DK2634551T3 - Interferometer og apparat til fourier-transformations spektroskopisk analyse - Google Patents

Interferometer og apparat til fourier-transformations spektroskopisk analyse Download PDF

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Publication number
DK2634551T3
DK2634551T3 DK11835954.6T DK11835954T DK2634551T3 DK 2634551 T3 DK2634551 T3 DK 2634551T3 DK 11835954 T DK11835954 T DK 11835954T DK 2634551 T3 DK2634551 T3 DK 2634551T3
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Denmark
Prior art keywords
interferometer
fourier transformation
spectroscopic analysis
spectroscopic
analysis
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Application number
DK11835954.6T
Other languages
English (en)
Inventor
Yusuke Hirao
Original Assignee
Foss Analytical As
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Publication of DK2634551T3 publication Critical patent/DK2634551T3/da

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056Passive reduction of errors
    • G01B9/02061Reduction or prevention of effects of tilts or misalignment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/45Interferometric spectrometry
    • G01J3/453Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535Devices with moving mirror

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DK11835954.6T 2010-10-28 2011-09-06 Interferometer og apparat til fourier-transformations spektroskopisk analyse DK2634551T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010242411 2010-10-28
PCT/JP2011/070208 WO2012056813A1 (ja) 2010-10-28 2011-09-06 干渉計およびフーリエ変換分光分析装置

Publications (1)

Publication Number Publication Date
DK2634551T3 true DK2634551T3 (da) 2021-07-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
DK11835954.6T DK2634551T3 (da) 2010-10-28 2011-09-06 Interferometer og apparat til fourier-transformations spektroskopisk analyse

Country Status (9)

Country Link
US (1) US9109869B2 (da)
EP (1) EP2634551B1 (da)
JP (1) JP5655859B2 (da)
CN (1) CN103201603B (da)
DK (1) DK2634551T3 (da)
ES (1) ES2879554T3 (da)
PL (1) PL2634551T3 (da)
PT (1) PT2634551T (da)
WO (1) WO2012056813A1 (da)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9261405B2 (en) * 2011-07-13 2016-02-16 Konica Minolta, Inc. Interferometer and spectrometer including same
JP2014137328A (ja) * 2013-01-18 2014-07-28 Konica Minolta Inc フーリエ変換型分光計およびフーリエ変換型分光計の波長校正方法
US9918627B2 (en) * 2014-05-06 2018-03-20 David Huang Aqueous cell differentiation in anterior uveitis using optical coherence tomography
KR102215750B1 (ko) 2014-07-15 2021-02-17 삼성디스플레이 주식회사 레이저 어닐 장치 및 이를 이용한 레이저 어닐 방법
KR102288353B1 (ko) 2015-02-27 2021-08-11 삼성디스플레이 주식회사 레이저 광학계 및 이를 포함하는 레이저 어닐링 장치
CN107407630B (zh) * 2015-03-13 2020-02-14 株式会社岛津制作所 傅里叶变换型分光光度计
WO2017011752A1 (en) * 2015-07-15 2017-01-19 Massachusetts Institute Of Technology Systems, apparatus, and methods for spectral imaging
JP6441759B2 (ja) * 2015-07-24 2018-12-19 株式会社堀場製作所 分光分析器に用いられる光検出器の出力補正方法
US10317283B2 (en) 2016-02-04 2019-06-11 Jasco Corporation Spectrum measurement method using fourier transform type spectroscopic device
JP6833426B2 (ja) * 2016-09-23 2021-02-24 大塚電子株式会社 分光測定装置
CN107228632B (zh) * 2017-05-18 2019-12-10 广东工业大学 一种基于加窗傅里叶变换的位移场层析测量装置及方法
DE102018206519B3 (de) * 2018-04-26 2019-07-18 Bruker Optik Gmbh Retrointerferometer mit aktiver Nachjustierung
CN112074724B (zh) * 2018-05-02 2023-10-27 仪景通株式会社 数据取得装置
CN110595615B (zh) * 2018-06-12 2020-12-25 中国科学院西安光学精密机械研究所 基于压电陶瓷驱动型多光程傅里叶变换高光谱成像装置
DE112018007955T5 (de) * 2018-09-03 2021-06-02 Shimadzu Corporation Vorrichtung zur Messung der Position eines beweglichen Spiegels eines Interferometers und Fouriertransform-Infrarotspektrometer
JP7215060B2 (ja) * 2018-10-12 2023-01-31 ウシオ電機株式会社 分光分析用光源、分光分析装置及び分光分析方法
JP7275581B2 (ja) * 2019-01-08 2023-05-18 株式会社島津製作所 フーリエ変換赤外分光装置
CN111239762A (zh) * 2020-02-11 2020-06-05 天津大学 一种光学频率梳的工件快速成像方法
CN111609997B (zh) * 2020-05-07 2022-04-19 中国科学院光电技术研究所 一种适用于透射式光学元件光程均匀性测量的检测装置
US11474029B2 (en) * 2020-08-03 2022-10-18 Shimadzu Corporation Spectrophotometer
WO2022126198A1 (en) * 2020-12-18 2022-06-23 Rapid Phenotyping Pty Limited Method of processing interferometry signal, and associated interferometer
JP2022125549A (ja) * 2021-02-17 2022-08-29 株式会社島津製作所 フーリエ変換赤外分光光度計
WO2023024018A1 (zh) * 2021-08-26 2023-03-02 江苏旭海光电科技有限公司 一种分段扫描傅里叶变换光谱仪
CN114397092B (zh) * 2022-01-14 2024-01-30 深圳迈塔兰斯科技有限公司 一种测量超表面相位的方法及系统
CN114354141B (zh) * 2022-01-14 2024-05-07 深圳迈塔兰斯科技有限公司 一种基于频域测量超表面相位的方法及系统

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58727A (ja) * 1981-06-24 1983-01-05 Agency Of Ind Science & Technol フ−リエ変換分光装置
US4711573A (en) * 1983-03-07 1987-12-08 Beckman Instruments, Inc. Dynamic mirror alignment control
JPH07111379B2 (ja) * 1987-02-17 1995-11-29 株式会社島津製作所 単色光源二光束干渉計
JPH0225310A (ja) 1988-07-14 1990-01-26 Kobe Steel Ltd アルミニウム合金製金型及びその製造方法
JP2784468B2 (ja) * 1988-07-15 1998-08-06 株式会社アドバンテスト 光干渉信号抽出装置
JPH02238334A (ja) * 1989-03-13 1990-09-20 Sumitomo Electric Ind Ltd スケールフアクタを安定化した干渉光学測定装置
JPH07119564B2 (ja) * 1989-03-27 1995-12-20 株式会社島津製作所 二光束干渉計
GB2231713B (en) 1989-03-30 1994-03-23 Toshiba Kk Semiconductor laser apparatus
JPH03161986A (ja) * 1989-11-21 1991-07-11 Toshiba Corp 半導体レーザモジュール
JPH063401B2 (ja) * 1989-12-29 1994-01-12 株式会社島津製作所 干渉分光光度計
JPH05231939A (ja) * 1992-02-21 1993-09-07 Hitachi Ltd ステップスキャンフーリエ変換赤外分光装置
JPH063192A (ja) * 1992-06-22 1994-01-11 Hokuyo Automatic Co フーリエ分光装置における短波長領域測定のためのサンプリング用光路差の決定方法
JPH0875434A (ja) * 1994-09-05 1996-03-22 Tokyo Seimitsu Co Ltd 表面形状測定装置
DE19704598C1 (de) * 1997-02-07 1998-06-18 Bruker Analytische Messtechnik Verfahren zur Gewinnung eines optischen FT-Spektrums
US6473185B2 (en) * 2001-03-07 2002-10-29 Plx, Inc. Alignment free interferometer and alignment free method of profiling object surfaces
US7349072B2 (en) * 2003-10-09 2008-03-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7292347B2 (en) * 2005-08-01 2007-11-06 Mitutoyo Corporation Dual laser high precision interferometer
WO2007047690A1 (en) * 2005-10-14 2007-04-26 The General Hospital Corporation Spectral- and frequency- encoded fluorescence imaging
JP5305732B2 (ja) * 2008-05-13 2013-10-02 キヤノン株式会社 干渉計
JP5330749B2 (ja) * 2008-07-01 2013-10-30 株式会社トプコン 測定装置
JP2010050137A (ja) * 2008-08-19 2010-03-04 Nec Corp 光モジュール、それを用いた光通信装置及び反射光路設定方法
JP2011040547A (ja) * 2009-08-10 2011-02-24 Canon Inc 計測装置、露光装置及びデバイスの製造方法
WO2011074452A1 (ja) * 2009-12-14 2011-06-23 コニカミノルタホールディングス株式会社 干渉計及び該干渉計を用いたフーリエ分光分析器

Also Published As

Publication number Publication date
CN103201603B (zh) 2015-05-20
PT2634551T (pt) 2021-07-15
EP2634551A4 (en) 2018-04-04
CN103201603A (zh) 2013-07-10
JP5655859B2 (ja) 2015-01-21
PL2634551T3 (pl) 2021-11-02
WO2012056813A1 (ja) 2012-05-03
EP2634551B1 (en) 2021-05-19
US9109869B2 (en) 2015-08-18
EP2634551A1 (en) 2013-09-04
JPWO2012056813A1 (ja) 2014-03-20
ES2879554T3 (es) 2021-11-22
US20130222790A1 (en) 2013-08-29

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