JP7275581B2 - フーリエ変換赤外分光装置 - Google Patents
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- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 title claims description 35
- 230000010355 oscillation Effects 0.000 claims description 87
- 238000010521 absorption reaction Methods 0.000 claims description 76
- 238000001228 spectrum Methods 0.000 claims description 66
- 230000003287 optical effect Effects 0.000 claims description 39
- 239000004065 semiconductor Substances 0.000 claims description 38
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 18
- 239000001569 carbon dioxide Substances 0.000 claims description 18
- 238000005259 measurement Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 15
- 238000012790 confirmation Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J3/108—Arrangements of light sources specially adapted for spectrometry or colorimetry for measurement in the infrared range
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/359—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using near infrared light
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
- G01J2003/102—Plural sources
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
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- G01N2201/127—Calibration; base line adjustment; drift compensation
- G01N2201/12746—Calibration values determination
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Description
多波長赤外光源、ビームスプリッタ、固定鏡及び移動鏡を含む主干渉計と、
半導体レーザ、前記ビームスプリッタ、前記固定鏡及び前記移動鏡を含むコントロール干渉計と、
前記主干渉計で生成され、試料を通過し又は試料で反射した赤外干渉光を検出する第1検出器と、
前記コントロール干渉計で生成される単色干渉光を検出する第2検出器と、
前記第2検出器で検出された単色干渉光の強度及び較正前の発振波長に基づいて、前記固定鏡を通る光路と前記移動鏡を通る光路の光路差を求め、前記第1検出器で検出された赤外干渉光の強度を該光路差による分布で示すインターフェログラムに対して高速フーリエ変換を行うことによりスペクトルを作成するスペクトル作成部と、
前記スペクトル作成部で作成されたスペクトル中のピークから二酸化炭素の吸収ピークを特定し、該吸収ピークの波数又は波長を二酸化炭素の本来の吸収波数又は波長と比較することにより、前記半導体レーザの較正後の発振波長を求める発振波長較正部と
を備えることを特徴とする。
図1に、本実施形態のフーリエ変換赤外分光装置(FTIR)1の構成を概略図で示す。このFTIR1は、多波長赤外光源11、赤外光軸用第1集光ミラー171、ビームスプリッタ12、固定鏡13、移動鏡14、試料室15、第1検出器16、赤外光軸用第2集光ミラー172、半導体レーザ21、第2検出器26及び制御部30を有する。多波長赤外光源11、赤外光軸用第1集光ミラー171、ビームスプリッタ12、固定鏡13及び移動鏡14により主干渉計10が構成される。また、半導体レーザ21、ビームスプリッタ12、固定鏡13及び移動鏡14によりコントロール干渉計20が構成される。従って、ビームスプリッタ12、固定鏡13及び移動鏡14は、主干渉計10の構成要素とコントロール干渉計20の構成要素を兼ねている。
次に、図2及び図3に示すフローチャートを用いて、本実施形態のフーリエ変換赤外分光装置1の動作を説明する。但し、通常の測定対象の試料を測定する際の動作は通常のFTIRの動作と同じであるため説明を省略し、以下では、半導体レーザ21の発振波長を較正する際の動作を説明する。
10…主干渉計
11…多波長赤外光源
12…ビームスプリッタ
13…固定鏡
14…移動鏡
15…試料室
16…第1検出器
171…赤外光軸用第1集光ミラー
172…赤外光軸用第2集光ミラー
20…コントロール干渉計
21…半導体レーザ
26…第2検出器
30…制御部
31…移動鏡制御部
32…スペクトル作成部
33…スペクトル適正判定部
34…発振波長較正部
35…較正値確認部
Claims (4)
- 多波長赤外光源、ビームスプリッタ、固定鏡及び移動鏡を含む主干渉計と、
半導体レーザ、前記ビームスプリッタ、前記固定鏡及び前記移動鏡を含むコントロール干渉計と、
前記主干渉計で生成され、試料を通過し又は試料で反射した赤外干渉光を検出する第1検出器と、
前記コントロール干渉計で生成される単色干渉光を検出する第2検出器と、
前記第2検出器で検出された単色干渉光の強度及び前記半導体レーザの較正前の発振波長に基づいて、前記固定鏡を通る光路と前記移動鏡を通る光路の光路差を求め、前記第1検出器で検出された赤外干渉光の強度を該光路差による分布で示すインターフェログラムに対して高速フーリエ変換を行うことによりスペクトルを作成するスペクトル作成部と、
前記スペクトル作成部で作成されたスペクトル中のピークから二酸化炭素の吸収ピークを特定し、該吸収ピークの波数又は波長を二酸化炭素の本来の吸収波数又は波長と比較することにより、前記半導体レーザの較正後の発振波長を求める発振波長較正部と、
前記発振波長較正部により得られた較正後の発振波長、前記第2検出器で検出された単色干渉光の強度及び前記第1検出器で検出された赤外干渉光の強度に基づいてスペクトルを作成し、該スペクトル中のピークから1又は複数の水蒸気の吸収ピークを特定し、該吸収ピークにおける波数又は波長を水蒸気の本来の吸収波数又は波長と比較することにより、発振波長の精密較正を行う発振波長精密較正部と
を備えることを特徴とするフーリエ変換赤外分光装置。 - 前記精密較正において、複数の水蒸気の吸収ピークについてそれぞれ得られた波数又は波長と本来の吸収波数又は波長との差が最小になるように較正することを特徴とする請求項1に記載のフーリエ変換赤外分光装置。
- 前記複数の水蒸気の吸収ピークが、波数1447.952cm-1、1464.905cm-1、1576.185cm-1、1616.711cm-1、1662.809cm-1及び1756.819cm-1における6個の吸収ピークのうちの2個~6個であることを特徴とする請求項2に記載のフーリエ変換赤外分光装置。
- さらに、前記スペクトル作成部により作成されたスペクトルに対して、所定の基準に基づいて、前記スペクトルが適正に作成されたものであるかを判定するスペクトル適正判定部を備えることを特徴とする請求項1~3のいずれかに記載のフーリエ変換赤外分光装置。
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JP2019001203A JP7275581B2 (ja) | 2019-01-08 | 2019-01-08 | フーリエ変換赤外分光装置 |
US16/693,494 US11009454B2 (en) | 2019-01-08 | 2019-11-25 | Fourier transform infrared spectrometer |
CN201911312566.7A CN111412989B (zh) | 2019-01-08 | 2019-12-18 | 傅立叶变换红外分光装置 |
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US11131848B2 (en) * | 2019-06-28 | 2021-09-28 | Hamamatsu Photonics K.K. | Optical module |
US11474029B2 (en) * | 2020-08-03 | 2022-10-18 | Shimadzu Corporation | Spectrophotometer |
DE102021206973A1 (de) * | 2021-07-02 | 2023-01-05 | Bruker Optics Gmbh & Co. Kg | FT-Spektrometer-Anordnung mit Zusatzdetektor zur Kalibrierung der Frequenzachse und zugehöriges Messverfahren |
CN114441453A (zh) * | 2021-12-27 | 2022-05-06 | 浙江微翰科技有限公司 | 基于傅里叶变换光谱仪的异步采集方法及傅里叶变换光谱仪 |
JP2023122114A (ja) | 2022-02-22 | 2023-09-01 | 日本分光株式会社 | フーリエ変換赤外分光光度計 |
WO2024019029A1 (ja) * | 2022-07-20 | 2024-01-25 | 株式会社堀場製作所 | ガス分析装置 |
CN115389445B (zh) * | 2022-10-27 | 2023-03-28 | 杭州泽天春来科技有限公司 | 傅里叶红外干涉仪的控制方法、系统及可读存储介质 |
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US20060238768A1 (en) | 2005-04-26 | 2006-10-26 | Mks Instruments, Inc. | Fourier transform infrared spectrometer |
JP2007024679A (ja) | 2005-07-15 | 2007-02-01 | Shimadzu Corp | 分析装置および分析処理方法 |
JP2008524609A (ja) | 2004-12-21 | 2008-07-10 | フォス・アナリティカル・エー/エス | 分光光度計を標準化する方法 |
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JP5360053B2 (ja) * | 2008-04-15 | 2013-12-04 | 株式会社島津製作所 | 校正用ガスセルを搭載したガス分析装置 |
JP5201214B2 (ja) * | 2008-12-02 | 2013-06-05 | 株式会社島津製作所 | 分光光度計 |
US9109869B2 (en) * | 2010-10-28 | 2015-08-18 | Konica Minolta, Inc. | Interferometer and fourier-transform spectroscopic analyzer |
JP6278205B2 (ja) | 2015-01-29 | 2018-02-14 | 株式会社島津製作所 | フーリエ変換型分光光度計 |
WO2017024046A2 (en) * | 2015-08-03 | 2017-02-09 | Spectrasensors, Inc. | Reconstruction of frequency registration deviations for quantitative spectroscopy |
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- 2019-11-25 US US16/693,494 patent/US11009454B2/en active Active
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JP2008524609A (ja) | 2004-12-21 | 2008-07-10 | フォス・アナリティカル・エー/エス | 分光光度計を標準化する方法 |
US20060238768A1 (en) | 2005-04-26 | 2006-10-26 | Mks Instruments, Inc. | Fourier transform infrared spectrometer |
JP2007024679A (ja) | 2005-07-15 | 2007-02-01 | Shimadzu Corp | 分析装置および分析処理方法 |
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US20200217786A1 (en) | 2020-07-09 |
CN111412989A (zh) | 2020-07-14 |
US11009454B2 (en) | 2021-05-18 |
CN111412989B (zh) | 2022-11-25 |
JP2020112364A (ja) | 2020-07-27 |
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