DK162938C - Fremgangsmaade til afsaetning af en transparent, solstraaleregulerende film hovedsageligt bestaaende af titannitrid paa et transparent, opvarmet, baandformet glassubstrat - Google Patents
Fremgangsmaade til afsaetning af en transparent, solstraaleregulerende film hovedsageligt bestaaende af titannitrid paa et transparent, opvarmet, baandformet glassubstratInfo
- Publication number
- DK162938C DK162938C DK353284A DK353284A DK162938C DK 162938 C DK162938 C DK 162938C DK 353284 A DK353284 A DK 353284A DK 353284 A DK353284 A DK 353284A DK 162938 C DK162938 C DK 162938C
- Authority
- DK
- Denmark
- Prior art keywords
- transparent
- shorted
- marketing
- tape
- heated
- Prior art date
Links
- 239000011521 glass Substances 0.000 title 1
- 150000004767 nitrides Chemical class 0.000 title 1
- 230000005855 radiation Effects 0.000 title 1
- 230000001105 regulatory effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/28—Other inorganic materials
- C03C2217/281—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Surface Treatment Of Glass (AREA)
- Chemical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US44334082A | 1982-11-22 | 1982-11-22 | |
| US44334082 | 1982-11-22 | ||
| US8301678 | 1983-10-28 | ||
| PCT/US1983/001678 WO1984002128A1 (en) | 1982-11-22 | 1983-10-28 | Chemical vapor deposition of titanium nitride and like films |
Publications (4)
| Publication Number | Publication Date |
|---|---|
| DK353284A DK353284A (da) | 1984-07-19 |
| DK353284D0 DK353284D0 (da) | 1984-07-19 |
| DK162938B DK162938B (da) | 1991-12-30 |
| DK162938C true DK162938C (da) | 1992-05-25 |
Family
ID=23760404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK353284A DK162938C (da) | 1982-11-22 | 1984-07-19 | Fremgangsmaade til afsaetning af en transparent, solstraaleregulerende film hovedsageligt bestaaende af titannitrid paa et transparent, opvarmet, baandformet glassubstrat |
Country Status (13)
| Country | Link |
|---|---|
| US (3) | US4524718A (cs) |
| EP (1) | EP0128169B1 (cs) |
| AU (1) | AU565957B2 (cs) |
| CA (1) | CA1222912A (cs) |
| CH (1) | CH662808A5 (cs) |
| DE (1) | DE3390341T1 (cs) |
| DK (1) | DK162938C (cs) |
| ES (1) | ES8500874A1 (cs) |
| GB (1) | GB2141444B (cs) |
| IT (1) | IT1203683B (cs) |
| MX (1) | MX160808A (cs) |
| SE (1) | SE453491B (cs) |
| WO (1) | WO1984002128A1 (cs) |
Families Citing this family (72)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60251274A (ja) * | 1984-05-28 | 1985-12-11 | Toyota Central Res & Dev Lab Inc | 窒化物被覆方法 |
| EP0174743A3 (en) * | 1984-09-05 | 1988-06-08 | Morton Thiokol, Inc. | Process for transition metal nitrides thin film deposition |
| US4690871A (en) * | 1986-03-10 | 1987-09-01 | Gordon Roy G | Protective overcoat of titanium nitride films |
| US4946712A (en) * | 1986-08-28 | 1990-08-07 | Libbey-Owens-Ford Co. | Glass coating method and resulting article |
| US4847157A (en) * | 1986-08-28 | 1989-07-11 | Libbey-Owens-Ford Co. | Glass coating method and resulting article |
| US4900633A (en) * | 1987-03-26 | 1990-02-13 | Ppg Industries, Inc. | High performance multilayer coatings |
| US4861669A (en) * | 1987-03-26 | 1989-08-29 | Ppg Industries, Inc. | Sputtered titanium oxynitride films |
| US4920006A (en) * | 1987-03-26 | 1990-04-24 | Ppg Industries, Inc. | Colored metal alloy/oxynitride coatings |
| US4924936A (en) * | 1987-08-05 | 1990-05-15 | M&T Chemicals Inc. | Multiple, parallel packed column vaporizer |
| GB8801366D0 (en) * | 1988-01-21 | 1988-02-17 | Secr Defence | Infra red transparent materials |
| US5167986A (en) * | 1988-04-15 | 1992-12-01 | Gordon Roy G | Titanium silicide-coated glass windows |
| GB8809504D0 (en) * | 1988-04-22 | 1988-05-25 | Marconi Gec Ltd | Optical devices |
| DE3830174A1 (de) * | 1988-09-06 | 1990-03-15 | Geesthacht Gkss Forschung | Leitfaehige oberflaechenschicht |
| GB8824104D0 (en) * | 1988-10-14 | 1988-11-23 | Pilkington Plc | Process for coating glass |
| JP2637804B2 (ja) * | 1988-12-20 | 1997-08-06 | 日本碍子株式会社 | メッキ付き基材 |
| US5139825A (en) * | 1989-11-30 | 1992-08-18 | President And Fellows Of Harvard College | Process for chemical vapor deposition of transition metal nitrides |
| DE3941797A1 (de) * | 1989-12-19 | 1991-06-20 | Leybold Ag | Belag, bestehend aus einem optisch wirkenden schichtsystem, fuer substrate, wobei das schichtsystem insbesondere eine hohe antireflexwirkung aufweist, und verfahren zur herstellung des belags |
| DE4117258A1 (de) * | 1989-12-19 | 1992-12-03 | Leybold Ag | Optisch wirkende schicht fuer substrate, die insbesondere eine hohe antireflexwirkung aufweist |
| DE3941795A1 (de) * | 1989-12-19 | 1991-06-20 | Leybold Ag | Optisch wirkende schicht fuer substrate, die insbesondere eine hohe antireflexwirkung aufweist, und verfahren zur herstellung der schicht |
| DE4117257B4 (de) * | 1989-12-27 | 2006-03-30 | Unaxis Deutschland Holding Gmbh | Optisch wirkendes Schichtsystem mit hoher Antireflexwirkung für transparente Substrate |
| JPH05506480A (ja) * | 1990-02-22 | 1993-09-22 | ゴードン,ロイ・ジイ | コータ方法及びコータ |
| US5091244A (en) * | 1990-08-10 | 1992-02-25 | Viratec Thin Films, Inc. | Electrically-conductive, light-attenuating antireflection coating |
| US5407733A (en) * | 1990-08-10 | 1995-04-18 | Viratec Thin Films, Inc. | Electrically-conductive, light-attenuating antireflection coating |
| US5279857A (en) * | 1991-08-16 | 1994-01-18 | Materials Research Corporation | Process for forming low resistivity titanium nitride films |
| US5308655A (en) * | 1991-08-16 | 1994-05-03 | Materials Research Corporation | Processing for forming low resistivity titanium nitride films |
| US5188979A (en) * | 1991-08-26 | 1993-02-23 | Motorola Inc. | Method for forming a nitride layer using preheated ammonia |
| US5202152A (en) * | 1991-10-25 | 1993-04-13 | Cornell Research Foundation, Inc. | Synthesis of titanium nitride films |
| DE69213898T2 (de) * | 1991-12-13 | 1997-02-06 | Ford Werke Ag | Metallnitridfilm |
| US5194642A (en) * | 1992-01-24 | 1993-03-16 | Ford Motor Company | Metallo-organic precursors to titanium nitride |
| US5300322A (en) * | 1992-03-10 | 1994-04-05 | Martin Marietta Energy Systems, Inc. | Molybdenum enhanced low-temperature deposition of crystalline silicon nitride |
| US5409735A (en) * | 1992-11-30 | 1995-04-25 | Wayne State University | Chemical vapor deposition of metal pnictogenide films using single source precursors |
| US5416045A (en) * | 1993-02-18 | 1995-05-16 | Micron Technology, Inc. | Method for chemical vapor depositing a titanium nitride layer on a semiconductor wafer and method of annealing tin films |
| PL178112B1 (pl) * | 1993-04-16 | 2000-02-29 | Libbey Owens Ford Co | Sposób i urządzenie do nakładania powłoki na powierzchnię podłoża zwłaszcza na powierzchnię poruszającej się wstęgi gorącego szkła |
| FR2708924B1 (fr) * | 1993-08-12 | 1995-10-20 | Saint Gobain Vitrage Int | Procédé de dépôt d'une couche de nitrure métallique sur un substrat transparent. |
| US5378501A (en) * | 1993-10-05 | 1995-01-03 | Foster; Robert F. | Method for chemical vapor deposition of titanium nitride films at low temperatures |
| US5975912A (en) * | 1994-06-03 | 1999-11-02 | Materials Research Corporation | Low temperature plasma-enhanced formation of integrated circuits |
| US5665640A (en) * | 1994-06-03 | 1997-09-09 | Sony Corporation | Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor |
| US5628829A (en) * | 1994-06-03 | 1997-05-13 | Materials Research Corporation | Method and apparatus for low temperature deposition of CVD and PECVD films |
| AU1745695A (en) * | 1994-06-03 | 1996-01-04 | Materials Research Corporation | A method of nitridization of titanium thin films |
| AU4001395A (en) * | 1994-10-11 | 1996-05-06 | Gelest, Inc. | Conformal titanium-based films and method for their preparation |
| US5691044A (en) * | 1994-12-13 | 1997-11-25 | Asahi Glass Company, Ltd. | Light absorptive antireflector |
| US5656338A (en) * | 1994-12-13 | 1997-08-12 | Gordon; Roy G. | Liquid solution of TiBr4 in Br2 used as a precursor for the chemical vapor deposition of titanium or titanium nitride |
| US6231999B1 (en) * | 1996-06-21 | 2001-05-15 | Cardinal Ig Company | Heat temperable transparent coated glass article |
| US5968594A (en) * | 1996-06-28 | 1999-10-19 | Lam Research Corporation | Direct liquid injection of liquid ammonia solutions in chemical vapor deposition |
| US5980977A (en) * | 1996-12-09 | 1999-11-09 | Pinnacle Research Institute, Inc. | Method of producing high surface area metal oxynitrides as substrates in electrical energy storage |
| US5989652A (en) * | 1997-01-31 | 1999-11-23 | Tokyo Electron Limited | Method of low temperature plasma enhanced chemical vapor deposition of tin film over titanium for use in via level applications |
| RU2121985C1 (ru) * | 1997-05-27 | 1998-11-20 | Научно-производственное объединение машиностроения | Способ нанесения покрытия на основе нитрида кремния на стеклянную, в том числе кварцевую поверхность |
| FR2766817B1 (fr) * | 1997-07-31 | 1999-08-27 | Saint Gobain Vitrage | Substrat transparent muni d'au moins une couche reflechissante et son procede d'obtention |
| DE10080457T1 (de) * | 1999-02-12 | 2001-04-26 | Gelest Inc | CVD-Abscheidung von Wolframnitrid |
| US6265311B1 (en) | 1999-04-27 | 2001-07-24 | Tokyo Electron Limited | PECVD of TaN films from tantalum halide precursors |
| US6268288B1 (en) | 1999-04-27 | 2001-07-31 | Tokyo Electron Limited | Plasma treated thermal CVD of TaN films from tantalum halide precursors |
| US6410432B1 (en) | 1999-04-27 | 2002-06-25 | Tokyo Electron Limited | CVD of integrated Ta and TaNx films from tantalum halide precursors |
| US6413860B1 (en) | 1999-04-27 | 2002-07-02 | Tokyo Electron Limited | PECVD of Ta films from tanatalum halide precursors |
| US6410433B1 (en) | 1999-04-27 | 2002-06-25 | Tokyo Electron Limited | Thermal CVD of TaN films from tantalum halide precursors |
| US6548402B2 (en) | 1999-06-11 | 2003-04-15 | Applied Materials, Inc. | Method of depositing a thick titanium nitride film |
| US6555183B2 (en) * | 1999-06-11 | 2003-04-29 | Applied Materials, Inc. | Plasma treatment of a titanium nitride film formed by chemical vapor deposition |
| US20010051215A1 (en) * | 2000-04-13 | 2001-12-13 | Gelest, Inc. | Methods for chemical vapor deposition of titanium-silicon-nitrogen films |
| JP2001322833A (ja) * | 2000-05-09 | 2001-11-20 | Central Glass Co Ltd | 車両用低反射ガラス |
| US6451692B1 (en) * | 2000-08-18 | 2002-09-17 | Micron Technology, Inc. | Preheating of chemical vapor deposition precursors |
| US6919133B2 (en) | 2002-03-01 | 2005-07-19 | Cardinal Cg Company | Thin film coating having transparent base layer |
| US6854487B2 (en) * | 2003-06-26 | 2005-02-15 | General Electric Company | Fluid conduit wall inhibiting heat transfer and method for making |
| WO2005073428A1 (en) * | 2004-01-23 | 2005-08-11 | Arkema Inc. | Method of depositing film stacks on a substrate |
| US7966969B2 (en) | 2004-09-22 | 2011-06-28 | Asm International N.V. | Deposition of TiN films in a batch reactor |
| KR100681274B1 (ko) * | 2004-11-25 | 2007-02-09 | 삼성전자주식회사 | 커패시터 및 그 제조 방법 |
| US7691757B2 (en) | 2006-06-22 | 2010-04-06 | Asm International N.V. | Deposition of complex nitride films |
| US7629256B2 (en) * | 2007-05-14 | 2009-12-08 | Asm International N.V. | In situ silicon and titanium nitride deposition |
| JP5062144B2 (ja) * | 2008-11-10 | 2012-10-31 | 東京エレクトロン株式会社 | ガスインジェクター |
| US7833906B2 (en) | 2008-12-11 | 2010-11-16 | Asm International N.V. | Titanium silicon nitride deposition |
| WO2011162747A1 (en) | 2010-06-22 | 2011-12-29 | Line Travel Automated Coating Inc. | Plural component coating application system with a compressed gas flushing system and spray tip flip mechanism |
| RU2534150C2 (ru) * | 2012-05-22 | 2014-11-27 | Николай Евгеньевич Староверов | Способ получения нитридной наноплёнки или нанонити |
| US10139520B2 (en) * | 2015-01-30 | 2018-11-27 | Cpfilms Inc. | Method of using a heat-treated titanium nitride film |
| JP6851173B2 (ja) * | 2016-10-21 | 2021-03-31 | 東京エレクトロン株式会社 | 成膜装置および成膜方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB284412A (en) * | 1926-11-01 | 1928-02-01 | Henry C Stephens Ltd | Improvements in or relating to containers for liquid or semiliquid adhesives |
| GB773702A (en) * | 1954-03-05 | 1957-05-01 | Metallgesellschaft Ag | Method of producing coatings from hard high-melting point nitrides |
| US2865791A (en) * | 1954-03-05 | 1958-12-23 | Metallgesellschaft Ag | Metal nitride coating process |
| US2953483A (en) * | 1956-08-13 | 1960-09-20 | Owens Illinois Glass Co | Method and apparatus for applying coatings to selected areas of articles |
| US3511703A (en) * | 1963-09-20 | 1970-05-12 | Motorola Inc | Method for depositing mixed oxide films containing aluminum oxide |
| US3306768A (en) * | 1964-01-08 | 1967-02-28 | Motorola Inc | Method of forming thin oxide films |
| GB1282866A (en) * | 1968-08-16 | 1972-07-26 | Pilkington Brothers Ltd | Improvements in or relating to the production of glass having desired surface characteristics |
| GB1283432A (en) * | 1970-03-24 | 1972-07-26 | Pilkington Brothers Ltd | Improvements in or relating to the coating of glass |
| BE787599A (fr) * | 1971-08-16 | 1973-02-16 | Battelle Memorial Institute | Vitrage filtrant antisolaire et isolant thermique |
| US4101703A (en) * | 1972-02-04 | 1978-07-18 | Schwarzkopf Development Corporation | Coated cemented carbide elements |
| US4196233A (en) * | 1974-02-07 | 1980-04-01 | Ciba-Geigy Corporation | Process for coating inorganic substrates with carbides, nitrides and/or carbonitrides |
| LU74666A1 (cs) * | 1976-03-29 | 1977-10-10 | ||
| US4206252A (en) * | 1977-04-04 | 1980-06-03 | Gordon Roy G | Deposition method for coating glass and the like |
| JPS5437077A (en) * | 1977-08-02 | 1979-03-19 | Agency Of Ind Science & Technol | Chemical evaporation method and apparatus for same |
| BE879189A (fr) * | 1978-10-19 | 1980-04-04 | Bfg Glassgroup | Procede de formation d'un revetement d'oxyde d'etain sur un support de verre chaud et produits ainsi obtenus |
| CH628600A5 (fr) * | 1979-02-14 | 1982-03-15 | Siv Soc Italiana Vetro | Procede pour deposer en continu, sur la surface d'un substrat porte a haute temperature, une couche d'une matiere solide et installation pour la mise en oeuvre de ce procede. |
| US4401052A (en) * | 1979-05-29 | 1983-08-30 | The University Of Delaware | Apparatus for continuous deposition by vacuum evaporation |
| IT1134153B (it) * | 1979-11-21 | 1986-07-31 | Siv Soc Italiana Vetro | Ugello per depositare in continuo su un substrato uno strato di una materia solida |
| CH640571A5 (fr) * | 1981-03-06 | 1984-01-13 | Battelle Memorial Institute | Procede et dispositif pour deposer sur un substrat une couche de matiere minerale. |
-
1983
- 1983-08-10 US US06/521,675 patent/US4524718A/en not_active Expired - Fee Related
- 1983-10-28 EP EP83903848A patent/EP0128169B1/en not_active Expired - Lifetime
- 1983-10-28 GB GB08417560A patent/GB2141444B/en not_active Expired
- 1983-10-28 DE DE19833390341 patent/DE3390341T1/de active Granted
- 1983-10-28 WO PCT/US1983/001678 patent/WO1984002128A1/en not_active Ceased
- 1983-10-28 US US06/546,471 patent/US4535000A/en not_active Expired - Lifetime
- 1983-10-28 AU AU22698/83A patent/AU565957B2/en not_active Ceased
- 1983-10-28 CH CH3499/84A patent/CH662808A5/fr not_active IP Right Cessation
- 1983-11-09 CA CA000440868A patent/CA1222912A/en not_active Expired
- 1983-11-15 MX MX199416A patent/MX160808A/es unknown
- 1983-11-21 ES ES527422A patent/ES8500874A1/es not_active Expired
- 1983-11-21 IT IT68218/83A patent/IT1203683B/it active
-
1984
- 1984-07-19 DK DK353284A patent/DK162938C/da not_active IP Right Cessation
- 1984-07-23 SE SE8403834A patent/SE453491B/sv not_active IP Right Cessation
-
1985
- 1985-02-25 US US06/704,609 patent/US4585674A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US4535000A (en) | 1985-08-13 |
| AU565957B2 (en) | 1987-10-01 |
| SE8403834L (sv) | 1984-07-23 |
| WO1984002128A1 (en) | 1984-06-07 |
| DK353284A (da) | 1984-07-19 |
| ES527422A0 (es) | 1984-11-01 |
| CA1222912A (en) | 1987-06-16 |
| GB8417560D0 (en) | 1984-08-15 |
| GB2141444B (en) | 1986-06-11 |
| IT8368218A0 (it) | 1983-11-21 |
| SE453491B (sv) | 1988-02-08 |
| EP0128169B1 (en) | 1990-07-11 |
| DK162938B (da) | 1991-12-30 |
| ES8500874A1 (es) | 1984-11-01 |
| IT1203683B (it) | 1989-02-15 |
| DE3390341C2 (cs) | 1992-10-22 |
| AU2269883A (en) | 1984-06-18 |
| DK353284D0 (da) | 1984-07-19 |
| SE8403834D0 (sv) | 1984-07-23 |
| US4585674A (en) | 1986-04-29 |
| MX160808A (es) | 1990-05-25 |
| GB2141444A (en) | 1984-12-19 |
| CH662808A5 (fr) | 1987-10-30 |
| US4524718A (en) | 1985-06-25 |
| DE3390341T1 (de) | 1985-01-10 |
| EP0128169A4 (en) | 1985-08-27 |
| EP0128169A1 (en) | 1984-12-19 |
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