DE7017942U - Vorrichtung zur bearbeitung von gegenstaenden. - Google Patents
Vorrichtung zur bearbeitung von gegenstaenden.Info
- Publication number
- DE7017942U DE7017942U DE7017942U DE7017942U DE7017942U DE 7017942 U DE7017942 U DE 7017942U DE 7017942 U DE7017942 U DE 7017942U DE 7017942 U DE7017942 U DE 7017942U DE 7017942 U DE7017942 U DE 7017942U
- Authority
- DE
- Germany
- Prior art keywords
- tool
- base
- abrasive
- circular
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- 239000010703 silicon Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 4
- 239000003082 abrasive agent Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 229910001315 Tool steel Inorganic materials 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 229910003460 diamond Inorganic materials 0.000 description 9
- 239000010432 diamond Substances 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02021—Edge treatment, chamfering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
- B24B5/14—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding conical surfaces, e.g. of centres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US82996169A | 1969-06-03 | 1969-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE7017942U true DE7017942U (de) | 1973-04-26 |
Family
ID=25256002
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE7017942U Expired DE7017942U (de) | 1969-06-03 | 1970-05-13 | Vorrichtung zur bearbeitung von gegenstaenden. |
| DE19702023439 Pending DE2023439A1 (de) | 1969-06-03 | 1970-05-13 | Verfahren und Vorrichtung zur Bearbeitung von Gegenständen |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE19702023439 Pending DE2023439A1 (de) | 1969-06-03 | 1970-05-13 | Verfahren und Vorrichtung zur Bearbeitung von Gegenständen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3603039A (enrdf_load_stackoverflow) |
| CA (1) | CA922110A (enrdf_load_stackoverflow) |
| DE (2) | DE7017942U (enrdf_load_stackoverflow) |
| ES (1) | ES379540A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1258697A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3803774A (en) * | 1972-12-22 | 1974-04-16 | Bell Telephone Labor Inc | Technique for correcting the crystallo-graphic orientation angle of crystals by the formation of mesas and double face lapping |
| US3805458A (en) * | 1972-12-22 | 1974-04-23 | Bell Telephone Labor Inc | Technique for correcting the crystallographic orientation angle of crystals by double face lapping of overlapping layers |
| US9044812B2 (en) | 2011-08-03 | 2015-06-02 | General Electric Company | Jig and method for modifying casing in turbine system |
| CN105150088A (zh) * | 2015-08-28 | 2015-12-16 | 中国空间技术研究院 | 一种电子器件背面开孔减薄装置及减薄方法 |
| CN112382706B (zh) * | 2020-11-13 | 2021-06-11 | 吴炜强 | 一种用于半导体发光元件的加工设备 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1048059A (en) * | 1910-09-07 | 1912-12-24 | Antonio Foppiano | Machine for cutting holes in glass, marble, and like material. |
| US1241236A (en) * | 1915-06-08 | 1917-09-25 | Maurice Mathy | Machine for grinding the rims of glass vessels. |
| US2395700A (en) * | 1943-03-23 | 1946-02-26 | Alncin Inc | Method and apparatus for shaping optical objects and the like |
| US3158968A (en) * | 1962-08-23 | 1964-12-01 | Bell Telephone Labor Inc | Grinding apparatus and method |
-
1969
- 1969-06-03 US US829961A patent/US3603039A/en not_active Expired - Lifetime
-
1970
- 1970-05-11 ES ES379540A patent/ES379540A1/es not_active Expired
- 1970-05-13 DE DE7017942U patent/DE7017942U/de not_active Expired
- 1970-05-13 DE DE19702023439 patent/DE2023439A1/de active Pending
- 1970-05-19 GB GB1258697D patent/GB1258697A/en not_active Expired
- 1970-05-26 CA CA083730A patent/CA922110A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA922110A (en) | 1973-03-06 |
| US3603039A (en) | 1971-09-07 |
| DE2023439A1 (de) | 1970-12-17 |
| GB1258697A (enrdf_load_stackoverflow) | 1971-12-30 |
| ES379540A1 (es) | 1973-04-01 |
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