CA922110A - Method of and apparatus for machining articles - Google Patents

Method of and apparatus for machining articles

Info

Publication number
CA922110A
CA922110A CA083730A CA83730A CA922110A CA 922110 A CA922110 A CA 922110A CA 083730 A CA083730 A CA 083730A CA 83730 A CA83730 A CA 83730A CA 922110 A CA922110 A CA 922110A
Authority
CA
Canada
Prior art keywords
machining articles
machining
articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA083730A
Other languages
English (en)
Inventor
F. Stahr Donald
M. Yandrick Rudolph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FMC Corp
Original Assignee
FMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FMC Corp filed Critical FMC Corp
Application granted granted Critical
Publication of CA922110A publication Critical patent/CA922110A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • H01L21/0201—Specific process step
    • H01L21/02021—Edge treatment, chamfering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/02—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work
    • B24B5/14—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centres or chucks for holding work for grinding conical surfaces, e.g. of centres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CA083730A 1969-06-03 1970-05-26 Method of and apparatus for machining articles Expired CA922110A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US82996169A 1969-06-03 1969-06-03

Publications (1)

Publication Number Publication Date
CA922110A true CA922110A (en) 1973-03-06

Family

ID=25256002

Family Applications (1)

Application Number Title Priority Date Filing Date
CA083730A Expired CA922110A (en) 1969-06-03 1970-05-26 Method of and apparatus for machining articles

Country Status (5)

Country Link
US (1) US3603039A (enrdf_load_stackoverflow)
CA (1) CA922110A (enrdf_load_stackoverflow)
DE (2) DE7017942U (enrdf_load_stackoverflow)
ES (1) ES379540A1 (enrdf_load_stackoverflow)
GB (1) GB1258697A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3803774A (en) * 1972-12-22 1974-04-16 Bell Telephone Labor Inc Technique for correcting the crystallo-graphic orientation angle of crystals by the formation of mesas and double face lapping
US3805458A (en) * 1972-12-22 1974-04-23 Bell Telephone Labor Inc Technique for correcting the crystallographic orientation angle of crystals by double face lapping of overlapping layers
US9044812B2 (en) 2011-08-03 2015-06-02 General Electric Company Jig and method for modifying casing in turbine system
CN105150088A (zh) * 2015-08-28 2015-12-16 中国空间技术研究院 一种电子器件背面开孔减薄装置及减薄方法
CN112382706B (zh) * 2020-11-13 2021-06-11 吴炜强 一种用于半导体发光元件的加工设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1048059A (en) * 1910-09-07 1912-12-24 Antonio Foppiano Machine for cutting holes in glass, marble, and like material.
US1241236A (en) * 1915-06-08 1917-09-25 Maurice Mathy Machine for grinding the rims of glass vessels.
US2395700A (en) * 1943-03-23 1946-02-26 Alncin Inc Method and apparatus for shaping optical objects and the like
US3158968A (en) * 1962-08-23 1964-12-01 Bell Telephone Labor Inc Grinding apparatus and method

Also Published As

Publication number Publication date
US3603039A (en) 1971-09-07
DE2023439A1 (de) 1970-12-17
DE7017942U (de) 1973-04-26
GB1258697A (enrdf_load_stackoverflow) 1971-12-30
ES379540A1 (es) 1973-04-01

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