DE69941230D1 - Verfahren zur Herstellung eines Halbleitergehäuses - Google Patents
Verfahren zur Herstellung eines HalbleitergehäusesInfo
- Publication number
- DE69941230D1 DE69941230D1 DE69941230T DE69941230T DE69941230D1 DE 69941230 D1 DE69941230 D1 DE 69941230D1 DE 69941230 T DE69941230 T DE 69941230T DE 69941230 T DE69941230 T DE 69941230T DE 69941230 D1 DE69941230 D1 DE 69941230D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor package
- package
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/11334—Manufacturing methods by local deposition of the material of the bump connector in solid form using preformed bumps
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/1147—Manufacturing methods using a lift-off mask
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/27—Manufacturing methods
- H01L2224/274—Manufacturing methods by blanket deposition of the material of the layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00013—Fully indexed content
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12042—LASER
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/167,207 US6063646A (en) | 1998-10-06 | 1998-10-06 | Method for production of semiconductor package |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69941230D1 true DE69941230D1 (de) | 2009-09-17 |
Family
ID=22606396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69941230T Expired - Lifetime DE69941230D1 (de) | 1998-10-06 | 1999-10-04 | Verfahren zur Herstellung eines Halbleitergehäuses |
Country Status (6)
Country | Link |
---|---|
US (2) | US6063646A (de) |
EP (2) | EP1724830B1 (de) |
KR (2) | KR100620088B1 (de) |
DE (1) | DE69941230D1 (de) |
SG (1) | SG115329A1 (de) |
TW (1) | TW421837B (de) |
Families Citing this family (37)
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JP2783259B2 (ja) * | 1996-07-18 | 1998-08-06 | 日本電気株式会社 | 半導体パッケージとその製造方法 |
JP3181262B2 (ja) * | 1998-06-04 | 2001-07-03 | スタンレー電気株式会社 | 平面実装型led素子およびその製造方法 |
JP2000036552A (ja) * | 1998-07-17 | 2000-02-02 | Fujitsu Ltd | 半導体装置、及び半導体装置で用いる封止材中の金属分の分取方法 |
US6903451B1 (en) * | 1998-08-28 | 2005-06-07 | Samsung Electronics Co., Ltd. | Chip scale packages manufactured at wafer level |
DE19842590A1 (de) * | 1998-09-17 | 2000-04-13 | Daimler Chrysler Ag | Verfahren zur Herstellung von Schaltungsanordnungen |
US6319851B1 (en) | 1999-02-03 | 2001-11-20 | Casio Computer Co., Ltd. | Method for packaging semiconductor device having bump electrodes |
US6159773A (en) * | 1999-02-12 | 2000-12-12 | Lin; Mou-Shiung | Strain release contact system for integrated circuits |
JP2000311921A (ja) * | 1999-04-27 | 2000-11-07 | Sony Corp | 半導体装置およびその製造方法 |
JP2000332165A (ja) * | 1999-05-17 | 2000-11-30 | Toray Ind Inc | 半導体封止用樹脂組成物およびそれを用いた半導体装置 |
JP3526788B2 (ja) * | 1999-07-01 | 2004-05-17 | 沖電気工業株式会社 | 半導体装置の製造方法 |
JP3223283B2 (ja) | 1999-09-14 | 2001-10-29 | カシオ計算機株式会社 | 半導体装置の製造方法 |
EP1085564A1 (de) * | 1999-09-14 | 2001-03-21 | Casio Computer Co., Ltd. | Verfahren zum Verpacken einer Halbleitervorrichtung mit Höckerelektroden |
JP2001094005A (ja) * | 1999-09-22 | 2001-04-06 | Oki Electric Ind Co Ltd | 半導体装置及び半導体装置の製造方法 |
JP3973340B2 (ja) * | 1999-10-05 | 2007-09-12 | Necエレクトロニクス株式会社 | 半導体装置、配線基板、及び、それらの製造方法 |
JP3485513B2 (ja) * | 2000-01-19 | 2004-01-13 | 沖電気工業株式会社 | 半導体装置の製造方法 |
US6710454B1 (en) * | 2000-02-16 | 2004-03-23 | Micron Technology, Inc. | Adhesive layer for an electronic apparatus having multiple semiconductor devices |
US6576496B1 (en) * | 2000-08-21 | 2003-06-10 | Micron Technology, Inc. | Method and apparatus for encapsulating a multi-chip substrate array |
JP4611569B2 (ja) * | 2001-05-30 | 2011-01-12 | ルネサスエレクトロニクス株式会社 | リードフレーム及び半導体装置の製造方法 |
JP4330821B2 (ja) * | 2001-07-04 | 2009-09-16 | 株式会社東芝 | 半導体装置の製造方法 |
US6929981B2 (en) * | 2002-09-06 | 2005-08-16 | Advanpack Solutions Pte, Ltd. | Package design and method of manufacture for chip grid array |
TW554503B (en) * | 2002-10-23 | 2003-09-21 | Orient Semiconductor Elect Ltd | Fabrication method of solder bump pattern in back-end wafer level package |
US20050161814A1 (en) * | 2002-12-27 | 2005-07-28 | Fujitsu Limited | Method for forming bumps, semiconductor device and method for manufacturing same, substrate processing apparatus, and semiconductor manufacturing apparatus |
US7169691B2 (en) * | 2004-01-29 | 2007-01-30 | Micron Technology, Inc. | Method of fabricating wafer-level packaging with sidewall passivation and related apparatus |
KR100817639B1 (ko) | 2004-03-19 | 2008-03-27 | 에스에무케이 가부시키가이샤 | 스크린 프린팅 금속 마스크 판 및 진동부를 수지-밀봉하는방법 |
TWI285069B (en) * | 2004-05-26 | 2007-08-01 | Advanced Semiconductor Eng | Screen printing method of forming conductive bumps |
US7719096B2 (en) * | 2006-08-11 | 2010-05-18 | Vishay General Semiconductor Llc | Semiconductor device and method for manufacturing a semiconductor device |
US20080079150A1 (en) * | 2006-09-28 | 2008-04-03 | Juergen Simon | Die arrangement and method for producing a die arrangement |
US20090306811A1 (en) * | 2008-06-06 | 2009-12-10 | Raytheon Company | Ball grid array cleaning system |
US8030770B1 (en) * | 2008-09-09 | 2011-10-04 | Triquint Semiconductor, Inc. | Substrateless package |
US8487435B2 (en) | 2008-09-09 | 2013-07-16 | Triquint Semiconductor, Inc. | Sheet-molded chip-scale package |
US20110316201A1 (en) * | 2010-06-24 | 2011-12-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer Level Packaging Using Blade Molding |
GB2485830A (en) | 2010-11-26 | 2012-05-30 | Cambridge Silicon Radio Ltd | Stacked multi-chip package using encapsulated electroplated pillar conductors; also able to include MEMS elements |
US8680683B1 (en) | 2010-11-30 | 2014-03-25 | Triquint Semiconductor, Inc. | Wafer level package with embedded passive components and method of manufacturing |
US9202714B2 (en) * | 2012-04-24 | 2015-12-01 | Micron Technology, Inc. | Methods for forming semiconductor device packages |
US9960105B2 (en) * | 2012-09-29 | 2018-05-01 | Intel Corporation | Controlled solder height packages and assembly processes |
JP6896347B2 (ja) * | 2017-10-27 | 2021-06-30 | 株式会社ディスコ | 被加工物の加工方法 |
KR102030529B1 (ko) * | 2018-02-27 | 2019-10-10 | 문영엽 | 플립칩 패키지 몰딩 장치 및 방법 |
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JP3526731B2 (ja) * | 1997-10-08 | 2004-05-17 | 沖電気工業株式会社 | 半導体装置およびその製造方法 |
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-
1998
- 1998-10-06 US US09/167,207 patent/US6063646A/en not_active Ceased
-
1999
- 1999-09-29 TW TW088116768A patent/TW421837B/zh not_active IP Right Cessation
- 1999-10-04 EP EP06118623A patent/EP1724830B1/de not_active Expired - Lifetime
- 1999-10-04 DE DE69941230T patent/DE69941230D1/de not_active Expired - Lifetime
- 1999-10-04 EP EP99307801A patent/EP0993040A3/de not_active Withdrawn
- 1999-10-06 KR KR1019990042978A patent/KR100620088B1/ko active IP Right Grant
- 1999-10-06 SG SG9905035A patent/SG115329A1/en unknown
-
2002
- 2002-05-16 US US10/150,379 patent/USRE38961E1/en not_active Expired - Lifetime
-
2006
- 2006-07-14 KR KR1020060066466A patent/KR100621670B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
USRE38961E1 (en) | 2006-01-31 |
EP0993040A2 (de) | 2000-04-12 |
EP1724830A3 (de) | 2007-05-09 |
KR20060092162A (ko) | 2006-08-22 |
EP0993040A3 (de) | 2001-03-14 |
KR100620088B1 (ko) | 2006-09-06 |
EP1724830B1 (de) | 2009-08-05 |
KR20000028855A (ko) | 2000-05-25 |
SG115329A1 (en) | 2005-10-28 |
TW421837B (en) | 2001-02-11 |
US6063646A (en) | 2000-05-16 |
KR100621670B1 (ko) | 2006-09-07 |
EP1724830A2 (de) | 2006-11-22 |
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