DE69936131D1 - Verfahren und vorrichtung zur entfernung eines photoresistfilms - Google Patents
Verfahren und vorrichtung zur entfernung eines photoresistfilmsInfo
- Publication number
- DE69936131D1 DE69936131D1 DE69936131T DE69936131T DE69936131D1 DE 69936131 D1 DE69936131 D1 DE 69936131D1 DE 69936131 T DE69936131 T DE 69936131T DE 69936131 T DE69936131 T DE 69936131T DE 69936131 D1 DE69936131 D1 DE 69936131D1
- Authority
- DE
- Germany
- Prior art keywords
- photoresist film
- photoresist
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/427—Stripping or agents therefor using plasma means only
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32350398 | 1998-11-13 | ||
JP32350398A JP3869566B2 (ja) | 1998-11-13 | 1998-11-13 | フォトレジスト膜除去方法および装置 |
PCT/JP1999/006324 WO2000030165A1 (fr) | 1998-11-13 | 1999-11-12 | Procede et dispositif d'elimination d'un film de photoresine |
Publications (3)
Publication Number | Publication Date |
---|---|
DE69936131D1 true DE69936131D1 (de) | 2007-07-05 |
DE69936131T2 DE69936131T2 (de) | 2008-01-17 |
DE69936131T9 DE69936131T9 (de) | 2008-05-08 |
Family
ID=18155429
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69936131T Active DE69936131T9 (de) | 1998-11-13 | 1999-11-12 | Verfahren und vorrichtung zur entfernung eines photoresistfilms |
Country Status (7)
Country | Link |
---|---|
US (2) | US6517998B1 (de) |
EP (1) | EP1049142B1 (de) |
JP (1) | JP3869566B2 (de) |
KR (2) | KR20010034087A (de) |
DE (1) | DE69936131T9 (de) |
TW (1) | TW451335B (de) |
WO (1) | WO2000030165A1 (de) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6982006B1 (en) * | 1999-10-19 | 2006-01-03 | Boyers David G | Method and apparatus for treating a substrate with an ozone-solvent solution |
US6440871B1 (en) | 2000-08-16 | 2002-08-27 | Micron Technology, Inc. | Gas assisted method for applying resist stripper and gas-resist stripper combinations |
WO2002027775A1 (fr) * | 2000-09-28 | 2002-04-04 | Mitsubishi Denki Kabushiki Kaisha | Procede et appareil de traitement de plaquettes |
JP4844912B2 (ja) * | 2001-08-01 | 2011-12-28 | 野村マイクロ・サイエンス株式会社 | フォトレジストの除去方法及び除去装置 |
JP3914842B2 (ja) * | 2001-10-23 | 2007-05-16 | 有限会社ユーエムエス | 有機被膜の除去方法および除去装置 |
JP4462935B2 (ja) * | 2002-03-18 | 2010-05-12 | 住友精密工業株式会社 | オゾン処理方法及びオゾン処理装置 |
JP4334844B2 (ja) * | 2002-06-26 | 2009-09-30 | 東京エレクトロン株式会社 | デバイス用溝構造体の製造方法 |
JP4351862B2 (ja) * | 2003-04-21 | 2009-10-28 | 積水化学工業株式会社 | レジスト除去方法及びレジスト除去装置 |
WO2004095550A1 (ja) * | 2003-04-21 | 2004-11-04 | Sekisui Chemical Co. Ltd. | 有機物除去装置、有機物除去方法、オゾン水噴射ノズル、及び、マスク基板用有機物除去装置 |
WO2004112093A2 (en) | 2003-06-06 | 2004-12-23 | P.C.T. Systems, Inc. | Method and apparatus to process substrates with megasonic energy |
US7202175B2 (en) * | 2003-11-07 | 2007-04-10 | Industrial Technology Research Institute | Method and apparatus for treating a substrate surface by bubbling |
US20060005856A1 (en) * | 2004-06-29 | 2006-01-12 | Applied Materials, Inc. | Reduction of reactive gas attack on substrate heater |
JP4438709B2 (ja) * | 2005-07-19 | 2010-03-24 | 株式会社Sumco | ウェーハの枚葉式エッチング方法 |
JP4787038B2 (ja) * | 2006-03-03 | 2011-10-05 | 大日本スクリーン製造株式会社 | 基板処理装置および基板処理方法 |
TWI351446B (en) | 2006-06-16 | 2011-11-01 | Toshiba Kk | Cleaning system and cleaning method |
CN101211125B (zh) * | 2006-12-25 | 2010-08-11 | 中芯国际集成电路制造(上海)有限公司 | 光刻胶的去除方法 |
DE102007058503B4 (de) * | 2007-12-05 | 2011-08-25 | Siltronic AG, 81737 | Verfahren zur nasschemischen Behandlung einer Halbleiterscheibe |
JP2009170554A (ja) * | 2008-01-11 | 2009-07-30 | Panasonic Corp | 半導体装置の製造方法 |
KR100992269B1 (ko) * | 2008-06-02 | 2010-11-05 | 삼성전기주식회사 | 도금층 형성 방법 |
JP2011145530A (ja) * | 2010-01-15 | 2011-07-28 | Hitachi Displays Ltd | 表示装置、及び、表示装置の製造方法 |
US9748120B2 (en) | 2013-07-01 | 2017-08-29 | Lam Research Ag | Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus |
CN104779136A (zh) * | 2014-01-10 | 2015-07-15 | 上海和辉光电有限公司 | 一种去除光致抗蚀剂的方法和设备 |
US9620383B2 (en) * | 2014-07-10 | 2017-04-11 | Tokyo Electron Limited | Method for uncovering underlying alignment patterns |
TWI595332B (zh) * | 2014-08-05 | 2017-08-11 | 頎邦科技股份有限公司 | 光阻剝離方法 |
US10490426B2 (en) | 2014-08-26 | 2019-11-26 | Lam Research Ag | Method and apparatus for processing wafer-shaped articles |
KR101847086B1 (ko) * | 2014-11-18 | 2018-04-10 | 주식회사 엘지화학 | 포토레지스트 박리 장치 및 이를 이용한 포토레지스트 박리 방법 |
US10395928B2 (en) * | 2016-06-15 | 2019-08-27 | Nanomedical Diagnostics, Inc. | Depositing a passivation layer on a graphene sheet |
US10759157B2 (en) | 2016-06-15 | 2020-09-01 | Nanomedical Diagnostics, Inc. | Systems and methods for transferring graphene |
US11056343B2 (en) | 2016-06-15 | 2021-07-06 | Cardea Bio, Inc. | Providing a temporary protective layer on a graphene sheet |
US10903319B2 (en) * | 2016-06-15 | 2021-01-26 | Nanomedical Diagnostics, Inc. | Patterning graphene with a hard mask coating |
JP2022131171A (ja) * | 2021-02-26 | 2022-09-07 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP2022169174A (ja) * | 2021-04-27 | 2022-11-09 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
CN116759348B (zh) * | 2023-08-18 | 2023-11-14 | 合肥晶合集成电路股份有限公司 | 补充h2o2液体的控制方法、其控制装置和其控制系统 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4341592A (en) * | 1975-08-04 | 1982-07-27 | Texas Instruments Incorporated | Method for removing photoresist layer from substrate by ozone treatment |
JPS57180132A (en) | 1981-04-30 | 1982-11-06 | Fujitsu Ltd | Washing method of substrate |
JPS6236826A (ja) * | 1985-08-09 | 1987-02-17 | Tokyo Electron Ltd | アツシング方法 |
US4812201A (en) * | 1986-07-25 | 1989-03-14 | Tokyo Electron Limited | Method of ashing layers, and apparatus for ashing layers |
JPH01206624A (ja) * | 1988-02-15 | 1989-08-18 | Koujiyundo Kagaku Kenkyusho:Kk | レジストのドライエッチング法 |
JPH0724265B2 (ja) * | 1988-04-13 | 1995-03-15 | 日本電気株式会社 | 半導体基板の洗浄装置 |
US5378317A (en) * | 1990-10-09 | 1995-01-03 | Chlorine Engineers Corp., Ltd. | Method for removing organic film |
JP2891578B2 (ja) * | 1991-11-29 | 1999-05-17 | クロリンエンジニアズ株式会社 | 基板処理方法 |
JPH05259139A (ja) * | 1992-03-16 | 1993-10-08 | Hitachi Ltd | 洗浄装置 |
JP3150509B2 (ja) * | 1992-11-27 | 2001-03-26 | 株式会社日立製作所 | 有機物除去方法及びその方法を使用するための装置 |
KR940012061A (ko) * | 1992-11-27 | 1994-06-22 | 가나이 쯔또무 | 유기물제거방법 및 그 방법을 이용하기 위한 유기물제거장치 |
US5464480A (en) * | 1993-07-16 | 1995-11-07 | Legacy Systems, Inc. | Process and apparatus for the treatment of semiconductor wafers in a fluid |
JP3320549B2 (ja) * | 1994-04-26 | 2002-09-03 | 岩手東芝エレクトロニクス株式会社 | 被膜除去方法および被膜除去剤 |
KR970053127A (ko) * | 1995-12-30 | 1997-07-29 | 김주용 | 반도체 기판의 세정방법 |
US6701941B1 (en) * | 1997-05-09 | 2004-03-09 | Semitool, Inc. | Method for treating the surface of a workpiece |
TW385489B (en) * | 1997-08-26 | 2000-03-21 | Tokyo Electron Ltd | Method for processing substrate and device of processing device |
JPH11165136A (ja) * | 1997-12-05 | 1999-06-22 | Sony Corp | レジスト除去方法およびレジスト除去装置 |
US6080531A (en) * | 1998-03-30 | 2000-06-27 | Fsi International, Inc. | Organic removal process |
JP3348695B2 (ja) * | 1999-06-04 | 2002-11-20 | 日本電気株式会社 | 半導体ウェーハ上のフォトレジスト除去方法及び除去装置 |
-
1998
- 1998-11-13 JP JP32350398A patent/JP3869566B2/ja not_active Expired - Fee Related
-
1999
- 1999-11-11 TW TW088119689A patent/TW451335B/zh not_active IP Right Cessation
- 1999-11-12 WO PCT/JP1999/006324 patent/WO2000030165A1/ja active IP Right Grant
- 1999-11-12 KR KR1020007007697A patent/KR20010034087A/ko active Search and Examination
- 1999-11-12 DE DE69936131T patent/DE69936131T9/de active Active
- 1999-11-12 EP EP99972372A patent/EP1049142B1/de not_active Expired - Lifetime
-
2000
- 2000-07-12 US US09/614,252 patent/US6517998B1/en not_active Expired - Fee Related
-
2002
- 2002-04-30 US US10/134,508 patent/US7965372B2/en not_active Expired - Fee Related
-
2003
- 2003-02-12 KR KR10-2003-0008813A patent/KR100514598B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW451335B (en) | 2001-08-21 |
EP1049142A1 (de) | 2000-11-02 |
JP2000150349A (ja) | 2000-05-30 |
US7965372B2 (en) | 2011-06-21 |
EP1049142B1 (de) | 2007-05-23 |
DE69936131T2 (de) | 2008-01-17 |
US20020115025A1 (en) | 2002-08-22 |
US6517998B1 (en) | 2003-02-11 |
KR20030024727A (ko) | 2003-03-26 |
EP1049142A4 (de) | 2003-01-02 |
WO2000030165A1 (fr) | 2000-05-25 |
DE69936131T9 (de) | 2008-05-08 |
KR100514598B1 (ko) | 2005-09-13 |
JP3869566B2 (ja) | 2007-01-17 |
KR20010034087A (ko) | 2001-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |