DE69925803D1 - Mikromechanischer halbleiter-beschleunigungssensor - Google Patents

Mikromechanischer halbleiter-beschleunigungssensor

Info

Publication number
DE69925803D1
DE69925803D1 DE69925803T DE69925803T DE69925803D1 DE 69925803 D1 DE69925803 D1 DE 69925803D1 DE 69925803 T DE69925803 T DE 69925803T DE 69925803 T DE69925803 T DE 69925803T DE 69925803 D1 DE69925803 D1 DE 69925803D1
Authority
DE
Germany
Prior art keywords
etched
accelerometer
cover layers
assembly
acceleration sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69925803T
Other languages
English (en)
Other versions
DE69925803T2 (de
Inventor
E Stewart
E Goldman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of DE69925803D1 publication Critical patent/DE69925803D1/de
Application granted granted Critical
Publication of DE69925803T2 publication Critical patent/DE69925803T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends
DE69925803T 1998-07-31 1999-07-22 Mikromechanischer halbleiter-beschleunigungssensor Expired - Lifetime DE69925803T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US127643 1998-07-31
US09/127,643 US6105427A (en) 1998-07-31 1998-07-31 Micro-mechanical semiconductor accelerometer
PCT/US1999/016774 WO2000007028A1 (en) 1998-07-31 1999-07-22 Micro-mechanical semiconductor accelerometer

Publications (2)

Publication Number Publication Date
DE69925803D1 true DE69925803D1 (de) 2005-07-21
DE69925803T2 DE69925803T2 (de) 2005-11-03

Family

ID=22431145

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69925803T Expired - Lifetime DE69925803T2 (de) 1998-07-31 1999-07-22 Mikromechanischer halbleiter-beschleunigungssensor

Country Status (10)

Country Link
US (2) US6105427A (de)
EP (2) EP1019733B1 (de)
JP (1) JP4932988B2 (de)
AT (1) ATE298092T1 (de)
AU (1) AU5227799A (de)
CA (1) CA2303044A1 (de)
DE (1) DE69925803T2 (de)
IL (2) IL135290A0 (de)
NO (1) NO20001630L (de)
WO (1) WO2000007028A1 (de)

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WO2006127777A1 (en) * 2005-05-25 2006-11-30 Northrop Grumman Corporation Silicon accelerometer chip design for size and thermal distortion reduction and process simplification
WO2006127813A2 (en) * 2005-05-25 2006-11-30 Northrop Grumman Corporation Methods for signal to noise improvement in bulk mems accelerometer chips and other mems devices
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Also Published As

Publication number Publication date
ATE298092T1 (de) 2005-07-15
CA2303044A1 (en) 2000-02-10
IL161532A (en) 2008-12-29
US6105427A (en) 2000-08-22
NO20001630D0 (no) 2000-03-29
AU5227799A (en) 2000-02-21
JP2002521695A (ja) 2002-07-16
EP1019733B1 (de) 2005-06-15
WO2000007028A1 (en) 2000-02-10
IL135290A0 (en) 2001-05-20
DE69925803T2 (de) 2005-11-03
EP1582877A1 (de) 2005-10-05
NO20001630L (no) 2000-05-25
EP1019733A1 (de) 2000-07-19
US6294400B1 (en) 2001-09-25
JP4932988B2 (ja) 2012-05-16

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