NO20001630L - Mikromekanisk halvlederakselerometer - Google Patents

Mikromekanisk halvlederakselerometer

Info

Publication number
NO20001630L
NO20001630L NO20001630A NO20001630A NO20001630L NO 20001630 L NO20001630 L NO 20001630L NO 20001630 A NO20001630 A NO 20001630A NO 20001630 A NO20001630 A NO 20001630A NO 20001630 L NO20001630 L NO 20001630L
Authority
NO
Norway
Prior art keywords
etched
accelerometer
cover layers
assembly
semiconductor accelerometer
Prior art date
Application number
NO20001630A
Other languages
English (en)
Other versions
NO20001630D0 (no
Inventor
Robert E Stewart
Arnold E Goldman
Original Assignee
Litton Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc filed Critical Litton Systems Inc
Publication of NO20001630D0 publication Critical patent/NO20001630D0/no
Publication of NO20001630L publication Critical patent/NO20001630L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Bipolar Transistors (AREA)
NO20001630A 1998-07-31 2000-03-29 Mikromekanisk halvlederakselerometer NO20001630L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/127,643 US6105427A (en) 1998-07-31 1998-07-31 Micro-mechanical semiconductor accelerometer
PCT/US1999/016774 WO2000007028A1 (en) 1998-07-31 1999-07-22 Micro-mechanical semiconductor accelerometer

Publications (2)

Publication Number Publication Date
NO20001630D0 NO20001630D0 (no) 2000-03-29
NO20001630L true NO20001630L (no) 2000-05-25

Family

ID=22431145

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20001630A NO20001630L (no) 1998-07-31 2000-03-29 Mikromekanisk halvlederakselerometer

Country Status (10)

Country Link
US (2) US6105427A (no)
EP (2) EP1582877A1 (no)
JP (1) JP4932988B2 (no)
AT (1) ATE298092T1 (no)
AU (1) AU5227799A (no)
CA (1) CA2303044A1 (no)
DE (1) DE69925803T2 (no)
IL (2) IL135290A0 (no)
NO (1) NO20001630L (no)
WO (1) WO2000007028A1 (no)

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Also Published As

Publication number Publication date
EP1019733B1 (en) 2005-06-15
IL161532A (en) 2008-12-29
DE69925803D1 (de) 2005-07-21
DE69925803T2 (de) 2005-11-03
IL135290A0 (en) 2001-05-20
US6105427A (en) 2000-08-22
CA2303044A1 (en) 2000-02-10
ATE298092T1 (de) 2005-07-15
EP1019733A1 (en) 2000-07-19
NO20001630D0 (no) 2000-03-29
EP1582877A1 (en) 2005-10-05
WO2000007028A1 (en) 2000-02-10
JP4932988B2 (ja) 2012-05-16
JP2002521695A (ja) 2002-07-16
US6294400B1 (en) 2001-09-25
AU5227799A (en) 2000-02-21

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