DE69924415D1 - Heizelement und Verfahren zu seiner Herstellung - Google Patents
Heizelement und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69924415D1 DE69924415D1 DE69924415T DE69924415T DE69924415D1 DE 69924415 D1 DE69924415 D1 DE 69924415D1 DE 69924415 T DE69924415 T DE 69924415T DE 69924415 T DE69924415 T DE 69924415T DE 69924415 D1 DE69924415 D1 DE 69924415D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- heating element
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
- H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
- H05B3/748—Resistive heating elements, i.e. heating elements exposed to the air, e.g. coil wire heater
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
- H05B3/74—Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1351898 | 1998-01-09 | ||
JP1351898 | 1998-01-09 | ||
JP10300736A JPH11260534A (ja) | 1998-01-09 | 1998-10-22 | 加熱装置およびその製造方法 |
JP30073698 | 1998-10-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69924415D1 true DE69924415D1 (de) | 2005-05-04 |
DE69924415T2 DE69924415T2 (de) | 2006-04-20 |
Family
ID=26349332
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69924415T Expired - Lifetime DE69924415T2 (de) | 1998-01-09 | 1999-01-07 | Heizelement und Verfahren zu seiner Herstellung |
Country Status (6)
Country | Link |
---|---|
US (2) | US6204489B1 (de) |
EP (1) | EP0929205B1 (de) |
JP (1) | JPH11260534A (de) |
KR (1) | KR100281953B1 (de) |
DE (1) | DE69924415T2 (de) |
TW (1) | TW409484B (de) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11260534A (ja) * | 1998-01-09 | 1999-09-24 | Ngk Insulators Ltd | 加熱装置およびその製造方法 |
JP3892609B2 (ja) * | 1999-02-16 | 2007-03-14 | 株式会社東芝 | ホットプレートおよび半導体装置の製造方法 |
WO2001019139A1 (fr) * | 1999-09-07 | 2001-03-15 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
WO2001031978A1 (fr) * | 1999-10-22 | 2001-05-03 | Ibiden Co., Ltd. | Plaque chauffante en ceramique |
DE60021848T2 (de) * | 1999-11-19 | 2006-06-08 | Ibiden Co., Ltd. | Keramisches heizgerät |
JP3567855B2 (ja) * | 2000-01-20 | 2004-09-22 | 住友電気工業株式会社 | 半導体製造装置用ウェハ保持体 |
JP4028149B2 (ja) * | 2000-02-03 | 2007-12-26 | 日本碍子株式会社 | 加熱装置 |
US6494955B1 (en) * | 2000-02-15 | 2002-12-17 | Applied Materials, Inc. | Ceramic substrate support |
US6693789B2 (en) * | 2000-04-05 | 2004-02-17 | Sumitomo Osaka Cement Co., Ltd. | Susceptor and manufacturing method thereof |
JP3851489B2 (ja) | 2000-04-27 | 2006-11-29 | 日本発条株式会社 | 静電チャック |
JP4328003B2 (ja) * | 2000-10-19 | 2009-09-09 | 日本碍子株式会社 | セラミックヒーター |
JP2002134484A (ja) * | 2000-10-19 | 2002-05-10 | Asm Japan Kk | 半導体基板保持装置 |
JP4156788B2 (ja) * | 2000-10-23 | 2008-09-24 | 日本碍子株式会社 | 半導体製造装置用サセプター |
JP4618885B2 (ja) * | 2000-12-27 | 2011-01-26 | 京セラ株式会社 | 加熱装置及びそれを用いた光モジュールの製造方法 |
US6623563B2 (en) * | 2001-01-02 | 2003-09-23 | Applied Materials, Inc. | Susceptor with bi-metal effect |
US6554907B2 (en) | 2001-01-02 | 2003-04-29 | Applied Materials, Inc. | Susceptor with internal support |
JP3956620B2 (ja) * | 2001-01-16 | 2007-08-08 | 日立化成工業株式会社 | 静電チャック |
JP2002220282A (ja) * | 2001-01-24 | 2002-08-09 | Tokuyama Corp | 窒化アルミニウム焼結体とその製造方法 |
GB0103929D0 (en) * | 2001-02-19 | 2001-04-04 | Microtherm Int Ltd | Base for an electric heater and method of manufacture |
JP2002313781A (ja) * | 2001-04-11 | 2002-10-25 | Sumitomo Electric Ind Ltd | 基板処理装置 |
JP3582518B2 (ja) * | 2001-04-18 | 2004-10-27 | 住友電気工業株式会社 | 抵抗発熱体回路パターンとそれを用いた基板処理装置 |
JP4331427B2 (ja) * | 2001-10-03 | 2009-09-16 | 住友電気工業株式会社 | 半導体製造装置に使用される給電用電極部材 |
JP3888531B2 (ja) * | 2002-03-27 | 2007-03-07 | 日本碍子株式会社 | セラミックヒーター、セラミックヒーターの製造方法、および金属部材の埋設品 |
JP2003317906A (ja) * | 2002-04-24 | 2003-11-07 | Sumitomo Electric Ind Ltd | セラミックスヒータ |
JP3963788B2 (ja) * | 2002-06-20 | 2007-08-22 | 信越化学工業株式会社 | 静電吸着機能を有する加熱装置 |
JP4082985B2 (ja) * | 2002-11-01 | 2008-04-30 | 信越化学工業株式会社 | 静電吸着機能を有する加熱装置及びその製造方法 |
JP2004200462A (ja) | 2002-12-19 | 2004-07-15 | Nhk Spring Co Ltd | 静電チャックおよびその製造方法 |
JP3910145B2 (ja) | 2003-01-06 | 2007-04-25 | 日本発条株式会社 | 溶射被膜およびその製造方法 |
US20040216678A1 (en) * | 2003-03-03 | 2004-11-04 | Sumitomo Electric Industries, Ltd. | Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed |
US6998587B2 (en) * | 2003-12-18 | 2006-02-14 | Intel Corporation | Apparatus and method for heating micro-components mounted on a substrate |
US7369393B2 (en) * | 2004-04-15 | 2008-05-06 | Saint-Gobain Ceramics & Plastics, Inc. | Electrostatic chucks having barrier layer |
JP4148180B2 (ja) * | 2004-04-23 | 2008-09-10 | 住友電気工業株式会社 | 半導体製造装置用ウェハ保持体 |
JP4987238B2 (ja) * | 2005-03-25 | 2012-07-25 | 日本碍子株式会社 | 窒化アルミニウム焼結体、半導体製造用部材及び窒化アルミニウム焼結体の製造方法 |
CN100521835C (zh) * | 2005-12-29 | 2009-07-29 | 梁敏玲 | 电阻膜加热装置的制造方法及所形成的电阻膜加热装置 |
KR100940456B1 (ko) | 2005-12-30 | 2010-02-04 | 주식회사 코미코 | 질화 알루미늄 소결체 및 이를 포함하는 반도체 제조장치용 부재 |
KR100794960B1 (ko) | 2006-06-07 | 2008-01-16 | (주)나노테크 | 하이브리드형 히터 제조방법 |
US7763831B2 (en) * | 2006-12-15 | 2010-07-27 | Ngk Insulators, Ltd. | Heating device |
US8129208B2 (en) * | 2007-02-07 | 2012-03-06 | Tokuyama Corporation | n-Type conductive aluminum nitride semiconductor crystal and manufacturing method thereof |
TWI459851B (zh) * | 2007-09-10 | 2014-11-01 | Ngk Insulators Ltd | heating equipment |
KR101177749B1 (ko) * | 2007-11-27 | 2012-08-29 | 주식회사 코미코 | 세라믹 히터, 이의 제조 방법 및 이를 갖는 박막 증착 장치 |
KR20090079540A (ko) * | 2008-01-18 | 2009-07-22 | 주식회사 코미코 | 기판 지지 장치 및 이를 갖는 기판 처리 장치 |
JP4712836B2 (ja) * | 2008-07-07 | 2011-06-29 | 信越化学工業株式会社 | 耐腐食性積層セラミックス部材 |
JP5416570B2 (ja) * | 2009-12-15 | 2014-02-12 | 住友電気工業株式会社 | 加熱冷却デバイスおよびそれを搭載した装置 |
JP2013008949A (ja) * | 2011-05-26 | 2013-01-10 | Hitachi Kokusai Electric Inc | 基板載置台、基板処理装置及び半導体装置の製造方法 |
JP5895387B2 (ja) * | 2011-07-21 | 2016-03-30 | 住友電気工業株式会社 | 半導体基板加熱用基板保持体 |
JP6527524B2 (ja) * | 2014-02-07 | 2019-06-05 | インテグリス・インコーポレーテッド | 静電チャックおよびその作製方法 |
JP6219229B2 (ja) * | 2014-05-19 | 2017-10-25 | 東京エレクトロン株式会社 | ヒータ給電機構 |
KR20170138052A (ko) * | 2016-06-06 | 2017-12-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 최적의 박막 증착 또는 에칭 프로세스들을 위한 특성들을 갖는 정전 척 |
JP6903959B2 (ja) * | 2017-03-10 | 2021-07-14 | 富士フイルムビジネスイノベーション株式会社 | 発熱部材、加熱装置、定着装置及び画像形成装置 |
JP7125265B2 (ja) * | 2018-02-05 | 2022-08-24 | 日本特殊陶業株式会社 | 基板加熱装置及びその製造方法 |
KR102630201B1 (ko) * | 2019-01-23 | 2024-01-29 | 주식회사 미코세라믹스 | 세라믹 히터 |
CN113574653A (zh) * | 2019-03-14 | 2021-10-29 | 朗姆研究公司 | 层状陶瓷结构 |
CN114340896B (zh) * | 2019-07-01 | 2024-04-02 | 阔斯泰公司 | 具有腐蚀保护层的多区氮化硅晶片加热器组件、和制造及使用其的方法 |
CN114342060A (zh) * | 2019-07-29 | 2022-04-12 | 应用材料公司 | 具有改善的高温吸附的半导体基板支撑件 |
WO2021080953A1 (en) * | 2019-10-21 | 2021-04-29 | Lam Research Corporation | Monolithic anisotropic substrate supports |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5303067A (en) | 1990-11-28 | 1994-04-12 | Sindo Ricoh Co., Ltd. | Computer connection circuit in facsimile |
US5280156A (en) * | 1990-12-25 | 1994-01-18 | Ngk Insulators, Ltd. | Wafer heating apparatus and with ceramic substrate and dielectric layer having electrostatic chucking means |
JP2938679B2 (ja) * | 1992-06-26 | 1999-08-23 | 信越化学工業株式会社 | セラミックス製静電チャック |
US5800618A (en) * | 1992-11-12 | 1998-09-01 | Ngk Insulators, Ltd. | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof |
JP3323924B2 (ja) * | 1993-01-29 | 2002-09-09 | 東京エレクトロン株式会社 | 静電チャック |
JPH07297268A (ja) * | 1993-12-27 | 1995-11-10 | Shin Etsu Chem Co Ltd | 静電チャック付セラミックスヒーター |
JPH07307377A (ja) | 1993-12-27 | 1995-11-21 | Shin Etsu Chem Co Ltd | 静電チャック付セラミックスヒーター |
US5668524A (en) * | 1994-02-09 | 1997-09-16 | Kyocera Corporation | Ceramic resistor and electrostatic chuck having an aluminum nitride crystal phase |
JP3393714B2 (ja) * | 1994-09-29 | 2003-04-07 | 京セラ株式会社 | クランプリング |
JPH08227933A (ja) * | 1995-02-20 | 1996-09-03 | Shin Etsu Chem Co Ltd | 静電吸着機能を有するウエハ加熱装置 |
JPH09105677A (ja) * | 1995-10-12 | 1997-04-22 | Isuzu Ceramics Kenkyusho:Kk | セラミックシース型部品及びその製造方法 |
DE29623184U1 (de) | 1996-12-04 | 1997-11-27 | Karlsruhe Forschzent | Heizbares keramisches Element |
JPH11260534A (ja) * | 1998-01-09 | 1999-09-24 | Ngk Insulators Ltd | 加熱装置およびその製造方法 |
-
1998
- 1998-10-22 JP JP10300736A patent/JPH11260534A/ja active Pending
- 1998-11-25 TW TW087119603A patent/TW409484B/zh not_active IP Right Cessation
- 1998-12-22 US US09/218,701 patent/US6204489B1/en not_active Expired - Lifetime
- 1998-12-29 KR KR1019980060139A patent/KR100281953B1/ko not_active IP Right Cessation
-
1999
- 1999-01-07 DE DE69924415T patent/DE69924415T2/de not_active Expired - Lifetime
- 1999-01-07 EP EP99300120A patent/EP0929205B1/de not_active Expired - Lifetime
-
2001
- 2001-01-03 US US09/753,481 patent/US6294771B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0929205A2 (de) | 1999-07-14 |
US6294771B2 (en) | 2001-09-25 |
JPH11260534A (ja) | 1999-09-24 |
KR19990066884A (ko) | 1999-08-16 |
US20010006172A1 (en) | 2001-07-05 |
KR100281953B1 (ko) | 2001-02-15 |
EP0929205A3 (de) | 1999-09-01 |
EP0929205B1 (de) | 2005-03-30 |
TW409484B (en) | 2000-10-21 |
DE69924415T2 (de) | 2006-04-20 |
US6204489B1 (en) | 2001-03-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |