DE69921853D1 - Vorrichtung zur behandlung von abgas - Google Patents
Vorrichtung zur behandlung von abgasInfo
- Publication number
- DE69921853D1 DE69921853D1 DE69921853T DE69921853T DE69921853D1 DE 69921853 D1 DE69921853 D1 DE 69921853D1 DE 69921853 T DE69921853 T DE 69921853T DE 69921853 T DE69921853 T DE 69921853T DE 69921853 D1 DE69921853 D1 DE 69921853D1
- Authority
- DE
- Germany
- Prior art keywords
- treatment
- exhaust gas
- exhaust
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
- B01D47/08—Spray cleaning with rotary nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/003—Arrangements of devices for treating smoke or fumes for supplying chemicals to fumes, e.g. using injection devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/006—Layout of treatment plant
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2217/00—Intercepting solids
- F23J2217/20—Intercepting solids by baffles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2217/00—Intercepting solids
- F23J2217/50—Intercepting solids by cleaning fluids (washers or scrubbers)
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J2219/00—Treatment devices
- F23J2219/70—Condensing contaminants with coolers
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Treating Waste Gases (AREA)
- Separation Of Particles Using Liquids (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP34224498 | 1998-12-01 | ||
JP34224498 | 1998-12-01 | ||
PCT/JP1999/006631 WO2000032299A1 (en) | 1998-12-01 | 1999-11-29 | Exhaust gas treating device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69921853D1 true DE69921853D1 (de) | 2004-12-16 |
DE69921853T2 DE69921853T2 (de) | 2005-12-08 |
Family
ID=18352230
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69921853T Expired - Lifetime DE69921853T2 (de) | 1998-12-01 | 1999-11-29 | Vorrichtung zur behandlung von abgas |
Country Status (7)
Country | Link |
---|---|
US (1) | US6638343B1 (de) |
EP (1) | EP1142621B1 (de) |
JP (1) | JP4102547B2 (de) |
KR (1) | KR100644994B1 (de) |
DE (1) | DE69921853T2 (de) |
TW (1) | TW421700B (de) |
WO (1) | WO2000032299A1 (de) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4828722B2 (ja) * | 2001-05-21 | 2011-11-30 | ルネサスエレクトロニクス株式会社 | 除害装置 |
JP2003144826A (ja) * | 2001-11-09 | 2003-05-20 | Ebara Corp | ファンスクラバー |
JP3737082B2 (ja) * | 2001-12-04 | 2006-01-18 | 株式会社荏原製作所 | 排ガスの処理方法および装置 |
JP4072815B2 (ja) * | 2002-03-01 | 2008-04-09 | 株式会社荏原製作所 | ファンスクラバー |
DE10355970A1 (de) * | 2003-11-24 | 2005-06-23 | DAS-Dünnschicht Anlagen Systeme GmbH Dresden | Vorrichtung und Verfahren für die Separation von Partikeln aus thermisch nachbehandelten Prozessabgasen |
GB2416139A (en) * | 2004-07-16 | 2006-01-18 | Howard Paul Davis | Mist injector for gas treatment |
KR100635124B1 (ko) | 2004-08-31 | 2006-10-17 | 비앤이테크(주) | 용해도에 따른 복합악취가스처리장치 |
KR100711940B1 (ko) | 2005-10-27 | 2007-05-02 | 주식회사 글로벌스탠다드테크놀로지 | 폐가스 정화처리장치용 습식유닛 |
JP4904042B2 (ja) * | 2005-11-01 | 2012-03-28 | 株式会社日本触媒 | ボラジン化合物の製造方法 |
JP2009018290A (ja) * | 2007-07-13 | 2009-01-29 | Ebara Corp | 排ガス洗浄装置 |
EP2037002B1 (de) * | 2007-09-11 | 2011-03-30 | Centrotherm Photovoltaics AG | Vorrichtung zur Abscheidung von Chalkogenen |
WO2010009804A1 (de) * | 2008-07-22 | 2010-01-28 | Michael Kaden | Sprühdüse zur agglomeration von partikeln |
JP5751743B2 (ja) * | 2009-03-09 | 2015-07-22 | 三菱重工業株式会社 | 排ガス処理装置及び排ガス処理方法 |
KR101233389B1 (ko) * | 2012-07-04 | 2013-02-15 | 주식회사 유니온이엔지 | 배기 일체형 실험실용 웨트 스크러버 |
KR101496037B1 (ko) * | 2013-10-04 | 2015-02-26 | 이동훈 | 배기가스의 폐열 회수 및 백연 저감 방법 및 장치 |
KR101462521B1 (ko) * | 2013-11-06 | 2014-11-18 | 지에스플라텍 주식회사 | 폐기물 및 고형 연료 처리장치 |
DE102015002794A1 (de) * | 2015-03-06 | 2016-09-08 | Erwin Hihn | Reinigungseinrichtung und Verfahren zum Reinigen eines Abluftstroms bei gleichzeitiger Wärmerückgewinnung |
JP6461735B2 (ja) * | 2015-07-10 | 2019-01-30 | 株式会社荏原製作所 | ファンスクラバー、及び、真空ポンプ装置 |
JP6542693B2 (ja) * | 2016-02-24 | 2019-07-10 | パナソニック株式会社 | 溶媒分離方法、溶媒分離装置及び溶媒分離システム |
CN107524110A (zh) * | 2016-06-21 | 2017-12-29 | 中国十七冶集团有限公司 | 一种城区深挖路基自动喷雾降尘防护施工多功能装置 |
ES2677608B1 (es) * | 2017-02-03 | 2019-08-20 | Desenvolupament Innovacio I Recerca Aplicada S L | Sistema de depuración de gases y aire |
CN106799121A (zh) * | 2017-03-08 | 2017-06-06 | 广东益康生环保设备有限公司 | 一种有机物降解机的废气减量化处理设备 |
CN107051079A (zh) * | 2017-03-22 | 2017-08-18 | 王琳荣 | 一种工厂一氧化碳废气无烟处理装置 |
KR102006765B1 (ko) * | 2017-08-07 | 2019-08-02 | 주식회사 피엠알 | 습벽탑을 이용한 배출가스의 세정처리장치 |
JP7076223B2 (ja) * | 2018-02-26 | 2022-05-27 | 株式会社荏原製作所 | 湿式除害装置 |
JP7068101B2 (ja) * | 2018-08-22 | 2022-05-16 | キオクシア株式会社 | ファンスクラバおよびファンスクラバの制御方法 |
JP7128078B2 (ja) * | 2018-10-12 | 2022-08-30 | 株式会社荏原製作所 | 除害装置、除害装置の配管部の交換方法及び除害装置の配管の洗浄方法 |
KR102135068B1 (ko) * | 2019-09-03 | 2020-07-17 | (주)다산이엔지 | 폐가스 선별분리 처리장치 및 그 제어방법 |
GB2593722A (en) * | 2020-03-31 | 2021-10-06 | Edwards Ltd | Apparatus |
DE102020115890B4 (de) * | 2020-06-16 | 2023-11-02 | Das Environmental Expert Gmbh | Gaswäscher zum Entfernen von Partikeln aus einem Abgas sowie Abgasentsorgungsanlage mit einem Gaswäscher |
CN112870895B (zh) * | 2021-01-15 | 2022-05-06 | 厦门奈克斯新材料有限公司 | 一种用于工业胶粘制品生产的废气处理装置 |
CN113426397A (zh) * | 2021-07-14 | 2021-09-24 | 龙岩绿合环保有限公司 | 一种可避免大气污染的三氯化铁生产装置 |
CN114904358A (zh) * | 2022-04-29 | 2022-08-16 | 彭小华 | 一种多段式模块化智能废气处理设备 |
CN117450742B (zh) * | 2023-11-11 | 2024-04-12 | 广州市帝东环保科技有限公司 | 一种用于净化VOCs尾气的流化床+催化燃烧装置 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS35848B1 (de) | 1957-03-20 | 1960-02-11 | ||
US3054244A (en) * | 1959-03-19 | 1962-09-18 | Fuller Co | Gas-material separator |
US3348830A (en) | 1966-12-28 | 1967-10-24 | Combustion Eng | Combined wet scrubber and heat exchange apparatus |
JPS4931428B1 (de) * | 1970-06-26 | 1974-08-21 | ||
FR2217054A1 (en) | 1972-07-28 | 1974-09-06 | Air Ind | Separating submicron dust particles - from gas by atomised moisture and two opposed mixing gas flows |
US3853515A (en) * | 1973-01-05 | 1974-12-10 | Palmer B | Clean air smoke scrubber |
JPS5550450B2 (de) * | 1973-02-09 | 1980-12-18 | ||
CA1033291A (en) * | 1973-04-26 | 1978-06-20 | Francis A.L. Dullien | Gas scrubber |
FR2371220A2 (fr) * | 1975-11-28 | 1978-06-16 | Creusot Loire | Dispositif d'aspiration et de depoussierage humide |
US4050912A (en) * | 1976-05-19 | 1977-09-27 | Midland-Ross Corporation | Apparatus for cooling hot gases |
US4212654A (en) * | 1978-07-24 | 1980-07-15 | Caraway Guy C | Centrifugal wet gas scrubbing method and apparatus |
US4289506A (en) * | 1980-05-08 | 1981-09-15 | Stone Arthur F | Scrubbing apparatus |
EP0118017A3 (de) * | 1983-02-05 | 1987-04-22 | Walter Kroll | Gasreiniger |
JPS59150519A (ja) | 1983-02-17 | 1984-08-28 | Sanetsu:Kk | オイルミストおよび粉塵などの除去装置 |
JPS6142321A (ja) | 1984-08-06 | 1986-02-28 | Sony Corp | シランガス処理装置 |
US4801437A (en) | 1985-12-04 | 1989-01-31 | Japan Oxygen Co., Ltd. | Process for treating combustible exhaust gases containing silane and the like |
JPS6362528A (ja) | 1986-09-03 | 1988-03-18 | Shindengen Electric Mfg Co Ltd | 排気ガス処理装置 |
JP2881210B2 (ja) | 1989-07-21 | 1999-04-12 | 千代田化工建設株式会社 | 有毒性排ガスの処理方法及び装置 |
US5076818A (en) * | 1990-06-28 | 1991-12-31 | Jonsson Kjartan A | Gas cleaning methods and apparatus |
JP2744580B2 (ja) * | 1993-08-17 | 1998-04-28 | 日本ジェット株式会社 | 湿式洗浄ろ過逆洗連続スクラバー |
US5510093A (en) | 1994-07-25 | 1996-04-23 | Alzeta Corporation | Combustive destruction of halogenated compounds |
DE19601759A1 (de) * | 1995-01-26 | 1996-08-01 | Koenig Ag | Anlage zum Abscheiden von Schadstoffen aus der Abluft einer Schadstoffquelle, insbesondere eines Spannrahmens |
JP2681034B2 (ja) | 1995-03-31 | 1997-11-19 | 工業技術院長 | フロンの無害化方法 |
US5649985A (en) * | 1995-11-29 | 1997-07-22 | Kanken Techno Co., Ltd. | Apparatus for removing harmful substances of exhaust gas discharged from semiconductor manufacturing process |
US5902377A (en) * | 1996-01-16 | 1999-05-11 | Morgan; Vernon E. | Mixing apparatus for gas scrubbing systems |
JPH10110926A (ja) | 1996-08-14 | 1998-04-28 | Nippon Sanso Kk | 燃焼式除害装置 |
JPH1061934A (ja) | 1996-08-16 | 1998-03-06 | Nippon Sanso Kk | 燃焼式排ガス処理装置 |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US6153150A (en) * | 1998-01-12 | 2000-11-28 | Advanced Technology Materials, Inc. | Apparatus and method for controlled decomposition oxidation of gaseous pollutants |
US6261524B1 (en) * | 1999-01-12 | 2001-07-17 | Advanced Technology Materials, Inc. | Advanced apparatus for abatement of gaseous pollutants |
US6423284B1 (en) * | 1999-10-18 | 2002-07-23 | Advanced Technology Materials, Inc. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
TW526086B (en) * | 2001-02-09 | 2003-04-01 | Nanya Technology Corp | Device and method for cooling and washing exhaust treatment machine |
-
1999
- 1999-11-29 KR KR1020017006813A patent/KR100644994B1/ko active IP Right Grant
- 1999-11-29 JP JP2000584982A patent/JP4102547B2/ja not_active Expired - Lifetime
- 1999-11-29 WO PCT/JP1999/006631 patent/WO2000032299A1/ja active IP Right Grant
- 1999-11-29 EP EP99972942A patent/EP1142621B1/de not_active Expired - Lifetime
- 1999-11-29 US US09/857,024 patent/US6638343B1/en not_active Expired - Lifetime
- 1999-11-29 DE DE69921853T patent/DE69921853T2/de not_active Expired - Lifetime
- 1999-11-30 TW TW088120836A patent/TW421700B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4102547B2 (ja) | 2008-06-18 |
EP1142621A4 (de) | 2002-05-22 |
WO2000032299A1 (en) | 2000-06-08 |
TW421700B (en) | 2001-02-11 |
EP1142621B1 (de) | 2004-11-10 |
KR20010093132A (ko) | 2001-10-27 |
DE69921853T2 (de) | 2005-12-08 |
KR100644994B1 (ko) | 2006-11-10 |
US6638343B1 (en) | 2003-10-28 |
EP1142621A1 (de) | 2001-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |