DE69925648D1 - Vorrichtung zur Behandlung von wasserstoffhaltigen Abgasen - Google Patents

Vorrichtung zur Behandlung von wasserstoffhaltigen Abgasen

Info

Publication number
DE69925648D1
DE69925648D1 DE69925648T DE69925648T DE69925648D1 DE 69925648 D1 DE69925648 D1 DE 69925648D1 DE 69925648 T DE69925648 T DE 69925648T DE 69925648 T DE69925648 T DE 69925648T DE 69925648 D1 DE69925648 D1 DE 69925648D1
Authority
DE
Germany
Prior art keywords
exhaust gases
containing exhaust
treating hydrogen
treating
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69925648T
Other languages
English (en)
Other versions
DE69925648T2 (de
Inventor
Yoshikazu Tanabe
Yukio Minami
Koji Kawada
Nobukazu Ikeda
Akihiro Morimoto
Keiji Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Fujikin Inc
Original Assignee
Hitachi Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Fujikin Inc filed Critical Hitachi Ltd
Publication of DE69925648D1 publication Critical patent/DE69925648D1/de
Application granted granted Critical
Publication of DE69925648T2 publication Critical patent/DE69925648T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Catalysts (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
DE69925648T 1998-01-06 1999-01-06 Vorrichtung zur Behandlung von wasserstoffhaltigen Abgasen Expired - Fee Related DE69925648T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP88498 1998-01-06
JP00088498A JP3563950B2 (ja) 1998-01-06 1998-01-06 水素含有排ガス処理装置

Publications (2)

Publication Number Publication Date
DE69925648D1 true DE69925648D1 (de) 2005-07-14
DE69925648T2 DE69925648T2 (de) 2006-03-16

Family

ID=11486109

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69925648T Expired - Fee Related DE69925648T2 (de) 1998-01-06 1999-01-06 Vorrichtung zur Behandlung von wasserstoffhaltigen Abgasen

Country Status (9)

Country Link
US (1) US6274098B1 (de)
EP (1) EP0928631B1 (de)
JP (1) JP3563950B2 (de)
KR (1) KR100289986B1 (de)
CA (1) CA2258632C (de)
DE (1) DE69925648T2 (de)
IL (1) IL127760A (de)
SG (1) SG72912A1 (de)
TW (1) TW457119B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200746302A (en) * 1997-03-05 2007-12-16 Hitachi Ltd Method of making semiconductor IC device
IL141194A0 (en) * 1999-08-06 2002-02-10 Fujikin Kk Apparatus and reactor for generating and feeding high purity moisture
CN1202987C (zh) * 2000-06-05 2005-05-25 株式会社富士金 水分发生用反应炉
KR100777672B1 (ko) * 2005-12-20 2007-11-28 코아텍주식회사 수소가스 처리용 스크러버 시스템
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
KR101670461B1 (ko) * 2015-06-11 2016-11-01 주식회사 테라세미콘 수소 포함 배기가스 처리장치
CN107924802A (zh) * 2015-08-24 2018-04-17 应用材料公司 用于真空溅射沉积的设备及其方法
CN105999997B (zh) * 2016-06-29 2018-09-25 上海立得催化剂有限公司 间断、小流量、低轻烃组分浓度的含轻烃尾气的处理方法
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
KR102450632B1 (ko) * 2022-03-17 2022-10-06 (주)진솔루션 반도체 제조 수소 공정의 배기 수소 처리장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1692916A (en) * 1927-01-04 1928-11-27 Woodruff Asa Allen Ejector
US4008050A (en) * 1975-06-11 1977-02-15 Betz Erwin C Apparatus for combining oxygen and hydrogen
US4119706A (en) * 1976-10-12 1978-10-10 Engelhard Minerals & Chemicals Corporation Method of catalytically recombining radiolytic hydrogen and radiolytic oxygen
US4178760A (en) * 1976-12-02 1979-12-18 Filterwerk Mann & Hummel Gmbh Filter dust ejector and check valve arrangement in exhaust system of internal combustion engine
JPS5749895A (en) 1980-09-10 1982-03-24 Hitachi Ltd Catalyst structure of recombiner
DE4319973A1 (de) * 1993-06-17 1995-02-16 Forschungszentrum Juelich Gmbh Katalysatoren zur Beseitigung von Wasserstoff aus einer Wasserstoff, Luft und Dampf enthaltenden Atmosphäre
DE19548235C2 (de) * 1995-12-22 1999-02-25 Forschungszentrum Juelich Gmbh Vorrichtung zur Entfernung von Wasserstoff aus einem Gasgemisch und Anwendung der Vorrichtung
IL125366A (en) * 1996-01-29 2001-12-23 Fujikin Kk A method of generating moisture, a reactor for generating moisture, a method for cooling a reactor temperature to generate moisture and a method for creating a platinum-coated stripping layer.
US5907076A (en) * 1996-12-31 1999-05-25 Exxon Chemical Patents Inc. Process for selectively separating hydrogen, or both hydrogen and carbon monoxide from olefinic hydrocarbons
JP3808975B2 (ja) * 1997-06-17 2006-08-16 忠弘 大見 半導体製造用水分の発生方法

Also Published As

Publication number Publication date
CA2258632C (en) 2002-07-16
US6274098B1 (en) 2001-08-14
IL127760A (en) 2003-06-24
IL127760A0 (en) 1999-10-28
KR19990067729A (ko) 1999-08-25
TW457119B (en) 2001-10-01
JPH11192429A (ja) 1999-07-21
EP0928631A2 (de) 1999-07-14
EP0928631A3 (de) 1999-09-29
JP3563950B2 (ja) 2004-09-08
SG72912A1 (en) 2000-05-23
EP0928631B1 (de) 2005-06-08
DE69925648T2 (de) 2006-03-16
KR100289986B1 (ko) 2001-05-15
CA2258632A1 (en) 1999-07-06

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee