DE69912334D1 - Verfahren zum Ablagern einer Metalloxyd(en)schicht - Google Patents

Verfahren zum Ablagern einer Metalloxyd(en)schicht

Info

Publication number
DE69912334D1
DE69912334D1 DE69912334T DE69912334T DE69912334D1 DE 69912334 D1 DE69912334 D1 DE 69912334D1 DE 69912334 T DE69912334 T DE 69912334T DE 69912334 T DE69912334 T DE 69912334T DE 69912334 D1 DE69912334 D1 DE 69912334D1
Authority
DE
Germany
Prior art keywords
depositing
layer
metal oxide
oxide
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69912334T
Other languages
English (en)
Other versions
DE69912334T2 (de
Inventor
Tsutomu Minami
Kiyoharu Tadanaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Original Assignee
Saint Gobain Glass France SAS
Compagnie de Saint Gobain SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Glass France SAS, Compagnie de Saint Gobain SA filed Critical Saint Gobain Glass France SAS
Publication of DE69912334D1 publication Critical patent/DE69912334D1/de
Application granted granted Critical
Publication of DE69912334T2 publication Critical patent/DE69912334T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/25—Oxides by deposition from the liquid phase
    • C03C17/253—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/14—Decomposition by irradiation, e.g. photolysis, particle radiation or by mixed irradiation sources
    • C23C18/143—Radiation by light, e.g. photolysis or pyrolysis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/241—Doped oxides with halides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/244—Doped oxides with Sb
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/11—Deposition methods from solutions or suspensions
    • C03C2218/113—Deposition methods from solutions or suspensions by sol-gel processes
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C03C2218/328—Partly or completely removing a coating
    • C03C2218/33—Partly or completely removing a coating by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Wood Science & Technology (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemically Coating (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
DE69912334T 1998-03-13 1999-03-11 Verfahren zum Ablagern einer Metalloxyd(en)schicht Expired - Lifetime DE69912334T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9803152A FR2775914B1 (fr) 1998-03-13 1998-03-13 Procede de depot de couches a base d'oxyde(s) metallique(s)
FR9803152 1998-03-13

Publications (2)

Publication Number Publication Date
DE69912334D1 true DE69912334D1 (de) 2003-12-04
DE69912334T2 DE69912334T2 (de) 2004-07-29

Family

ID=9524051

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69912334T Expired - Lifetime DE69912334T2 (de) 1998-03-13 1999-03-11 Verfahren zum Ablagern einer Metalloxyd(en)schicht

Country Status (7)

Country Link
US (1) US6517901B1 (de)
EP (1) EP0941773B1 (de)
JP (1) JP4750237B2 (de)
KR (1) KR100607595B1 (de)
DE (1) DE69912334T2 (de)
ES (1) ES2210996T3 (de)
FR (1) FR2775914B1 (de)

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US20030017371A1 (en) * 2001-06-20 2003-01-23 E.L. Specialists, Inc. Method for increasing conductivity of conductive translucent layer
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KR20030059872A (ko) * 2002-01-03 2003-07-12 삼성전자주식회사 금속 또는 금속산화물 미세 패턴의 제조방법
EP1491498A1 (de) * 2002-02-28 2004-12-29 Japan Science and Technology Agency Ausrichtungsdünnfilm mit titandioxid-nanoschichten, herstellungsverfahren dafür und gegenstand, der den ausrichtungsdünnfilm mit titandioxid-nanoschichten enthält
US7909929B2 (en) 2002-11-13 2011-03-22 Nippon Soda Co., Ltd. Dispersoid having metal-oxygen bonds, metal oxide film, and monomolecular film
KR100974778B1 (ko) * 2003-06-30 2010-08-06 삼성전자주식회사 유기금속 전구체 조성물 및 이를 이용한 금속 필름 또는패턴 형성방법
US7381633B2 (en) * 2005-01-27 2008-06-03 Hewlett-Packard Development Company, L.P. Method of making a patterned metal oxide film
US7695998B2 (en) * 2005-07-02 2010-04-13 Hewlett-Packard Development Company, L.P. Methods for making and using high-mobility inorganic semiconductive films
KR100665263B1 (ko) * 2005-07-22 2007-01-09 삼성전기주식회사 복합금속산화물 유전체막 제조방법 및 복합금속산화물유전체막
DE102005036427A1 (de) * 2005-08-03 2007-02-08 Schott Ag Substrat, umfassend zumindest eine voll- oder teilflächige makrostrukturierte Schicht, Verfahren zu deren Herstellung und deren Verwendung
DE102010021648A1 (de) 2009-05-26 2011-01-05 Auth, Matthias, Dr. Verfahren zur Beschichtung von Glasfasern oder Halbzeugen für die optische Industrie
KR101043854B1 (ko) * 2009-07-17 2011-06-24 연세대학교 산학협력단 투명 박막 트랜지스터 및 그 제조 방법
US9252455B1 (en) * 2010-04-14 2016-02-02 Hrl Laboratories, Llc Lithium battery structures employing composite layers, and fabrication methods to produce composite layers
US8329772B2 (en) * 2010-05-20 2012-12-11 E I Du Pont De Nemours And Company UV-curable polymer thick film dielectric compositions with excellent adhesion to ITO
GB201108967D0 (en) 2011-05-27 2011-07-13 Element Six Ltd Superhard structure, tool element and method of making same
KR101387963B1 (ko) * 2012-08-23 2014-04-22 인제대학교 산학협력단 전자기파 보조 졸겔법에 의한 박막 제조 방법, 및 이에 의하여 제조된 박막
CN103922609B (zh) * 2014-03-27 2015-12-30 浙江大学 一种胶体ito纳米晶薄膜的制备方法及其产品
WO2018176267A1 (zh) * 2017-03-29 2018-10-04 香港中文大学（深圳） 完美吸收体的制造方法
CN108118295A (zh) * 2017-12-21 2018-06-05 上海银之川金银线有限公司 一种非连续真空镀金属薄膜、金属丝及其制作方法
KR102560231B1 (ko) * 2018-04-11 2023-07-26 인프리아 코포레이션 낮은 폴리알킬 오염물을 갖는 모노알킬 주석 화합물,이의 조성물 및 방법
US11673903B2 (en) * 2018-04-11 2023-06-13 Inpria Corporation Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
US10787466B2 (en) 2018-04-11 2020-09-29 Inpria Corporation Monoalkyl tin compounds with low polyalkyl contamination, their compositions and methods
TW202404985A (zh) 2018-06-21 2024-02-01 美商英培雅股份有限公司 包含溶劑與單烷基錫三烷氧化物之混合物的溶液
US11498934B2 (en) 2019-01-30 2022-11-15 Inpria Corporation Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with particulate contamination and corresponding methods
US11966158B2 (en) 2019-01-30 2024-04-23 Inpria Corporation Monoalkyl tin trialkoxides and/or monoalkyl tin triamides with low metal contamination and/or particulate contamination, and corresponding methods

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US6905991B1 (en) 1997-03-13 2005-06-14 Saint-Gobain Glass France Soda-lime-silica glass compositions and applications

Also Published As

Publication number Publication date
JP4750237B2 (ja) 2011-08-17
DE69912334T2 (de) 2004-07-29
EP0941773A1 (de) 1999-09-15
KR100607595B1 (ko) 2006-08-02
US6517901B1 (en) 2003-02-11
FR2775914A1 (fr) 1999-09-17
EP0941773B1 (de) 2003-10-29
FR2775914B1 (fr) 2000-04-21
ES2210996T3 (es) 2004-07-01
JPH11319547A (ja) 1999-11-24
KR19990077817A (ko) 1999-10-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Representative=s name: BOCKHORNI & KOLLEGEN, 80687 MUENCHEN