DE69901939D1 - Koaxialsonden-schnittstelle für automatische testeinrichtungen - Google Patents

Koaxialsonden-schnittstelle für automatische testeinrichtungen

Info

Publication number
DE69901939D1
DE69901939D1 DE69901939T DE69901939T DE69901939D1 DE 69901939 D1 DE69901939 D1 DE 69901939D1 DE 69901939 T DE69901939 T DE 69901939T DE 69901939 T DE69901939 T DE 69901939T DE 69901939 D1 DE69901939 D1 DE 69901939D1
Authority
DE
Germany
Prior art keywords
automatic test
test devices
probe interface
coaxial probe
coaxial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69901939T
Other languages
English (en)
Other versions
DE69901939T2 (de
Inventor
E Corwith
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teradyne Inc
Original Assignee
Teradyne Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/047,089 external-priority patent/US6037787A/en
Application filed by Teradyne Inc filed Critical Teradyne Inc
Publication of DE69901939D1 publication Critical patent/DE69901939D1/de
Application granted granted Critical
Publication of DE69901939T2 publication Critical patent/DE69901939T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/18—Screening arrangements against electric or magnetic fields, e.g. against earth's field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
DE69901939T 1998-03-24 1999-03-04 Koaxialsonden-schnittstelle für automatische testeinrichtungen Expired - Lifetime DE69901939T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7680898P 1998-03-24 1998-03-24
US09/047,089 US6037787A (en) 1998-03-24 1998-03-24 High performance probe interface for automatic test equipment
PCT/US1999/004669 WO1999045400A1 (en) 1998-03-04 1999-03-04 Coaxial probe interface for automatic test equipment

Publications (2)

Publication Number Publication Date
DE69901939D1 true DE69901939D1 (de) 2002-08-01
DE69901939T2 DE69901939T2 (de) 2003-01-23

Family

ID=26724622

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69901939T Expired - Lifetime DE69901939T2 (de) 1998-03-24 1999-03-04 Koaxialsonden-schnittstelle für automatische testeinrichtungen

Country Status (7)

Country Link
EP (1) EP1060398B1 (de)
JP (1) JP4575593B2 (de)
KR (1) KR20010041554A (de)
CN (1) CN1276260C (de)
DE (1) DE69901939T2 (de)
TW (1) TW438980B (de)
WO (1) WO1999045400A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0999450B1 (de) * 1999-08-23 2002-04-10 Agilent Technologies, Inc. (a Delaware corporation) Modulare Schnittstelle zwischen Testeinrichtung und Anwendungseinrichtung
US6447328B1 (en) * 2001-03-13 2002-09-10 3M Innovative Properties Company Method and apparatus for retaining a spring probe
JP4251855B2 (ja) * 2002-11-19 2009-04-08 株式会社ヨコオ 高周波・高速用デバイスの検査治具の製法
JP2013100994A (ja) * 2011-11-07 2013-05-23 Nidec-Read Corp 基板検査治具、治具ベースユニット及び基板検査装置
US10451653B2 (en) * 2014-12-19 2019-10-22 Teradyne, Inc. Controlling a per-pin measurement unit
KR101954086B1 (ko) * 2017-11-07 2019-03-06 리노공업주식회사 검사 프로브 조립체 및 검사 소켓
KR102044753B1 (ko) 2018-05-25 2019-11-15 리노공업주식회사 검사장치
JP2020020664A (ja) * 2018-07-31 2020-02-06 東京特殊電線株式会社 半導体デバイスの検査治具
JP2020020660A (ja) * 2018-07-31 2020-02-06 東京特殊電線株式会社 半導体デバイスの検査治具
JP2020020661A (ja) * 2018-07-31 2020-02-06 東京特殊電線株式会社 半導体デバイスの検査治具
SG11202105529RA (en) * 2018-11-27 2021-06-29 Nhk Spring Co Ltd Probe unit
CN113167815B (zh) * 2018-11-27 2024-02-23 日本发条株式会社 探针单元
TWI736145B (zh) * 2020-02-25 2021-08-11 利亙通國際有限公司 應用於自動測試系統之彈簧針介面
CN116520137A (zh) * 2023-06-27 2023-08-01 北京智芯微电子科技有限公司 低噪声芯片引脚干扰测量辅助装置及测量系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60207343A (ja) * 1984-03-31 1985-10-18 Yokowo Mfg Co Ltd 回路基板等の検査装置
JPS6177286A (ja) * 1984-09-21 1986-04-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 同軸ケーブル用インターフェース装置
JPH0178029U (de) * 1987-11-13 1989-05-25
JPH02176568A (ja) * 1988-12-28 1990-07-09 Mitsubishi Electric Corp プリント基板用接触ピン
FR2662861A1 (fr) * 1990-05-30 1991-12-06 Radiall Sa Connecteur pour cable coaxial.
JPH04206845A (ja) * 1990-11-30 1992-07-28 Mitsubishi Electric Corp 高周波プローブ針
JPH063371A (ja) * 1992-06-18 1994-01-11 Taisee:Kk 同軸型コンタクトプローブ
JPH0782026B2 (ja) * 1992-12-15 1995-09-06 日本電気株式会社 コンタクトプローブ

Also Published As

Publication number Publication date
WO1999045400A1 (en) 1999-09-10
CN1276260C (zh) 2006-09-20
EP1060398B1 (de) 2002-06-26
KR20010041554A (ko) 2001-05-25
CN1292091A (zh) 2001-04-18
EP1060398A1 (de) 2000-12-20
JP2002506211A (ja) 2002-02-26
TW438980B (en) 2001-06-07
JP4575593B2 (ja) 2010-11-04
DE69901939T2 (de) 2003-01-23

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Legal Events

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