DE69819976D1 - Flüssigkeitsausstosskopf, Substrat und Herstelllungsverfahren - Google Patents

Flüssigkeitsausstosskopf, Substrat und Herstelllungsverfahren

Info

Publication number
DE69819976D1
DE69819976D1 DE69819976T DE69819976T DE69819976D1 DE 69819976 D1 DE69819976 D1 DE 69819976D1 DE 69819976 T DE69819976 T DE 69819976T DE 69819976 T DE69819976 T DE 69819976T DE 69819976 D1 DE69819976 D1 DE 69819976D1
Authority
DE
Germany
Prior art keywords
substrate
manufacturing process
liquid ejection
ejection head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69819976T
Other languages
English (en)
Other versions
DE69819976T2 (de
Inventor
Hioraki Mihara
Masahiko Ogawa
Kazuaki Masuda
Masami Ikeda
Ichiro Saito
Hiroyuki Ishinaga
Toshio Kashino
Shuji Koyama
Tomoyuki Hiroki
Yoshiyuki Imanaka
Teruo Ozaki
Masahiko Kubota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP21083197A external-priority patent/JPH1148488A/ja
Priority claimed from JP33606097A external-priority patent/JP3639707B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69819976D1 publication Critical patent/DE69819976D1/de
Application granted granted Critical
Publication of DE69819976T2 publication Critical patent/DE69819976T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14024—Assembling head parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1625—Manufacturing processes electroforming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/016—Method or apparatus with etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69819976T 1997-08-05 1998-08-04 Flüssigkeitsausstosskopf, Substrat und Herstelllungsverfahren Expired - Lifetime DE69819976T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP21083197 1997-08-05
JP21083197A JPH1148488A (ja) 1997-08-05 1997-08-05 液体吐出ヘッドの製造方法及び液体吐出ヘッド
JP33606097 1997-12-05
JP33606097A JP3639707B2 (ja) 1997-12-05 1997-12-05 液体吐出ヘッド及びヘッド用基板

Publications (2)

Publication Number Publication Date
DE69819976D1 true DE69819976D1 (de) 2004-01-08
DE69819976T2 DE69819976T2 (de) 2004-09-02

Family

ID=26518294

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69819976T Expired - Lifetime DE69819976T2 (de) 1997-08-05 1998-08-04 Flüssigkeitsausstosskopf, Substrat und Herstelllungsverfahren

Country Status (3)

Country Link
US (2) US6374482B1 (de)
EP (1) EP0895861B1 (de)
DE (1) DE69819976T2 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3524340B2 (ja) * 1997-08-26 2004-05-10 キヤノン株式会社 液体吐出ヘッド
US6391527B2 (en) 1998-04-16 2002-05-21 Canon Kabushiki Kaisha Method of producing micro structure, method of production liquid discharge head
US6918655B2 (en) * 1998-10-16 2005-07-19 Silverbrook Research Pty Ltd Ink jet printhead with nozzles
AU1139100A (en) * 1998-10-16 2000-05-08 Silverbrook Research Pty Limited Improvements relating to inkjet printers
JP3762172B2 (ja) 1998-12-03 2006-04-05 キヤノン株式会社 液体吐出ヘッド、該液体吐出ヘッドが搭載されたヘッドカートリッジと液体吐出装置、及び該液体吐出ヘッドの製造方法
JP3907329B2 (ja) 1998-12-03 2007-04-18 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
CN1170681C (zh) * 1999-05-24 2004-10-13 松下电器产业株式会社 一种墨水喷射头
US6591500B1 (en) 1999-06-04 2003-07-15 Canon Kabushiki Kaisha Method of manufacturing a liquid discharge head
JP3548536B2 (ja) 2000-02-15 2004-07-28 キヤノン株式会社 液体吐出ヘッドの製造方法
US6834423B2 (en) * 2000-07-31 2004-12-28 Canon Kabushiki Kaisha Method of manufacturing a liquid discharge head
US6474792B2 (en) 2000-07-31 2002-11-05 Canon Kabushiki Kaisha Liquid discharge head, method for manufacturing liquid discharge head, head cartridge on which liquid discharge head is mounted, and liquid discharge apparatus
JP4532785B2 (ja) * 2001-07-11 2010-08-25 キヤノン株式会社 構造体の製造方法、および液体吐出ヘッドの製造方法
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP3970119B2 (ja) * 2002-07-19 2007-09-05 キヤノン株式会社 インクジェット記録ヘッドおよび該インクジェット記録ヘッドを用いた記録装置
US8227043B2 (en) * 2004-06-28 2012-07-24 Canon Kabushiki Kaisha Liquid discharge head manufacturing method, and liquid discharge head obtained using this method
JP4208794B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4208793B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
CN100569524C (zh) * 2004-11-10 2009-12-16 佳能株式会社 液体排出头
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
JP2007230194A (ja) 2006-03-03 2007-09-13 Canon Finetech Inc インクジェット記録ヘッドおよび製造方法
JP2007230193A (ja) * 2006-03-03 2007-09-13 Canon Finetech Inc 液体吐出ヘッド
US7456548B2 (en) * 2006-05-09 2008-11-25 Canon Kabushiki Kaisha Piezoelectric element, piezoelectric actuator, and ink jet recording head
US8034724B2 (en) 2006-07-21 2011-10-11 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP4290211B2 (ja) * 2006-08-11 2009-07-01 キヤノン株式会社 結晶性金属膜
JP4221611B2 (ja) * 2006-10-31 2009-02-12 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
US7811911B2 (en) * 2006-11-07 2010-10-12 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP5046819B2 (ja) 2007-09-13 2012-10-10 キヤノン株式会社 スルーホールの形成方法およびインクジェットヘッド
US8566943B2 (en) * 2009-10-01 2013-10-22 Kaspersky Lab, Zao Asynchronous processing of events for malware detection

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
US4611219A (en) 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
US4881318A (en) 1984-06-11 1989-11-21 Canon Kabushiki Kaisha Method of manufacturing a liquid jet recording head
JPS6159911A (ja) 1984-08-30 1986-03-27 Nec Corp 切換スイツチ回路
JPS6159914A (ja) 1984-08-31 1986-03-27 Fujitsu Ltd デイジタル圧縮装置
US4592414A (en) 1985-03-06 1986-06-03 Mccord Heat Transfer Corporation Heat exchanger core construction utilizing a plate member adaptable for producing either a single or double pass flow arrangement
DE3514550A1 (de) 1985-04-23 1986-10-23 Hüls AG, 4370 Marl 3-hydroxydicarbonsaeuren und ein verfahren zu ihrer herstellung
US4860033A (en) 1987-02-04 1989-08-22 Canon Kabushiki Kaisha Base plate having an oxidation film and an insulating film for ink jet recording head and ink jet recording head using said base plate
JPS63197652A (ja) 1987-02-13 1988-08-16 Canon Inc インクジエツト記録ヘツドおよびその製造方法
JPS63199972A (ja) * 1987-02-13 1988-08-18 Canon Inc 弁素子の製造方法
US4994825A (en) 1988-06-30 1991-02-19 Canon Kabushiki Kaisha Ink jet recording head equipped with a discharging opening forming member including a protruding portion and a recessed portion
US5081474A (en) 1988-07-04 1992-01-14 Canon Kabushiki Kaisha Recording head having multi-layer matrix wiring
US5208604A (en) 1988-10-31 1993-05-04 Canon Kabushiki Kaisha Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head
GB8921722D0 (en) * 1989-09-26 1989-11-08 British Telecomm Micromechanical switch
US5135605A (en) * 1991-04-29 1992-08-04 At&T Bell Laboratories Methods for making mirrors
US5479197A (en) 1991-07-11 1995-12-26 Canon Kabushiki Kaisha Head for recording apparatus
JPH05124189A (ja) * 1991-11-01 1993-05-21 Matsushita Electric Ind Co Ltd インク吐出装置
US5278585A (en) 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
JP3475512B2 (ja) 1994-04-22 2003-12-08 日産自動車株式会社 ロックアップ装置の油圧回路
AU4092396A (en) 1995-01-13 1996-08-08 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
AU4092296A (en) 1995-01-13 1996-08-08 Canon Kabushiki Kaisha Liquid ejecting head, liquid ejecting device and liquid ejecting method
TW332799B (en) 1995-01-13 1998-06-01 Canon Kk The liquid ejecting head, device and method of liquid ejecting
JP3342279B2 (ja) 1995-01-13 2002-11-05 キヤノン株式会社 液体吐出方法、液体吐出ヘッドおよび該液体吐出ヘッドの製造方法
JP3706671B2 (ja) 1995-04-14 2005-10-12 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドを用いたヘッドカートリッジ、液体吐出装置、および液体吐出方法
DE69622217T2 (de) * 1995-04-14 2002-12-05 Canon Kk Verfahren zum Herstellen eines Flüssigkeitsausstosskopfes und nach diesem Verfahren hergestellter Flüssigkeitsausstosskopf
MX9601557A (es) 1995-04-26 1997-06-28 Canon Kk Cabeza de eyeccion de liquido, dispositivo de eyeccion de liquido y metodo de eyeccion de liquido.
US5838351A (en) 1995-10-26 1998-11-17 Hewlett-Packard Company Valve assembly for controlling fluid flow within an ink-jet pen
JP3647205B2 (ja) 1996-06-07 2005-05-11 キヤノン株式会社 液体吐出方法、液供給方法、液体吐出ヘッド、該液体吐出ヘッドを用いた液体吐出ヘッドカートリッジ、及び液体吐出装置
US6213592B1 (en) 1996-06-07 2001-04-10 Canon Kabushiki Kaisha Method for discharging ink from a liquid jet recording head having a fluid resistance element with a movable member, and head, head cartridge and recording apparatus using that method
US5872582A (en) * 1996-07-02 1999-02-16 Hewlett-Packard Company Microfluid valve for modulating fluid flow within an ink-jet printer
JP3403008B2 (ja) 1996-07-05 2003-05-06 キヤノン株式会社 液体吐出ヘッドおよびそれを用いたヘッドカートリッジと記録装置
JP3408066B2 (ja) 1996-07-09 2003-05-19 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドを用いたヘッドカートリッジ、液体吐出装置、液体吐出方法およびヘッドキット
JP3403009B2 (ja) 1996-07-12 2003-05-06 キヤノン株式会社 可動部材の変位と気泡成長を伴う液体吐出方法、該吐出方法に用いられる液体吐出ヘッド、ヘッドカートリッジ及びこれらを用いた液体吐出装置
JP3372765B2 (ja) 1996-07-12 2003-02-04 キヤノン株式会社 液体吐出ヘッド、ヘッドカートリッジ、液体吐出装置、記録システム、ヘッドキット、および液体吐出ヘッドの製造方法
JP3524340B2 (ja) 1997-08-26 2004-05-10 キヤノン株式会社 液体吐出ヘッド
DE69813154T2 (de) * 1997-12-05 2004-03-04 Canon K.K. Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren, Kopfkassette und Flüssigkeitsausstossvorrichtung
JP2000198199A (ja) * 1997-12-05 2000-07-18 Canon Inc 液体吐出ヘッドおよびヘッドカートリッジおよび液体吐出装置および液体吐出ヘッドの製造方法

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US6834943B2 (en) 2004-12-28
US6374482B1 (en) 2002-04-23
US20020093553A1 (en) 2002-07-18
EP0895861B1 (de) 2003-11-26
EP0895861A1 (de) 1999-02-10

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