DE69830700D1 - Flüssigkeitsausstosskopf, Flüssigkeitsausstossgerät und Flüssigkeitsausstossverfahren - Google Patents

Flüssigkeitsausstosskopf, Flüssigkeitsausstossgerät und Flüssigkeitsausstossverfahren

Info

Publication number
DE69830700D1
DE69830700D1 DE69830700T DE69830700T DE69830700D1 DE 69830700 D1 DE69830700 D1 DE 69830700D1 DE 69830700 T DE69830700 T DE 69830700T DE 69830700 T DE69830700 T DE 69830700T DE 69830700 D1 DE69830700 D1 DE 69830700D1
Authority
DE
Germany
Prior art keywords
liquid
liquid ejection
ejector
ejection head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69830700T
Other languages
English (en)
Other versions
DE69830700T2 (de
Inventor
Yoichi Taneya
Masahiko Ogawa
Masami Ikeda
Ichiro Saito
Hiroyuki Ishinaga
Toshio Kashino
Tomoyuki Hiroki
Yoshiyuki Imanaka
Teruo Ozaki
Masahiko Kubota
Aya Yoshihira
Kiyomitsu Kudo
Hiroyuki Sugiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69830700D1 publication Critical patent/DE69830700D1/de
Publication of DE69830700T2 publication Critical patent/DE69830700T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14056—Plural heating elements per ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)
DE69830700T 1997-12-05 1998-12-04 Flüssigkeitsausstosskopf, Flüssigkeitsausstossgerät und Flüssigkeitsausstossverfahren Expired - Lifetime DE69830700T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP33610897 1997-12-05
JP33610997 1997-12-05
JP33610897 1997-12-05
JP33610997 1997-12-05
JP33605597 1997-12-05
JP33605597 1997-12-05

Publications (2)

Publication Number Publication Date
DE69830700D1 true DE69830700D1 (de) 2005-08-04
DE69830700T2 DE69830700T2 (de) 2006-05-04

Family

ID=27340761

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69830700T Expired - Lifetime DE69830700T2 (de) 1997-12-05 1998-12-04 Flüssigkeitsausstosskopf, Flüssigkeitsausstossgerät und Flüssigkeitsausstossverfahren

Country Status (3)

Country Link
US (1) US6491380B2 (de)
EP (1) EP0921002B1 (de)
DE (1) DE69830700T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AUPQ130399A0 (en) * 1999-06-30 1999-07-22 Silverbrook Research Pty Ltd A method and apparatus (IJ47V9)
DE60014272T2 (de) * 1999-07-27 2005-10-06 Canon K.K. Drucker und Druckverfahren
US6497475B1 (en) 1999-09-03 2002-12-24 Canon Kabushiki Kaisha Liquid discharge method, head, and apparatus which suppress bubble growth at the upstream side
EP1080906A3 (de) * 1999-09-03 2002-04-24 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren, und Flüssigkeitsausstossvorrichtung
EP1177902A1 (de) 2000-07-31 2002-02-06 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf,Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, Kassette mit darauf montiertem Flüssigkeitsausstosskopf und Flüssigkeitsausstossvorrichtung
US20030037302A1 (en) * 2001-06-24 2003-02-20 Aliaksei Dzienis Systems and methods for automatically converting document file formats
JP4095368B2 (ja) * 2001-08-10 2008-06-04 キヤノン株式会社 インクジェット記録ヘッドの作成方法
JP2003311982A (ja) * 2002-04-23 2003-11-06 Canon Inc 液体吐出ヘッド
CN1968815B (zh) * 2004-06-28 2013-05-01 佳能株式会社 排液头制造方法，和使用该方法得到的排液头
US7549734B2 (en) * 2004-11-10 2009-06-23 Canon Kabushiki Kaisha Liquid discharge head
JP4459037B2 (ja) * 2004-12-01 2010-04-28 キヤノン株式会社 液体吐出ヘッド
CN102947099B (zh) 2010-04-29 2015-11-25 惠普发展公司，有限责任合伙企业 流体喷射装置
JP6494352B2 (ja) 2014-05-30 2019-04-03 キヤノン株式会社 液体吐出ヘッド
JP6848264B2 (ja) * 2016-08-25 2021-03-24 東洋製罐株式会社 加飾多層押出ブローボトルの製造方法。

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5581172A (en) 1978-12-14 1980-06-18 Canon Inc Liquid injection type recording method and device
US4450455A (en) 1981-06-18 1984-05-22 Canon Kabushiki Kaisha Ink jet head
US4558333A (en) 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
US4611219A (en) 1981-12-29 1986-09-09 Canon Kabushiki Kaisha Liquid-jetting head
US4480259A (en) 1982-07-30 1984-10-30 Hewlett-Packard Company Ink jet printer with bubble driven flexible membrane
WO1985004750A1 (en) 1982-11-26 1985-10-24 Mitsubishi Denki Kabushiki Kaisha Analog input circuit
US4646110A (en) 1982-12-29 1987-02-24 Canon Kabushiki Kaisha Liquid injection recording apparatus
JPS6119372A (ja) 1984-07-07 1986-01-28 Nec Corp インクジエツトヘツド
CA1237020A (en) * 1984-10-13 1988-05-24 Herbert A. Waggener Silicon nozzle structure and method of manufacture
JPS6169467A (ja) 1985-06-11 1986-04-10 Seiko Epson Corp 記録液滴吐出型記録装置
JPS63199972A (ja) 1987-02-13 1988-08-18 Canon Inc 弁素子の製造方法
JP2672096B2 (ja) 1987-10-01 1997-11-05 キヤノン株式会社 インクジェット記録ヘッド
US4994825A (en) 1988-06-30 1991-02-19 Canon Kabushiki Kaisha Ink jet recording head equipped with a discharging opening forming member including a protruding portion and a recessed portion
US5208604A (en) 1988-10-31 1993-05-04 Canon Kabushiki Kaisha Ink jet head and manufacturing method thereof, and ink jet apparatus with ink jet head
ES2155568T3 (es) 1989-09-18 2001-05-16 Canon Kk Aparato de chorros de tinta.
EP0436047A1 (de) 1990-01-02 1991-07-10 Siemens Aktiengesellschaft Flüssigkeitsstrahlaufzeichnungskopf für Tintendruckeinrichtungen
DE69232671T2 (de) 1991-10-22 2003-02-06 Canon K.K., Tokio/Tokyo Verfahren zur Herstellung eines Tintenstrahlaufzeichnungskopfes
JPH05124189A (ja) 1991-11-01 1993-05-21 Matsushita Electric Ind Co Ltd インク吐出装置
US5278585A (en) * 1992-05-28 1994-01-11 Xerox Corporation Ink jet printhead with ink flow directing valves
US5821962A (en) * 1995-06-02 1998-10-13 Canon Kabushiki Kaisha Liquid ejection apparatus and method
JP3542460B2 (ja) 1996-06-07 2004-07-14 キヤノン株式会社 液体吐出方法及び液体吐出装置

Also Published As

Publication number Publication date
EP0921002A2 (de) 1999-06-09
EP0921002A3 (de) 1999-12-15
DE69830700T2 (de) 2006-05-04
EP0921002B1 (de) 2005-06-29
US6491380B2 (en) 2002-12-10
US20020015078A1 (en) 2002-02-07

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