DE69804724D1 - Tintenstrahldruckkopf und sein Herstellungsverfahren - Google Patents

Tintenstrahldruckkopf und sein Herstellungsverfahren

Info

Publication number
DE69804724D1
DE69804724D1 DE69804724T DE69804724T DE69804724D1 DE 69804724 D1 DE69804724 D1 DE 69804724D1 DE 69804724 T DE69804724 T DE 69804724T DE 69804724 T DE69804724 T DE 69804724T DE 69804724 D1 DE69804724 D1 DE 69804724D1
Authority
DE
Germany
Prior art keywords
manufacturing process
inkjet printhead
printhead
inkjet
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69804724T
Other languages
English (en)
Other versions
DE69804724T2 (de
Inventor
Yoshinao Miyata
Shinri Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69804724D1 publication Critical patent/DE69804724D1/de
Publication of DE69804724T2 publication Critical patent/DE69804724T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE69804724T 1997-07-25 1998-07-24 Tintenstrahldruckkopf und sein Herstellungsverfahren Expired - Lifetime DE69804724T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20065197 1997-07-25
JP20065097 1997-07-25

Publications (2)

Publication Number Publication Date
DE69804724D1 true DE69804724D1 (de) 2002-05-16
DE69804724T2 DE69804724T2 (de) 2002-08-14

Family

ID=26512320

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69804724T Expired - Lifetime DE69804724T2 (de) 1997-07-25 1998-07-24 Tintenstrahldruckkopf und sein Herstellungsverfahren

Country Status (3)

Country Link
US (1) US6109738A (de)
EP (1) EP0893259B8 (de)
DE (1) DE69804724T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4300610B2 (ja) * 1998-12-25 2009-07-22 富士フイルム株式会社 インクジェット記録ヘッド及びプリンタ装置
JP2000218787A (ja) * 1999-01-29 2000-08-08 Seiko Epson Corp インクジェット式記録ヘッド及び画像記録装置
WO2001047714A1 (fr) * 1999-12-24 2001-07-05 Fujitsu Limited Tete d'enregistrement a jet d'encre et son procede de fabrication
US6604817B2 (en) * 2000-03-07 2003-08-12 Brother Kogyo Kabushiki Kaisha Print head for piezoelectric ink jet printer, piezoelectric actuator therefor, and process for producing piezoelectric actuator
JP2002001974A (ja) * 2000-06-26 2002-01-08 Nec Corp インクジェット式プリンタヘッド構造
JP3661775B2 (ja) * 2001-02-14 2005-06-22 セイコーエプソン株式会社 インクジェット式記録ヘッドの製造方法
US7370949B2 (en) * 2002-02-28 2008-05-13 Seiko Epson Corporation Liquid supplying member, method of manufacturing the same, and liquid ejection apparatus incorporating the same
JP2004107179A (ja) * 2002-09-20 2004-04-08 Canon Inc 圧電体前駆体ゾル、圧電体膜の製造方法、圧電体素子およびインクジェット記録ヘッド
TWI230477B (en) * 2002-09-20 2005-04-01 Canon Kk Composition for forming piezoelectric film, producing method for piezoelectric film, piezoelectric element and ink jet recording head
US7152289B2 (en) * 2002-09-25 2006-12-26 Intel Corporation Method for forming bulk resonators silicon <110> substrate
JP4239593B2 (ja) * 2003-01-10 2009-03-18 リコープリンティングシステムズ株式会社 インクジェットヘッド及びインクジェット記録装置
US20040239717A1 (en) * 2003-02-26 2004-12-02 Kyocera Corporation Alumina sintered body and ink-jet recording head structure
JP3885783B2 (ja) * 2003-08-14 2007-02-28 ブラザー工業株式会社 インクジェットヘッド
US7097286B2 (en) * 2003-11-12 2006-08-29 Kyocera Corporation Ink jet recording head structure, ink jet printer, powder molding method, method of manufacturing recording head structure supporting member, and powder molding press apparatus
US7163274B2 (en) * 2003-12-29 2007-01-16 Industrial Technology Research Institute Inkjet dispensing apparatus
JP5743076B2 (ja) * 2011-04-06 2015-07-01 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
JP6273829B2 (ja) 2013-09-13 2018-02-07 株式会社リコー 電気機械変換素子とその製造方法、及び電気機械変換素子を有する液滴吐出ヘッド、液滴吐出ヘッドを有する液滴吐出装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58122878A (ja) * 1982-01-14 1983-07-21 Ricoh Co Ltd インクジエツト記録装置
DE3645017C2 (de) * 1985-09-06 1990-07-12 Fuji Electric Co., Ltd., Kawasaki, Kanagawa, Jp
JPH05301342A (ja) * 1991-03-20 1993-11-16 Fujitsu Ltd インクジェットプリンタ用ヘッド
JPH05305710A (ja) * 1992-02-24 1993-11-19 Rohm Co Ltd インクジェットプリントヘッド及びそれを備える電子機器
JPH05286131A (ja) 1992-04-15 1993-11-02 Rohm Co Ltd インクジェットプリントヘッドの製造方法及びインクジェットプリントヘッド
WO1993022140A1 (en) * 1992-04-23 1993-11-11 Seiko Epson Corporation Liquid jet head and production thereof
JPH06218917A (ja) * 1993-01-22 1994-08-09 Sharp Corp インクジェットヘッド
JP3451700B2 (ja) * 1994-03-10 2003-09-29 セイコーエプソン株式会社 インクジェット記録ヘッド及びその製造方法
FR2719804B1 (fr) * 1994-04-26 1997-10-17 Seiko Epson Corp Tête d'enregistrement à jets d'encre et son procédé de fabrication.
JP3679863B2 (ja) * 1995-06-12 2005-08-03 セイコーエプソン株式会社 インクジェット式記録ヘッド
DE69612333T2 (de) * 1995-07-26 2001-10-11 Sony Corp Druckvorrichtung und Verfahren zu ihrer Herstellung
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
JPH10211701A (ja) * 1996-11-06 1998-08-11 Seiko Epson Corp 圧電体素子を備えたアクチュエータ及びインクジェット式記録ヘッド、並びにこれらの製造方法

Also Published As

Publication number Publication date
EP0893259A3 (de) 1999-08-25
DE69804724T2 (de) 2002-08-14
EP0893259A2 (de) 1999-01-27
US6109738A (en) 2000-08-29
EP0893259B1 (de) 2002-04-10
EP0893259B8 (de) 2003-03-26

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