DE60113926D1 - Tintenstrahldrucker und dazugehöriges Herstellungsverfahren - Google Patents

Tintenstrahldrucker und dazugehöriges Herstellungsverfahren

Info

Publication number
DE60113926D1
DE60113926D1 DE60113926T DE60113926T DE60113926D1 DE 60113926 D1 DE60113926 D1 DE 60113926D1 DE 60113926 T DE60113926 T DE 60113926T DE 60113926 T DE60113926 T DE 60113926T DE 60113926 D1 DE60113926 D1 DE 60113926D1
Authority
DE
Germany
Prior art keywords
inkjet printer
associated manufacturing
manufacturing
inkjet
printer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60113926T
Other languages
English (en)
Other versions
DE60113926T2 (de
Inventor
Colin C Davis
Eric L Nikkel
Martha A Truninger
Ronald L Enck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hewlett Packard Development Co LP
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Application granted granted Critical
Publication of DE60113926D1 publication Critical patent/DE60113926D1/de
Publication of DE60113926T2 publication Critical patent/DE60113926T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60113926T 2000-07-07 2001-06-19 Tintenstrahldrucker und dazugehöriges Herstellungsverfahren Expired - Lifetime DE60113926T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/611,810 US6481831B1 (en) 2000-07-07 2000-07-07 Fluid ejection device and method of fabricating
US611810 2000-07-07

Publications (2)

Publication Number Publication Date
DE60113926D1 true DE60113926D1 (de) 2006-02-23
DE60113926T2 DE60113926T2 (de) 2006-07-20

Family

ID=24450490

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60113926T Expired - Lifetime DE60113926T2 (de) 2000-07-07 2001-06-19 Tintenstrahldrucker und dazugehöriges Herstellungsverfahren

Country Status (4)

Country Link
US (1) US6481831B1 (de)
EP (1) EP1170129B1 (de)
JP (1) JP2002079679A (de)
DE (1) DE60113926T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7083265B2 (en) * 2001-10-31 2006-08-01 Hewlett-Packard Development Company, L.P. Circuit routing for printhead having increased corrosion resistance
JP3812485B2 (ja) * 2002-04-10 2006-08-23 ソニー株式会社 液体吐出装置及びプリンタ
JP2005067164A (ja) * 2003-08-28 2005-03-17 Sony Corp 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの製造方法
KR100517515B1 (ko) * 2004-01-20 2005-09-28 삼성전자주식회사 모놀리틱 잉크젯 프린트헤드의 제조방법
US7239006B2 (en) * 2004-04-14 2007-07-03 International Business Machines Corporation Resistor tuning
GB2413306A (en) * 2004-04-23 2005-10-26 Hewlett Packard Development Co Ink cartridge having terminals and conductive tracks applied directly thereon.
US7293359B2 (en) * 2004-04-29 2007-11-13 Hewlett-Packard Development Company, L.P. Method for manufacturing a fluid ejection device
US7387370B2 (en) * 2004-04-29 2008-06-17 Hewlett-Packard Development Company, L.P. Microfluidic architecture
US20080147495A1 (en) * 2006-12-19 2008-06-19 General Electric Company System and method for providing promotions
US20080147496A1 (en) * 2006-12-19 2008-06-19 General Electric Company System and method for providing promotions
KR20090008022A (ko) * 2007-07-16 2009-01-21 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조방법
US7862156B2 (en) * 2007-07-26 2011-01-04 Hewlett-Packard Development Company, L.P. Heating element
US7837886B2 (en) * 2007-07-26 2010-11-23 Hewlett-Packard Development Company, L.P. Heating element
US8336981B2 (en) * 2009-10-08 2012-12-25 Hewlett-Packard Development Company, L.P. Determining a healthy fluid ejection nozzle
US20120091121A1 (en) * 2010-10-19 2012-04-19 Zachary Justin Reitmeier Heater stack for inkjet printheads
EP3099497B1 (de) 2014-01-29 2020-01-22 Hewlett-Packard Development Company, L.P. Thermischer tintenstrahldruckkopf
US20180102318A1 (en) * 2016-10-12 2018-04-12 Globalfoundries Inc. Compound resistor structure for semiconductor device
WO2018107222A1 (en) * 2016-12-15 2018-06-21 Griffith University Silicon carbide schottky diodes

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513298A (en) 1983-05-25 1985-04-23 Hewlett-Packard Company Thermal ink jet printhead
US4535343A (en) 1983-10-31 1985-08-13 Hewlett-Packard Company Thermal ink jet printhead with self-passivating elements
US4602421A (en) 1985-04-24 1986-07-29 The United States Of America As Represented By The Secretary Of The Air Force Low noise polycrystalline semiconductor resistors by hydrogen passivation
US4862197A (en) 1986-08-28 1989-08-29 Hewlett-Packard Co. Process for manufacturing thermal ink jet printhead and integrated circuit (IC) structures produced thereby
US5364743A (en) * 1990-12-21 1994-11-15 Xerox Corporation Process for fabrication of bubble jet using positive resist image reversal for lift off of passivation layer
US5075250A (en) * 1991-01-02 1991-12-24 Xerox Corporation Method of fabricating a monolithic integrated circuit chip for a thermal ink jet printhead
US5159353A (en) 1991-07-02 1992-10-27 Hewlett-Packard Company Thermal inkjet printhead structure and method for making the same
US5159430A (en) 1991-07-24 1992-10-27 Micron Technology, Inc. Vertically integrated oxygen-implanted polysilicon resistor
US5232865A (en) 1991-07-24 1993-08-03 Micron Technology, Inc. Method of fabricating vertically integrated oxygen-implanted polysilicon resistor
JP2750992B2 (ja) 1992-08-12 1998-05-18 三菱電機株式会社 半導体装置およびその製造方法
ATE183140T1 (de) 1992-12-22 1999-08-15 Canon Kk Tintenstrahldruckkopf und herstellungsverfahren und druckgerät mit tintenstrahldruckkopf
US5330930A (en) 1992-12-31 1994-07-19 Chartered Semiconductor Manufacturing Pte Ltd. Formation of vertical polysilicon resistor having a nitride sidewall for small static RAM cell
EP0674995B1 (de) 1994-03-29 2002-03-06 Canon Kabushiki Kaisha Substrat für Tintenstrahlkopf, Tintenstrahlkopf, Tintenstrahlschreiber und Tintenstrahlgerät
US6008082A (en) 1995-09-14 1999-12-28 Micron Technology, Inc. Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry
US5683930A (en) 1995-12-06 1997-11-04 Micron Technology Inc. SRAM cell employing substantially vertically elongated pull-up resistors and methods of making, and resistor constructions and methods of making
US5883650A (en) 1995-12-06 1999-03-16 Hewlett-Packard Company Thin-film printhead device for an ink-jet printer
US5710070A (en) 1996-11-08 1998-01-20 Chartered Semiconductor Manufacturing Pte Ltd. Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology
US6020905A (en) 1997-01-24 2000-02-01 Lexmark International, Inc. Ink jet printhead for drop size modulation

Also Published As

Publication number Publication date
JP2002079679A (ja) 2002-03-19
DE60113926T2 (de) 2006-07-20
US6481831B1 (en) 2002-11-19
EP1170129B1 (de) 2005-10-12
EP1170129A2 (de) 2002-01-09
EP1170129A3 (de) 2002-01-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HEWLETT-PACKARD DEVELOPMENT CO., L.P., HOUSTON, TE

8364 No opposition during term of opposition