DE60133611D1 - Drucker, Druckkopf und Druckkopfherstellungsverfahren - Google Patents

Drucker, Druckkopf und Druckkopfherstellungsverfahren

Info

Publication number
DE60133611D1
DE60133611D1 DE60133611T DE60133611T DE60133611D1 DE 60133611 D1 DE60133611 D1 DE 60133611D1 DE 60133611 T DE60133611 T DE 60133611T DE 60133611 T DE60133611 T DE 60133611T DE 60133611 D1 DE60133611 D1 DE 60133611D1
Authority
DE
Germany
Prior art keywords
printhead
printer
manufacturing process
printhead manufacturing
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60133611T
Other languages
English (en)
Other versions
DE60133611T2 (de
Inventor
Takaaki Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of DE60133611D1 publication Critical patent/DE60133611D1/de
Application granted granted Critical
Publication of DE60133611T2 publication Critical patent/DE60133611T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60133611T 2000-11-07 2001-11-06 Drucker, Druckkopf und Druckkopfherstellungsverfahren Expired - Lifetime DE60133611T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000344227A JP4706098B2 (ja) 2000-11-07 2000-11-07 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
JP2000344227 2000-11-07

Publications (2)

Publication Number Publication Date
DE60133611D1 true DE60133611D1 (de) 2008-05-29
DE60133611T2 DE60133611T2 (de) 2009-05-28

Family

ID=18818456

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60133611T Expired - Lifetime DE60133611T2 (de) 2000-11-07 2001-11-06 Drucker, Druckkopf und Druckkopfherstellungsverfahren

Country Status (4)

Country Link
US (1) US6685304B2 (de)
EP (1) EP1205303B9 (de)
JP (1) JP4706098B2 (de)
DE (1) DE60133611T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1225048A1 (de) * 2001-01-18 2002-07-24 Tonejet Corporation Pty Ltd Elektrode für auf Abruf Tropfen erzeugender Drucker
JP3734246B2 (ja) 2001-10-30 2006-01-11 キヤノン株式会社 液体吐出ヘッド及び構造体の製造方法、液体吐出ヘッド並びに液体吐出装置
KR100453058B1 (ko) * 2002-10-30 2004-10-15 삼성전자주식회사 잉크젯 프린트헤드
KR100553914B1 (ko) * 2004-01-29 2006-02-24 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP4305401B2 (ja) * 2005-02-28 2009-07-29 セイコーエプソン株式会社 半導体装置
KR20080000421A (ko) * 2006-06-27 2008-01-02 삼성전자주식회사 프린트 헤드 및 그 제조방법
US7735952B2 (en) * 2007-04-12 2010-06-15 Lexmark International, Inc. Method of bonding a micro-fluid ejection head to a support substrate
KR20090008022A (ko) * 2007-07-16 2009-01-21 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조방법
US8833908B2 (en) * 2011-09-29 2014-09-16 Lexmark International, Inc. Planar heater structures for ejection devices
JP2016198908A (ja) 2015-04-08 2016-12-01 キヤノン株式会社 液体吐出ヘッド
JP6929150B2 (ja) 2017-06-30 2021-09-01 キヤノン株式会社 半導体装置、その製造方法、液体吐出ヘッド及び液体吐出装置
EP3470228B1 (de) 2017-10-11 2021-06-30 Canon Kabushiki Kaisha Elementsubstrat, herstellungsverfahren dafür, druckkopf und druckvorrichtung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2611981B2 (ja) * 1987-02-04 1997-05-21 キヤノン株式会社 インクジエツト記録ヘツド用基板及びインクジエツト記録ヘツド
US4926197A (en) * 1988-03-16 1990-05-15 Hewlett-Packard Company Plastic substrate for thermal ink jet printer
JPH08118635A (ja) * 1994-10-28 1996-05-14 Canon Inc 記録ヘッド用基板、記録ヘッド及び記録装置
JP3275600B2 (ja) * 1995-01-09 2002-04-15 富士ゼロックス株式会社 インクジェット記録ヘッド
JPH08187859A (ja) * 1995-01-13 1996-07-23 Matsushita Electric Ind Co Ltd インクジェットヘッド及びその製造方法
JPH09109392A (ja) * 1995-10-13 1997-04-28 Canon Inc インクジェット記録ヘッドの製造方法および同方法により製造されたインクジェット記録ヘッド、並びにインクジェット記録装置
US6126276A (en) * 1998-03-02 2000-10-03 Hewlett-Packard Company Fluid jet printhead with integrated heat-sink
JPH10109421A (ja) * 1996-10-08 1998-04-28 Canon Inc 液体噴射記録ヘッド用発熱基板
KR100225082B1 (ko) * 1997-01-15 1999-10-15 윤종용 프린트 헤드의 잉크 분사 장치 구조
US6020905A (en) * 1997-01-24 2000-02-01 Lexmark International, Inc. Ink jet printhead for drop size modulation
US5943076A (en) * 1997-02-24 1999-08-24 Xerox Corporation Printhead for thermal ink jet devices
JP3618965B2 (ja) * 1997-06-19 2005-02-09 キヤノン株式会社 液体噴射記録ヘッド用基板およびその製造方法ならびに液体噴射記録装置
DE69708067T2 (de) * 1997-06-27 2002-07-11 St Microelectronics Srl Integrierter Tintenstrahldruckkopf und sein Herstellungsverfahren
JP3619036B2 (ja) * 1997-12-05 2005-02-09 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6491834B1 (en) * 1998-12-03 2002-12-10 Canon Kabushiki Kaisha Method for manufacturing liquid discharge head, liquid discharge head, head cartridge, and liquid discharge recording apparatus
US6328428B1 (en) * 1999-04-22 2001-12-11 Hewlett-Packard Company Ink-jet printhead and method of producing same
JP2002052725A (ja) * 2000-08-07 2002-02-19 Sony Corp プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
JP4654494B2 (ja) * 2000-08-07 2011-03-23 ソニー株式会社 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法

Also Published As

Publication number Publication date
EP1205303A1 (de) 2002-05-15
US6685304B2 (en) 2004-02-03
JP4706098B2 (ja) 2011-06-22
EP1205303B9 (de) 2008-09-24
US20020126182A1 (en) 2002-09-12
DE60133611T2 (de) 2009-05-28
JP2002144571A (ja) 2002-05-21
EP1205303B1 (de) 2008-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)