DE60130842D1 - Drucker, Druckkopf und dazugehöriges Herstellungsverfahren - Google Patents

Drucker, Druckkopf und dazugehöriges Herstellungsverfahren

Info

Publication number
DE60130842D1
DE60130842D1 DE60130842T DE60130842T DE60130842D1 DE 60130842 D1 DE60130842 D1 DE 60130842D1 DE 60130842 T DE60130842 T DE 60130842T DE 60130842 T DE60130842 T DE 60130842T DE 60130842 D1 DE60130842 D1 DE 60130842D1
Authority
DE
Germany
Prior art keywords
printhead
printer
manufacturing process
related manufacturing
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60130842T
Other languages
English (en)
Other versions
DE60130842T2 (de
Inventor
Takaaki Miyamoto
Toru Tanikawa
Minoru Kohno
Hideki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of DE60130842D1 publication Critical patent/DE60130842D1/de
Publication of DE60130842T2 publication Critical patent/DE60130842T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60130842T 2000-08-07 2001-08-06 Drucker, Druckkopf und dazugehöriges Herstellungsverfahren Expired - Lifetime DE60130842T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000243996 2000-08-07
JP2000243996A JP4654494B2 (ja) 2000-08-07 2000-08-07 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法

Publications (2)

Publication Number Publication Date
DE60130842D1 true DE60130842D1 (de) 2007-11-22
DE60130842T2 DE60130842T2 (de) 2008-07-17

Family

ID=18734756

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60130842T Expired - Lifetime DE60130842T2 (de) 2000-08-07 2001-08-06 Drucker, Druckkopf und dazugehöriges Herstellungsverfahren

Country Status (5)

Country Link
US (1) US6513912B2 (de)
EP (1) EP1180434B1 (de)
JP (1) JP4654494B2 (de)
DE (1) DE60130842T2 (de)
SG (1) SG99931A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4706098B2 (ja) * 2000-11-07 2011-06-22 ソニー株式会社 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
US6692108B1 (en) 2002-11-23 2004-02-17 Silverbrook Research Pty Ltd. High efficiency thermal ink jet printhead
US6755509B2 (en) 2002-11-23 2004-06-29 Silverbrook Research Pty Ltd Thermal ink jet printhead with suspended beam heater
JP3900349B2 (ja) * 2003-04-04 2007-04-04 ソニー株式会社 無線装置および無線装置システム
KR100571769B1 (ko) 2003-08-25 2006-04-18 삼성전자주식회사 잉크젯 프린트 헤드의 보호층 및 이를 구비하는 잉크젯프린트 헤드의 제조방법
KR20080000421A (ko) * 2006-06-27 2008-01-02 삼성전자주식회사 프린트 헤드 및 그 제조방법
JP5008448B2 (ja) * 2007-04-20 2012-08-22 キヤノン株式会社 インクジェット記録ヘッド用の基板の製造方法
KR20090008022A (ko) * 2007-07-16 2009-01-21 삼성전자주식회사 잉크젯 프린트 헤드 및 그 제조방법
TWI332904B (en) * 2007-11-29 2010-11-11 Internat United Technology Company Ltd Thermal inkjet printhead chip structure and manufacture method thereof
US9776402B2 (en) 2014-01-29 2017-10-03 Hewlett-Packard Development Company, L.P. Thermal ink jet printhead

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5008689A (en) 1988-03-16 1991-04-16 Hewlett-Packard Company Plastic substrate for thermal ink jet printer
JPH02212152A (ja) * 1989-02-14 1990-08-23 Canon Inc 液体噴射記録ヘッド
JP2866256B2 (ja) * 1992-06-02 1999-03-08 キヤノン株式会社 インクジェットヘッド、その製造方法及びそれを用いたインクジェット記録装置
JP2727989B2 (ja) 1994-11-25 1998-03-18 日本電気株式会社 サーマルヘッドの製造方法
JPH10119284A (ja) 1996-10-21 1998-05-12 Canon Inc インクジェット用基体、インクジェットヘッド、インクジェットペン、及びインクジェット装置
US5710070A (en) * 1996-11-08 1998-01-20 Chartered Semiconductor Manufacturing Pte Ltd. Application of titanium nitride and tungsten nitride thin film resistor for thermal ink jet technology
JPH1170658A (ja) * 1997-06-20 1999-03-16 Canon Inc 記録素子ユニット、インクジェット記録素子ユニット、インクジェットカートリッジ、及びインクジェット記録装置
US6109733A (en) * 1997-11-21 2000-08-29 Xerox Corporation Printhead for thermal ink jet devices
JPH11297942A (ja) * 1998-04-08 1999-10-29 Nec Corp 強誘電体メモリ装置およびその製造方法
JP2000015817A (ja) * 1998-07-01 2000-01-18 Casio Comput Co Ltd インクジェットヘッド

Also Published As

Publication number Publication date
EP1180434A1 (de) 2002-02-20
EP1180434B1 (de) 2007-10-10
JP4654494B2 (ja) 2011-03-23
US6513912B2 (en) 2003-02-04
US20020057314A1 (en) 2002-05-16
SG99931A1 (en) 2003-11-27
JP2002052724A (ja) 2002-02-19
DE60130842T2 (de) 2008-07-17

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)