DE60003620D1 - Substrat für Tintenstrahlkopf, Tintenstrahlkopf, und Tintenstrahlapparat - Google Patents

Substrat für Tintenstrahlkopf, Tintenstrahlkopf, und Tintenstrahlapparat

Info

Publication number
DE60003620D1
DE60003620D1 DE60003620T DE60003620T DE60003620D1 DE 60003620 D1 DE60003620 D1 DE 60003620D1 DE 60003620 T DE60003620 T DE 60003620T DE 60003620 T DE60003620 T DE 60003620T DE 60003620 D1 DE60003620 D1 DE 60003620D1
Authority
DE
Germany
Prior art keywords
ink jet
jet head
substrate
head
jet apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60003620T
Other languages
English (en)
Other versions
DE60003620T2 (de
Inventor
Ichiro Saito
Masahiko Ogawa
Teruo Ozaki
Masahiko Kubota
Muga Mochizuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60003620D1 publication Critical patent/DE60003620D1/de
Publication of DE60003620T2 publication Critical patent/DE60003620T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
    • B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
    • B41J2/235—Print head assemblies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60003620T 1999-10-04 2000-10-02 Substrat für Tintenstrahlkopf, Tintenstrahlkopf, und Tintenstrahlapparat Expired - Lifetime DE60003620T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28354099A JP3576888B2 (ja) 1999-10-04 1999-10-04 インクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
JP28354099 1999-10-04

Publications (2)

Publication Number Publication Date
DE60003620D1 true DE60003620D1 (de) 2003-08-07
DE60003620T2 DE60003620T2 (de) 2004-06-09

Family

ID=17666865

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60003620T Expired - Lifetime DE60003620T2 (de) 1999-10-04 2000-10-02 Substrat für Tintenstrahlkopf, Tintenstrahlkopf, und Tintenstrahlapparat

Country Status (7)

Country Link
US (2) US6485131B1 (de)
EP (2) EP1318018A1 (de)
JP (1) JP3576888B2 (de)
KR (1) KR100468992B1 (de)
DE (1) DE60003620T2 (de)
ES (1) ES2201985T3 (de)
TW (1) TW506905B (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10039817A1 (de) 2000-08-09 2002-02-21 Koenig & Bauer Ag Bilderzeugungseinrichtung
US6582070B2 (en) 2000-09-04 2003-06-24 Canon Kabushiki Kaisha Recording unit and image recording apparatus
JP2004216889A (ja) * 2002-12-27 2004-08-05 Canon Inc 発熱抵抗体薄膜、これを用いたインクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
CN100493912C (zh) * 2002-12-27 2009-06-03 佳能株式会社 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法
JP3962719B2 (ja) * 2002-12-27 2007-08-22 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
JP4078295B2 (ja) 2002-12-27 2008-04-23 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
CN100496979C (zh) * 2002-12-27 2009-06-10 佳能株式会社 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法
JP4208794B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4208793B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
US7195343B2 (en) * 2004-08-27 2007-03-27 Lexmark International, Inc. Low ejection energy micro-fluid ejection heads
CN101284454B (zh) * 2004-09-08 2011-04-20 阿尔卑斯电气株式会社 热敏头及其制造方法
JP4605760B2 (ja) * 2004-11-08 2011-01-05 キヤノン株式会社 発熱抵抗体膜の製造方法、記録ヘッド用基体の製造方法
JP4646602B2 (ja) * 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP2006327180A (ja) * 2005-04-28 2006-12-07 Canon Inc インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録装置、およびインクジェット記録ヘッド用基板の製造方法
JP4926669B2 (ja) 2005-12-09 2012-05-09 キヤノン株式会社 インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置
JP4963679B2 (ja) * 2007-05-29 2012-06-27 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法、並びに該基体を用いる液体吐出ヘッド
JP5328607B2 (ja) * 2008-11-17 2013-10-30 キヤノン株式会社 液体吐出ヘッド用基板、該基板を有する液体吐出ヘッド、該ヘッドのクリーニング方法および前記ヘッドを用いる液体吐出装置
JP6039411B2 (ja) * 2012-12-27 2016-12-07 キヤノン株式会社 インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法
US20190119101A1 (en) * 2016-06-24 2019-04-25 Hewlett-Packard Development Company, L.P. Amorphous thin metal film
JP2022078882A (ja) 2020-11-13 2022-05-25 キヤノン株式会社 液体吐出ヘッド用基板、及び液体吐出ヘッド

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
GB2151555B (en) * 1983-11-30 1988-05-05 Canon Kk Liquid jet recording head
JP2683350B2 (ja) * 1987-12-01 1997-11-26 キヤノン株式会社 液体噴射記録ヘッド及び該ヘッド用基板
JP2571421B2 (ja) 1988-07-04 1997-01-16 大同特殊鋼株式会社 プラズマ浸炭熱処理炉
CA1336660C (en) * 1988-07-26 1995-08-15 Hiroyuki Ishinaga Ink jet recording substrate, recording head and apparatus using same
DE69122726T2 (de) * 1990-12-12 1997-03-13 Canon Kk Tintenstrahlaufzeichnung
US5660739A (en) 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
JP3397473B2 (ja) 1994-10-21 2003-04-14 キヤノン株式会社 液体噴射ヘッド用素子基板を用いた液体噴射ヘッド、該ヘッドを用いた液体噴射装置
JP3524340B2 (ja) * 1997-08-26 2004-05-10 キヤノン株式会社 液体吐出ヘッド

Also Published As

Publication number Publication date
US6663228B2 (en) 2003-12-16
EP1090760A1 (de) 2001-04-11
DE60003620T2 (de) 2004-06-09
JP3576888B2 (ja) 2004-10-13
JP2001105596A (ja) 2001-04-17
EP1090760B1 (de) 2003-07-02
KR20010039980A (ko) 2001-05-15
US6485131B1 (en) 2002-11-26
ES2201985T3 (es) 2004-04-01
US20030103111A1 (en) 2003-06-05
TW506905B (en) 2002-10-21
KR100468992B1 (ko) 2005-01-31
EP1318018A1 (de) 2003-06-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition