DE69808535T2 - Verfahren zur Herstellung einer organischen elektrolumineszenten Vorrichtung - Google Patents
Verfahren zur Herstellung einer organischen elektrolumineszenten VorrichtungInfo
- Publication number
- DE69808535T2 DE69808535T2 DE69808535T DE69808535T DE69808535T2 DE 69808535 T2 DE69808535 T2 DE 69808535T2 DE 69808535 T DE69808535 T DE 69808535T DE 69808535 T DE69808535 T DE 69808535T DE 69808535 T2 DE69808535 T2 DE 69808535T2
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- organic electroluminescent
- electroluminescent device
- organic
- electroluminescent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9054679A JP2845856B2 (ja) | 1997-03-10 | 1997-03-10 | 有機エレクトロルミネッセンス素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69808535D1 DE69808535D1 (de) | 2002-11-14 |
DE69808535T2 true DE69808535T2 (de) | 2003-08-14 |
Family
ID=12977485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69808535T Expired - Lifetime DE69808535T2 (de) | 1997-03-10 | 1998-03-10 | Verfahren zur Herstellung einer organischen elektrolumineszenten Vorrichtung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6001413A (de) |
EP (1) | EP0865229B1 (de) |
JP (1) | JP2845856B2 (de) |
KR (1) | KR100484702B1 (de) |
DE (1) | DE69808535T2 (de) |
TW (1) | TW392419B (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3704883B2 (ja) * | 1997-05-01 | 2005-10-12 | コニカミノルタホールディングス株式会社 | 有機エレクトロルミネセンス素子及びその製造方法 |
JPH1145779A (ja) * | 1997-07-25 | 1999-02-16 | Tdk Corp | 有機el素子の製造方法および装置 |
JP3782245B2 (ja) * | 1998-10-28 | 2006-06-07 | Tdk株式会社 | 有機el表示装置の製造装置及び製造方法 |
JP3682465B2 (ja) * | 1999-03-31 | 2005-08-10 | 独立行政法人産業技術総合研究所 | 樹脂成形物表面層の改質方法およびそのための装置および表面層が改質された樹脂成形物、および樹脂成形物表面層の着色方法およびそのための装置および表面層が着色された樹脂成形物、および表面層の改質により機能性を付与された樹脂成形物 |
EP1115268A1 (de) | 1999-07-07 | 2001-07-11 | Sony Corporation | Verfahren und vorrichtung zur herstellung flexibler, organischer elektrolumineszenter anzeigen |
TW504941B (en) * | 1999-07-23 | 2002-10-01 | Semiconductor Energy Lab | Method of fabricating an EL display device, and apparatus for forming a thin film |
JP4827294B2 (ja) * | 1999-11-29 | 2011-11-30 | 株式会社半導体エネルギー研究所 | 成膜装置及び発光装置の作製方法 |
TW490714B (en) * | 1999-12-27 | 2002-06-11 | Semiconductor Energy Lab | Film formation apparatus and method for forming a film |
JP4608172B2 (ja) | 2000-03-22 | 2011-01-05 | 出光興産株式会社 | 有機el表示装置の製造装置およびそれを用いた有機el表示装置の製造方法 |
US20010051487A1 (en) * | 2000-04-26 | 2001-12-13 | Yuichi Hashimoto | Method for making organic luminescent device |
US20020011205A1 (en) | 2000-05-02 | 2002-01-31 | Shunpei Yamazaki | Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device |
US7517551B2 (en) * | 2000-05-12 | 2009-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a light-emitting device |
TW451601B (en) * | 2000-08-07 | 2001-08-21 | Ind Tech Res Inst | The fabrication method of full color organic electroluminescent device |
KR100625966B1 (ko) * | 2000-10-11 | 2006-09-20 | 삼성에스디아이 주식회사 | 유기 el소자의 박막 증착방법 및 그 장치 |
JP2002203682A (ja) * | 2000-10-26 | 2002-07-19 | Semiconductor Energy Lab Co Ltd | 発光装置及びその作製方法 |
US6664732B2 (en) | 2000-10-26 | 2003-12-16 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and manufacturing method thereof |
CN101397649B (zh) | 2001-02-01 | 2011-12-28 | 株式会社半导体能源研究所 | 能够将有机化合物沉积在衬底上的装置 |
TWI264473B (en) * | 2001-10-26 | 2006-10-21 | Matsushita Electric Works Ltd | Vacuum deposition device and vacuum deposition method |
US7453202B2 (en) | 2001-11-28 | 2008-11-18 | Samsung Sdi Co., Ltd. | Organic EL display device having organic soluble derivative layer |
KR100478522B1 (ko) * | 2001-11-28 | 2005-03-28 | 삼성에스디아이 주식회사 | 유기 화합물 유도체막층을 포함하고 있는 고분자 유기전계 발광 소자 및 그 제조 방법 |
SG113448A1 (en) | 2002-02-25 | 2005-08-29 | Semiconductor Energy Lab | Fabrication system and a fabrication method of a light emitting device |
EP1369499A3 (de) | 2002-04-15 | 2004-10-20 | Semiconductor Energy Laboratory Co., Ltd. | Verfahren und Vorrichtung zur Herstellung eines lichtemittierenden Bauteils |
US20040035360A1 (en) * | 2002-05-17 | 2004-02-26 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
TWI336905B (en) * | 2002-05-17 | 2011-02-01 | Semiconductor Energy Lab | Evaporation method, evaporation device and method of fabricating light emitting device |
US20030221620A1 (en) * | 2002-06-03 | 2003-12-04 | Semiconductor Energy Laboratory Co., Ltd. | Vapor deposition device |
CN100459220C (zh) | 2002-09-20 | 2009-02-04 | 株式会社半导体能源研究所 | 制造系统以及发光元件的制作方法 |
EP1836001A4 (de) * | 2004-12-30 | 2009-08-05 | Du Pont | Organische elektronische bauelemente und verfahren |
JP4737746B2 (ja) * | 2005-03-30 | 2011-08-03 | 株式会社昭和真空 | 薄膜形成方法及びその装置 |
JP5095990B2 (ja) * | 2006-12-22 | 2012-12-12 | 東京エレクトロン株式会社 | 基板処理装置およびクリーニング方法 |
WO2010120792A1 (en) * | 2009-04-17 | 2010-10-21 | The Regents Of The University Of California | Method and apparatus for super-high rate deposition |
JP5506475B2 (ja) * | 2010-03-15 | 2014-05-28 | ユー・ディー・シー アイルランド リミテッド | 有機電界発光素子の製造方法 |
CN110819964A (zh) * | 2018-08-13 | 2020-02-21 | 中兴通讯股份有限公司 | 真空镀膜设备、方法及滤波器腔体膜层的制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0661198A (ja) * | 1992-08-10 | 1994-03-04 | Fujitsu Ltd | 薄膜素子の製造方法 |
JPH06173000A (ja) * | 1992-12-07 | 1994-06-21 | Hitachi Ltd | 連続式成膜装置 |
JP2917795B2 (ja) * | 1994-02-04 | 1999-07-12 | 住友電気工業株式会社 | 有機エレクトロルミネッセンス素子およびその製造方法 |
JPH08201619A (ja) * | 1995-01-24 | 1996-08-09 | Sony Corp | カラーフィルタチップの製造方法 |
JP3394130B2 (ja) * | 1996-02-22 | 2003-04-07 | 出光興産株式会社 | 有機エレクトロルミネッセンス素子の製造方法および有機エレクトロルミネッセンス素子の製造装置 |
KR980005782A (ko) * | 1996-06-24 | 1998-03-30 | 김주용 | 반도체 소자의 산화막 식각방법 |
JPH10214682A (ja) * | 1997-01-30 | 1998-08-11 | Mitsubishi Chem Corp | 有機電界発光素子の製造装置及び製造方法 |
-
1997
- 1997-03-10 JP JP9054679A patent/JP2845856B2/ja not_active Expired - Lifetime
-
1998
- 1998-02-23 TW TW087102550A patent/TW392419B/zh not_active IP Right Cessation
- 1998-03-06 US US09/036,000 patent/US6001413A/en not_active Expired - Lifetime
- 1998-03-09 KR KR10-1998-0007716A patent/KR100484702B1/ko not_active IP Right Cessation
- 1998-03-10 DE DE69808535T patent/DE69808535T2/de not_active Expired - Lifetime
- 1998-03-10 EP EP98104261A patent/EP0865229B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
TW392419B (en) | 2000-06-01 |
US6001413A (en) | 1999-12-14 |
DE69808535D1 (de) | 2002-11-14 |
EP0865229A2 (de) | 1998-09-16 |
KR100484702B1 (ko) | 2005-06-16 |
KR19980080038A (ko) | 1998-11-25 |
EP0865229B1 (de) | 2002-10-09 |
EP0865229A3 (de) | 1999-03-31 |
JP2845856B2 (ja) | 1999-01-13 |
JPH10255973A (ja) | 1998-09-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |