DE69802739D1 - Avalanche-Photodiode und Methode zu deren Herstellung - Google Patents
Avalanche-Photodiode und Methode zu deren HerstellungInfo
- Publication number
- DE69802739D1 DE69802739D1 DE69802739T DE69802739T DE69802739D1 DE 69802739 D1 DE69802739 D1 DE 69802739D1 DE 69802739 T DE69802739 T DE 69802739T DE 69802739 T DE69802739 T DE 69802739T DE 69802739 D1 DE69802739 D1 DE 69802739D1
- Authority
- DE
- Germany
- Prior art keywords
- making
- avalanche photodiode
- avalanche
- photodiode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- H01L31/1075—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes in which the active layers, e.g. absorption or multiplication layers, form an heterostructure, e.g. SAM structure
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/831,843 US5866936A (en) | 1997-04-01 | 1997-04-01 | Mesa-structure avalanche photodiode having a buried epitaxial junction |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69802739D1 true DE69802739D1 (de) | 2002-01-17 |
DE69802739T2 DE69802739T2 (de) | 2002-09-05 |
Family
ID=25260000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69802739T Expired - Lifetime DE69802739T2 (de) | 1997-04-01 | 1998-03-02 | Avalanche-Photodiode und Methode zu deren Herstellung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5866936A (de) |
EP (1) | EP0869561B1 (de) |
JP (1) | JP3996699B2 (de) |
DE (1) | DE69802739T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4450454B2 (ja) * | 1999-08-26 | 2010-04-14 | Okiセミコンダクタ株式会社 | 半導体受光素子 |
US20040000675A1 (en) * | 2002-05-24 | 2004-01-01 | Opnext Japan, Inc. | Method for manufacturing avalanche photodiodes, avalanche photodiode, optical receiver module and optical receiving apparatus |
JP4084958B2 (ja) | 2002-05-24 | 2008-04-30 | 日本オプネクスト株式会社 | 半導体受光装置の製造方法 |
US6846172B2 (en) * | 2002-06-07 | 2005-01-25 | The Procter & Gamble Company | Embossing apparatus |
US6794631B2 (en) | 2002-06-07 | 2004-09-21 | Corning Lasertron, Inc. | Three-terminal avalanche photodiode |
US6730979B2 (en) | 2002-09-12 | 2004-05-04 | The Boeing Company | Recessed p-type region cap layer avalanche photodiode |
JP4755854B2 (ja) | 2005-06-02 | 2011-08-24 | 富士通株式会社 | 半導体受光装置及びその製造方法 |
US7863647B1 (en) * | 2007-03-19 | 2011-01-04 | Northrop Grumman Systems Corporation | SiC avalanche photodiode with improved edge termination |
JP4861887B2 (ja) * | 2007-04-20 | 2012-01-25 | 日本オプネクスト株式会社 | 半導体受光装置、光受信モジュールおよび半導体受光装置の製造方法 |
US7834379B2 (en) * | 2007-07-18 | 2010-11-16 | Jds Uniphase Corporation | Avalanche photodiode with edge breakdown suppression |
US8030684B2 (en) * | 2007-07-18 | 2011-10-04 | Jds Uniphase Corporation | Mesa-type photodetectors with lateral diffusion junctions |
US7893464B2 (en) * | 2008-03-28 | 2011-02-22 | Jds Uniphase Corporation | Semiconductor photodiode and method of manufacture thereof |
US8008688B2 (en) * | 2008-04-01 | 2011-08-30 | Jds Uniphase Corporation | Photodiode and method of fabrication |
US8198650B2 (en) * | 2008-12-08 | 2012-06-12 | General Electric Company | Semiconductor devices and systems |
US8242432B2 (en) * | 2009-10-23 | 2012-08-14 | Kotura, Inc. | System having light sensor with enhanced sensitivity including a multiplication layer for generating additional electrons |
US8639065B2 (en) * | 2010-06-18 | 2014-01-28 | Kotura, Inc. | System having avalanche effect light sensor with enhanced sensitivity |
EP2987186B1 (de) | 2013-04-19 | 2020-07-01 | Lightspin Technologies, Inc. | Integrierte lawinenphotodiodenarrays |
US9377581B2 (en) | 2013-05-08 | 2016-06-28 | Mellanox Technologies Silicon Photonics Inc. | Enhancing the performance of light sensors that receive light signals from an integrated waveguide |
CN106356290A (zh) * | 2016-10-28 | 2017-01-25 | 中国电子科技集团公司第四十四研究所 | 1064nm硅基雪崩探测器及其制作方法 |
US10529884B2 (en) | 2017-11-09 | 2020-01-07 | LightSpin Technologies Inc. | Virtual negative bevel and methods of isolating adjacent devices |
RU2721161C1 (ru) * | 2019-11-19 | 2020-05-18 | Федеральное государственное бюджетное учреждение науки Физико-технический институт им. А.Ф. Иоффе Российской академии наук | Способ изготовления фотопреобразователя |
CN111755555B (zh) * | 2020-07-06 | 2022-01-07 | 武汉光谷量子技术有限公司 | 台面型二极管及其制作方法、阵列芯片的制作方法 |
TWI768831B (zh) * | 2021-04-16 | 2022-06-21 | 聯亞光電工業股份有限公司 | 非擴散型光電二極體 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3886579A (en) * | 1972-07-28 | 1975-05-27 | Hitachi Ltd | Avalanche photodiode |
US4326211A (en) * | 1977-09-01 | 1982-04-20 | U.S. Philips Corporation | N+PP-PP-P+ Avalanche photodiode |
JPS57111073A (en) * | 1980-12-26 | 1982-07-10 | Sumitomo Electric Ind Ltd | Semiconductor light-receiving element |
JPS5854685A (ja) * | 1981-09-28 | 1983-03-31 | Kokusai Denshin Denwa Co Ltd <Kdd> | アバランシ・ホトダイオ−ド及びその製造方法 |
JPS6016474A (ja) * | 1983-07-08 | 1985-01-28 | Nec Corp | ヘテロ多重接合型光検出器 |
US4885622A (en) * | 1984-03-23 | 1989-12-05 | Oki Electric Industry Co., Ltd. | Pin photodiode and method of fabrication of the same |
US4719498A (en) * | 1984-05-18 | 1988-01-12 | Fujitsu Limited | Optoelectronic integrated circuit |
JPH0824199B2 (ja) * | 1984-05-31 | 1996-03-06 | 富士通株式会社 | 半導体受光素子の製造方法 |
JPS6180875A (ja) * | 1984-09-27 | 1986-04-24 | Nec Corp | 半導体装置 |
JPS61144076A (ja) * | 1984-12-18 | 1986-07-01 | Fujitsu Ltd | 半導体受光素子 |
DE3678338D1 (de) * | 1985-05-20 | 1991-05-02 | Nec Corp | Planare heterouebergang-avalanche-fotodiode. |
US5179430A (en) * | 1988-05-24 | 1993-01-12 | Nec Corporation | Planar type heterojunction avalanche photodiode |
GB8817886D0 (en) * | 1988-07-27 | 1988-09-01 | British Telecomm | Avalanche photodiode structure |
JPH0273676A (ja) * | 1988-09-09 | 1990-03-13 | Fujitsu Ltd | アバランシフォトダイオード |
JPH02159775A (ja) * | 1988-12-14 | 1990-06-19 | Toshiba Corp | 半導体受光素子及びその製造方法 |
JPH02248081A (ja) * | 1989-03-22 | 1990-10-03 | Toshiba Corp | アバランシェフォトダイオード及びその製造方法 |
JPH02296379A (ja) * | 1989-05-10 | 1990-12-06 | Mitsubishi Electric Corp | アバランシェフォトダイオード |
GB8913198D0 (en) * | 1989-06-08 | 1989-07-26 | British Telecomm | Guard ring structure |
JP2934294B2 (ja) * | 1990-04-09 | 1999-08-16 | 日本電信電話株式会社 | アバランシェフォトダイオード |
JP2970815B2 (ja) * | 1990-04-11 | 1999-11-02 | 株式会社東芝 | 半導体受光素子 |
US5045908A (en) * | 1990-09-25 | 1991-09-03 | Motorola, Inc. | Vertically and laterally illuminated p-i-n photodiode |
US5204539A (en) * | 1991-01-28 | 1993-04-20 | Nec Corporation | Avalanche photodiode with hetero-periodical structure |
JPH0521829A (ja) * | 1991-07-12 | 1993-01-29 | Hitachi Ltd | 半導体装置 |
JP3254532B2 (ja) * | 1992-08-06 | 2002-02-12 | 富士通株式会社 | アバランシェホトダイオード |
JP2639347B2 (ja) * | 1994-06-23 | 1997-08-13 | 日本電気株式会社 | 半導体受光素子 |
JP2601231B2 (ja) * | 1994-12-22 | 1997-04-16 | 日本電気株式会社 | 超格子アバランシェフォトダイオード |
US5610416A (en) * | 1995-02-16 | 1997-03-11 | Hewlett-Packard Company | Avalanche photodiode with epitaxially regrown guard rings |
-
1997
- 1997-04-01 US US08/831,843 patent/US5866936A/en not_active Expired - Lifetime
-
1998
- 1998-03-02 EP EP98103617A patent/EP0869561B1/de not_active Expired - Lifetime
- 1998-03-02 DE DE69802739T patent/DE69802739T2/de not_active Expired - Lifetime
- 1998-03-27 JP JP08162498A patent/JP3996699B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH10308527A (ja) | 1998-11-17 |
EP0869561A2 (de) | 1998-10-07 |
DE69802739T2 (de) | 2002-09-05 |
EP0869561A3 (de) | 1999-09-01 |
US5866936A (en) | 1999-02-02 |
EP0869561B1 (de) | 2001-12-05 |
JP3996699B2 (ja) | 2007-10-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69802739T2 (de) | Avalanche-Photodiode und Methode zu deren Herstellung | |
DE69825674D1 (de) | Rückbeleuchteter Fotodetektor und Methode zu dessen Herstellung | |
DE69732285D1 (de) | Photokatalysator und methode zu seiner herstellung | |
DE69817035D1 (de) | Strahlungsdetektor und Verfahren zu seiner Herstellung | |
DE69830222D1 (de) | Reformer und Methode zu dessen Betreiben | |
DE69831755D1 (de) | Optoakustische kontrastmittel und anwendungsverfahren | |
DE69841509D1 (de) | Lektrodenfomstück und elektrochemische elemente | |
DK1032396T3 (da) | Sterilisering af glucocorticosteroider | |
DE69917111D1 (de) | Festkörper-Bildaufnahmevorrichtung und Verfahren zu ihrer Herstellung | |
ID24490A (id) | Metode untuk menggunakan dan metode pembuatan tabung oven-pijar | |
DE69430876D1 (de) | Optisches Faserarray und Methode zu seiner Herstellung | |
DE59608735D1 (de) | Optoelektronischer wandler und herstellverfahren | |
DK1041879T4 (da) | Desinfektionsmiddel og fremstillingsmetode | |
FR2763836B1 (fr) | Cage intervertebrale cervicale | |
DE69913433D1 (de) | Planare Mikrolinsenanordnung und Verfahren zur deren Herstellung | |
DE69708619T2 (de) | Elektroentionisierungsvorrichtung und methode | |
ATE263600T1 (de) | Ball und methode zu seiner herstellung | |
DE69833304D1 (de) | Gesamt-optische Zeitdemultiplex-Schaltung und gesamtoptische TDM-WDM Konversionsschaltung | |
FI980246A (fi) | Menetelmä keittimen käyttämiseksi ja keitin | |
DK1300129T3 (da) | Implantathætteglas | |
DE69808157D1 (de) | Strahlungsbildwandler und Verfahren zur Herstellung desselben | |
DE69922852D1 (de) | Planare Mikrolinsenanordnung und Verfahren zur deren Herstellung | |
ID26057A (id) | Aparatus pengatur output optikal dan metode penganturan output optikal | |
ID28368A (id) | Tanda-tanda mikrosatelite tumbuhan dan metode terhadap penggunaannya | |
ID20514A (id) | Bejana metalurgi yang ditingkatkan dan metode penggunaan bejana tersebut |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: AVAGO TECHNOLOGIES GENERAL IP ( SINGAPORE) PTE. LT |