DE3678338D1 - Planare heterouebergang-avalanche-fotodiode. - Google Patents
Planare heterouebergang-avalanche-fotodiode.Info
- Publication number
- DE3678338D1 DE3678338D1 DE8686106627T DE3678338T DE3678338D1 DE 3678338 D1 DE3678338 D1 DE 3678338D1 DE 8686106627 T DE8686106627 T DE 8686106627T DE 3678338 T DE3678338 T DE 3678338T DE 3678338 D1 DE3678338 D1 DE 3678338D1
- Authority
- DE
- Germany
- Prior art keywords
- heteroue
- avalanche
- photodiode
- planar
- transition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
- H01L31/1075—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes in which the active layers, e.g. absorption or multiplication layers, form an heterostructure, e.g. SAM structure
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Light Receiving Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60108634A JPS61265876A (ja) | 1985-05-20 | 1985-05-20 | プレ−ナ型ヘテロ接合半導体受光素子 |
JP60108661A JPS61267375A (ja) | 1985-05-21 | 1985-05-21 | プレ−ナ型ヘテロ接合半導体受光素子 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3678338D1 true DE3678338D1 (de) | 1991-05-02 |
Family
ID=26448466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686106627T Expired - Lifetime DE3678338D1 (de) | 1985-05-20 | 1986-05-15 | Planare heterouebergang-avalanche-fotodiode. |
Country Status (3)
Country | Link |
---|---|
US (1) | US5057891A (de) |
EP (1) | EP0205899B1 (de) |
DE (1) | DE3678338D1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0304048B1 (de) * | 1987-08-19 | 1997-05-28 | Nec Corporation | Planare Avalanche-Photodiode mit Heterostruktur |
JPH022691A (ja) * | 1988-06-17 | 1990-01-08 | Nec Corp | 半導体受光素子 |
JPH04111478A (ja) * | 1990-08-31 | 1992-04-13 | Sumitomo Electric Ind Ltd | 受光素子 |
JPH0777271B2 (ja) * | 1992-12-04 | 1995-08-16 | 日本電気株式会社 | アバランシェフォトダイオード |
US5610416A (en) * | 1995-02-16 | 1997-03-11 | Hewlett-Packard Company | Avalanche photodiode with epitaxially regrown guard rings |
KR19980058393A (ko) * | 1996-12-30 | 1998-10-07 | 김영환 | 애벌런치 포토 다이오드 및 그의 제조방법 |
US5866936A (en) * | 1997-04-01 | 1999-02-02 | Hewlett-Packard Company | Mesa-structure avalanche photodiode having a buried epitaxial junction |
US6583482B2 (en) * | 2000-12-06 | 2003-06-24 | Alexandre Pauchard | Hetero-interface avalance photodetector |
JP3910817B2 (ja) * | 2000-12-19 | 2007-04-25 | ユーディナデバイス株式会社 | 半導体受光装置 |
JP2002231992A (ja) * | 2001-02-02 | 2002-08-16 | Toshiba Corp | 半導体受光素子 |
DE102004022948B4 (de) | 2004-05-10 | 2006-06-01 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Avalanche-Strahlungsdetektor |
US7147270B1 (en) * | 2005-05-13 | 2006-12-12 | Paul Guy Andrus | Automatic rear airfoil for vehicle |
US8198650B2 (en) | 2008-12-08 | 2012-06-12 | General Electric Company | Semiconductor devices and systems |
US11769782B2 (en) * | 2018-05-02 | 2023-09-26 | Sony Semiconductor Solutions Corporation | Solid-state imaging element and imaging apparatus |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4383266A (en) * | 1979-09-26 | 1983-05-10 | Kokusai Denshin Denwa Kabushiki Kaisha | Avalanche photo diode |
JPS6016474A (ja) * | 1983-07-08 | 1985-01-28 | Nec Corp | ヘテロ多重接合型光検出器 |
US4651187A (en) * | 1984-03-22 | 1987-03-17 | Nec Corporation | Avalanche photodiode |
-
1986
- 1986-05-15 EP EP86106627A patent/EP0205899B1/de not_active Expired - Lifetime
- 1986-05-15 DE DE8686106627T patent/DE3678338D1/de not_active Expired - Lifetime
-
1991
- 1991-02-12 US US07/653,487 patent/US5057891A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5057891A (en) | 1991-10-15 |
EP0205899A1 (de) | 1986-12-30 |
EP0205899B1 (de) | 1991-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |