DE69735011D1 - Verfahren zur Herstellung einer piezoelektrischen Dünnschichtanordnung - Google Patents
Verfahren zur Herstellung einer piezoelektrischen DünnschichtanordnungInfo
- Publication number
- DE69735011D1 DE69735011D1 DE69735011T DE69735011T DE69735011D1 DE 69735011 D1 DE69735011 D1 DE 69735011D1 DE 69735011 T DE69735011 T DE 69735011T DE 69735011 T DE69735011 T DE 69735011T DE 69735011 D1 DE69735011 D1 DE 69735011D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- piezoelectric thin
- film arrangement
- film
- arrangement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/077—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition
- H10N30/078—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by liquid phase deposition by sol-gel deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/1051—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14258—Multi layer thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/03—Specific materials used
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8548—Lead based oxides
- H10N30/8554—Lead zirconium titanate based
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4902696 | 1996-03-06 | ||
JP4902696 | 1996-03-06 | ||
JP7766896 | 1996-03-29 | ||
JP7766896A JP3209082B2 (ja) | 1996-03-06 | 1996-03-29 | 圧電体薄膜素子及びその製造方法、並びにこれを用いたインクジェット式記録ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69735011D1 true DE69735011D1 (de) | 2006-02-02 |
DE69735011T2 DE69735011T2 (de) | 2006-06-22 |
Family
ID=26389379
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1997635011 Expired - Lifetime DE69735011T2 (de) | 1996-03-06 | 1997-03-05 | Verfahren zur Herstellung einer piezoelektrischen Dünnschichtanordnung |
DE1997625910 Expired - Lifetime DE69725910T2 (de) | 1996-03-06 | 1997-03-05 | Piezoelektrische Dünnschichtanordnung |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1997625910 Expired - Lifetime DE69725910T2 (de) | 1996-03-06 | 1997-03-05 | Piezoelektrische Dünnschichtanordnung |
Country Status (4)
Country | Link |
---|---|
US (2) | US6013970A (de) |
EP (2) | EP1018771B1 (de) |
JP (1) | JP3209082B2 (de) |
DE (2) | DE69735011T2 (de) |
Families Citing this family (73)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3890634B2 (ja) * | 1995-09-19 | 2007-03-07 | セイコーエプソン株式会社 | 圧電体薄膜素子及びインクジェット式記録ヘッド |
JP3438509B2 (ja) * | 1997-02-04 | 2003-08-18 | セイコーエプソン株式会社 | セラミックス薄膜及びその製造方法 |
EP0886328B1 (de) * | 1997-06-20 | 2008-05-28 | Seiko Epson Corporation | Piezoelektrisches Schichtelement, Verfahren zum Herstellen und Tintenstrahldruckkopf |
JP3682684B2 (ja) | 1997-10-20 | 2005-08-10 | セイコーエプソン株式会社 | 圧電体薄膜素子の製造方法 |
JP3594787B2 (ja) * | 1998-02-03 | 2004-12-02 | 富士通株式会社 | 半導体装置及びその製造方法 |
JP4122564B2 (ja) * | 1998-04-24 | 2008-07-23 | セイコーエプソン株式会社 | 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法 |
JP3379479B2 (ja) * | 1998-07-01 | 2003-02-24 | セイコーエプソン株式会社 | 機能性薄膜、圧電体素子、インクジェット式記録ヘッド、プリンタ、圧電体素子の製造方法およびインクジェット式記録ヘッドの製造方法、 |
EP0980103B1 (de) * | 1998-08-12 | 2006-11-29 | Seiko Epson Corporation | Piezoelektrischer Aktuator, Tintenstrahlkopf, Drucker, Herstellungsverfahren für den piezoelektrischen Aktuator, Herstellungsverfahren für den Tintenstrahlkopf |
US6594875B2 (en) | 1998-10-14 | 2003-07-22 | Samsung Electro-Mechanics Co. | Method for producing a piezoelectric/electrostrictive actuator |
JP4357659B2 (ja) * | 1998-10-26 | 2009-11-04 | セイコーインスツル株式会社 | 圧電体装置及びその製造方法 |
US6560833B2 (en) * | 1998-12-04 | 2003-05-13 | Konica Corporation | Method of manufacturing ink jet head |
DE60045022D1 (de) * | 1999-01-22 | 2010-11-11 | Canon Kk | Piezoelektrische dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf |
EP1737054B1 (de) * | 1999-01-29 | 2012-04-11 | Seiko Epson Corporation | Piezoelektrischer Transducer |
JP4327942B2 (ja) * | 1999-05-20 | 2009-09-09 | Tdk株式会社 | 薄膜圧電素子 |
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US10355623B1 (en) | 2006-12-07 | 2019-07-16 | Dmitriy Yavid | Generator employing piezolectric and resonating elements with synchronized heat delivery |
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JP2010161330A (ja) * | 2008-12-08 | 2010-07-22 | Hitachi Cable Ltd | 圧電薄膜素子 |
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JP5510036B2 (ja) * | 2009-05-28 | 2014-06-04 | Tdk株式会社 | 活物質、活物質の製造方法及びリチウムイオン二次電池 |
JP5615590B2 (ja) | 2009-07-16 | 2014-10-29 | 日本碍子株式会社 | 結晶配向セラミックスの製造方法 |
JP2011142280A (ja) * | 2010-01-09 | 2011-07-21 | Seiko Epson Corp | アクチュエーター装置、アクチュエーター装置の製造方法、液体噴射ヘッドの製造方法および液体噴射装置の製造方法 |
US20110209989A1 (en) * | 2010-02-26 | 2011-09-01 | Youming Li | Physical vapor deposition with insulated clamp |
US9339926B2 (en) | 2010-05-03 | 2016-05-17 | Innovation Plus, Llc | System for performing predefined fastener installation procedures |
JP5814764B2 (ja) * | 2010-12-27 | 2015-11-17 | キヤノン株式会社 | 記録素子基板、記録ヘッド、および記録ヘッドの製造方法 |
JP2014072511A (ja) * | 2012-10-02 | 2014-04-21 | Ngk Insulators Ltd | 積層体 |
US9147826B2 (en) * | 2014-01-23 | 2015-09-29 | Tdk Corporation | Thin film piezoelectric element, thin film piezoelectric actuator, and thin film piezoelectric sensor; and hard disk drive, and inkjet printer |
JP6596634B2 (ja) * | 2014-10-23 | 2019-10-30 | アドバンストマテリアルテクノロジーズ株式会社 | 強誘電体セラミックス、電子部品及び強誘電体セラミックスの製造方法 |
JPWO2017086068A1 (ja) * | 2015-11-18 | 2018-08-30 | コニカミノルタ株式会社 | 二酸化バナジウム含有粒子の製造方法及び二酸化バナジウム含有粒子分散液の製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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SU400139A1 (ru) * | 1971-07-07 | 1974-02-25 | Фонд вноертш | |
US5500988A (en) * | 1990-11-20 | 1996-03-26 | Spectra, Inc. | Method of making a perovskite thin-film ink jet transducer |
US5265315A (en) * | 1990-11-20 | 1993-11-30 | Spectra, Inc. | Method of making a thin-film transducer ink jet head |
DE69223096T2 (de) * | 1991-07-18 | 1998-05-28 | Ngk Insulators Ltd | Piezoelektrischer/elektrostriktiver Element mit einem keramischen Substrat aus stabilisiertem Zirkoniumdioxid |
US5271955A (en) * | 1992-04-06 | 1993-12-21 | Motorola, Inc. | Method for making a semiconductor device having an anhydrous ferroelectric thin film |
JP3106044B2 (ja) * | 1992-12-04 | 2000-11-06 | 日本碍子株式会社 | アクチュエータ及びそれを用いたインクジェットプリントヘッド |
JP3151644B2 (ja) * | 1993-03-08 | 2001-04-03 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
WO1994025637A1 (en) * | 1993-04-23 | 1994-11-10 | Etex Corporation | Method of coating medical devices and devices coated thereby |
US5537863A (en) * | 1993-07-15 | 1996-07-23 | Nikon Corporation | Scanning probe microscope having a cantilever used therein |
JP3521499B2 (ja) * | 1993-11-26 | 2004-04-19 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
DE69617288T2 (de) * | 1995-02-20 | 2002-05-23 | Seiko Epson Corp | Verfahren zur Herstellung einer piezoelektrischen Dünnschicht |
US6140746A (en) * | 1995-04-03 | 2000-10-31 | Seiko Epson Corporation | Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film |
-
1996
- 1996-03-29 JP JP7766896A patent/JP3209082B2/ja not_active Expired - Lifetime
-
1997
- 1997-03-05 EP EP20000103235 patent/EP1018771B1/de not_active Expired - Lifetime
- 1997-03-05 DE DE1997635011 patent/DE69735011T2/de not_active Expired - Lifetime
- 1997-03-05 EP EP19970103653 patent/EP0794579B1/de not_active Expired - Lifetime
- 1997-03-05 DE DE1997625910 patent/DE69725910T2/de not_active Expired - Lifetime
- 1997-03-06 US US08/812,167 patent/US6013970A/en not_active Expired - Lifetime
-
1998
- 1998-02-24 US US09/028,308 patent/US6103072A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69735011T2 (de) | 2006-06-22 |
EP1018771A1 (de) | 2000-07-12 |
JP3209082B2 (ja) | 2001-09-17 |
EP0794579A1 (de) | 1997-09-10 |
JPH09298324A (ja) | 1997-11-18 |
DE69725910T2 (de) | 2004-05-06 |
DE69725910D1 (de) | 2003-12-11 |
US6013970A (en) | 2000-01-11 |
US6103072A (en) | 2000-08-15 |
EP1018771B1 (de) | 2005-12-28 |
EP0794579B1 (de) | 2003-11-05 |
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