DE69711530T2 - Verfahren zur Herstellung einer Schattenmaske und Vorrichtung zur Beschichtung mit Ätzresistentem Material - Google Patents

Verfahren zur Herstellung einer Schattenmaske und Vorrichtung zur Beschichtung mit Ätzresistentem Material

Info

Publication number
DE69711530T2
DE69711530T2 DE69711530T DE69711530T DE69711530T2 DE 69711530 T2 DE69711530 T2 DE 69711530T2 DE 69711530 T DE69711530 T DE 69711530T DE 69711530 T DE69711530 T DE 69711530T DE 69711530 T2 DE69711530 T2 DE 69711530T2
Authority
DE
Germany
Prior art keywords
etch
coating
producing
resistant material
shadow mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69711530T
Other languages
English (en)
Other versions
DE69711530D1 (de
Inventor
Masaru Nikaido
Yasuhisa Ohtake
Sachiko Hirahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of DE69711530D1 publication Critical patent/DE69711530D1/de
Application granted granted Critical
Publication of DE69711530T2 publication Critical patent/DE69711530T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0839—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being unsupported at the line of contact between the coating roller and the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/003—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating incorporating means for heating or cooling the liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0826—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being a web or sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/0856—Reverse coating rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/06—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying two different liquids or other fluent materials, or the same liquid or other fluent material twice, to the same side of the work
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
    • B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
    • B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
    • B05C1/12—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being fed round the roller
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/942—Masking
    • Y10S438/944—Shadow

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
DE69711530T 1996-09-30 1997-09-29 Verfahren zur Herstellung einer Schattenmaske und Vorrichtung zur Beschichtung mit Ätzresistentem Material Expired - Fee Related DE69711530T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25953896 1996-09-30

Publications (2)

Publication Number Publication Date
DE69711530D1 DE69711530D1 (de) 2002-05-08
DE69711530T2 true DE69711530T2 (de) 2002-10-02

Family

ID=17335508

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69711530T Expired - Fee Related DE69711530T2 (de) 1996-09-30 1997-09-29 Verfahren zur Herstellung einer Schattenmaske und Vorrichtung zur Beschichtung mit Ätzresistentem Material

Country Status (7)

Country Link
US (1) US6117774A (de)
EP (1) EP0833360B1 (de)
KR (1) KR100260657B1 (de)
CN (1) CN1096095C (de)
DE (1) DE69711530T2 (de)
MY (1) MY117114A (de)
TW (1) TW373223B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050261637A1 (en) * 2004-05-21 2005-11-24 Halkey-Roberts Corporation T-port with swabbable valve
JP5824253B2 (ja) * 2011-06-21 2015-11-25 富士機械工業株式会社 間欠塗工装置
CN102698923A (zh) * 2012-06-29 2012-10-03 东莞市施乐威尔光电科技有限公司 一种拉丝膜涂布机
DE102014213858B3 (de) * 2014-07-16 2015-11-12 Hauni Maschinenbau Ag Vorrichtung zum Auftragen einer Leimspur auf einen Umhüllungsstreifen eines stabförmigen Produktes der Tabak verarbeitenden Industrie
CN111273380A (zh) * 2018-12-05 2020-06-12 旭晖应用材料股份有限公司 环形金属片制法
CN114308519A (zh) * 2021-12-22 2022-04-12 山东膜丽东方新材料科技有限公司 一种涂布机的逆向涂布结构
CN115383613A (zh) * 2022-10-10 2022-11-25 苏州安洁科技股份有限公司 一种金属内孔毛刺处理方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6243675A (ja) * 1985-08-20 1987-02-25 Ricoh Co Ltd トナ−濃度検出装置
JPH027663Y2 (de) * 1985-09-06 1990-02-23
JPS63286588A (ja) * 1987-05-19 1988-11-24 Toshiba Corp シャドウマスクの製造方法
US5006432A (en) * 1987-10-28 1991-04-09 Kabushiki Kaisha Toshiba Method for manufacturing a shadow mask
JPH02119977A (ja) * 1989-09-06 1990-05-08 Yasui Seiki:Kk グラビア塗工方法
JP3034292B2 (ja) * 1990-10-23 2000-04-17 株式会社東芝 感光液塗布方法
JPH06310031A (ja) * 1992-08-27 1994-11-04 Toshiba Corp 感光液塗布装置
JP3696257B2 (ja) * 1993-02-08 2005-09-14 株式会社康井精機 微小凹部を有する基材に対する塗工方法および塗工装置
JP3079911B2 (ja) * 1994-10-06 2000-08-21 凸版印刷株式会社 シャドウマスクの製造方法

Also Published As

Publication number Publication date
EP0833360A3 (de) 1998-11-04
DE69711530D1 (de) 2002-05-08
CN1096095C (zh) 2002-12-11
MY117114A (en) 2004-05-31
EP0833360A2 (de) 1998-04-01
KR100260657B1 (ko) 2000-07-01
CN1178386A (zh) 1998-04-08
US6117774A (en) 2000-09-12
EP0833360B1 (de) 2002-04-03
TW373223B (en) 1999-11-01
KR19980025174A (ko) 1998-07-06

Similar Documents

Publication Publication Date Title
DE69807949D1 (de) Verfahren und Vorrichtung zur Herstellung einer Dünnschicht
ATE272135T1 (de) Verfahren und vorrichtung zur herstellung einer spinnvliesbahn
DE69520043D1 (de) Beschichtung, beschichtungszusammensetzung und verfahren zur herstellung einer beschichtung
DE69625093T2 (de) Belichtungsverfahren, Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung
DE59506666D1 (de) Vorrichtung zur Bildung eines Zahnersatzes und Verfahren zur Herstellung einer solchen Vorrichtung
DE69015900T2 (de) Verfahren zur Herstellung einer gemusterten Beschichtung.
DE69728126D1 (de) Projektionsbelichtungsapparat und Verfahren zur Herstellung einer Vorrichtung
DE69534331D1 (de) Verfahren und Vorrichtung zur Hervorhebung der Einzelheit einer Baumstruktur
DE59503839D1 (de) Verfahren und Vorrichtung zur Herstellung einer Druckform
DE69132527T2 (de) Negativplatte zur Herstellung einer Schattenmaske und Verfahren zur Herstellung der Negativplatte
DE69800033D1 (de) Strahlungsempfindliches Resistmaterial und Verfahren zur Herstellung einer Vorrichtung unter Benutzung des strahlungsempfindlichen Resistmaterials
DE69739621D1 (de) Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
DE69837232D1 (de) Belichtungsverfahren und Verfahren zur Herstellung einer Vorrichtung
DE69511920T2 (de) Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung
DE69424725T2 (de) Verfahren und Vorrichtung zur Herstellung einer Halbleiteranordnung
DE69817249D1 (de) Verfahren und Anlage zur Herstellung einer Vielzahl unterschiedlicher Reifen
DE69413465T2 (de) Belichtungsapparat und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
DE69520361T2 (de) Vorrichtung und kontinuierliches verfahren zur herstellung einer gerinnungstesteinrichtung
DE69711530T2 (de) Verfahren zur Herstellung einer Schattenmaske und Vorrichtung zur Beschichtung mit Ätzresistentem Material
DE69428821D1 (de) Verfahren zur Herstellung einer Mikrostruktur und einer Röntgenstrahlmaske
DE69410621T2 (de) Verfahren und vorrichtung zur herstellung einer einbanddecke
DE69426662D1 (de) Vorrichtung und Verfahren zur Herstellung einer Druckplatte
DE59501797D1 (de) Verfahren und Vorrichtung zur Herstellung einer Einbanddecke
DE69602820T2 (de) Verfahren und vorrichtung zur herstellung einer verbundfolie
DE69021284D1 (de) Verfahren zur Herstellung und Verwendung einer Hochauflösungs-Lithographie-Maske.

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee