DE3851461T2 - Verfahren zur Herstellung von Schattenmasken. - Google Patents

Verfahren zur Herstellung von Schattenmasken.

Info

Publication number
DE3851461T2
DE3851461T2 DE3851461T DE3851461T DE3851461T2 DE 3851461 T2 DE3851461 T2 DE 3851461T2 DE 3851461 T DE3851461 T DE 3851461T DE 3851461 T DE3851461 T DE 3851461T DE 3851461 T2 DE3851461 T2 DE 3851461T2
Authority
DE
Germany
Prior art keywords
production
shadow masks
masks
shadow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE3851461T
Other languages
English (en)
Other versions
DE3851461D1 (de
Inventor
Makoto C O Patent Divisi Kudou
Katsumi C O Patent Di Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Application granted granted Critical
Publication of DE3851461D1 publication Critical patent/DE3851461D1/de
Publication of DE3851461T2 publication Critical patent/DE3851461T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/12—Production of screen printing forms or similar printing forms, e.g. stencils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/142—Manufacture of electrodes or electrode systems of non-emitting electrodes of shadow-masks for colour television tubes

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • ing And Chemical Polishing (AREA)
DE3851461T 1987-05-19 1988-05-17 Verfahren zur Herstellung von Schattenmasken. Expired - Lifetime DE3851461T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62120142A JPS63286588A (ja) 1987-05-19 1987-05-19 シャドウマスクの製造方法

Publications (2)

Publication Number Publication Date
DE3851461D1 DE3851461D1 (de) 1994-10-20
DE3851461T2 true DE3851461T2 (de) 1995-03-23

Family

ID=14779004

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3851461T Expired - Lifetime DE3851461T2 (de) 1987-05-19 1988-05-17 Verfahren zur Herstellung von Schattenmasken.

Country Status (6)

Country Link
US (1) US4861422A (de)
EP (1) EP0291929B1 (de)
JP (1) JPS63286588A (de)
KR (1) KR910004743B1 (de)
CN (1) CN1009142B (de)
DE (1) DE3851461T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6487786A (en) * 1987-09-30 1989-03-31 Toshiba Corp Production of shadow mask
US5336587A (en) * 1988-05-24 1994-08-09 Kabushiki Kaisha Toshiba Method of manufacturing main plates for exposure printing
JP2670835B2 (ja) * 1989-02-10 1997-10-29 日本シイエムケイ株式会社 微細パターン形成用エッチング方法とエッチング装置
EP0476664B1 (de) * 1990-09-20 1995-07-05 Dainippon Screen Mfg. Co., Ltd. Verfahren zur Herstellung von kleinen Durchgangslöchern in dünne Metallplatten
US5348825A (en) * 1991-07-02 1994-09-20 Dai Nippon Printing Co., Ltd. Method for manufacturing shadow mask and shadow mask manufactured by said method
US5401932A (en) * 1992-02-07 1995-03-28 Matsushita Electric Industrial Co., Ltd. Method of producing a stencil mask
JPH06215690A (ja) * 1993-01-18 1994-08-05 Sony Corp カラー陰極線管の色選別手段の製造方法
US5288660A (en) * 1993-02-01 1994-02-22 Avantek, Inc. Method for forming self-aligned t-shaped transistor electrode
JPH0737492A (ja) * 1993-07-21 1995-02-07 Dainippon Printing Co Ltd アパーチャーグリルの製造方法
EP0641009B1 (de) * 1993-08-25 2000-01-05 Kabushiki Kaisha Toshiba Farbkathodenstrahlröhre und deren Herstellungsverfahren
US5435884A (en) * 1993-09-30 1995-07-25 Parker-Hannifin Corporation Spray nozzle and method of manufacturing same
US5484074A (en) * 1994-05-03 1996-01-16 Bmc Industries, Inc. Method for manufacturing a shadow mask
KR200235771Y1 (ko) * 1996-09-09 2001-10-25 김순택 음극선관용 새도우마스크
TW373223B (en) * 1996-09-30 1999-11-01 Toshiba Corp Shade shelter lid fabricating method and the etch endurable layer coating device use in this method
CN101845618B (zh) * 2010-05-06 2012-09-26 上海纳腾仪器有限公司 一种x射线显微透镜成像用氮化硅薄膜窗口的制作方法
KR102090198B1 (ko) * 2013-03-29 2020-03-18 삼성디스플레이 주식회사 파인 메탈 마스크 및 그 제조 방법
CN111273380A (zh) * 2018-12-05 2020-06-12 旭晖应用材料股份有限公司 环形金属片制法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE685312C (de) * 1936-08-25 1939-12-15 Fritz Hermann Hausleiter Mittel zum Entfernen von Kolloidschichten oder Kolloidschischtresten von Flachdruckblechen
US3264220A (en) * 1963-12-16 1966-08-02 Powers Chemco Inc Photoengraving
US3515607A (en) * 1967-06-21 1970-06-02 Western Electric Co Method of removing polymerised resist material from a substrate
US4124437A (en) * 1976-04-05 1978-11-07 Buckbee-Mears Company System for etching patterns of small openings on a continuous strip of metal
DE2942249C2 (de) * 1979-10-19 1985-06-27 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur Entfernung von Fotofolien von Leiterplatten
JPS59193275A (ja) * 1983-04-15 1984-11-01 Toshiba Corp シヤドウマスクの製造方法
JPS6070185A (ja) * 1983-09-26 1985-04-20 Toshiba Corp シヤドウマスクの製造方法
JPS6160889A (ja) * 1984-08-30 1986-03-28 Toshiba Corp シヤドウマスクの製造方法
JPS6275437A (ja) * 1985-09-28 1987-04-07 Nitto Electric Ind Co Ltd 画像形成材料

Also Published As

Publication number Publication date
EP0291929B1 (de) 1994-09-14
CN88102931A (zh) 1988-12-14
EP0291929A3 (en) 1990-08-22
KR910004743B1 (ko) 1991-07-10
US4861422A (en) 1989-08-29
EP0291929A2 (de) 1988-11-23
KR880014620A (ko) 1988-12-24
DE3851461D1 (de) 1994-10-20
JPS63286588A (ja) 1988-11-24
CN1009142B (zh) 1990-08-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)