DE69633066D1 - Verfahren und vorrichtung zur herstellung eines quarzglases durch verbrennung von flüssigen reagentien - Google Patents
Verfahren und vorrichtung zur herstellung eines quarzglases durch verbrennung von flüssigen reagentienInfo
- Publication number
- DE69633066D1 DE69633066D1 DE69633066T DE69633066T DE69633066D1 DE 69633066 D1 DE69633066 D1 DE 69633066D1 DE 69633066 T DE69633066 T DE 69633066T DE 69633066 T DE69633066 T DE 69633066T DE 69633066 D1 DE69633066 D1 DE 69633066D1
- Authority
- DE
- Germany
- Prior art keywords
- soot
- liquid
- flame
- silicon
- fused silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/26—Nozzle-type reactors, i.e. the distribution of the initial reactants within the reactor is effected by their introduction or injection through nozzles
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/28—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with integral means for shielding the discharged liquid or other fluent material, e.g. to limit area of spray; with integral means for catching drips or collecting surplus liquid or other fluent material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/183—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
- C03B19/1423—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00157—Controlling the temperature by means of a burner
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00159—Controlling the temperature controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/32—Non-halide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/34—Liquid, e.g. mist or aerosol
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2201/00—Glass compositions
- C03C2201/06—Doped silica-based glasses
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/40—Gas-phase processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Silicon Compounds (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US888995P | 1995-12-19 | 1995-12-19 | |
PCT/US1996/020756 WO1997022553A1 (en) | 1995-12-19 | 1996-12-12 | Method and apparatus for forming fused silica by combustion of liquid reactants |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69633066D1 true DE69633066D1 (de) | 2004-09-09 |
Family
ID=21734283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69633066T Expired - Lifetime DE69633066D1 (de) | 1995-12-19 | 1996-12-12 | Verfahren und vorrichtung zur herstellung eines quarzglases durch verbrennung von flüssigen reagentien |
Country Status (13)
Country | Link |
---|---|
US (1) | US6565823B1 (de) |
EP (1) | EP0868401B1 (de) |
JP (1) | JP4089922B2 (de) |
KR (1) | KR100473827B1 (de) |
CN (1) | CN1128111C (de) |
AT (1) | ATE272573T1 (de) |
AU (1) | AU718737B2 (de) |
BR (1) | BR9611969A (de) |
CA (1) | CA2233021A1 (de) |
DE (1) | DE69633066D1 (de) |
TW (1) | TW343959B (de) |
UA (1) | UA46068C2 (de) |
WO (1) | WO1997022553A1 (de) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
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US6312656B1 (en) * | 1995-12-19 | 2001-11-06 | Corning Incorporated | Method for forming silica by combustion of liquid reactants using oxygen |
EP0931018A4 (de) * | 1996-10-08 | 2000-02-23 | Corning Inc | Verfahren zur inhibierung von siloxangelierten einsätze und gel inhibierter einsatz |
JP2001509469A (ja) * | 1997-07-08 | 2001-07-24 | コーニング インコーポレイテッド | シリカガラスを形成するための塩化ゲルマニウムとシロキサンとからなる原料ならびにシリカガラス形成方法 |
US5979185A (en) * | 1997-07-16 | 1999-11-09 | Corning Incorporated | Method and apparatus for forming silica by combustion of liquid reactants using a heater |
EP1007484A4 (de) * | 1997-07-21 | 2000-09-20 | Corning Inc | Verfahren zum herstellen von dämpfe mit niedrigern strömung |
JPH11116247A (ja) * | 1997-10-09 | 1999-04-27 | Nikon Corp | 合成石英ガラス製造方法 |
JP4038866B2 (ja) * | 1998-03-11 | 2008-01-30 | 株式会社ニコン | 合成石英ガラス製造方法 |
US6094940A (en) | 1997-10-09 | 2000-08-01 | Nikon Corporation | Manufacturing method of synthetic silica glass |
BR9813652A (pt) * | 1997-12-19 | 2000-10-03 | Corning Inc | Queimador e método para produção de fuligem de óxido de metal |
US6260385B1 (en) | 1998-08-07 | 2001-07-17 | Corning Incorporated | Method and burner for forming silica-containing soot |
EP0978487A3 (de) * | 1998-08-07 | 2001-02-21 | Corning Incorporated | Brenner mit abgedichtetem Kopf und ohne Vormischung für die Abscheidung von Quarzglas |
ZA994173B (en) * | 1998-08-07 | 2000-03-06 | Corning Inc | System and method for plug free delivery of liquid reactants through a burner assembly to form soot for the manufacture of glass. |
US6705127B1 (en) | 1998-10-30 | 2004-03-16 | Corning Incorporated | Methods of manufacturing soot for optical fiber preforms and preforms made by the methods |
CA2344806A1 (en) * | 1998-10-30 | 2000-05-11 | Michael B. Cain | Methods of manufacturing soot for optical fiber preforms and preforms made by the methods |
US6736633B1 (en) | 1998-12-17 | 2004-05-18 | Corning Incorporated | Burner manifold apparatus for use in a chemical vapor deposition process |
US6336347B1 (en) | 1998-12-28 | 2002-01-08 | Pirelli Cavi E Sistemi S.P.A. | Process for producing silica by decomposition of an organosilane |
GB2346683A (en) * | 1999-02-05 | 2000-08-16 | Univ Glasgow | Flame hydrolysis deposition burner |
WO2000060286A1 (fr) | 1999-04-06 | 2000-10-12 | Shin-Etsu Chemical Co., Ltd. | Bruleur et four a combustion de combustion et d'hydrolyse a la flamme, et procede de combustion correspondant |
US6418756B1 (en) | 2000-01-28 | 2002-07-16 | Corning Incorporated | Method of making planar waveguides using low flow rates of feedstock vapors from a gas and liquid mixture |
US20030070452A1 (en) * | 2001-10-12 | 2003-04-17 | Alcatel | Process for online spheroidization of quartz and silica particles |
WO2004048261A2 (en) * | 2002-11-26 | 2004-06-10 | Cabot Corporation | Fumed metal oxide particles and process for producing the same |
DE10302914B4 (de) * | 2003-01-24 | 2005-12-29 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von synthetischem Quarzglas |
FI116619B (fi) | 2004-07-02 | 2006-01-13 | Liekki Oy | Menetelmä ja laite optisen materiaalin tuottamiseksi sekä optinen aaltojohde |
KR100975746B1 (ko) * | 2004-08-11 | 2010-08-12 | 현대중공업 주식회사 | 프로펠러 및 금속 주조를 위한 통합 압탕가열장치 |
JP4412485B2 (ja) * | 2004-12-10 | 2010-02-10 | 信越化学工業株式会社 | シリコーンゴムと基材との一体成形複合体及びその製造方法 |
US20070165308A1 (en) * | 2005-12-15 | 2007-07-19 | Jian Wang | Optical retarders and methods of making the same |
US20090079187A1 (en) * | 2007-09-25 | 2009-03-26 | Itt Automotive, Inc. | Fluidic coupling with deformable quick connector |
CN102015531B (zh) * | 2008-05-16 | 2013-10-16 | 电气化学工业株式会社 | 无定形二氧化硅质粉末、其制造方法以及用途 |
US8729158B2 (en) * | 2008-09-05 | 2014-05-20 | Cabot Corporation | Fumed silica of controlled aggregate size and processes for manufacturing the same |
US8038971B2 (en) * | 2008-09-05 | 2011-10-18 | Cabot Corporation | Fumed silica of controlled aggregate size and processes for manufacturing the same |
GB2478307A (en) | 2010-03-02 | 2011-09-07 | Heraeus Quartz Uk Ltd | Manufacture of silica glass |
US8840858B2 (en) * | 2011-07-06 | 2014-09-23 | Corning Incorporated | Apparatus for mixing vaporized precursor and gas and method therefor |
JP6236866B2 (ja) * | 2013-05-15 | 2017-11-29 | 住友電気工業株式会社 | ガラス微粒子堆積体の製造方法およびガラス微粒子堆積体製造用バーナー |
JP6086168B2 (ja) * | 2016-04-01 | 2017-03-01 | 住友電気工業株式会社 | ガラス微粒子堆積体の製造方法およびガラス母材の製造方法 |
CN106277750A (zh) * | 2016-08-19 | 2017-01-04 | 中国建筑材料科学研究总院 | 石英玻璃的制备方法 |
KR101880728B1 (ko) | 2017-01-06 | 2018-07-23 | 배명인 | 각도 및 길이조절이 가능한 조명장치 |
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US5268337A (en) | 1991-11-18 | 1993-12-07 | The Johns Hopkins University | Ceramic oxide powders and the formation thereof |
US5622750A (en) | 1994-10-31 | 1997-04-22 | Lucent Technologies Inc. | Aerosol process for the manufacture of planar waveguides |
US5703191A (en) | 1995-09-01 | 1997-12-30 | Corning Incorporated | Method for purifying polyalkylsiloxanes and the resulting products |
DE19725955C1 (de) | 1997-06-19 | 1999-01-21 | Heraeus Quarzglas | Verfahren zur Herstellung eines Quarzglasrohlings und dafür geeignete Vorrichtung |
US5979185A (en) * | 1997-07-16 | 1999-11-09 | Corning Incorporated | Method and apparatus for forming silica by combustion of liquid reactants using a heater |
-
1996
- 1996-12-12 DE DE69633066T patent/DE69633066D1/de not_active Expired - Lifetime
- 1996-12-12 CN CN96199035A patent/CN1128111C/zh not_active Expired - Fee Related
- 1996-12-12 WO PCT/US1996/020756 patent/WO1997022553A1/en active IP Right Grant
- 1996-12-12 AT AT96945303T patent/ATE272573T1/de not_active IP Right Cessation
- 1996-12-12 JP JP52308997A patent/JP4089922B2/ja not_active Expired - Fee Related
- 1996-12-12 KR KR10-1998-0704637A patent/KR100473827B1/ko not_active IP Right Cessation
- 1996-12-12 EP EP96945303A patent/EP0868401B1/de not_active Expired - Lifetime
- 1996-12-12 AU AU15206/97A patent/AU718737B2/en not_active Ceased
- 1996-12-12 UA UA98052779A patent/UA46068C2/uk unknown
- 1996-12-12 CA CA002233021A patent/CA2233021A1/en not_active Abandoned
- 1996-12-12 BR BR9611969A patent/BR9611969A/pt not_active Application Discontinuation
- 1996-12-17 US US08/767,653 patent/US6565823B1/en not_active Expired - Lifetime
-
1997
- 1997-04-07 TW TW086100125A patent/TW343959B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW343959B (en) | 1998-11-01 |
EP0868401B1 (de) | 2004-08-04 |
AU718737B2 (en) | 2000-04-20 |
UA46068C2 (uk) | 2002-05-15 |
KR20000064466A (ko) | 2000-11-06 |
US6565823B1 (en) | 2003-05-20 |
WO1997022553A1 (en) | 1997-06-26 |
KR100473827B1 (ko) | 2005-07-18 |
JP4089922B2 (ja) | 2008-05-28 |
CA2233021A1 (en) | 1997-06-26 |
BR9611969A (pt) | 1999-02-17 |
ATE272573T1 (de) | 2004-08-15 |
EP0868401A1 (de) | 1998-10-07 |
CN1128111C (zh) | 2003-11-19 |
AU1520697A (en) | 1997-07-14 |
CN1204299A (zh) | 1999-01-06 |
JP2000502040A (ja) | 2000-02-22 |
EP0868401A4 (de) | 1999-03-17 |
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