DE69631100D1 - Ätzung von Nitridkristallen - Google Patents
Ätzung von NitridkristallenInfo
- Publication number
- DE69631100D1 DE69631100D1 DE69631100A DE69631100A DE69631100D1 DE 69631100 D1 DE69631100 D1 DE 69631100D1 DE 69631100 A DE69631100 A DE 69631100A DE 69631100 A DE69631100 A DE 69631100A DE 69631100 D1 DE69631100 D1 DE 69631100D1
- Authority
- DE
- Germany
- Prior art keywords
- etching
- nitride crystals
- crystals
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title 1
- 238000005530 etching Methods 0.000 title 1
- 150000004767 nitrides Chemical class 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
- H01L21/30621—Vapour phase etching
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7212374A JPH0945670A (ja) | 1995-07-29 | 1995-07-29 | Iii族−n系結晶の気相エッチング方法および再成長方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE69631100D1 true DE69631100D1 (de) | 2004-01-29 |
Family
ID=16621514
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69631100T Expired - Lifetime DE69631100T4 (de) | 1995-07-29 | 1996-07-25 | Ätzung von Nitridkristallen |
DE69631100A Expired - Lifetime DE69631100D1 (de) | 1995-07-29 | 1996-07-25 | Ätzung von Nitridkristallen |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69631100T Expired - Lifetime DE69631100T4 (de) | 1995-07-29 | 1996-07-25 | Ätzung von Nitridkristallen |
Country Status (5)
Country | Link |
---|---|
US (1) | US5814239A (de) |
EP (1) | EP0762486B9 (de) |
JP (1) | JPH0945670A (de) |
KR (1) | KR100436821B1 (de) |
DE (2) | DE69631100T4 (de) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6083841A (en) * | 1997-05-15 | 2000-07-04 | Rohm Co., Ltd. | Method of etching gallium-nitride based compound semiconductor layer and method of manufacturing semiconductor light emitting device utilizing the same |
JP2000208874A (ja) * | 1999-01-12 | 2000-07-28 | Sony Corp | 窒化物半導体と、窒化物半導体発光装置と、窒化物半導体の製造方法と、半導体発光装置の製造方法 |
JP3702700B2 (ja) * | 1999-03-31 | 2005-10-05 | 豊田合成株式会社 | Iii族窒化物系化合物半導体素子及びその製造方法 |
US6566256B1 (en) * | 1999-04-16 | 2003-05-20 | Gbl Technologies, Inc. | Dual process semiconductor heterostructures and methods |
US6179913B1 (en) * | 1999-04-16 | 2001-01-30 | Cbl Technologies, Inc. | Compound gas injection system and methods |
US6306739B1 (en) * | 1999-04-27 | 2001-10-23 | The United States Of America As Represented By The Secretary Of The Air Force | Method and apparatus for depositing thin films of group III nitrides and other films and devices made therefrom |
JP3773713B2 (ja) * | 1999-08-24 | 2006-05-10 | 三洋電機株式会社 | 量子箱の形成方法 |
US6569765B1 (en) * | 1999-08-26 | 2003-05-27 | Cbl Technologies, Inc | Hybrid deposition system and methods |
EP1113485A3 (de) * | 1999-12-27 | 2005-08-31 | Matsushita Electric Industrial Co., Ltd. | Herstellungsverfahren für ein Halbleiterbauelement |
JP3679720B2 (ja) * | 2001-02-27 | 2005-08-03 | 三洋電機株式会社 | 窒化物系半導体素子および窒化物系半導体の形成方法 |
JP3956637B2 (ja) | 2001-04-12 | 2007-08-08 | ソニー株式会社 | 窒化物半導体の結晶成長方法及び半導体素子の形成方法 |
US20020158046A1 (en) * | 2001-04-27 | 2002-10-31 | Chi Wu | Formation of an optical component |
US20020158047A1 (en) * | 2001-04-27 | 2002-10-31 | Yiqiong Wang | Formation of an optical component having smooth sidewalls |
US6921490B1 (en) | 2002-09-06 | 2005-07-26 | Kotura, Inc. | Optical component having waveguides extending from a common region |
US20050130422A1 (en) * | 2003-12-12 | 2005-06-16 | 3M Innovative Properties Company | Method for patterning films |
US20050164504A1 (en) * | 2004-01-26 | 2005-07-28 | Mirkarimi Laura W. | Method for etching high aspect ratio features in III-V based compounds for optoelectronic devices |
JP5498640B2 (ja) * | 2005-10-14 | 2014-05-21 | 大陽日酸株式会社 | 窒化物半導体製造装置部品の洗浄方法と洗浄装置 |
US11661673B1 (en) | 2006-03-27 | 2023-05-30 | Ostendo Technologies, Inc. | HVPE apparatus and methods for growing indium nitride and indium nitride materials and structures grown thereby |
US20070240631A1 (en) * | 2006-04-14 | 2007-10-18 | Applied Materials, Inc. | Epitaxial growth of compound nitride semiconductor structures |
US20070256635A1 (en) * | 2006-05-02 | 2007-11-08 | Applied Materials, Inc. A Delaware Corporation | UV activation of NH3 for III-N deposition |
US20080314311A1 (en) * | 2007-06-24 | 2008-12-25 | Burrows Brian H | Hvpe showerhead design |
DE102009010556B4 (de) * | 2009-02-25 | 2013-11-07 | Siltronic Ag | Verfahren zur Herstellung von epitaxierten Siliciumscheiben |
US8491720B2 (en) * | 2009-04-10 | 2013-07-23 | Applied Materials, Inc. | HVPE precursor source hardware |
US8183132B2 (en) * | 2009-04-10 | 2012-05-22 | Applied Materials, Inc. | Methods for fabricating group III nitride structures with a cluster tool |
WO2010124261A2 (en) * | 2009-04-24 | 2010-10-28 | Applied Materials, Inc. | Substrate pretreatment for subsequent high temperature group iii depositions |
US20100273291A1 (en) * | 2009-04-28 | 2010-10-28 | Applied Materials, Inc. | Decontamination of mocvd chamber using nh3 purge after in-situ cleaning |
CN102414797A (zh) * | 2009-04-29 | 2012-04-11 | 应用材料公司 | 在HVPE中形成原位预GaN沉积层的方法 |
WO2011044046A2 (en) * | 2009-10-07 | 2011-04-14 | Applied Materials, Inc. | Improved multichamber split processes for led manufacturing |
US20110256692A1 (en) | 2010-04-14 | 2011-10-20 | Applied Materials, Inc. | Multiple precursor concentric delivery showerhead |
TWI534291B (zh) | 2011-03-18 | 2016-05-21 | 應用材料股份有限公司 | 噴淋頭組件 |
JP6301259B2 (ja) | 2011-11-21 | 2018-03-28 | サン‐ゴバン、クリストー、エ、デテクトゥールSaint−Gobain Cristaux & Detecteurs | 半導体基板および形成方法 |
CN103137439B (zh) * | 2013-01-21 | 2016-03-02 | 华灿光电股份有限公司 | 一种GaN基外延片衬底的回收方法 |
CN103531678A (zh) * | 2013-11-01 | 2014-01-22 | 杭州士兰明芯科技有限公司 | 一种去除衬底上GaN基外延层的方法 |
CN105655395B (zh) * | 2015-01-27 | 2018-05-15 | 苏州捷芯威半导体有限公司 | 一种增强型高电子迁移率晶体管及其制作方法 |
SG10201604524PA (en) * | 2015-06-05 | 2017-01-27 | Lam Res Corp | ATOMIC LAYER ETCHING OF GaN AND OTHER III-V MATERIALS |
US10096487B2 (en) | 2015-08-19 | 2018-10-09 | Lam Research Corporation | Atomic layer etching of tungsten and other metals |
US9991128B2 (en) | 2016-02-05 | 2018-06-05 | Lam Research Corporation | Atomic layer etching in continuous plasma |
US10566212B2 (en) | 2016-12-19 | 2020-02-18 | Lam Research Corporation | Designer atomic layer etching |
JP7184252B2 (ja) * | 2018-11-12 | 2022-12-06 | 国立大学法人東海国立大学機構 | エッチング方法およびエッチング装置 |
WO2020257192A1 (en) * | 2019-06-18 | 2020-12-24 | Yale University | In-situ and selective area etching of surfaces or layers, and high-speed growth of gallium nitride, by organometallic chlorine precursors |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6156474A (ja) * | 1984-08-28 | 1986-03-22 | Matsushita Electric Ind Co Ltd | 窒化ガリウム半導体装置の製造方法 |
JPH0770496B2 (ja) * | 1987-02-26 | 1995-07-31 | 新電元工業株式会社 | 半導体装置の製造法 |
JP3055181B2 (ja) * | 1990-03-06 | 2000-06-26 | 住友電気工業株式会社 | 薄膜成長法 |
US5270263A (en) * | 1991-12-20 | 1993-12-14 | Micron Technology, Inc. | Process for depositing aluminum nitride (AlN) using nitrogen plasma sputtering |
JPH06232099A (ja) * | 1992-09-10 | 1994-08-19 | Mitsubishi Electric Corp | 半導体装置の製造方法,半導体装置の製造装置,半導体レーザの製造方法,量子細線構造の製造方法,及び結晶成長方法 |
US5535905A (en) * | 1994-07-29 | 1996-07-16 | General Motors Corporation | Etching technique for producing cubic boron nitride films |
US5567659A (en) * | 1995-05-25 | 1996-10-22 | Northern Telecom Limited | Method of etching patterns in III-V material with accurate depth control |
-
1995
- 1995-07-29 JP JP7212374A patent/JPH0945670A/ja active Pending
-
1996
- 1996-07-19 US US08/684,608 patent/US5814239A/en not_active Expired - Lifetime
- 1996-07-25 DE DE69631100T patent/DE69631100T4/de not_active Expired - Lifetime
- 1996-07-25 EP EP96305466A patent/EP0762486B9/de not_active Expired - Lifetime
- 1996-07-25 DE DE69631100A patent/DE69631100D1/de not_active Expired - Lifetime
- 1996-07-27 KR KR1019960030806A patent/KR100436821B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP0762486B9 (de) | 2004-09-22 |
DE69631100T4 (de) | 2005-06-30 |
EP0762486A3 (de) | 1997-12-29 |
JPH0945670A (ja) | 1997-02-14 |
US5814239A (en) | 1998-09-29 |
KR970006546A (ko) | 1997-02-21 |
EP0762486B1 (de) | 2003-12-17 |
EP0762486A2 (de) | 1997-03-12 |
KR100436821B1 (ko) | 2004-09-18 |
DE69631100T2 (de) | 2004-09-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |