DE69326224D1 - Elektronenstrahllithographie mit verringerter Aufladung - Google Patents
Elektronenstrahllithographie mit verringerter AufladungInfo
- Publication number
- DE69326224D1 DE69326224D1 DE69326224T DE69326224T DE69326224D1 DE 69326224 D1 DE69326224 D1 DE 69326224D1 DE 69326224 T DE69326224 T DE 69326224T DE 69326224 T DE69326224 T DE 69326224T DE 69326224 D1 DE69326224 D1 DE 69326224D1
- Authority
- DE
- Germany
- Prior art keywords
- electron beam
- beam lithography
- reduced charging
- charging
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/38—Treatment before imagewise removal, e.g. prebaking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Analytical Chemistry (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Electron Beam Exposure (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US99386692A | 1992-12-23 | 1992-12-23 | |
US08/025,714 US5288368A (en) | 1992-12-23 | 1993-03-02 | Electron beam lithography with reduced charging effects |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69326224D1 true DE69326224D1 (de) | 1999-10-07 |
DE69326224T2 DE69326224T2 (de) | 2000-04-13 |
Family
ID=26700079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69326224T Expired - Fee Related DE69326224T2 (de) | 1992-12-23 | 1993-12-06 | Elektronenstrahllithographie mit verringerter Aufladung |
Country Status (9)
Country | Link |
---|---|
US (1) | US5288368A (de) |
EP (1) | EP0604054B1 (de) |
JP (1) | JP2883798B2 (de) |
KR (1) | KR0166094B1 (de) |
CA (1) | CA2103411C (de) |
DE (1) | DE69326224T2 (de) |
ES (1) | ES2137973T3 (de) |
SG (1) | SG44456A1 (de) |
TW (1) | TW337032B (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100380546B1 (ko) * | 1994-02-24 | 2003-06-25 | 가부시끼가이샤 히다치 세이사꾸쇼 | 반도체집적회로장치의제조방법 |
JP2001519040A (ja) * | 1995-08-30 | 2001-10-16 | ドイッチェ テレコム アーゲー | 三次元表面の構造化におけるコントラストを向上させる方法 |
DE19630705A1 (de) | 1995-08-30 | 1997-03-20 | Deutsche Telekom Ag | Verfahren zur Herstellung von 3-dimensional strukturierten Polymerschichten für die integrierte Optik |
JPH11145046A (ja) * | 1997-11-13 | 1999-05-28 | Nec Corp | 半導体デバイスの製造方法 |
JP3456461B2 (ja) * | 2000-02-21 | 2003-10-14 | Tdk株式会社 | パターニング方法、薄膜デバイスの製造方法及び薄膜磁気ヘッドの製造方法 |
US6586158B2 (en) | 2001-05-25 | 2003-07-01 | The United States Of America As Represented By The Secretary Of The Navy | Anti-charging layer for beam lithography and mask fabrication |
US6894294B2 (en) * | 2002-09-10 | 2005-05-17 | Applied Materials Israel, Ltd. | System and method for reducing charged particle contamination |
KR100625615B1 (ko) | 2004-06-29 | 2006-09-20 | 이상훈 | 마이크로 밸브 제조 방법 |
US7538295B2 (en) * | 2005-04-21 | 2009-05-26 | Hewlett-Packard Development Company, L.P. | Laser welding system |
JP2010153641A (ja) * | 2008-12-25 | 2010-07-08 | Nuflare Technology Inc | 基板処理方法 |
US9460887B2 (en) * | 2009-05-18 | 2016-10-04 | Hermes Microvision, Inc. | Discharging method for charged particle beam imaging |
JP5368392B2 (ja) * | 2010-07-23 | 2013-12-18 | 信越化学工業株式会社 | 電子線用レジスト膜及び有機導電性膜が積層された被加工基板、該被加工基板の製造方法、及びレジストパターンの形成方法 |
JP6621947B2 (ja) * | 2019-01-17 | 2019-12-18 | Hoya株式会社 | レジスト膜付きマスクブランクおよびその製造方法ならびに転写用マスクの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5443681A (en) * | 1977-09-13 | 1979-04-06 | Mitsubishi Electric Corp | Electron beam light-exposing method |
JPS54116883A (en) * | 1978-03-02 | 1979-09-11 | Mitsubishi Electric Corp | Electron beam exposure method |
JPS58113925A (ja) * | 1981-12-26 | 1983-07-07 | Fujitsu Ltd | 電子ビ−ム描画用レジスト |
JPH0795509B2 (ja) * | 1987-04-10 | 1995-10-11 | 松下電子工業株式会社 | レジストパタ−ンの形成方法 |
US5091285A (en) * | 1989-04-28 | 1992-02-25 | Fujitsu Limited | Method of forming pattern by using an electroconductive composition |
JP2902727B2 (ja) * | 1990-05-30 | 1999-06-07 | 株式会社日立製作所 | 荷電粒子線照射方法及び観察方法 |
US5244759A (en) * | 1991-02-27 | 1993-09-14 | At&T Bell Laboratories | Single-alignment-level lithographic technique for achieving self-aligned features |
-
1993
- 1993-03-02 US US08/025,714 patent/US5288368A/en not_active Expired - Fee Related
- 1993-05-27 TW TW082104202A patent/TW337032B/zh active
- 1993-11-18 CA CA002103411A patent/CA2103411C/en not_active Expired - Fee Related
- 1993-12-06 SG SG1996000569A patent/SG44456A1/en unknown
- 1993-12-06 EP EP93309768A patent/EP0604054B1/de not_active Expired - Lifetime
- 1993-12-06 ES ES93309768T patent/ES2137973T3/es not_active Expired - Lifetime
- 1993-12-06 DE DE69326224T patent/DE69326224T2/de not_active Expired - Fee Related
- 1993-12-17 JP JP5343225A patent/JP2883798B2/ja not_active Expired - Lifetime
- 1993-12-22 KR KR1019930028973A patent/KR0166094B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH07176470A (ja) | 1995-07-14 |
DE69326224T2 (de) | 2000-04-13 |
CA2103411C (en) | 1998-09-15 |
KR940016476A (ko) | 1994-07-23 |
SG44456A1 (en) | 1997-12-19 |
KR0166094B1 (ko) | 1999-02-01 |
CA2103411A1 (en) | 1994-06-24 |
US5288368A (en) | 1994-02-22 |
ES2137973T3 (es) | 2000-01-01 |
TW337032B (en) | 1998-07-21 |
JP2883798B2 (ja) | 1999-04-19 |
EP0604054B1 (de) | 1999-09-01 |
EP0604054A1 (de) | 1994-06-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |