DE69311401D1 - Emissionsmikroskop - Google Patents

Emissionsmikroskop

Info

Publication number
DE69311401D1
DE69311401D1 DE69311401T DE69311401T DE69311401D1 DE 69311401 D1 DE69311401 D1 DE 69311401D1 DE 69311401 T DE69311401 T DE 69311401T DE 69311401 T DE69311401 T DE 69311401T DE 69311401 D1 DE69311401 D1 DE 69311401D1
Authority
DE
Germany
Prior art keywords
emission microscope
microscope
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69311401T
Other languages
English (en)
Inventor
Victoria J Bruce
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Application granted granted Critical
Publication of DE69311401D1 publication Critical patent/DE69311401D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry
DE69311401T 1992-01-28 1993-01-18 Emissionsmikroskop Expired - Lifetime DE69311401D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/826,992 US5301006A (en) 1992-01-28 1992-01-28 Emission microscope

Publications (1)

Publication Number Publication Date
DE69311401D1 true DE69311401D1 (de) 1997-07-17

Family

ID=25248047

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69311401T Expired - Lifetime DE69311401D1 (de) 1992-01-28 1993-01-18 Emissionsmikroskop

Country Status (4)

Country Link
US (1) US5301006A (de)
EP (1) EP0559313B1 (de)
JP (1) JPH05308097A (de)
DE (1) DE69311401D1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69328323D1 (de) * 1992-01-29 2000-05-18 Advanced Micro Devices Inc Energieauflösendes Emissions-Mikroskop-System und Verfahren
USRE43097E1 (en) 1994-10-13 2012-01-10 Illumina, Inc. Massively parallel signature sequencing by ligation of encoded adaptors
US5970167A (en) * 1995-11-08 1999-10-19 Alpha Innotech Corporation Integrated circuit failure analysis using color voltage contrast
US5892539A (en) * 1995-11-08 1999-04-06 Alpha Innotech Corporation Portable emission microscope workstation for failure analysis
US5764409A (en) * 1996-04-26 1998-06-09 Alpha Innotech Corp Elimination of vibration by vibration coupling in microscopy applications
JP3436456B2 (ja) * 1996-06-14 2003-08-11 三菱電機株式会社 エミッション顕微鏡による半導体装置の故障解析方法及び半導体装置故障解析システム
US5940545A (en) * 1996-07-18 1999-08-17 International Business Machines Corporation Noninvasive optical method for measuring internal switching and other dynamic parameters of CMOS circuits
DE19701703A1 (de) * 1997-01-21 1998-07-23 Zeiss Carl Jena Gmbh Mikroskopisches System zur Erfassung der Emissionsverteilung und Verfahren zu dessen Betrieb
CA2291180A1 (en) 1997-05-23 1998-11-26 Lynx Therapeutics, Inc. System and apparatus for sequential processing of analytes
US6051828A (en) * 1997-07-02 2000-04-18 Texas Instruments Incorporated Light emission noise detection and characterization
DE19804532A1 (de) * 1998-02-05 1999-08-12 Herolab Gmbh Vorrichtung zur optischen Untersuchung von Proben
US6107107A (en) * 1998-03-31 2000-08-22 Advanced Micro Devices, Inc. Analyzing an electronic circuit formed upon a frontside surface of a semiconductor substrate by detecting radiation exiting a backside surface coated with an antireflective material
EP2360271A1 (de) 1998-06-24 2011-08-24 Illumina, Inc. Dekodierung von Arraysensoren mit Mikrosphären
US6731327B1 (en) * 1999-02-12 2004-05-04 Hypervision, Inc. Dynamic structural coupling mechanism for reducing optical degradation in vibrating environments
US6505168B1 (en) 1999-08-16 2003-01-07 First Usa Bank, Na System and method for gathering and standardizing customer purchase information for target marketing
US6867789B1 (en) 2000-02-15 2005-03-15 Bank One, Delaware, National Association System and method for generating graphical user interfaces
US6775567B2 (en) * 2000-02-25 2004-08-10 Xenogen Corporation Imaging apparatus
US6469536B1 (en) * 2000-10-17 2002-10-22 Motorola, Inc. Method and device for providing symetrical monitoring of ESD testing an integrated circuit
US7831467B1 (en) 2000-10-17 2010-11-09 Jpmorgan Chase Bank, N.A. Method and system for retaining customer loyalty
US6716683B1 (en) * 2001-06-22 2004-04-06 Advanced Mircor Devices, Inc. Optical analysis for SOI integrated circuits
US6774647B2 (en) * 2002-02-07 2004-08-10 International Business Machines Corporation Noninvasive optical method and system for inspecting or testing CMOS circuits
DE10212554A1 (de) * 2002-03-16 2003-10-30 Zeiss Carl Jena Gmbh Anordnung und Verfahren für ein bildgebendes Spektrometer
US6894518B1 (en) 2002-03-29 2005-05-17 Advanced Micro Devices, Inc. Circuit analysis and manufacture using electric field-induced effects
US6891363B2 (en) 2002-09-03 2005-05-10 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US6943572B2 (en) * 2002-09-03 2005-09-13 Credence Systems Corporation Apparatus and method for detecting photon emissions from transistors
US8175908B1 (en) 2003-09-04 2012-05-08 Jpmorgan Chase Bank, N.A. Systems and methods for constructing and utilizing a merchant database derived from customer purchase transactions data
US7453273B1 (en) * 2007-05-16 2008-11-18 Xilinx, Inc. Method and apparatus for analyzing current in an integrated circuit under test
CN100576013C (zh) * 2008-05-16 2009-12-30 中国科学院上海光学精密机械研究所 强度关联量子成像显微镜
CN102122066B (zh) * 2011-03-24 2012-10-10 姚斌 全自动双ccd感光元件数字显微镜
US9557369B2 (en) 2012-06-22 2017-01-31 International Business Machines Corporation Integrated time dependent dielectric breakdown reliability testing
SG10201708329XA (en) * 2013-04-10 2017-11-29 Dcg Systems Inc Optimized wavelength photon emission microscope for vlsi devices
US20200340858A1 (en) * 2019-04-24 2020-10-29 Applied Materials, Inc. Plasma emission monitoring system with cross-dispersion grating

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3889053A (en) * 1973-10-30 1975-06-10 Westinghouse Electric Corp Contactless test system
US4389669A (en) * 1981-02-27 1983-06-21 Ilc Data Device Corporation Opto-video inspection system
US4473842A (en) * 1981-07-06 1984-09-25 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus and method for examining printed circuit board provided with electronic parts
US4680635A (en) * 1986-04-01 1987-07-14 Intel Corporation Emission microscope
US4755874A (en) * 1987-08-31 1988-07-05 Kla Instruments Corporation Emission microscopy system
US4811090A (en) * 1988-01-04 1989-03-07 Hypervision Image emission microscope with improved image processing capability
US5166755A (en) * 1990-05-23 1992-11-24 Nahum Gat Spectrometer apparatus

Also Published As

Publication number Publication date
JPH05308097A (ja) 1993-11-19
US5301006A (en) 1994-04-05
EP0559313B1 (de) 1997-06-11
EP0559313A1 (de) 1993-09-08

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Legal Events

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8332 No legal effect for de