DE69322928D1 - Verfahren zur Herstellung eines nicht-flüchtigen Halbleiter-Speicherbauteils - Google Patents
Verfahren zur Herstellung eines nicht-flüchtigen Halbleiter-SpeicherbauteilsInfo
- Publication number
- DE69322928D1 DE69322928D1 DE69322928T DE69322928T DE69322928D1 DE 69322928 D1 DE69322928 D1 DE 69322928D1 DE 69322928 T DE69322928 T DE 69322928T DE 69322928 T DE69322928 T DE 69322928T DE 69322928 D1 DE69322928 D1 DE 69322928D1
- Authority
- DE
- Germany
- Prior art keywords
- manufacturing
- memory device
- semiconductor memory
- volatile semiconductor
- volatile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/42—Simultaneous manufacture of periphery and memory cells
- H10B41/43—Simultaneous manufacture of periphery and memory cells comprising only one type of peripheral transistor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28804392 | 1992-10-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69322928D1 true DE69322928D1 (de) | 1999-02-18 |
DE69322928T2 DE69322928T2 (de) | 1999-07-29 |
Family
ID=17725098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69322928T Expired - Fee Related DE69322928T2 (de) | 1992-10-27 | 1993-10-26 | Verfahren zur Herstellung eines nicht-flüchtigen Halbleiter-Speicherbauteils |
Country Status (4)
Country | Link |
---|---|
US (1) | US5449634A (de) |
EP (1) | EP0595250B1 (de) |
KR (1) | KR0139188B1 (de) |
DE (1) | DE69322928T2 (de) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5716864A (en) * | 1994-07-22 | 1998-02-10 | Nkk Corporation | Method of manufacturing a non-volatile semiconductor memory device with peripheral transistor |
KR0161402B1 (ko) * | 1995-03-22 | 1998-12-01 | 김광호 | 불휘발성 메모리 제조방법 |
US5830772A (en) * | 1995-09-08 | 1998-11-03 | United Microelectronicscorp. | Method for fabricating isolating regions for buried conductors |
US6815762B2 (en) * | 1997-05-30 | 2004-11-09 | Hitachi, Ltd. | Semiconductor integrated circuit device and process for manufacturing the same including spacers on bit lines |
TW347558B (en) * | 1996-07-10 | 1998-12-11 | Fujitsu Ltd | Semiconductor device with self-aligned contact and its manufacture |
JP3212882B2 (ja) * | 1996-08-15 | 2001-09-25 | 日本電気株式会社 | 半導体装置の製造方法 |
KR100234414B1 (ko) * | 1997-03-05 | 1999-12-15 | 윤종용 | 불휘발성 메모리장치 및 그 제조방법 |
TW360951B (en) * | 1997-04-01 | 1999-06-11 | Nxp Bv | Method of manufacturing a semiconductor device |
US6027974A (en) * | 1997-04-11 | 2000-02-22 | Programmable Silicon Solutions | Nonvolatile memory |
US6087221A (en) * | 1997-08-22 | 2000-07-11 | Micron Technology, Inc. | Method of fabricating two dissimilar devices with diminished processing steps |
US6159795A (en) * | 1998-07-02 | 2000-12-12 | Advanced Micro Devices, Inc. | Low voltage junction and high voltage junction optimization for flash memory |
US6180456B1 (en) | 1999-02-17 | 2001-01-30 | International Business Machines Corporation | Triple polysilicon embedded NVRAM cell and method thereof |
JP2000311992A (ja) | 1999-04-26 | 2000-11-07 | Toshiba Corp | 不揮発性半導体記憶装置およびその製造方法 |
US6306760B1 (en) * | 1999-12-09 | 2001-10-23 | United Microelectronics Corp. | Method of forming a self-aligned contact hole on a semiconductor wafer |
JP4096507B2 (ja) * | 2000-09-29 | 2008-06-04 | 富士通株式会社 | 半導体装置の製造方法 |
JP2006222203A (ja) * | 2005-02-09 | 2006-08-24 | Renesas Technology Corp | 半導体装置およびその製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56116670A (en) * | 1980-02-20 | 1981-09-12 | Hitachi Ltd | Semiconductor integrated circuit device and manufacture thereof |
JPS5850771A (ja) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | 再書込み可能な高集積rom及びその製造方法 |
JPS58184768A (ja) * | 1982-04-23 | 1983-10-28 | Oki Electric Ind Co Ltd | 半導体装置の製造方法 |
JPH07114264B2 (ja) * | 1985-08-23 | 1995-12-06 | 株式会社日立製作所 | 半導体集積回路装置の製造方法 |
US4775642A (en) * | 1987-02-02 | 1988-10-04 | Motorola, Inc. | Modified source/drain implants in a double-poly non-volatile memory process |
JPS63126279A (ja) * | 1987-10-23 | 1988-05-30 | Hitachi Ltd | 半導体集積回路装置の製法 |
JPH01259566A (ja) * | 1988-04-08 | 1989-10-17 | Fujitsu Ltd | 半導体装置及びその製造方法 |
FR2642900B1 (fr) * | 1989-01-17 | 1991-05-10 | Sgs Thomson Microelectronics | Procede de fabrication de circuits integres a transistors de memoire eprom et a transistors logiques |
JP2670330B2 (ja) * | 1989-01-17 | 1997-10-29 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JPH03125479A (ja) * | 1989-10-11 | 1991-05-28 | Kawasaki Steel Corp | 不揮発性記憶素子を有する半導体集積回路の製造方法 |
US5175120A (en) * | 1991-10-11 | 1992-12-29 | Micron Technology, Inc. | Method of processing a semiconductor wafer to form an array of nonvolatile memory devices employing floating gate transistors and peripheral area having CMOS transistors |
-
1993
- 1993-10-26 EP EP93117303A patent/EP0595250B1/de not_active Expired - Lifetime
- 1993-10-26 DE DE69322928T patent/DE69322928T2/de not_active Expired - Fee Related
- 1993-10-27 KR KR1019930022471A patent/KR0139188B1/ko not_active IP Right Cessation
- 1993-10-27 US US08/141,882 patent/US5449634A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR0139188B1 (ko) | 1998-04-27 |
EP0595250B1 (de) | 1999-01-07 |
EP0595250A2 (de) | 1994-05-04 |
US5449634A (en) | 1995-09-12 |
EP0595250A3 (en) | 1994-07-06 |
DE69322928T2 (de) | 1999-07-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |