DE69322345T2 - Synchrotron-Röntgenbelichtungsverfahren - Google Patents

Synchrotron-Röntgenbelichtungsverfahren

Info

Publication number
DE69322345T2
DE69322345T2 DE69322345T DE69322345T DE69322345T2 DE 69322345 T2 DE69322345 T2 DE 69322345T2 DE 69322345 T DE69322345 T DE 69322345T DE 69322345 T DE69322345 T DE 69322345T DE 69322345 T2 DE69322345 T2 DE 69322345T2
Authority
DE
Germany
Prior art keywords
synchrotron
exposure process
ray exposure
ray
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69322345T
Other languages
English (en)
Other versions
DE69322345D1 (de
Inventor
Mitsuaki Amemiya
Yasuaki Fukuda
Yutaka Watanabe
Akira Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP04270973A external-priority patent/JP3096529B2/ja
Priority claimed from JP05159495A external-priority patent/JP3103461B2/ja
Priority claimed from JP5161789A external-priority patent/JPH0757987A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69322345D1 publication Critical patent/DE69322345D1/de
Application granted granted Critical
Publication of DE69322345T2 publication Critical patent/DE69322345T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2037—Exposure with X-ray radiation or corpuscular radiation, through a mask with a pattern opaque to that radiation
    • G03F7/2039—X-ray radiation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0844—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using X-ray

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE69322345T 1992-09-14 1993-09-13 Synchrotron-Röntgenbelichtungsverfahren Expired - Fee Related DE69322345T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP04270973A JP3096529B2 (ja) 1992-09-14 1992-09-14 Ｘ線露光方法
JP05159495A JP3103461B2 (ja) 1993-06-29 1993-06-29 Ｘ線露光方法と装置、並びにデバイス製造方法
JP5161789A JPH0757987A (ja) 1993-06-30 1993-06-30 Ｘ線露光方法と装置、並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
DE69322345D1 DE69322345D1 (de) 1999-01-14
DE69322345T2 true DE69322345T2 (de) 1999-05-20

Family

ID=27321556

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69322345T Expired - Fee Related DE69322345T2 (de) 1992-09-14 1993-09-13 Synchrotron-Röntgenbelichtungsverfahren

Country Status (3)

Country Link
US (1) US5606586A (de)
EP (1) EP0588579B1 (de)
DE (1) DE69322345T2 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666951B2 (ja) 1995-10-06 2005-06-29 キヤノン株式会社 マーク検出方法、これを用いた位置合わせ方法、露光方法及び装置、ならびにデバイス生産方法
JP3284045B2 (ja) * 1996-04-30 2002-05-20 キヤノン株式会社 Ｘ線光学装置およびデバイス製造方法
JP3450622B2 (ja) * 1996-07-19 2003-09-29 キヤノン株式会社 露光装置およびこれを用いたデバイス製造方法
JP3255849B2 (ja) * 1996-07-19 2002-02-12 キヤノン株式会社 露光装置
US6167111A (en) * 1997-07-02 2000-12-26 Canon Kabushiki Kaisha Exposure apparatus for synchrotron radiation lithography
JP2000100685A (ja) * 1998-09-17 2000-04-07 Nikon Corp 露光装置及び該装置を用いた露光方法
JP2000357643A (ja) 1999-06-14 2000-12-26 Canon Inc 露光方法及びそれを用いた露光装置
JP2000357644A (ja) 1999-06-14 2000-12-26 Canon Inc 露光方法及び露光装置
JP2002093684A (ja) 2000-09-18 2002-03-29 Canon Inc Ｘ線露光装置、ｘ線露光方法、半導体製造装置および微細構造体
DE10122279A1 (de) * 2001-05-08 2002-12-12 Heimann Systems Gmbh & Co Röntgenanlage
US6998620B2 (en) * 2001-08-13 2006-02-14 Lambda Physik Ag Stable energy detector for extreme ultraviolet radiation detection
JP3564104B2 (ja) * 2002-01-29 2004-09-08 キヤノン株式会社 露光装置及びその制御方法、これを用いたデバイスの製造方法
JP4006251B2 (ja) * 2002-03-20 2007-11-14 キヤノン株式会社 ミラー装置、ミラーの調整方法、露光装置、露光方法及び半導体デバイスの製造方法
US7973909B2 (en) * 2008-10-14 2011-07-05 Synopsys, Inc. Method and apparatus for using a synchrotron as a source in extreme ultraviolet lithography
CN101740155B (zh) * 2008-11-19 2012-03-28 同方威视技术股份有限公司 辐射屏蔽装置以及辐照系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2744245B2 (ja) * 1988-03-25 1998-04-28 キヤノン株式会社 露光装置と露光方法
EP0345097B1 (de) * 1988-06-03 2001-12-12 Canon Kabushiki Kaisha Verfahren und Vorrichtung zur Belichtung
US5157700A (en) * 1988-09-02 1992-10-20 Canon Kabushiki Kaisha Exposure apparatus for controlling intensity of exposure radiation
JP2731955B2 (ja) * 1989-09-07 1998-03-25 キヤノン株式会社 Ｘ線露光装置
US5285488A (en) * 1989-09-21 1994-02-08 Canon Kabushiki Kaisha Exposure apparatus
DE69031897T2 (de) * 1989-10-19 1998-05-07 Canon Kk Röntgenbelichtungsvorrichtung
JPH0443626A (ja) * 1990-06-11 1992-02-13 Soltec:Kk Ｘ線露光方法
JP3143505B2 (ja) * 1991-10-30 2001-03-07 キヤノン株式会社 Ｘ線露光装置

Also Published As

Publication number Publication date
DE69322345D1 (de) 1999-01-14
US5606586A (en) 1997-02-25
EP0588579A1 (de) 1994-03-23
EP0588579B1 (de) 1998-12-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee