DE69320522T2 - Verfahren zur Herstellung einer nichtflüchtigen grabenförmigen Speicheranordnung - Google Patents

Verfahren zur Herstellung einer nichtflüchtigen grabenförmigen Speicheranordnung

Info

Publication number
DE69320522T2
DE69320522T2 DE69320522T DE69320522T DE69320522T2 DE 69320522 T2 DE69320522 T2 DE 69320522T2 DE 69320522 T DE69320522 T DE 69320522T DE 69320522 T DE69320522 T DE 69320522T DE 69320522 T2 DE69320522 T2 DE 69320522T2
Authority
DE
Germany
Prior art keywords
producing
storage device
shaped storage
trench
volatile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69320522T
Other languages
English (en)
Other versions
DE69320522D1 (de
Inventor
Satyendranath Mukherjee
Manjin Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE69320522D1 publication Critical patent/DE69320522D1/de
Application granted granted Critical
Publication of DE69320522T2 publication Critical patent/DE69320522T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
    • H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
    • H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
DE69320522T 1992-04-13 1993-04-06 Verfahren zur Herstellung einer nichtflüchtigen grabenförmigen Speicheranordnung Expired - Fee Related DE69320522T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/867,595 US5229312A (en) 1992-04-13 1992-04-13 Nonvolatile trench memory device and self-aligned method for making such a device

Publications (2)

Publication Number Publication Date
DE69320522D1 DE69320522D1 (de) 1998-10-01
DE69320522T2 true DE69320522T2 (de) 1999-03-25

Family

ID=25350101

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320522T Expired - Fee Related DE69320522T2 (de) 1992-04-13 1993-04-06 Verfahren zur Herstellung einer nichtflüchtigen grabenförmigen Speicheranordnung

Country Status (5)

Country Link
US (1) US5229312A (de)
EP (1) EP0566187B1 (de)
JP (1) JP2545193B2 (de)
KR (1) KR100281375B1 (de)
DE (1) DE69320522T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69416274T2 (de) * 1993-06-16 1999-06-24 Nissha Printing Druckzylinder und elastische druckplatte für diesen druckzylinder
US20070004134A1 (en) * 1996-05-29 2007-01-04 Vora Madhukar B Vertically integrated flash EPROM for greater density and lower cost
JPH1117034A (ja) * 1997-06-24 1999-01-22 Matsushita Electron Corp 半導体記憶装置およびその製造方法
US6013551A (en) * 1997-09-26 2000-01-11 Taiwan Semiconductor Manufacturing Company, Ltd. Method of manufacture of self-aligned floating gate, flash memory cell and device manufactured thereby
US5854114A (en) * 1997-10-09 1998-12-29 Advanced Micro Devices, Inc. Data retention of EEPROM cell with shallow trench isolation using thicker liner oxide
US6127226A (en) * 1997-12-22 2000-10-03 Taiwan Semiconductor Manufacturing Company Method for forming vertical channel flash memory cell using P/N junction isolation
US6204123B1 (en) * 1998-10-30 2001-03-20 Sony Corporation Vertical floating gate transistor with epitaxial channel
US6870220B2 (en) * 2002-08-23 2005-03-22 Fairchild Semiconductor Corporation Method and apparatus for improved MOS gating to reduce miller capacitance and switching losses
US6417048B1 (en) * 2001-11-19 2002-07-09 Vanguard International Semiconductor Corporation Method for fabricating flash memory with recessed floating gates
US6661053B2 (en) 2001-12-18 2003-12-09 Infineon Technologies Ag Memory cell with trench transistor
DE10162261B4 (de) * 2001-12-18 2005-09-15 Infineon Technologies Ag Speicherzelle mit Grabentransistor
DE10229065A1 (de) * 2002-06-28 2004-01-29 Infineon Technologies Ag Verfahren zur Herstellung eines NROM-Speicherzellenfeldes
DE10321742A1 (de) * 2003-05-14 2004-12-09 Infineon Technologies Ag Integrierte Schaltungsanordnung mit Isoliergraben und Feldeffekttransistor sowie Herstellungsverfahren
JP2008171872A (ja) * 2007-01-09 2008-07-24 Elpida Memory Inc 半導体装置及びその製造方法
JP2009004510A (ja) * 2007-06-20 2009-01-08 Toshiba Corp 不揮発性半導体記憶装置
US8081515B2 (en) * 2008-04-04 2011-12-20 Trom Trench monos memory cell and array
US7915124B2 (en) * 2008-07-09 2011-03-29 Sandisk Corporation Method of forming dielectric layer above floating gate for reducing leakage current
US7919809B2 (en) * 2008-07-09 2011-04-05 Sandisk Corporation Dielectric layer above floating gate for reducing leakage current
US8207036B2 (en) * 2008-09-30 2012-06-26 Sandisk Technologies Inc. Method for forming self-aligned dielectric cap above floating gate
JP5364128B2 (ja) * 2011-05-30 2013-12-11 日油技研工業株式会社 滅菌インジケータの退色及び転写の抑制材、及びそれを用いた滅菌バッグ
TWI470790B (zh) * 2012-07-13 2015-01-21 Ubiq Semiconductor Corp 溝渠式閘極金氧半場效電晶體

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4774556A (en) * 1985-07-25 1988-09-27 Nippondenso Co., Ltd. Non-volatile semiconductor memory device
JPH07120717B2 (ja) * 1986-05-19 1995-12-20 日本電気株式会社 半導体記憶装置の製造方法
JPS63168053A (ja) * 1986-12-27 1988-07-12 Toshiba Corp 不揮発性半導体記憶装置およびその製造方法
JPH0640588B2 (ja) * 1987-03-13 1994-05-25 株式会社東芝 半導体記憶装置
EP0333426B1 (de) * 1988-03-15 1996-07-10 Kabushiki Kaisha Toshiba Dynamischer RAM
JPH01245539A (ja) * 1988-03-28 1989-09-29 Seiko Epson Corp 半導体装置の製造方法
JPH07105477B2 (ja) * 1988-05-28 1995-11-13 富士通株式会社 半導体装置及びその製造方法
JPH0748553B2 (ja) * 1989-03-14 1995-05-24 シャープ株式会社 半導体装置
US5126807A (en) * 1990-06-13 1992-06-30 Kabushiki Kaisha Toshiba Vertical MOS transistor and its production method
US5071782A (en) * 1990-06-28 1991-12-10 Texas Instruments Incorporated Vertical memory cell array and method of fabrication
US5146426A (en) * 1990-11-08 1992-09-08 North American Philips Corp. Electrically erasable and programmable read only memory with trench structure

Also Published As

Publication number Publication date
JPH0629546A (ja) 1994-02-04
EP0566187A3 (de) 1994-08-31
DE69320522D1 (de) 1998-10-01
KR930022566A (ko) 1993-11-24
EP0566187A2 (de) 1993-10-20
JP2545193B2 (ja) 1996-10-16
US5229312A (en) 1993-07-20
EP0566187B1 (de) 1998-08-26
KR100281375B1 (ko) 2001-02-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8339 Ceased/non-payment of the annual fee