DE69313499T2 - Halbleiterbauelement mit Bufferstruktur - Google Patents
Halbleiterbauelement mit BufferstrukturInfo
- Publication number
- DE69313499T2 DE69313499T2 DE69313499T DE69313499T DE69313499T2 DE 69313499 T2 DE69313499 T2 DE 69313499T2 DE 69313499 T DE69313499 T DE 69313499T DE 69313499 T DE69313499 T DE 69313499T DE 69313499 T2 DE69313499 T2 DE 69313499T2
- Authority
- DE
- Germany
- Prior art keywords
- semiconductor device
- buffer structure
- buffer
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/083—Anode or cathode regions of thyristors or gated bipolar-mode devices
- H01L29/0834—Anode regions of thyristors or gated bipolar-mode devices, e.g. supplementary regions surrounding anode regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
- H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
- H01L29/7391—Gated diode structures
- H01L29/7392—Gated diode structures with PN junction gate, e.g. field controlled thyristors (FCTh), static induction thyristors (SITh)
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Thyristors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4114140A JPH0793426B2 (ja) | 1992-04-07 | 1992-04-07 | 静電誘導バッファ構造を有する半導体素子 |
JP4144887A JPH0793427B2 (ja) | 1992-05-11 | 1992-05-11 | ドリフトバッファ構造を有する半導体素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69313499D1 DE69313499D1 (de) | 1997-10-09 |
DE69313499T2 true DE69313499T2 (de) | 1998-01-08 |
Family
ID=26452969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69313499T Expired - Fee Related DE69313499T2 (de) | 1992-04-07 | 1993-04-07 | Halbleiterbauelement mit Bufferstruktur |
Country Status (3)
Country | Link |
---|---|
US (1) | US5352910A (de) |
EP (2) | EP0565350B1 (de) |
DE (1) | DE69313499T2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0665597A1 (de) * | 1994-01-27 | 1995-08-02 | Consorzio per la Ricerca sulla Microelettronica nel Mezzogiorno - CoRiMMe | IGBT und Herstellungsverfahren dafür |
DE59808468D1 (en) * | 1997-01-31 | 2003-06-26 | Infineon Technologies Ag | Asymmetrischer thyristor |
DE19823944A1 (de) | 1998-05-28 | 1999-12-02 | Siemens Ag | Leistungsdioden-Struktur |
KR100351042B1 (ko) * | 2000-04-04 | 2002-09-05 | 페어차일드코리아반도체 주식회사 | 역방향 차폐 모드에서도 높은 브레이크다운 전압을 갖는절연 게이트 바이폴라 트랜지스터 및 그 제조방법 |
JP3906076B2 (ja) * | 2001-01-31 | 2007-04-18 | 株式会社東芝 | 半導体装置 |
DE10325721B4 (de) * | 2003-06-06 | 2009-02-05 | Infineon Technologies Ag | Halbleiterbauelement |
US7301220B2 (en) * | 2005-05-20 | 2007-11-27 | Cambridge Semiconductor Limited | Semiconductor device and method of forming a semiconductor device |
CN102468330A (zh) * | 2010-11-09 | 2012-05-23 | 杭州汉安半导体有限公司 | 一种短路点新型布局的快速晶闸管 |
JP2013168564A (ja) | 2012-02-16 | 2013-08-29 | Ngk Insulators Ltd | 半導体装置及びその製造方法 |
US9461116B2 (en) * | 2012-12-06 | 2016-10-04 | Institute of Microelectronics, Chinese Academy of Sciences | Method of formation of a TI-IGBT |
JP6362152B1 (ja) * | 2016-11-11 | 2018-07-25 | 新電元工業株式会社 | Mosfet及び電力変換回路 |
CN113451387B (zh) * | 2020-03-24 | 2022-12-23 | 清华大学 | 用于过压击穿功能的缓冲区变掺杂结构及半导体器件 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4053924A (en) * | 1975-02-07 | 1977-10-11 | California Linear Circuits, Inc. | Ion-implanted semiconductor abrupt junction |
US4086611A (en) * | 1975-10-20 | 1978-04-25 | Semiconductor Research Foundation | Static induction type thyristor |
US4171995A (en) * | 1975-10-20 | 1979-10-23 | Semiconductor Research Foundation | Epitaxial deposition process for producing an electrostatic induction type thyristor |
JPS5931869B2 (ja) | 1976-05-06 | 1984-08-04 | 三菱電機株式会社 | 静電誘導形サイリスタ |
US4985738A (en) * | 1978-01-06 | 1991-01-15 | Zaidan Hojin Handotai Kenkyu Shinkokai | Semiconductor switching device |
JPS6011815B2 (ja) * | 1979-07-09 | 1985-03-28 | 三菱電機株式会社 | サイリスタ |
JPS5927571A (ja) * | 1982-08-05 | 1984-02-14 | Meidensha Electric Mfg Co Ltd | ゲ−トタ−ンオフサイリスタ |
JPS5993169A (ja) * | 1982-11-17 | 1984-05-29 | 三洋電機株式会社 | 透視構造体の組立方法 |
JPS59193169A (ja) * | 1983-04-15 | 1984-11-01 | Toyota Motor Corp | ドライ型塗装ブ−ス |
US4654679A (en) * | 1983-10-05 | 1987-03-31 | Toyo Denki Seizo Kabushiki Kaisha | Static induction thyristor with stepped-doping gate region |
JPS60189260A (ja) * | 1984-03-09 | 1985-09-26 | Toshiba Corp | 逆阻止型ゲートターンオフサイリスタ |
JPH0691244B2 (ja) * | 1984-04-27 | 1994-11-14 | 三菱電機株式会社 | ゲートターンオフサイリスタの製造方法 |
JP2632322B2 (ja) * | 1987-10-02 | 1997-07-23 | 財団法人 半導体研究振興会 | 電力用半導体素子 |
JPH0642542B2 (ja) * | 1988-04-08 | 1994-06-01 | 株式会社東芝 | 高耐圧半導体装置の製造方法 |
FR2638892B1 (fr) * | 1988-11-09 | 1992-12-24 | Sgs Thomson Microelectronics | Procede de modulation de la quantite d'or diffusee dans un substrat de silicium et diode rapide obtenue par ce procede |
JP2729309B2 (ja) * | 1988-12-05 | 1998-03-18 | 三菱電機株式会社 | 半導体装置の製造方法 |
DE59003052D1 (de) * | 1989-05-18 | 1993-11-18 | Asea Brown Boveri | Halbleiterbauelement. |
-
1993
- 1993-04-02 US US08/042,152 patent/US5352910A/en not_active Expired - Fee Related
- 1993-04-07 DE DE69313499T patent/DE69313499T2/de not_active Expired - Fee Related
- 1993-04-07 EP EP93302716A patent/EP0565350B1/de not_active Expired - Lifetime
- 1993-04-07 EP EP96120609A patent/EP0771034A3/de not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
EP0771034A2 (de) | 1997-05-02 |
EP0565350A3 (de) | 1994-12-28 |
EP0565350B1 (de) | 1997-09-03 |
EP0565350A2 (de) | 1993-10-13 |
US5352910A (en) | 1994-10-04 |
DE69313499D1 (de) | 1997-10-09 |
EP0771034A3 (de) | 1997-05-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: NGK INSULATORS, LTD., NAGOYA, AICHI, JP TAMAMUSHI, |
|
8339 | Ceased/non-payment of the annual fee |