DE69221775D1 - Verfahren zur Erzeugung eines Fotolackmusters auf einem Halbleitersubstrat durch Lichtbestrahlung - Google Patents
Verfahren zur Erzeugung eines Fotolackmusters auf einem Halbleitersubstrat durch LichtbestrahlungInfo
- Publication number
- DE69221775D1 DE69221775D1 DE69221775T DE69221775T DE69221775D1 DE 69221775 D1 DE69221775 D1 DE 69221775D1 DE 69221775 T DE69221775 T DE 69221775T DE 69221775 T DE69221775 T DE 69221775T DE 69221775 D1 DE69221775 D1 DE 69221775D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- semiconductor substrate
- light irradiation
- photoresist pattern
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/56—Organic absorbers, e.g. of photo-resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13679991 | 1991-06-07 | ||
JP3323442A JP2888683B2 (ja) | 1991-06-07 | 1991-12-06 | 光露光によるレジストマスクパターン形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69221775D1 true DE69221775D1 (de) | 1997-10-02 |
DE69221775T2 DE69221775T2 (de) | 1998-03-12 |
Family
ID=26470299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69221775T Expired - Fee Related DE69221775T2 (de) | 1991-06-07 | 1992-05-14 | Verfahren zur Erzeugung eines Fotolackmusters auf einem Halbleitersubstrat durch Lichtbestrahlung |
Country Status (3)
Country | Link |
---|---|
US (1) | US5330862A (de) |
EP (1) | EP0517382B1 (de) |
DE (1) | DE69221775T2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2837063B2 (ja) * | 1993-06-04 | 1998-12-14 | シャープ株式会社 | レジストパターンの形成方法 |
TW270219B (de) * | 1994-05-31 | 1996-02-11 | Advanced Micro Devices Inc | |
TW522291B (en) * | 2002-06-28 | 2003-03-01 | United Microelectronics Corp | Structure of phase shifting mask |
JP2007149768A (ja) * | 2005-11-24 | 2007-06-14 | Nec Electronics Corp | 半導体装置の製造方法 |
JP5132625B2 (ja) * | 2009-04-10 | 2013-01-30 | 株式会社東芝 | パターン形成方法 |
JP5863343B2 (ja) * | 2011-09-01 | 2016-02-16 | キヤノン株式会社 | 半導体装置の製造方法 |
US9618664B2 (en) | 2015-04-15 | 2017-04-11 | Finisar Corporation | Partially etched phase-transforming optical element |
US10539723B2 (en) | 2016-10-19 | 2020-01-21 | Finisar Corporation | Phase-transforming optical reflector formed by partial etching or by partial etching with reflow |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5651738A (en) * | 1979-10-03 | 1981-05-09 | Oki Electric Ind Co Ltd | Minute pattern forming method |
JPS6459884A (en) * | 1987-08-31 | 1989-03-07 | Fujitsu Ltd | Forming of shift type diffraction grating pattern |
US5015559A (en) * | 1988-07-26 | 1991-05-14 | Matsushita Electric Industrial Co., Ltd. | Process for forming a fine resist pattern |
JPH03237458A (ja) * | 1990-02-14 | 1991-10-23 | Mitsubishi Electric Corp | 微細パターン形成方法 |
JPH03259257A (ja) * | 1990-03-09 | 1991-11-19 | Mitsubishi Electric Corp | 微細パターン形成方法 |
-
1992
- 1992-04-28 US US07/874,809 patent/US5330862A/en not_active Expired - Lifetime
- 1992-05-14 EP EP92304342A patent/EP0517382B1/de not_active Expired - Lifetime
- 1992-05-14 DE DE69221775T patent/DE69221775T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69221775T2 (de) | 1998-03-12 |
US5330862A (en) | 1994-07-19 |
EP0517382A1 (de) | 1992-12-09 |
EP0517382B1 (de) | 1997-08-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |