DE69216970T2 - Hochleistungsfähiger induktionsplasmabrenner mit einem wassergekühlten keramischen abschlussrohr - Google Patents
Hochleistungsfähiger induktionsplasmabrenner mit einem wassergekühlten keramischen abschlussrohrInfo
- Publication number
- DE69216970T2 DE69216970T2 DE69216970T DE69216970T DE69216970T2 DE 69216970 T2 DE69216970 T2 DE 69216970T2 DE 69216970 T DE69216970 T DE 69216970T DE 69216970 T DE69216970 T DE 69216970T DE 69216970 T2 DE69216970 T2 DE 69216970T2
- Authority
- DE
- Germany
- Prior art keywords
- plasma
- ceramic material
- annular chamber
- tube
- confinement tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000006698 induction Effects 0.000 title claims abstract description 31
- 239000000919 ceramic Substances 0.000 title abstract description 8
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 28
- 239000002131 composite material Substances 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 6
- 229920000642 polymer Polymers 0.000 claims abstract description 6
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052582 BN Inorganic materials 0.000 claims abstract description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 5
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 5
- 239000000654 additive Substances 0.000 claims abstract description 4
- 239000000945 filler Substances 0.000 claims abstract description 4
- 239000012809 cooling fluid Substances 0.000 claims description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 230000000996 additive effect Effects 0.000 claims 1
- 239000000498 cooling water Substances 0.000 abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 239000002861 polymer material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 22
- 238000001816 cooling Methods 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000000523 sample Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 235000014820 Galium aparine Nutrition 0.000 description 1
- 240000005702 Galium aparine Species 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
- Ceramic Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/684,179 US5200595A (en) | 1991-04-12 | 1991-04-12 | High performance induction plasma torch with a water-cooled ceramic confinement tube |
PCT/CA1992/000156 WO1992019086A1 (en) | 1991-04-12 | 1992-04-10 | High performance induction plasma torch with a water-cooled ceramic confinement tube |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69216970D1 DE69216970D1 (de) | 1997-03-06 |
DE69216970T2 true DE69216970T2 (de) | 1997-07-31 |
Family
ID=24746987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69216970T Expired - Lifetime DE69216970T2 (de) | 1991-04-12 | 1992-04-10 | Hochleistungsfähiger induktionsplasmabrenner mit einem wassergekühlten keramischen abschlussrohr |
Country Status (10)
Country | Link |
---|---|
US (1) | US5200595A (ko) |
EP (1) | EP0533884B1 (ko) |
JP (1) | JP3169962B2 (ko) |
KR (1) | KR100203994B1 (ko) |
CN (1) | CN1035303C (ko) |
AT (1) | ATE148298T1 (ko) |
AU (1) | AU1640192A (ko) |
CA (1) | CA2085133C (ko) |
DE (1) | DE69216970T2 (ko) |
WO (1) | WO1992019086A1 (ko) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102010014056A1 (de) | 2010-01-29 | 2011-08-04 | j-plasma GmbH, 07751 | Induktiv gekoppelter Plasmabrenner |
DE102011008575A1 (de) | 2011-01-14 | 2012-07-19 | J-Plasma Gmbh | Induktiv gekoppelter Plasmabrenner |
DE102011107536A1 (de) | 2011-03-17 | 2012-10-18 | J-Plasma Gmbh | Brenner, insbesondere induktiv gekoppelter Plasmabrenner vorzugsweise zur Herstellung von Halbzeug für biegeunempfindliche Glasfasern |
CN107852807A (zh) * | 2015-06-29 | 2018-03-27 | 泰克纳等离子系统公司 | 具有更高等离子体能量密度的感应式等离子体喷枪 |
AT526238A4 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
AT526239B1 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
WO2024031119A1 (de) | 2022-08-09 | 2024-02-15 | Thermal Processing Solutions GmbH | Einrichtung zur thermischen behandlung eines stoffes |
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JP2023548325A (ja) | 2020-10-30 | 2023-11-16 | シックスケー インコーポレイテッド | 球状化金属粉末の合成のためのシステムおよび方法 |
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GB1033392A (en) * | 1962-06-20 | 1966-06-22 | Atomic Energy Authority Uk | Improvements in or relating to induction coupled plasma generators |
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FR1395307A (fr) * | 1964-05-15 | 1965-04-09 | Ass Elect Ind | Perfectionnements à des torches à plasma |
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US4431901A (en) * | 1982-07-02 | 1984-02-14 | The United States Of America As Represented By The United States Department Of Energy | Induction plasma tube |
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CA1266094A (en) * | 1986-01-17 | 1990-02-20 | Patrick Earl Burke | Induction heating and melting systems having improved induction coils |
US4795879A (en) * | 1987-04-13 | 1989-01-03 | The United States Of America As Represented By The United States Department Of Energy | Method of processing materials using an inductively coupled plasma |
FR2649850B1 (fr) * | 1989-07-12 | 1993-10-01 | Gaz De France | Torche a plasma |
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-
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- 1992-04-10 WO PCT/CA1992/000156 patent/WO1992019086A1/en active IP Right Grant
- 1992-04-10 AT AT92908330T patent/ATE148298T1/de active
- 1992-04-10 EP EP92908330A patent/EP0533884B1/en not_active Expired - Lifetime
- 1992-04-10 CA CA002085133A patent/CA2085133C/en not_active Expired - Lifetime
- 1992-04-10 AU AU16401/92A patent/AU1640192A/en not_active Abandoned
- 1992-04-10 DE DE69216970T patent/DE69216970T2/de not_active Expired - Lifetime
- 1992-04-10 JP JP50792092A patent/JP3169962B2/ja not_active Expired - Lifetime
- 1992-04-10 KR KR1019920703194A patent/KR100203994B1/ko not_active IP Right Cessation
- 1992-04-11 CN CN92103380A patent/CN1035303C/zh not_active Expired - Lifetime
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102010014056A1 (de) | 2010-01-29 | 2011-08-04 | j-plasma GmbH, 07751 | Induktiv gekoppelter Plasmabrenner |
DE102010014056B4 (de) | 2010-01-29 | 2022-07-07 | J-Plasma Gmbh | Induktiv gekoppelter Plasmabrenner |
DE102011008575A1 (de) | 2011-01-14 | 2012-07-19 | J-Plasma Gmbh | Induktiv gekoppelter Plasmabrenner |
DE102011107536A1 (de) | 2011-03-17 | 2012-10-18 | J-Plasma Gmbh | Brenner, insbesondere induktiv gekoppelter Plasmabrenner vorzugsweise zur Herstellung von Halbzeug für biegeunempfindliche Glasfasern |
CN107852807A (zh) * | 2015-06-29 | 2018-03-27 | 泰克纳等离子系统公司 | 具有更高等离子体能量密度的感应式等离子体喷枪 |
AT526238B1 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
AT526238A4 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
AT526239B1 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
AT526239A4 (de) * | 2022-08-09 | 2024-01-15 | Thermal Proc Solutions Gmbh | Vorrichtung zur Bereitstellung eines Plasmas |
WO2024031119A1 (de) | 2022-08-09 | 2024-02-15 | Thermal Processing Solutions GmbH | Einrichtung zur thermischen behandlung eines stoffes |
WO2024031118A2 (de) | 2022-08-09 | 2024-02-15 | Thermal Processing Solutions GmbH | Vorrichtung zur bereitstellung eines plasmas |
AT526353A4 (de) * | 2022-08-09 | 2024-02-15 | Thermal Proc Solutions Gmbh | Einrichtung zur thermischen Behandlung eines Stoffes |
WO2024031117A2 (de) | 2022-08-09 | 2024-02-15 | Thermal Processing Solutions GmbH | Vorrichtung zur bereitstellung eines plasmas |
AT526353B1 (de) * | 2022-08-09 | 2024-02-15 | Thermal Proc Solutions Gmbh | Einrichtung zur thermischen Behandlung eines Stoffes |
Also Published As
Publication number | Publication date |
---|---|
ATE148298T1 (de) | 1997-02-15 |
JPH05508053A (ja) | 1993-11-11 |
EP0533884A1 (en) | 1993-03-31 |
CA2085133C (en) | 2002-01-29 |
AU1640192A (en) | 1992-11-17 |
KR100203994B1 (ko) | 1999-06-15 |
JP3169962B2 (ja) | 2001-05-28 |
WO1992019086A1 (en) | 1992-10-29 |
CA2085133A1 (en) | 1992-10-13 |
CN1068697A (zh) | 1993-02-03 |
CN1035303C (zh) | 1997-06-25 |
US5200595A (en) | 1993-04-06 |
DE69216970D1 (de) | 1997-03-06 |
EP0533884B1 (en) | 1997-01-22 |
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