DE69215030D1 - Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop - Google Patents
Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem MikroskopInfo
- Publication number
- DE69215030D1 DE69215030D1 DE69215030T DE69215030T DE69215030D1 DE 69215030 D1 DE69215030 D1 DE 69215030D1 DE 69215030 T DE69215030 T DE 69215030T DE 69215030 T DE69215030 T DE 69215030T DE 69215030 D1 DE69215030 D1 DE 69215030D1
- Authority
- DE
- Germany
- Prior art keywords
- tunnel
- atomic force
- microscope
- combined
- force scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
- G01Q30/025—Optical microscopes coupled with SPM
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
- G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
- Y10S977/869—Optical microscope
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3199465A JPH0540034A (ja) | 1991-08-08 | 1991-08-08 | 複合型顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69215030D1 true DE69215030D1 (de) | 1996-12-12 |
DE69215030T2 DE69215030T2 (de) | 1997-03-06 |
Family
ID=16408260
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69215030T Expired - Fee Related DE69215030T2 (de) | 1991-08-08 | 1992-08-07 | Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US5360977A (de) |
EP (2) | EP0527448B1 (de) |
JP (1) | JPH0540034A (de) |
DE (1) | DE69215030T2 (de) |
Families Citing this family (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0509856B1 (de) * | 1991-03-15 | 1998-08-12 | Nikon Corporation | Mikroskop bestehend aus Rastertunnelmikroskop kombiniert mit optischem Mikroskop |
US5448399A (en) * | 1992-03-13 | 1995-09-05 | Park Scientific Instruments | Optical system for scanning microscope |
US5426302A (en) * | 1993-04-28 | 1995-06-20 | Board Of Regents, University Of Texas | Optically guided macroscopic-scan-range/nanometer resolution probing system |
US5517027A (en) * | 1993-06-08 | 1996-05-14 | Mitsubishi Denki Kabushiki Kaisha | Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these |
US5513518A (en) | 1994-05-19 | 1996-05-07 | Molecular Imaging Corporation | Magnetic modulation of force sensor for AC detection in an atomic force microscope |
US5753814A (en) | 1994-05-19 | 1998-05-19 | Molecular Imaging Corporation | Magnetically-oscillated probe microscope for operation in liquids |
US5866805A (en) | 1994-05-19 | 1999-02-02 | Molecular Imaging Corporation Arizona Board Of Regents | Cantilevers for a magnetically driven atomic force microscope |
JP3258821B2 (ja) * | 1994-06-02 | 2002-02-18 | 三菱電機株式会社 | 微小異物の位置決め方法、分析方法、これに用いる分析装置およびこれを用いた半導体素子もしくは液晶表示素子の製法 |
US6339217B1 (en) * | 1995-07-28 | 2002-01-15 | General Nanotechnology Llc | Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
US5756997A (en) * | 1996-03-04 | 1998-05-26 | General Nanotechnology, L.L.C. | Scanning probe/optical microscope with modular objective/probe and drive/detector units |
US6337479B1 (en) | 1994-07-28 | 2002-01-08 | Victor B. Kley | Object inspection and/or modification system and method |
US5751683A (en) | 1995-07-24 | 1998-05-12 | General Nanotechnology, L.L.C. | Nanometer scale data storage device and associated positioning system |
JPH08152430A (ja) * | 1994-11-29 | 1996-06-11 | Seiko Instr Inc | 位置合わせ機能付き顕微鏡 |
US5621210A (en) * | 1995-02-10 | 1997-04-15 | Molecular Imaging Corporation | Microscope for force and tunneling microscopy in liquids |
US5705814A (en) * | 1995-08-30 | 1998-01-06 | Digital Instruments, Inc. | Scanning probe microscope having automatic probe exchange and alignment |
US5874668A (en) | 1995-10-24 | 1999-02-23 | Arch Development Corporation | Atomic force microscope for biological specimens |
JPH10104242A (ja) * | 1996-09-26 | 1998-04-24 | Jeol Ltd | 走査プローブ顕微鏡 |
US6787768B1 (en) | 2001-03-08 | 2004-09-07 | General Nanotechnology Llc | Method and apparatus for tool and tip design for nanomachining and measurement |
US6802646B1 (en) | 2001-04-30 | 2004-10-12 | General Nanotechnology Llc | Low-friction moving interfaces in micromachines and nanomachines |
US6752008B1 (en) | 2001-03-08 | 2004-06-22 | General Nanotechnology Llc | Method and apparatus for scanning in scanning probe microscopy and presenting results |
US6923044B1 (en) | 2001-03-08 | 2005-08-02 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
US7196328B1 (en) | 2001-03-08 | 2007-03-27 | General Nanotechnology Llc | Nanomachining method and apparatus |
US6455838B2 (en) | 1998-10-06 | 2002-09-24 | The Regents Of The University Of California | High sensitivity deflection sensing device |
US6357285B1 (en) | 1998-11-09 | 2002-03-19 | Veeco Instruments Inc. | Method and apparatus for the quantitative and objective correlation of data from a local sensitive force detector |
WO2001003157A1 (en) | 1999-07-01 | 2001-01-11 | General Nanotechnology, Llc | Object inspection and/or modification system and method |
EP1116932A3 (de) * | 2000-01-14 | 2003-04-16 | Leica Microsystems Wetzlar GmbH | Messgerät und Verfahren zun Vermessen von Strukturen auf einem Substrat |
SE0000555D0 (sv) * | 2000-02-22 | 2000-02-22 | Nanofactory Instruments Ab | Mätanordning för transmissions-elektron-mikroskop |
US6931710B2 (en) | 2001-01-30 | 2005-08-23 | General Nanotechnology Llc | Manufacturing of micro-objects such as miniature diamond tool tips |
MXPA03007555A (es) | 2001-02-26 | 2004-10-15 | Sumitomo Metal Ind | Material de acero tratado superficialmente, un metodo para su produccion y un liquido para tratamiento de conversion quimica. |
US7253407B1 (en) | 2001-03-08 | 2007-08-07 | General Nanotechnology Llc | Active cantilever for nanomachining and metrology |
RU2180726C1 (ru) * | 2001-05-25 | 2002-03-20 | Зао "Нт-Мдт" | Сканирующий зондовый микроскоп, совмещенный с инвертированным оптическим микроскопом |
US20030233870A1 (en) * | 2001-07-18 | 2003-12-25 | Xidex Corporation | Multidimensional sensing system for atomic force microscopy |
US7053369B1 (en) | 2001-10-19 | 2006-05-30 | Rave Llc | Scan data collection for better overall data accuracy |
US6813937B2 (en) | 2001-11-28 | 2004-11-09 | General Nanotechnology Llc | Method and apparatus for micromachines, microstructures, nanomachines and nanostructures |
DE10226801B4 (de) * | 2002-06-15 | 2005-03-31 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen |
JP2005538855A (ja) | 2002-09-09 | 2005-12-22 | ジェネラル ナノテクノロジー エルエルシー | 走査型プローブ顕微鏡の流体送達 |
JP4233954B2 (ja) | 2003-08-07 | 2009-03-04 | ポップリベット・ファスナー株式会社 | 乗員保護部材をボデーパネルに取付ける装置 |
WO2005054541A1 (ja) | 2003-12-04 | 2005-06-16 | Sumitomo Metal Industries, Ltd. | 鋼材の化成処理前の表面調整処理 |
WO2008019679A1 (de) * | 2006-08-18 | 2008-02-21 | Jpk Instruments Ag | Vorrichtung und ein verfahren zum sondenmikroskopischen untersuchen einer probe |
JP5057787B2 (ja) * | 2007-01-10 | 2012-10-24 | オリンパス株式会社 | 欠陥修正装置 |
DE102007010890A1 (de) | 2007-03-06 | 2008-09-11 | Ludwig-Maximilians-Universität München | Anordnung zum Untersuchen oder/und Manipulieren von Proben |
DE102008057100A1 (de) * | 2008-11-13 | 2010-11-11 | Carl Zeiss Ag | Untersuchungseinheit für nahfeldoptische Mikroskopie |
EP2204686B9 (de) | 2008-12-30 | 2012-11-14 | Cellavision AB | Analysator zur optischen Analyse einer biologischen Probe |
EP2477037A1 (de) | 2011-01-12 | 2012-07-18 | Institut Curie | Optische Komponente zur Integration der optischen Mikroskopie in die Atomkraftmikroskopie mit Beibehaltung der maximalen Leistung der Atomkraftmikroskopie |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3989358A (en) * | 1974-11-21 | 1976-11-02 | Kms Fusion, Inc. | Adjustable micrometer stage |
JPS6349722A (ja) * | 1986-08-20 | 1988-03-02 | Canon Inc | 顕微鏡のtvカメラ取付マウント |
EP0640829B1 (de) * | 1987-08-12 | 2004-11-17 | Olympus Optical Co., Ltd. | Rastertunnelmikroskop |
DE68916667T2 (de) * | 1988-03-04 | 1995-01-12 | Kabushiki Kaisha Toshiba, Kawasaki, Kanagawa | Mikroskop. |
US4999495A (en) * | 1988-08-31 | 1991-03-12 | Seiko Instruments Inc. | Scanning tunneling microscope |
US5041783A (en) * | 1989-02-13 | 1991-08-20 | Olympus Optical Co., Ltd. | Probe unit for an atomic probe microscope |
US5260824A (en) * | 1989-04-24 | 1993-11-09 | Olympus Optical Co., Ltd. | Atomic force microscope |
JP2821005B2 (ja) * | 1989-10-02 | 1998-11-05 | オリンパス光学工業株式会社 | 微細表面形状計測装置 |
US5206702A (en) * | 1989-10-09 | 1993-04-27 | Olympus Optical Co., Ltd. | Technique for canceling the effect of external vibration on an atomic force microscope |
US5144833A (en) * | 1990-09-27 | 1992-09-08 | International Business Machines Corporation | Atomic force microscopy |
JPH05256641A (ja) * | 1992-03-11 | 1993-10-05 | Olympus Optical Co Ltd | カンチレバー変位検出装置 |
-
1991
- 1991-08-08 JP JP3199465A patent/JPH0540034A/ja active Pending
-
1992
- 1992-07-29 US US07/921,129 patent/US5360977A/en not_active Expired - Fee Related
- 1992-08-07 EP EP92113490A patent/EP0527448B1/de not_active Expired - Lifetime
- 1992-08-07 DE DE69215030T patent/DE69215030T2/de not_active Expired - Fee Related
- 1992-08-07 EP EP95106253A patent/EP0665417A3/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP0665417A3 (de) | 1995-09-06 |
EP0665417A2 (de) | 1995-08-02 |
JPH0540034A (ja) | 1993-02-19 |
EP0527448A2 (de) | 1993-02-17 |
DE69215030T2 (de) | 1997-03-06 |
US5360977A (en) | 1994-11-01 |
EP0527448B1 (de) | 1996-11-06 |
EP0527448A3 (en) | 1993-05-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: WESER & KOLLEGEN, 81245 MUENCHEN |
|
8339 | Ceased/non-payment of the annual fee |