DE69215030D1 - Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop - Google Patents

Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop

Info

Publication number
DE69215030D1
DE69215030D1 DE69215030T DE69215030T DE69215030D1 DE 69215030 D1 DE69215030 D1 DE 69215030D1 DE 69215030 T DE69215030 T DE 69215030T DE 69215030 T DE69215030 T DE 69215030T DE 69215030 D1 DE69215030 D1 DE 69215030D1
Authority
DE
Germany
Prior art keywords
tunnel
atomic force
microscope
combined
force scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69215030T
Other languages
English (en)
Other versions
DE69215030T2 (de
Inventor
Onuki Tetsuji
Suzuki Masatoshi
Matsushiro Hiroyuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Application granted granted Critical
Publication of DE69215030D1 publication Critical patent/DE69215030D1/de
Publication of DE69215030T2 publication Critical patent/DE69215030T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/869—Optical microscope

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69215030T 1991-08-08 1992-08-07 Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop Expired - Fee Related DE69215030T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3199465A JPH0540034A (ja) 1991-08-08 1991-08-08 複合型顕微鏡

Publications (2)

Publication Number Publication Date
DE69215030D1 true DE69215030D1 (de) 1996-12-12
DE69215030T2 DE69215030T2 (de) 1997-03-06

Family

ID=16408260

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69215030T Expired - Fee Related DE69215030T2 (de) 1991-08-08 1992-08-07 Tunnel/Atomkraft-Rastermikroskop kombiniert mit optischem Mikroskop

Country Status (4)

Country Link
US (1) US5360977A (de)
EP (2) EP0527448B1 (de)
JP (1) JPH0540034A (de)
DE (1) DE69215030T2 (de)

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DE69226554T2 (de) * 1991-03-15 1999-03-04 Nikon Corp Mikroskop bestehend aus Rastertunnelmikroskop kombiniert mit optischem Mikroskop
US5448399A (en) 1992-03-13 1995-09-05 Park Scientific Instruments Optical system for scanning microscope
US5426302A (en) * 1993-04-28 1995-06-20 Board Of Regents, University Of Texas Optically guided macroscopic-scan-range/nanometer resolution probing system
US5517027A (en) * 1993-06-08 1996-05-14 Mitsubishi Denki Kabushiki Kaisha Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
US5866805A (en) 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5513518A (en) 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5753814A (en) 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
JP3258821B2 (ja) * 1994-06-02 2002-02-18 三菱電機株式会社 微小異物の位置決め方法、分析方法、これに用いる分析装置およびこれを用いた半導体素子もしくは液晶表示素子の製法
US6337479B1 (en) 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US5751683A (en) 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
US5756997A (en) * 1996-03-04 1998-05-26 General Nanotechnology, L.L.C. Scanning probe/optical microscope with modular objective/probe and drive/detector units
US6339217B1 (en) 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
JPH08152430A (ja) * 1994-11-29 1996-06-11 Seiko Instr Inc 位置合わせ機能付き顕微鏡
US5621210A (en) * 1995-02-10 1997-04-15 Molecular Imaging Corporation Microscope for force and tunneling microscopy in liquids
US5705814A (en) * 1995-08-30 1998-01-06 Digital Instruments, Inc. Scanning probe microscope having automatic probe exchange and alignment
US5874668A (en) 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JPH10104242A (ja) * 1996-09-26 1998-04-24 Jeol Ltd 走査プローブ顕微鏡
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6802646B1 (en) 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6455838B2 (en) 1998-10-06 2002-09-24 The Regents Of The University Of California High sensitivity deflection sensing device
US6357285B1 (en) 1998-11-09 2002-03-19 Veeco Instruments Inc. Method and apparatus for the quantitative and objective correlation of data from a local sensitive force detector
AU6061100A (en) 1999-07-01 2001-01-22 General Nanotechnology, Llc Object inspection and/or modification system and method
EP1116932A3 (de) * 2000-01-14 2003-04-16 Leica Microsystems Wetzlar GmbH Messgerät und Verfahren zun Vermessen von Strukturen auf einem Substrat
SE0000555D0 (sv) 2000-02-22 2000-02-22 Nanofactory Instruments Ab Mätanordning för transmissions-elektron-mikroskop
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
RU2258765C2 (ru) 2001-02-26 2005-08-20 Сумитомо Метал Индастриз, Лтд. Поверхностно-обработанный стальной материал, способ его получения и жидкость для химической конверсионной обработки
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
RU2180726C1 (ru) * 2001-05-25 2002-03-20 Зао "Нт-Мдт" Сканирующий зондовый микроскоп, совмещенный с инвертированным оптическим микроскопом
US20030233870A1 (en) * 2001-07-18 2003-12-25 Xidex Corporation Multidimensional sensing system for atomic force microscopy
US7053369B1 (en) 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
US6998689B2 (en) 2002-09-09 2006-02-14 General Nanotechnology Llc Fluid delivery for scanning probe microscopy
DE10226801B4 (de) * 2002-06-15 2005-03-31 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen
JP4233954B2 (ja) 2003-08-07 2009-03-04 ポップリベット・ファスナー株式会社 乗員保護部材をボデーパネルに取付ける装置
EP1705265B1 (de) 2003-12-04 2015-07-08 Nippon Steel & Sumitomo Metal Corporation Oberflächeneinstellungsbehandlung vor der chemischen behandlung eines stahlprodukts
US9063335B2 (en) * 2006-08-18 2015-06-23 Jpk Instruments Ag Apparatus and method for examining a specimen by means of probe microscopy
JP5057787B2 (ja) * 2007-01-10 2012-10-24 オリンパス株式会社 欠陥修正装置
DE102007010890A1 (de) 2007-03-06 2008-09-11 Ludwig-Maximilians-Universität München Anordnung zum Untersuchen oder/und Manipulieren von Proben
DE102008057100A1 (de) * 2008-11-13 2010-11-11 Carl Zeiss Ag Untersuchungseinheit für nahfeldoptische Mikroskopie
EP2204686B9 (de) * 2008-12-30 2012-11-14 Cellavision AB Analysator zur optischen Analyse einer biologischen Probe
EP2477037A1 (de) 2011-01-12 2012-07-18 Institut Curie Optische Komponente zur Integration der optischen Mikroskopie in die Atomkraftmikroskopie mit Beibehaltung der maximalen Leistung der Atomkraftmikroskopie

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3989358A (en) * 1974-11-21 1976-11-02 Kms Fusion, Inc. Adjustable micrometer stage
JPS6349722A (ja) * 1986-08-20 1988-03-02 Canon Inc 顕微鏡のｔｖカメラ取付マウント
DE3854620T2 (de) * 1987-08-12 1996-03-28 Olympus Optical Co., Ltd., Tokio/Tokyo Tunnel-abtastmikroskop.
EP0331148B1 (de) * 1988-03-04 1994-07-13 Kabushiki Kaisha Toshiba Mikroskop
US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
US5041783A (en) * 1989-02-13 1991-08-20 Olympus Optical Co., Ltd. Probe unit for an atomic probe microscope
US5260824A (en) * 1989-04-24 1993-11-09 Olympus Optical Co., Ltd. Atomic force microscope
JP2821005B2 (ja) * 1989-10-02 1998-11-05 オリンパス光学工業株式会社 微細表面形状計測装置
US5206702A (en) * 1989-10-09 1993-04-27 Olympus Optical Co., Ltd. Technique for canceling the effect of external vibration on an atomic force microscope
US5144833A (en) * 1990-09-27 1992-09-08 International Business Machines Corporation Atomic force microscopy
JPH05256641A (ja) * 1992-03-11 1993-10-05 Olympus Optical Co Ltd カンチレバー変位検出装置

Also Published As

Publication number Publication date
EP0527448A2 (de) 1993-02-17
EP0665417A3 (de) 1995-09-06
DE69215030T2 (de) 1997-03-06
JPH0540034A (ja) 1993-02-19
EP0527448A3 (en) 1993-05-26
EP0527448B1 (de) 1996-11-06
EP0665417A2 (de) 1995-08-02
US5360977A (en) 1994-11-01

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Legal Events

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8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: WESER & KOLLEGEN, 81245 MUENCHEN

8339 Ceased/non-payment of the annual fee