SE0000555D0 - Mätanordning för transmissions-elektron-mikroskop - Google Patents

Mätanordning för transmissions-elektron-mikroskop

Info

Publication number
SE0000555D0
SE0000555D0 SE0000555A SE0000555A SE0000555D0 SE 0000555 D0 SE0000555 D0 SE 0000555D0 SE 0000555 A SE0000555 A SE 0000555A SE 0000555 A SE0000555 A SE 0000555A SE 0000555 D0 SE0000555 D0 SE 0000555D0
Authority
SE
Sweden
Prior art keywords
transmission electron
electron microscope
measuring device
atomic force
relates
Prior art date
Application number
SE0000555A
Other languages
English (en)
Inventor
Haakan Olin
Original Assignee
Nanofactory Instruments Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanofactory Instruments Ab filed Critical Nanofactory Instruments Ab
Priority to SE0000555A priority Critical patent/SE0000555D0/sv
Publication of SE0000555D0 publication Critical patent/SE0000555D0/sv
Priority to US10/203,475 priority patent/US6864483B2/en
Priority to AU2001234318A priority patent/AU2001234318A1/en
Priority to PCT/SE2001/000380 priority patent/WO2001063204A1/en
Priority to EP01906496A priority patent/EP1257780A1/en
Priority to JP2001562128A priority patent/JP4708657B2/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
SE0000555A 2000-02-22 2000-02-22 Mätanordning för transmissions-elektron-mikroskop SE0000555D0 (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE0000555A SE0000555D0 (sv) 2000-02-22 2000-02-22 Mätanordning för transmissions-elektron-mikroskop
US10/203,475 US6864483B2 (en) 2000-02-22 2001-02-20 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
AU2001234318A AU2001234318A1 (en) 2000-02-22 2001-02-20 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
PCT/SE2001/000380 WO2001063204A1 (en) 2000-02-22 2001-02-20 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
EP01906496A EP1257780A1 (en) 2000-02-22 2001-02-20 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device
JP2001562128A JP4708657B2 (ja) 2000-02-22 2001-02-20 透過型電子顕微鏡から利用可能な測定情報を増加させる方法および原子間力顕微鏡挿入物を含む透過型電子顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE0000555A SE0000555D0 (sv) 2000-02-22 2000-02-22 Mätanordning för transmissions-elektron-mikroskop

Publications (1)

Publication Number Publication Date
SE0000555D0 true SE0000555D0 (sv) 2000-02-22

Family

ID=20278525

Family Applications (1)

Application Number Title Priority Date Filing Date
SE0000555A SE0000555D0 (sv) 2000-02-22 2000-02-22 Mätanordning för transmissions-elektron-mikroskop

Country Status (6)

Country Link
US (1) US6864483B2 (sv)
EP (1) EP1257780A1 (sv)
JP (1) JP4708657B2 (sv)
AU (1) AU2001234318A1 (sv)
SE (1) SE0000555D0 (sv)
WO (1) WO2001063204A1 (sv)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0103781D0 (sv) * 2001-11-12 2001-11-12 Nanofactory Instruments Ab Mätanordning för elektronmikroskop
US6677697B2 (en) * 2001-12-06 2004-01-13 Veeco Instruments Inc. Force scanning probe microscope
SE0400177D0 (sv) 2004-01-26 2004-01-26 Nanofactory Instruments Ab Sensor
US8026491B2 (en) * 2006-03-08 2011-09-27 Hitachi High-Technologies Corporation Charged particle beam apparatus and method for charged particle beam adjustment
EP3364444A1 (en) 2017-02-21 2018-08-22 IMEC vzw A method and apparatus for transmission electron microscopy
CN111024988B (zh) * 2019-12-12 2021-07-13 江苏集萃微纳自动化系统与装备技术研究所有限公司 应用于afm-sem混合显微镜系统的prc及其制造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0447654A (ja) * 1990-06-13 1992-02-17 Hitachi Ltd 表面顕微鏡
US5552602A (en) 1991-05-15 1996-09-03 Hitachi, Ltd. Electron microscope
JPH0540034A (ja) 1991-08-08 1993-02-19 Nikon Corp 複合型顕微鏡
JP2984154B2 (ja) * 1992-10-06 1999-11-29 日本電子株式会社 原子間力顕微鏡
JPH06129847A (ja) * 1992-10-21 1994-05-13 Canon Inc 原子間力顕微鏡装置
JP3761906B2 (ja) * 1992-11-06 2006-03-29 日立建機株式会社 走査プローブ顕微鏡及びその制御誤差の補正方法
NL9400111A (nl) * 1994-01-24 1995-09-01 Biomat Res Group Stichting Azl Elektronenmicroscoop met Ramanspectroscopie.
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
WO1997009584A1 (en) * 1995-09-01 1997-03-13 International Business Machines Corporation Cantilever with integrated deflection sensor
JP3407101B2 (ja) * 1997-08-21 2003-05-19 科学技術振興事業団 超高真空状態で電子顕微鏡と走査トンネル顕微鏡とで同時に観察できる顕微鏡

Also Published As

Publication number Publication date
US20030116710A1 (en) 2003-06-26
AU2001234318A1 (en) 2001-09-03
EP1257780A1 (en) 2002-11-20
JP2003524287A (ja) 2003-08-12
US6864483B2 (en) 2005-03-08
JP4708657B2 (ja) 2011-06-22
WO2001063204A1 (en) 2001-08-30

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