SE0400177D0 - Sensor - Google Patents
SensorInfo
- Publication number
- SE0400177D0 SE0400177D0 SE0400177A SE0400177A SE0400177D0 SE 0400177 D0 SE0400177 D0 SE 0400177D0 SE 0400177 A SE0400177 A SE 0400177A SE 0400177 A SE0400177 A SE 0400177A SE 0400177 D0 SE0400177 D0 SE 0400177D0
- Authority
- SE
- Sweden
- Prior art keywords
- membrane
- force sensor
- springs
- electrodes
- bulk structure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/36—DC mode
- G01Q60/366—Nanoindenters, i.e. wherein the indenting force is measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q80/00—Applications, other than SPM, of scanning-probe techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/206—Modifying objects while observing
- H01J2237/2067—Surface alteration
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Micromachines (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Pressure Sensors (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0400177A SE0400177D0 (sv) | 2004-01-26 | 2004-01-26 | Sensor |
EP05704766A EP1706888A2 (en) | 2004-01-26 | 2005-01-26 | Mems nanoindenter |
US10/586,729 US7654159B2 (en) | 2004-01-26 | 2005-01-26 | MEMS nanoindenter |
PCT/SE2005/000098 WO2005069748A2 (en) | 2004-01-26 | 2005-01-26 | Mems nanoindenter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0400177A SE0400177D0 (sv) | 2004-01-26 | 2004-01-26 | Sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
SE0400177D0 true SE0400177D0 (sv) | 2004-01-26 |
Family
ID=31713246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0400177A SE0400177D0 (sv) | 2004-01-26 | 2004-01-26 | Sensor |
Country Status (4)
Country | Link |
---|---|
US (1) | US7654159B2 (sv) |
EP (1) | EP1706888A2 (sv) |
SE (1) | SE0400177D0 (sv) |
WO (1) | WO2005069748A2 (sv) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7798011B2 (en) * | 2006-02-08 | 2010-09-21 | Hysitron, Inc. | Actuatable capacitive transducer for quantitative nanoindentation combined with transmission electron microscopy |
US8945970B2 (en) * | 2006-09-22 | 2015-02-03 | Carnegie Mellon University | Assembling and applying nano-electro-mechanical systems |
WO2008089950A1 (en) * | 2007-01-22 | 2008-07-31 | Nanofactory Instruments Ab | Mems sensor for in situ tem atomic force microscopy |
US9335240B2 (en) | 2008-07-03 | 2016-05-10 | Hysitron Incorporated | Method of measuring an interaction force |
WO2010003149A1 (en) | 2008-07-03 | 2010-01-07 | Hysitron Incorporated | Micromachined comb drive for quantitative nanoindentation |
JP5826760B2 (ja) | 2009-11-27 | 2015-12-02 | ハイジトロン, インク.Hysitron, Inc. | ミクロ電気機械ヒータ |
US8631687B2 (en) | 2010-04-19 | 2014-01-21 | Hysitron, Inc. | Indenter assembly |
WO2012122523A1 (en) * | 2011-03-09 | 2012-09-13 | Warren Oden Lee | Three dimensional transducer |
US8717043B2 (en) | 2011-07-27 | 2014-05-06 | International Business Machines Corporation | Determining thermal interface material (TIM) thickness change |
US8794079B2 (en) | 2011-11-04 | 2014-08-05 | International Business Machines Corporation | Determining magnitude of compressive loading |
US9476816B2 (en) | 2011-11-14 | 2016-10-25 | Hysitron, Inc. | Probe tip heating assembly |
EP2786116B1 (en) | 2011-11-28 | 2020-07-15 | Bruker Nano, Inc. | High temperature heating system |
US9829417B2 (en) | 2012-06-13 | 2017-11-28 | Hysitron, Inc. | Environmental conditioning assembly for use in mechanical testing at micron or nano-scales |
EP2926111B1 (en) * | 2012-11-28 | 2022-07-27 | Bruker Nano, Inc. | Micromachined comb drive for quantitative nanoindentation |
US9535086B2 (en) | 2014-06-24 | 2017-01-03 | Femtotools Ag | Interface of a microfabricated scanning force sensor for combined force and position sensing |
US10168261B2 (en) | 2015-03-23 | 2019-01-01 | Kla-Tencor Corporation | Structure for achieving dimensional stability during temperature changes |
US10151715B2 (en) | 2015-09-03 | 2018-12-11 | Saudi Arabian Oil Company | Nano-level evaluation of kerogen-rich reservoir rock |
US9869649B2 (en) | 2015-09-03 | 2018-01-16 | Saudi Arabian Oil Company | Nano-level evaluation of kerogen-rich reservoir rock |
CN105223213B (zh) * | 2015-09-28 | 2017-12-15 | 北京工业大学 | 一种透射电镜双倾原位纳米压痕平台 |
US10451601B2 (en) | 2016-06-28 | 2019-10-22 | Saudi Arabian Oil Company | Nano-indentation test to determine mechanical properties of reservoir rock |
EP3489654B1 (en) | 2017-11-22 | 2020-07-29 | FemtoTools AG | Mems nanoindenter chip with indenter probe and reference probe |
EP3690423B8 (en) | 2019-02-04 | 2023-11-29 | Femtotools AG | Mems-based nanoindentation force sensor with electro-thermal tip heating |
WO2021016515A1 (en) | 2019-07-24 | 2021-01-28 | Saudi Arabian Oil Company | Oxidizing gasses for carbon dioxide-based fracturing fluids |
US11492541B2 (en) | 2019-07-24 | 2022-11-08 | Saudi Arabian Oil Company | Organic salts of oxidizing anions as energetic materials |
WO2021138355A1 (en) | 2019-12-31 | 2021-07-08 | Saudi Arabian Oil Company | Viscoelastic-surfactant fracturing fluids having oxidizer |
US11352548B2 (en) | 2019-12-31 | 2022-06-07 | Saudi Arabian Oil Company | Viscoelastic-surfactant treatment fluids having oxidizer |
US11339321B2 (en) | 2019-12-31 | 2022-05-24 | Saudi Arabian Oil Company | Reactive hydraulic fracturing fluid |
US11473001B2 (en) | 2020-01-17 | 2022-10-18 | Saudi Arabian Oil Company | Delivery of halogens to a subterranean formation |
US11268373B2 (en) | 2020-01-17 | 2022-03-08 | Saudi Arabian Oil Company | Estimating natural fracture properties based on production from hydraulically fractured wells |
US11473009B2 (en) | 2020-01-17 | 2022-10-18 | Saudi Arabian Oil Company | Delivery of halogens to a subterranean formation |
US11365344B2 (en) | 2020-01-17 | 2022-06-21 | Saudi Arabian Oil Company | Delivery of halogens to a subterranean formation |
US11578263B2 (en) | 2020-05-12 | 2023-02-14 | Saudi Arabian Oil Company | Ceramic-coated proppant |
US11542815B2 (en) | 2020-11-30 | 2023-01-03 | Saudi Arabian Oil Company | Determining effect of oxidative hydraulic fracturing |
US20230280218A1 (en) * | 2022-03-01 | 2023-09-07 | Asmpt Singapore Pte. Ltd. | Force measurement device and method for bonding or encapsulation process and apparatus incorporating the device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3287858B2 (ja) * | 1991-05-15 | 2002-06-04 | 株式会社日立製作所 | 電子顕微鏡装置及び電子顕微方法 |
DE4309206C1 (de) * | 1993-03-22 | 1994-09-15 | Texas Instruments Deutschland | Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor |
US6026677A (en) * | 1993-10-01 | 2000-02-22 | Hysitron, Incorporated | Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
US5553486A (en) | 1993-10-01 | 1996-09-10 | Hysitron Incorporated | Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
SE0000555D0 (sv) | 2000-02-22 | 2000-02-22 | Nanofactory Instruments Ab | Mätanordning för transmissions-elektron-mikroskop |
US6806991B1 (en) * | 2001-08-16 | 2004-10-19 | Zyvex Corporation | Fully released MEMs XYZ flexure stage with integrated capacitive feedback |
SE0103781D0 (sv) | 2001-11-12 | 2001-11-12 | Nanofactory Instruments Ab | Mätanordning för elektronmikroskop |
US7461543B2 (en) * | 2005-06-17 | 2008-12-09 | Georgia Tech Research Corporation | Overlay measurement methods with firat based probe microscope |
-
2004
- 2004-01-26 SE SE0400177A patent/SE0400177D0/sv unknown
-
2005
- 2005-01-26 WO PCT/SE2005/000098 patent/WO2005069748A2/en active Application Filing
- 2005-01-26 US US10/586,729 patent/US7654159B2/en active Active
- 2005-01-26 EP EP05704766A patent/EP1706888A2/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
EP1706888A2 (en) | 2006-10-04 |
WO2005069748A2 (en) | 2005-08-04 |
US20080276727A1 (en) | 2008-11-13 |
US7654159B2 (en) | 2010-02-02 |
WO2005069748A3 (en) | 2005-09-22 |
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