ATE416366T1 - Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke - Google Patents

Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke

Info

Publication number
ATE416366T1
ATE416366T1 AT06726079T AT06726079T ATE416366T1 AT E416366 T1 ATE416366 T1 AT E416366T1 AT 06726079 T AT06726079 T AT 06726079T AT 06726079 T AT06726079 T AT 06726079T AT E416366 T1 ATE416366 T1 AT E416366T1
Authority
AT
Austria
Prior art keywords
wheatstone bridge
force measurement
resistive
resistive detection
membrane
Prior art date
Application number
AT06726079T
Other languages
English (en)
Inventor
Patrice Rey
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE416366T1 publication Critical patent/ATE416366T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • G01L1/2262—Measuring circuits therefor involving simple electrical bridges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Measurement Of Force In General (AREA)
AT06726079T 2005-03-17 2006-03-13 Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke ATE416366T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0502649A FR2883372B1 (fr) 2005-03-17 2005-03-17 Dispositif de mesure de force par detection resistive a double pont de wheastone

Publications (1)

Publication Number Publication Date
ATE416366T1 true ATE416366T1 (de) 2008-12-15

Family

ID=34978729

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06726079T ATE416366T1 (de) 2005-03-17 2006-03-13 Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke

Country Status (7)

Country Link
US (1) US7694586B2 (de)
EP (1) EP1877746B1 (de)
JP (1) JP2008533481A (de)
AT (1) ATE416366T1 (de)
DE (1) DE602006004034D1 (de)
FR (1) FR2883372B1 (de)
WO (1) WO2006097613A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4697004B2 (ja) 2006-03-29 2011-06-08 株式会社日立製作所 力学量測定装置
HUP0600488A2 (en) * 2006-06-13 2008-05-28 Mta Mueszaki Fiz Es Anyagtudom Method for producing micromechanical elements can be integrated into cmos technology, carrying monolith si and monolith sio produced by porous si micromanufacturing process
DE102007010913A1 (de) * 2007-03-05 2008-09-11 Endress + Hauser Gmbh + Co. Kg Drucksensor
FR2942316B1 (fr) 2009-02-13 2011-07-22 Commissariat Energie Atomique Capteur de force de contact
US20110092840A1 (en) * 2009-09-23 2011-04-21 Feather Sensors Llc Intelligent air flow sensors
WO2011039566A1 (de) * 2009-09-30 2011-04-07 Tecsis Gmbh Messvorrichtung mit erfassung von deformationen
WO2013057689A1 (en) 2011-10-21 2013-04-25 Ecole Polytechnique Federale De Lausanne (Epfl) SiC HIGH TEMPERATURE PRESSURE TRANSDUCER
US8857271B2 (en) 2012-07-24 2014-10-14 The Boeing Company Wraparound strain gage assembly for brake rod
DE102013107953A1 (de) * 2013-07-25 2015-01-29 Pro-Micron Gmbh & Co. Kg Verfahren und Messsystem zur Ermittlung von Verformungen eines geometrischen Körpers mittels Kraft- oder Verformungsmesssensoren
JP2015175833A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
JP6694062B2 (ja) * 2016-06-08 2020-05-13 日立オートモティブシステムズ株式会社 力センサ
JP6869710B2 (ja) * 2016-12-09 2021-05-12 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
US10260981B2 (en) * 2017-02-06 2019-04-16 Nxp Usa, Inc. Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
JP6794293B2 (ja) * 2017-02-24 2020-12-02 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
JP6776152B2 (ja) * 2017-02-24 2020-10-28 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
JP6776151B2 (ja) * 2017-02-24 2020-10-28 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
KR102241350B1 (ko) * 2017-07-06 2021-04-15 미네베아미츠미 가부시키가이샤 스트레인 게이지 및 다축력 센서
KR102036536B1 (ko) * 2018-03-19 2019-10-25 대양전기공업 주식회사 4개의 저항체로 2개의 독립된 풀휘트스톤브리지를 형성하는 반도체 압력센서
JP6618128B2 (ja) * 2018-07-11 2019-12-11 株式会社レプトリノ 力覚センサ及び力覚センサのブリッジ回路構成方法
WO2020202821A1 (ja) * 2019-04-03 2020-10-08 公益財団法人電磁材料研究所 力センサ
FR3098298B1 (fr) * 2019-07-03 2021-07-16 Arianegroup Sas Capteur de pression double
US11650110B2 (en) * 2020-11-04 2023-05-16 Honeywell International Inc. Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor
JP7073471B2 (ja) * 2020-11-05 2022-05-23 日本電産コパル電子株式会社 起歪体

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915015A (en) * 1974-03-18 1975-10-28 Stanford Research Inst Strain gauge transducer system
US4530244A (en) * 1982-01-04 1985-07-23 Honeywell Inc. Semiconductor pressure transducer
US4745812A (en) * 1987-03-25 1988-05-24 The United States Of America As Represented By The Secretary Of The Army Triaxial tactile sensor
JPH01250837A (ja) * 1988-03-31 1989-10-05 Ricoh Co Ltd 力覚センサの配線方法
US5259248A (en) * 1990-03-19 1993-11-09 Hitachi Ltd. Integrated multisensor and static and differential pressure transmitter and plant system using the integrated multisensor
DE4012829C2 (de) 1990-04-23 1995-11-23 Walter Rieger Vorrichtung zur mehrdimensionalen Kraftmessung und daraus abgeleiteten Größen durch Meßwertaufnahme mittels elektrischer Sensoren, z. B. Dehnungsmeßstreifen
DE19527687A1 (de) * 1995-07-28 1997-01-30 Bosch Gmbh Robert Sensor
JP3666622B2 (ja) * 1996-09-30 2005-06-29 カヤバ工業株式会社 荷重検出装置
FR2784745B1 (fr) 1998-10-16 2001-01-05 Crouzet Automatismes Detecteur de position a cellule de detection micro-usinee
US6422088B1 (en) * 1999-09-24 2002-07-23 Denso Corporation Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus
JP4438193B2 (ja) * 1999-09-24 2010-03-24 株式会社デンソー 圧力センサ
DE60231067D1 (de) 2001-07-10 2009-03-19 Commissariat Energie Atomique Eine Kraftmesseinrichtung beinhaltender Reifen
JP4045979B2 (ja) * 2003-02-26 2008-02-13 株式会社デンソー 圧力検出装置
DE50313527D1 (de) * 2003-07-03 2011-04-21 Grundfos As Differenzdrucksensor
JP4303091B2 (ja) * 2003-11-10 2009-07-29 ニッタ株式会社 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット
FR2885409B1 (fr) * 2005-05-04 2007-08-31 Commissariat Energie Atomique Dispositif de mesure de force a tige rigide
FR2885411B1 (fr) * 2005-05-04 2007-07-06 Michelin Soc Tech Pneumatique comportant un dispositif de mesure de force a tige rigide

Also Published As

Publication number Publication date
EP1877746B1 (de) 2008-12-03
EP1877746A1 (de) 2008-01-16
WO2006097613A1 (fr) 2006-09-21
US20080276726A1 (en) 2008-11-13
US7694586B2 (en) 2010-04-13
FR2883372A1 (fr) 2006-09-22
FR2883372B1 (fr) 2007-06-29
JP2008533481A (ja) 2008-08-21
DE602006004034D1 (de) 2009-01-15

Similar Documents

Publication Publication Date Title
ATE416366T1 (de) Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke
TW200724881A (en) Circuit board monitoring system
ATE493290T1 (de) Alcotestgerät
ATE476659T1 (de) Sensor für mehrere analyte
EP2423768A3 (de) Sensorprüfung und Wertaustausch zur durchgehenden Emissionsüberwachung
EP1924849A4 (de) Elektrochemisches thermodynamisches messsystem
FR2951826B1 (fr) Capteur a detection piezoresistive dans le plan
WO2011100117A3 (en) Compact and robust load and moment sensor
FR2893711B1 (fr) Dispositif et procede de mesure capacitive par pont flottant
BRPI0407739A (pt) sistema de monitoração de gás e sistema de medição de gás na corrente lateral adaptado para se comunicar com um sistema de medição de gás na corrente principal
BRPI0817189A2 (pt) Sensores de teste de multi-região e de potencial, métodos, e sistemas
WO2012103073A3 (en) Non-differential elastomer curvature sensor
ATE512681T1 (de) Dialysesystem mit nichtinvasiver temperaturmessung
DK2052236T3 (da) Optisk detektionssystem og fremgangsmåde til at skelne plantemateriale
ATE547705T1 (de) Kohlenhydratnachweissensor
EP1890114A4 (de) Strömungsgeschwindigkeitsmesser und strömungsgeschwindigkeitssteuersystem damit
FR2924422B1 (fr) Dispositif a detection par jauge de contrainte piezoresistive suspendue comportant une cellule d'amplification de contrainte.
WO2008157619A3 (en) Total internal reflection displacement scale
WO2009055117A3 (en) Determining a characteristic of a seismic sensing module using a processor in the seismic sensing module
EP3901565A4 (de) Zusammengesetztes piezoelektrisches element, reifenzustandsmessvorrichtung, reifensensormodul, reifensensorvorrichtung und piezoelektrischer sensor
WO2008043614A3 (de) Messelement mit einer als massverkörperung fungierenden spur und korrespondierendes, mit einem solchen messelement ausführbares messverfahren
WO2007126882A3 (en) Analysis of splice variant expression data
ATE542501T1 (de) Verbindungselement für orthopädische komponenten
DE50313527D1 (de) Differenzdrucksensor
FR2897937B1 (fr) Capteur de pression a jauges resistives

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties