ATE416366T1 - Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke - Google Patents

Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke

Info

Publication number
ATE416366T1
ATE416366T1 AT06726079T AT06726079T ATE416366T1 AT E416366 T1 ATE416366 T1 AT E416366T1 AT 06726079 T AT06726079 T AT 06726079T AT 06726079 T AT06726079 T AT 06726079T AT E416366 T1 ATE416366 T1 AT E416366T1
Authority
AT
Austria
Prior art keywords
wheatstone bridge
force measurement
resistive
resistive detection
membrane
Prior art date
Application number
AT06726079T
Other languages
English (en)
Inventor
Patrice Rey
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE416366T1 publication Critical patent/ATE416366T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
    • G01L5/162—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance of piezoresistors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/225—Measuring circuits therefor
    • G01L1/2262—Measuring circuits therefor involving simple electrical bridges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measurement Of Force In General (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
AT06726079T 2005-03-17 2006-03-13 Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke ATE416366T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0502649A FR2883372B1 (fr) 2005-03-17 2005-03-17 Dispositif de mesure de force par detection resistive a double pont de wheastone

Publications (1)

Publication Number Publication Date
ATE416366T1 true ATE416366T1 (de) 2008-12-15

Family

ID=34978729

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06726079T ATE416366T1 (de) 2005-03-17 2006-03-13 Einrichtung zur kraftmessung durch resistive detektion mit doppelter wheatstonebrücke

Country Status (7)

Country Link
US (1) US7694586B2 (de)
EP (1) EP1877746B1 (de)
JP (1) JP2008533481A (de)
AT (1) ATE416366T1 (de)
DE (1) DE602006004034D1 (de)
FR (1) FR2883372B1 (de)
WO (1) WO2006097613A1 (de)

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* Cited by examiner, † Cited by third party
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JP4697004B2 (ja) * 2006-03-29 2011-06-08 株式会社日立製作所 力学量測定装置
HUP0600488A2 (en) * 2006-06-13 2008-05-28 Mta Mueszaki Fiz Es Anyagtudom Method for producing micromechanical elements can be integrated into cmos technology, carrying monolith si and monolith sio produced by porous si micromanufacturing process
DE102007010913A1 (de) 2007-03-05 2008-09-11 Endress + Hauser Gmbh + Co. Kg Drucksensor
FR2942316B1 (fr) 2009-02-13 2011-07-22 Commissariat Energie Atomique Capteur de force de contact
US20110092840A1 (en) * 2009-09-23 2011-04-21 Feather Sensors Llc Intelligent air flow sensors
WO2011039566A1 (de) * 2009-09-30 2011-04-07 Tecsis Gmbh Messvorrichtung mit erfassung von deformationen
EP2769191B1 (de) 2011-10-21 2020-03-04 CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement Sic-hochtemperatur-druckwandler
US8857271B2 (en) 2012-07-24 2014-10-14 The Boeing Company Wraparound strain gage assembly for brake rod
DE102013107953A1 (de) * 2013-07-25 2015-01-29 Pro-Micron Gmbh & Co. Kg Verfahren und Messsystem zur Ermittlung von Verformungen eines geometrischen Körpers mittels Kraft- oder Verformungsmesssensoren
JP2015175833A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
JP6694062B2 (ja) * 2016-06-08 2020-05-13 日立オートモティブシステムズ株式会社 力センサ
JP6869710B2 (ja) * 2016-12-09 2021-05-12 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
US10260981B2 (en) * 2017-02-06 2019-04-16 Nxp Usa, Inc. Pressure sensor having sense elements in multiple wheatstone bridges with chained outputs
JP6776152B2 (ja) * 2017-02-24 2020-10-28 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
JP6794293B2 (ja) * 2017-02-24 2020-12-02 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
JP6776151B2 (ja) * 2017-02-24 2020-10-28 日本電産コパル電子株式会社 起歪体およびその起歪体を備えた力覚センサ
WO2019009368A1 (ja) 2017-07-06 2019-01-10 ミネベアミツミ株式会社 ひずみゲージ及び多軸力センサ
KR102036536B1 (ko) * 2018-03-19 2019-10-25 대양전기공업 주식회사 4개의 저항체로 2개의 독립된 풀휘트스톤브리지를 형성하는 반도체 압력센서
JP6618128B2 (ja) * 2018-07-11 2019-12-11 株式会社レプトリノ 力覚センサ及び力覚センサのブリッジ回路構成方法
WO2020202821A1 (ja) * 2019-04-03 2020-10-08 公益財団法人電磁材料研究所 力センサ
FR3098298B1 (fr) * 2019-07-03 2021-07-16 Arianegroup Sas Capteur de pression double
US11650110B2 (en) * 2020-11-04 2023-05-16 Honeywell International Inc. Rosette piezo-resistive gauge circuit for thermally compensated measurement of full stress tensor
JP7073471B2 (ja) * 2020-11-05 2022-05-23 日本電産コパル電子株式会社 起歪体

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US4530244A (en) * 1982-01-04 1985-07-23 Honeywell Inc. Semiconductor pressure transducer
US4745812A (en) * 1987-03-25 1988-05-24 The United States Of America As Represented By The Secretary Of The Army Triaxial tactile sensor
JPH01250837A (ja) * 1988-03-31 1989-10-05 Ricoh Co Ltd 力覚センサの配線方法
DE4108989C2 (de) * 1990-03-19 1996-04-25 Hitachi Ltd Integrierter Multisensor zum Erfassen eines statischen und eines Differenzdruckes
DE4012829C2 (de) 1990-04-23 1995-11-23 Walter Rieger Vorrichtung zur mehrdimensionalen Kraftmessung und daraus abgeleiteten Größen durch Meßwertaufnahme mittels elektrischer Sensoren, z. B. Dehnungsmeßstreifen
DE19527687A1 (de) * 1995-07-28 1997-01-30 Bosch Gmbh Robert Sensor
JP3666622B2 (ja) * 1996-09-30 2005-06-29 カヤバ工業株式会社 荷重検出装置
FR2784745B1 (fr) 1998-10-16 2001-01-05 Crouzet Automatismes Detecteur de position a cellule de detection micro-usinee
JP4438193B2 (ja) * 1999-09-24 2010-03-24 株式会社デンソー 圧力センサ
US6422088B1 (en) * 1999-09-24 2002-07-23 Denso Corporation Sensor failure or abnormality detecting system incorporated in a physical or dynamic quantity detecting apparatus
DE60231067D1 (de) * 2001-07-10 2009-03-19 Commissariat Energie Atomique Eine Kraftmesseinrichtung beinhaltender Reifen
JP4045979B2 (ja) * 2003-02-26 2008-02-13 株式会社デンソー 圧力検出装置
EP1494004B1 (de) * 2003-07-03 2011-03-09 Grundfos A/S Differenzdrucksensor
JP4303091B2 (ja) * 2003-11-10 2009-07-29 ニッタ株式会社 歪みゲージ型センサおよびこれを利用した歪みゲージ型センサユニット
FR2885409B1 (fr) * 2005-05-04 2007-08-31 Commissariat Energie Atomique Dispositif de mesure de force a tige rigide
FR2885411B1 (fr) * 2005-05-04 2007-07-06 Michelin Soc Tech Pneumatique comportant un dispositif de mesure de force a tige rigide

Also Published As

Publication number Publication date
EP1877746A1 (de) 2008-01-16
US7694586B2 (en) 2010-04-13
EP1877746B1 (de) 2008-12-03
DE602006004034D1 (de) 2009-01-15
FR2883372A1 (fr) 2006-09-22
WO2006097613A1 (fr) 2006-09-21
US20080276726A1 (en) 2008-11-13
JP2008533481A (ja) 2008-08-21
FR2883372B1 (fr) 2007-06-29

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