DE69320992D1 - Optisches nahfeldmikroskop - Google Patents

Optisches nahfeldmikroskop

Info

Publication number
DE69320992D1
DE69320992D1 DE69320992T DE69320992T DE69320992D1 DE 69320992 D1 DE69320992 D1 DE 69320992D1 DE 69320992 T DE69320992 T DE 69320992T DE 69320992 T DE69320992 T DE 69320992T DE 69320992 D1 DE69320992 D1 DE 69320992D1
Authority
DE
Germany
Prior art keywords
near field
field microscope
optical near
optical
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69320992T
Other languages
English (en)
Other versions
DE69320992T2 (de
Inventor
Bert Hecht
Harald Heinzelmann
Lukas Novotny
Wolfgang Pohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69320992D1 publication Critical patent/DE69320992D1/de
Application granted granted Critical
Publication of DE69320992T2 publication Critical patent/DE69320992T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
DE69320992T 1993-10-04 1993-10-04 Optisches nahfeldmikroskop Expired - Lifetime DE69320992T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1993/002713 WO1995010060A1 (en) 1993-10-04 1993-10-04 Near-field optical microscope

Publications (2)

Publication Number Publication Date
DE69320992D1 true DE69320992D1 (de) 1998-10-15
DE69320992T2 DE69320992T2 (de) 1999-05-27

Family

ID=8165773

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69320992T Expired - Lifetime DE69320992T2 (de) 1993-10-04 1993-10-04 Optisches nahfeldmikroskop

Country Status (6)

Country Link
US (1) US5739527A (de)
EP (1) EP0722574B1 (de)
KR (1) KR100262878B1 (de)
CA (1) CA2170860C (de)
DE (1) DE69320992T2 (de)
WO (1) WO1995010060A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6466537B1 (en) 1998-03-20 2002-10-15 Seiko Instruments Inc. Recording apparatus
JP4144819B2 (ja) * 1998-06-05 2008-09-03 キヤノン株式会社 近接場光学顕微鏡装置
DE19841736C2 (de) * 1998-09-11 2000-08-10 Max Planck Gesellschaft Lichtkoppler für Breitbandstrahlung im Mikrowellen- bis Infrarotbereich
US6633660B1 (en) * 1999-02-05 2003-10-14 John Carl Schotland Near-field tomography
TW558642B (en) 1999-08-02 2003-10-21 Zetetic Inst Scanning interferometric near-field confocal microscopy
AU2001281361A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Differential interferometric scanning near-field confocal microscopy
US6667809B2 (en) 2000-07-27 2003-12-23 Zetetic Institute Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
WO2002010829A2 (en) 2000-07-27 2002-02-07 Zetetic Institute Multiple-source arrays with optical transmission enhanced by resonant cavities
AU2001279047A1 (en) 2000-07-27 2002-02-13 Zetetic Institute Control of position and orientation of sub-wavelength aperture array in near-field microscopy
DE10039337A1 (de) * 2000-08-04 2002-02-28 Infineon Technologies Ag Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken
US6534768B1 (en) * 2000-10-30 2003-03-18 Euro-Oeltique, S.A. Hemispherical detector
JP3793430B2 (ja) * 2001-07-18 2006-07-05 株式会社日立製作所 近接場光を用いた光学装置
KR100476318B1 (ko) * 2002-02-22 2005-03-10 학교법인연세대학교 광학식 미세 간격 측정장치 및 이를 이용한 광픽업 장치
EP2494400B1 (de) 2009-10-28 2021-12-08 Alentic Microscience Inc. Mikroskopische bildgebung
US9075225B2 (en) 2009-10-28 2015-07-07 Alentic Microscience Inc. Microscopy imaging
CA2856664A1 (en) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
US10502666B2 (en) 2013-02-06 2019-12-10 Alentic Microscience Inc. Sample processing improvements for quantitative microscopy
US9518920B2 (en) 2013-06-26 2016-12-13 Alentic Microscience Inc. Sample processing improvements for microscopy
JP5796056B2 (ja) * 2013-06-26 2015-10-21 韓国科学技術院Ｋｏｒｅａ Ａｄｖａｎｃｅｄ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｓｃｉｅｎｃｅ Ａｎｄ Ｔｅｃｈｎｏｌｏｇｙ 光の散乱を用いた近接場制御装置及び方法
KR102412917B1 (ko) * 2015-02-16 2022-06-27 한국전자통신연구원 현미경
KR20230156814A (ko) 2017-10-26 2023-11-14 파티클 머슈어링 시스템즈, 인크. 입자 측정을 위한 시스템 및 방법
WO2020219841A1 (en) 2019-04-25 2020-10-29 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
EP4062146A4 (de) 2019-11-22 2024-02-28 Particle Measuring Syst Fortgeschrittene systeme und verfahren zur interferometrischen teilchendetektion und detektion von teilchen mit kleinen abmessungen

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5018865A (en) * 1988-10-21 1991-05-28 Ferrell Thomas L Photon scanning tunneling microscopy
FR2653906B1 (fr) * 1989-10-31 1992-05-22 Ardt Spectroscopie discriminante du profil optique d'un objet transparent, obtenu par microscopie optique a balayage en champ evanescent frustre, et microscopes de ce type mettant en óoeuvre ledit procede.
FR2654212A1 (fr) * 1989-11-03 1991-05-10 Ardt Procede d'analyse spectroscopique ponctuelle de la lumiere diffractee ou absorbee par une substance placee dans un champ proche, et microscopes optiques a balayage en champ proche mettant en óoeuvre ce procede.
JP3268797B2 (ja) * 1991-10-09 2002-03-25 オリンパス光学工業株式会社 光導入装置
FR2685789A1 (fr) * 1991-12-31 1993-07-02 Centre Nat Rech Scient Microscope en champ proche fonctionnant par detection tunnel optique.
JPH05203879A (ja) * 1992-01-27 1993-08-13 Nikon Corp 反射共振型近接場走査型顕微鏡
DE69223789T2 (de) * 1992-10-22 1998-06-25 Ibm Optisches Nahfeldabtastmikroskop
US5410151A (en) * 1993-07-15 1995-04-25 Sumitomo Electric Lightwave Corp. Fiber optic probe and method of making same

Also Published As

Publication number Publication date
KR100262878B1 (ko) 2000-08-01
EP0722574A1 (de) 1996-07-24
CA2170860A1 (en) 1995-04-13
KR960705246A (ko) 1996-10-09
CA2170860C (en) 2002-07-23
DE69320992T2 (de) 1999-05-27
EP0722574B1 (de) 1998-09-09
WO1995010060A1 (en) 1995-04-13
US5739527A (en) 1998-04-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8320 Willingness to grant licences declared (paragraph 23)
8328 Change in the person/name/address of the agent

Representative=s name: DUSCHER, R., DIPL.-PHYS. DR.RER.NAT., PAT.-ANW., 7