DE69315871D1 - Optisches Abtastsystem mit Hyperauflösung - Google Patents

Optisches Abtastsystem mit Hyperauflösung

Info

Publication number
DE69315871D1
DE69315871D1 DE69315871T DE69315871T DE69315871D1 DE 69315871 D1 DE69315871 D1 DE 69315871D1 DE 69315871 T DE69315871 T DE 69315871T DE 69315871 T DE69315871 T DE 69315871T DE 69315871 D1 DE69315871 D1 DE 69315871D1
Authority
DE
Germany
Prior art keywords
optical scanning
scanning system
hyper resolution
hyper
resolution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315871T
Other languages
English (en)
Other versions
DE69315871T2 (de
Inventor
Makoto Kato
Kenichi Kasazumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of DE69315871D1 publication Critical patent/DE69315871D1/de
Application granted granted Critical
Publication of DE69315871T2 publication Critical patent/DE69315871T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/123Integrated head arrangements, e.g. with source and detectors mounted on the same substrate
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0056Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/0072Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58Optics for apodization or superresolution; Optical synthetic aperture systems
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554Moving beam scanning
    • G06K7/10564Light sources
    • G06K7/10574Multiple sources
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554Moving beam scanning
    • G06K7/10594Beam path
    • G06K7/10683Arrangement of fixed elements
    • G06K7/10702Particularities of propagating elements, e.g. lenses, mirrors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/125Optical beam sources therefor, e.g. laser control circuitry specially adapted for optical storage devices; Modulators, e.g. means for controlling the size or intensity of optical spots or optical traces
    • G11B7/127Lasers; Multiple laser arrays
    • G11B7/1275Two or more lasers having different wavelengths
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1353Diffractive elements, e.g. holograms or gratings
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1365Separate or integrated refractive elements, e.g. wave plates
    • G11B7/1367Stepped phase plates
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372Lenses
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1381Non-lens elements for altering the properties of the beam, e.g. knife edges, slits, filters or stops
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372Lenses
    • G11B2007/13727Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optical Head (AREA)
  • Holo Graphy (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
DE69315871T 1992-03-19 1993-03-19 Optisches Abtastsystem mit Hyperauflösung Expired - Fee Related DE69315871T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4063761A JPH0695038A (ja) 1992-03-19 1992-03-19 超解像走査光学装置、光学装置の超解像用光源装置及び光学装置の超解像用フィルター

Publications (2)

Publication Number Publication Date
DE69315871D1 true DE69315871D1 (de) 1998-02-05
DE69315871T2 DE69315871T2 (de) 1998-04-16

Family

ID=13238698

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69315871T Expired - Fee Related DE69315871T2 (de) 1992-03-19 1993-03-19 Optisches Abtastsystem mit Hyperauflösung
DE0562488T Pending DE562488T1 (de) 1992-03-19 1993-03-19 Optisches Abtastsystem mit Hyperauflösung.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE0562488T Pending DE562488T1 (de) 1992-03-19 1993-03-19 Optisches Abtastsystem mit Hyperauflösung.

Country Status (5)

Country Link
US (2) US5496995A (de)
EP (1) EP0562488B1 (de)
JP (1) JPH0695038A (de)
KR (1) KR930020375A (de)
DE (2) DE69315871T2 (de)

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US6114712A (en) * 1996-10-09 2000-09-05 Symbol Technologies, Inc. One piece optical assembly for low cost optical scanner
JPH07311970A (ja) * 1994-05-17 1995-11-28 Seiko Epson Corp 光ヘッド及び光記憶装置
US5866911A (en) * 1994-07-15 1999-02-02 Baer; Stephen C. Method and apparatus for improving resolution in scanned optical system
US5600620A (en) * 1994-11-08 1997-02-04 Nec Corporation Optical head apparatus having means to eliminate noise caused by side-lobes
US5754512A (en) * 1995-05-30 1998-05-19 Matsushita Electric Industrial Co., Ltd. Correction elements to lower light intensity around an optical axis of an optical head with a plurality of focal points
USRE39025E1 (en) * 1995-08-30 2006-03-21 Samsung Electronics Co., Ltd. Lens device including a light controlling mechanism and an optical pickup apparatus using a lens device
US5907530A (en) * 1995-08-30 1999-05-25 Samsung Electronics Co., Ltd. Optical pickup device
KR100234257B1 (ko) * 1995-08-30 1999-12-15 윤종용 대물렌즈 장치 및 안정된 포커스 서보 신호를 얻는방법 및 이를 적용한 광픽업 장치 및 두께가 다른 디스크를 판별하는 방법 및 두께가 다른 디스크로부터 정보를 재생하고 기록하는 방법
DE69726527T2 (de) * 1996-03-18 2004-09-23 Seiko Epson Corp. Optischer kopf und optisches aufzeichnungsgerät
US6222812B1 (en) * 1996-08-29 2001-04-24 Samsung Electronics Co., Ltd. Optical pickup using an optical phase plate
WO1998015952A1 (fr) * 1996-10-08 1998-04-16 Citizen Watch Co., Ltd. Appareil optique
KR100258927B1 (ko) * 1996-10-29 2000-06-15 윤종용 다중 트랙 스캔 가능한 호환형 광픽업장치
US6639889B1 (en) 1997-02-13 2003-10-28 Samsung Electronics Co., Ltd. Recording/reproducing apparatus including an optical pickup having an objective lens compatible with a plurality of optical disk formats
US6304540B1 (en) 1998-03-30 2001-10-16 Samsung Electronics Co., Ltd. Optical pickup compatible with a digital versatile disk and a recordable compact disk using a holographic ring lens
US6020988A (en) * 1997-08-05 2000-02-01 Science Research Laboratory, Inc. Ultra high resolution wave focusing method and apparatus and systems employing such method and apparatus
US6186400B1 (en) * 1998-03-20 2001-02-13 Symbol Technologies, Inc. Bar code reader with an integrated scanning component module mountable on printed circuit board
DE19936573A1 (de) 1998-12-22 2001-02-08 Zeiss Carl Jena Gmbh Anordnung zur Separierung von Anregungs- und Emissionslicht in einem Mikroskop
US6651888B1 (en) * 1999-02-02 2003-11-25 Symbol Technologies, Inc. Beam shaping system and diverging laser beam for scanning optical code
JP2000250100A (ja) * 1999-03-01 2000-09-14 Mitsutoyo Corp 光学測定機用照明装置
DE19908883A1 (de) 1999-03-02 2000-09-07 Rainer Heintzmann Verfahren zur Erhöhung der Auflösung optischer Abbildung
US6540145B2 (en) 1999-06-11 2003-04-01 Symbol Technologies, Inc. Aperture controlled laser beam shaping techniques for scanning optical code
US6633433B2 (en) 1999-06-11 2003-10-14 Symbol Technologies, Inc. Beam shaping for optical scanners
KR20030093683A (ko) * 2002-06-05 2003-12-11 삼성전자주식회사 호환형 광픽업
US20040090874A1 (en) * 2002-11-08 2004-05-13 Kunjithapatham Balasubramanian Apparatus and method for effective reduction of a laser beam spot size
US7079256B2 (en) * 2003-08-09 2006-07-18 Chian Chiu Li Interferometric optical apparatus and method for measurements
CN1902639A (zh) * 2003-11-10 2007-01-24 科技创新有限责任公司 数字成像组合件及其方法
CH697495B1 (de) * 2005-04-01 2008-11-14 Baumer Electric Ag Optischer Sensor und Verfahren zur Unterdrückung von Streulichtfehlern.
US7348528B2 (en) * 2005-12-20 2008-03-25 Marshall Daniel R Distance measuring system
JP2008026661A (ja) * 2006-07-21 2008-02-07 Ricoh Co Ltd ビームスポット整形方法、光走査装置、及び画像形成装置
US8553733B2 (en) * 2007-02-26 2013-10-08 Hamamatsu Photonics K.K. Light source device, observation device, and processing device
DE102007063274B8 (de) * 2007-12-20 2022-12-15 Albert-Ludwigs-Universität Freiburg Mikroskop
KR101362508B1 (ko) * 2009-09-11 2014-02-13 나룩스 가부시키가이샤 위상 시프트 소자
JP2013539074A (ja) 2010-09-24 2013-10-17 カール・ツァイス・マイクロスコピー・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング 3d局在顕微鏡法並びに4d局在顕微鏡法及び追跡方法並びに追跡システム
US9170411B2 (en) * 2013-10-11 2015-10-27 Panasonic Intellectual Property Management Co., Ltd. Scanning optical microscope
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Also Published As

Publication number Publication date
US5978109A (en) 1999-11-02
EP0562488B1 (de) 1997-12-29
JPH0695038A (ja) 1994-04-08
DE69315871T2 (de) 1998-04-16
KR930020375A (ko) 1993-10-19
EP0562488A1 (de) 1993-09-29
DE562488T1 (de) 1994-11-17
US5496995A (en) 1996-03-05

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8339 Ceased/non-payment of the annual fee