DE69220598D1 - Optisches Nahfeldabtastmikroskop - Google Patents

Optisches Nahfeldabtastmikroskop

Info

Publication number
DE69220598D1
DE69220598D1 DE69220598T DE69220598T DE69220598D1 DE 69220598 D1 DE69220598 D1 DE 69220598D1 DE 69220598 T DE69220598 T DE 69220598T DE 69220598 T DE69220598 T DE 69220598T DE 69220598 D1 DE69220598 D1 DE 69220598D1
Authority
DE
Germany
Prior art keywords
scanning microscope
field scanning
optical near
optical
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69220598T
Other languages
English (en)
Other versions
DE69220598T2 (de
Inventor
Shinichiro Aoshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Application granted granted Critical
Publication of DE69220598D1 publication Critical patent/DE69220598D1/de
Publication of DE69220598T2 publication Critical patent/DE69220598T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
DE69220598T 1991-04-05 1992-04-03 Optisches Nahfeldabtastmikroskop Expired - Fee Related DE69220598T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3073054A JP2823970B2 (ja) 1991-04-05 1991-04-05 近接場走査光学顕微鏡

Publications (2)

Publication Number Publication Date
DE69220598D1 true DE69220598D1 (de) 1997-08-07
DE69220598T2 DE69220598T2 (de) 1997-11-06

Family

ID=13507266

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69220598T Expired - Fee Related DE69220598T2 (de) 1991-04-05 1992-04-03 Optisches Nahfeldabtastmikroskop

Country Status (4)

Country Link
US (1) US5382789A (de)
EP (1) EP0507628B1 (de)
JP (1) JP2823970B2 (de)
DE (1) DE69220598T2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5548113A (en) * 1994-03-24 1996-08-20 Trustees Of Boston University Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope
JP2936311B2 (ja) * 1994-09-09 1999-08-23 セイコーインスツルメンツ株式会社 液中観察機能付き走査型近視野原子間力顕微鏡
DE4438391C2 (de) * 1994-10-27 1997-07-03 Evotec Biosystems Gmbh Vorrichtung zur Bestimmung stoffspezifischer Parameter eines oder weniger Moleküle mittels Korrelations-Spektroskopie
DE19512265A1 (de) * 1995-03-24 1996-09-26 Joerg Dr Wrachtrup Optisch detektierte magnetische Resonanz Bilddarstellung an einzelnen Molekülen
US6266581B1 (en) * 1996-05-10 2001-07-24 The United States Of America As Represented By The Secretary Of Commerce Spatial RAM for high precision data acquisition systems
US5990474A (en) * 1996-05-15 1999-11-23 Atia; Walid A. Near field optical probe for simultaneous phase and enhanced amplitude contrast in reflection mode using path matched differential interferometry and method of making it
JP3399781B2 (ja) * 1997-05-09 2003-04-21 日本電信電話株式会社 走査型発光顕微鏡
EP0884583A1 (de) * 1997-06-10 1998-12-16 Evotec BioSystems GmbH Verfahren zur Charakterisierung von Proben in einem mindestens zweidimensionalen Raum spezifischer physikalischer Eigenschaften
DE19741122C2 (de) * 1997-09-12 2003-09-25 Forschungsverbund Berlin Ev Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung)
DE19820575B4 (de) * 1998-05-08 2012-03-29 Leica Microsystems Cms Gmbh Verfahren zum Betrieb einer pulsierenden Laserlichtquelle
DE19822869C2 (de) * 1998-05-22 2001-05-10 Zeiss Carl Jena Gmbh Optisches Nahfeldmikroskop
IL124838A0 (en) * 1998-06-10 1999-01-26 Yeda Res & Dev Near-field optical inspection apparatus
JP4667571B2 (ja) * 1999-09-24 2011-04-13 オリンパス株式会社 レーザ走査顕微鏡
KR100434542B1 (ko) * 2001-09-18 2004-06-05 삼성전자주식회사 근접장용 광 프로브 개구 측정장치 및 방법
US6775349B2 (en) * 2001-10-23 2004-08-10 Washington Univ. In St. Louis System and method for scanning near-field optical tomography
DE102007010890A1 (de) * 2007-03-06 2008-09-11 Ludwig-Maximilians-Universität München Anordnung zum Untersuchen oder/und Manipulieren von Proben
KR100978600B1 (ko) * 2007-10-23 2010-08-27 연세대학교 산학협력단 초고분해능 주사 광학 측정 장치
JP5262937B2 (ja) * 2009-04-08 2013-08-14 三菱電機株式会社 走査型プローブ光電子収量分光顕微法および走査型プローブ光電子収量分光顕微鏡
JP4628488B1 (ja) * 2009-05-15 2011-02-09 日東電工株式会社 光学表示装置の製造システム及び製造方法
GB0913782D0 (en) * 2009-08-07 2009-09-16 Univ Strathclyde Microscope
JP4676026B1 (ja) 2010-09-17 2011-04-27 日東電工株式会社 液晶表示素子の製造システム及び製造方法
JP4723044B1 (ja) * 2010-09-17 2011-07-13 日東電工株式会社 液晶表示素子の製造システム及び製造方法
JP4733227B1 (ja) * 2010-09-30 2011-07-27 日東電工株式会社 液晶表示素子の製造システム及び製造方法
JP5782010B2 (ja) 2012-11-09 2015-09-24 日東電工株式会社 光学表示パネルの連続製造方法および光学表示パネルの連続製造システム
WO2014185099A1 (ja) 2013-05-17 2014-11-20 住友化学株式会社 光学表示デバイスの生産システム

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4136950A (en) * 1976-11-08 1979-01-30 Labrum Engineering, Inc. Microscope system for observing moving particles
EP0112401B1 (de) * 1982-12-27 1987-04-22 International Business Machines Corporation Optisches Nahfeldabtastmikroskop
US4662747A (en) * 1983-08-03 1987-05-05 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
SE455646B (sv) * 1984-10-22 1988-07-25 Radians Innova Ab Fluorescensanordning
JPH06100532B2 (ja) * 1986-08-25 1994-12-12 浜松ホトニクス株式会社 高空間・時間分解計測装置
DE3772563D1 (de) * 1987-06-22 1991-10-02 Ibm Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.
US4917462A (en) * 1988-06-15 1990-04-17 Cornell Research Foundation, Inc. Near field scanning optical microscopy
FR2640040B1 (fr) * 1988-12-05 1994-10-28 Micro Controle Procede et dispositif de mesure optique
DE69131528T2 (de) * 1990-05-30 2000-05-04 Hitachi, Ltd. Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe
JPH0477605A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ
US5105305A (en) * 1991-01-10 1992-04-14 At&T Bell Laboratories Near-field scanning optical microscope using a fluorescent probe

Also Published As

Publication number Publication date
JPH04307510A (ja) 1992-10-29
EP0507628A3 (en) 1993-03-03
DE69220598T2 (de) 1997-11-06
US5382789A (en) 1995-01-17
EP0507628B1 (de) 1997-07-02
EP0507628A2 (de) 1992-10-07
JP2823970B2 (ja) 1998-11-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee