DE69220598D1 - Optisches Nahfeldabtastmikroskop - Google Patents
Optisches NahfeldabtastmikroskopInfo
- Publication number
- DE69220598D1 DE69220598D1 DE69220598T DE69220598T DE69220598D1 DE 69220598 D1 DE69220598 D1 DE 69220598D1 DE 69220598 T DE69220598 T DE 69220598T DE 69220598 T DE69220598 T DE 69220598T DE 69220598 D1 DE69220598 D1 DE 69220598D1
- Authority
- DE
- Germany
- Prior art keywords
- scanning microscope
- field scanning
- optical near
- optical
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/862—Near-field probe
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Microscoopes, Condenser (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3073054A JP2823970B2 (ja) | 1991-04-05 | 1991-04-05 | 近接場走査光学顕微鏡 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69220598D1 true DE69220598D1 (de) | 1997-08-07 |
DE69220598T2 DE69220598T2 (de) | 1997-11-06 |
Family
ID=13507266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69220598T Expired - Fee Related DE69220598T2 (de) | 1991-04-05 | 1992-04-03 | Optisches Nahfeldabtastmikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US5382789A (de) |
EP (1) | EP0507628B1 (de) |
JP (1) | JP2823970B2 (de) |
DE (1) | DE69220598T2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5548113A (en) * | 1994-03-24 | 1996-08-20 | Trustees Of Boston University | Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope |
JP2936311B2 (ja) * | 1994-09-09 | 1999-08-23 | セイコーインスツルメンツ株式会社 | 液中観察機能付き走査型近視野原子間力顕微鏡 |
DE4438391C2 (de) * | 1994-10-27 | 1997-07-03 | Evotec Biosystems Gmbh | Vorrichtung zur Bestimmung stoffspezifischer Parameter eines oder weniger Moleküle mittels Korrelations-Spektroskopie |
DE19512265A1 (de) * | 1995-03-24 | 1996-09-26 | Joerg Dr Wrachtrup | Optisch detektierte magnetische Resonanz Bilddarstellung an einzelnen Molekülen |
US6266581B1 (en) * | 1996-05-10 | 2001-07-24 | The United States Of America As Represented By The Secretary Of Commerce | Spatial RAM for high precision data acquisition systems |
US5990474A (en) * | 1996-05-15 | 1999-11-23 | Atia; Walid A. | Near field optical probe for simultaneous phase and enhanced amplitude contrast in reflection mode using path matched differential interferometry and method of making it |
JP3399781B2 (ja) * | 1997-05-09 | 2003-04-21 | 日本電信電話株式会社 | 走査型発光顕微鏡 |
EP0884583A1 (de) * | 1997-06-10 | 1998-12-16 | Evotec BioSystems GmbH | Verfahren zur Charakterisierung von Proben in einem mindestens zweidimensionalen Raum spezifischer physikalischer Eigenschaften |
DE19741122C2 (de) * | 1997-09-12 | 2003-09-25 | Forschungsverbund Berlin Ev | Anordnung zur Vermessung und Strukturierung (Nahfeldanordnung) |
DE19820575B4 (de) * | 1998-05-08 | 2012-03-29 | Leica Microsystems Cms Gmbh | Verfahren zum Betrieb einer pulsierenden Laserlichtquelle |
DE19822869C2 (de) * | 1998-05-22 | 2001-05-10 | Zeiss Carl Jena Gmbh | Optisches Nahfeldmikroskop |
IL124838A0 (en) * | 1998-06-10 | 1999-01-26 | Yeda Res & Dev | Near-field optical inspection apparatus |
JP4667571B2 (ja) * | 1999-09-24 | 2011-04-13 | オリンパス株式会社 | レーザ走査顕微鏡 |
KR100434542B1 (ko) * | 2001-09-18 | 2004-06-05 | 삼성전자주식회사 | 근접장용 광 프로브 개구 측정장치 및 방법 |
US6775349B2 (en) * | 2001-10-23 | 2004-08-10 | Washington Univ. In St. Louis | System and method for scanning near-field optical tomography |
DE102007010890A1 (de) * | 2007-03-06 | 2008-09-11 | Ludwig-Maximilians-Universität München | Anordnung zum Untersuchen oder/und Manipulieren von Proben |
KR100978600B1 (ko) * | 2007-10-23 | 2010-08-27 | 연세대학교 산학협력단 | 초고분해능 주사 광학 측정 장치 |
JP5262937B2 (ja) * | 2009-04-08 | 2013-08-14 | 三菱電機株式会社 | 走査型プローブ光電子収量分光顕微法および走査型プローブ光電子収量分光顕微鏡 |
JP4628488B1 (ja) * | 2009-05-15 | 2011-02-09 | 日東電工株式会社 | 光学表示装置の製造システム及び製造方法 |
GB0913782D0 (en) * | 2009-08-07 | 2009-09-16 | Univ Strathclyde | Microscope |
JP4676026B1 (ja) | 2010-09-17 | 2011-04-27 | 日東電工株式会社 | 液晶表示素子の製造システム及び製造方法 |
JP4723044B1 (ja) * | 2010-09-17 | 2011-07-13 | 日東電工株式会社 | 液晶表示素子の製造システム及び製造方法 |
JP4733227B1 (ja) * | 2010-09-30 | 2011-07-27 | 日東電工株式会社 | 液晶表示素子の製造システム及び製造方法 |
JP5782010B2 (ja) | 2012-11-09 | 2015-09-24 | 日東電工株式会社 | 光学表示パネルの連続製造方法および光学表示パネルの連続製造システム |
WO2014185099A1 (ja) | 2013-05-17 | 2014-11-20 | 住友化学株式会社 | 光学表示デバイスの生産システム |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4136950A (en) * | 1976-11-08 | 1979-01-30 | Labrum Engineering, Inc. | Microscope system for observing moving particles |
EP0112401B1 (de) * | 1982-12-27 | 1987-04-22 | International Business Machines Corporation | Optisches Nahfeldabtastmikroskop |
US4662747A (en) * | 1983-08-03 | 1987-05-05 | Cornell Research Foundation, Inc. | Method and apparatus for production and use of nanometer scale light beams |
SE455646B (sv) * | 1984-10-22 | 1988-07-25 | Radians Innova Ab | Fluorescensanordning |
JPH06100532B2 (ja) * | 1986-08-25 | 1994-12-12 | 浜松ホトニクス株式会社 | 高空間・時間分解計測装置 |
DE3772563D1 (de) * | 1987-06-22 | 1991-10-02 | Ibm | Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. |
US4917462A (en) * | 1988-06-15 | 1990-04-17 | Cornell Research Foundation, Inc. | Near field scanning optical microscopy |
FR2640040B1 (fr) * | 1988-12-05 | 1994-10-28 | Micro Controle | Procede et dispositif de mesure optique |
DE69131528T2 (de) * | 1990-05-30 | 2000-05-04 | Hitachi, Ltd. | Verfahren und Vorrichtung zur Behandlung eines sehr kleinen Bereichs einer Probe |
JPH0477605A (ja) * | 1990-07-20 | 1992-03-11 | Olympus Optical Co Ltd | 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ |
US5105305A (en) * | 1991-01-10 | 1992-04-14 | At&T Bell Laboratories | Near-field scanning optical microscope using a fluorescent probe |
-
1991
- 1991-04-05 JP JP3073054A patent/JP2823970B2/ja not_active Expired - Fee Related
-
1992
- 1992-04-03 DE DE69220598T patent/DE69220598T2/de not_active Expired - Fee Related
- 1992-04-03 EP EP92302996A patent/EP0507628B1/de not_active Expired - Lifetime
- 1992-04-06 US US07/864,238 patent/US5382789A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH04307510A (ja) | 1992-10-29 |
EP0507628A3 (en) | 1993-03-03 |
DE69220598T2 (de) | 1997-11-06 |
US5382789A (en) | 1995-01-17 |
EP0507628B1 (de) | 1997-07-02 |
EP0507628A2 (de) | 1992-10-07 |
JP2823970B2 (ja) | 1998-11-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |