DE3772563D1 - Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. - Google Patents
Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.Info
- Publication number
- DE3772563D1 DE3772563D1 DE8787108907T DE3772563T DE3772563D1 DE 3772563 D1 DE3772563 D1 DE 3772563D1 DE 8787108907 T DE8787108907 T DE 8787108907T DE 3772563 T DE3772563 T DE 3772563T DE 3772563 D1 DE3772563 D1 DE 3772563D1
- Authority
- DE
- Germany
- Prior art keywords
- sample
- laser
- nanometer
- implementing
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/861—Scanning tunneling probe
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/868—Scanning probe structure with optical means
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP87108907A EP0296262B1 (de) | 1987-06-22 | 1987-06-22 | Verfahren zur Oberflächenuntersuchung mit Nanometer- und Pikosekundenauflösung sowie Laserabgetastetes Rastertunnelmikroskop zur Durchführung des Verfahrens |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3772563D1 true DE3772563D1 (de) | 1991-10-02 |
Family
ID=8197082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8787108907T Expired - Lifetime DE3772563D1 (de) | 1987-06-22 | 1987-06-22 | Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. |
Country Status (4)
Country | Link |
---|---|
US (1) | US4918309A (de) |
EP (1) | EP0296262B1 (de) |
JP (1) | JPH073397B2 (de) |
DE (1) | DE3772563D1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS643502A (en) * | 1987-06-25 | 1989-01-09 | Seiko Instr & Electronics | Scanning type tunnel microscope |
US5255258A (en) * | 1987-09-24 | 1993-10-19 | Canon Kabushiki Kaisha | Microprobe, preparation thereof and electronic device by use of said microprobe |
JPH02134503A (ja) * | 1988-11-15 | 1990-05-23 | Mitsubishi Electric Corp | 走査型トンネル顕微鏡 |
JP2737017B2 (ja) * | 1989-01-20 | 1998-04-08 | キヤノン株式会社 | 光検知装置及び光検知方法 |
US4935634A (en) * | 1989-03-13 | 1990-06-19 | The Regents Of The University Of California | Atomic force microscope with optional replaceable fluid cell |
US4941753A (en) * | 1989-04-07 | 1990-07-17 | International Business Machines Corp. | Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control |
US5161147A (en) * | 1989-08-30 | 1992-11-03 | Hoechst Celanese Corp. | High speed information system utilizing scanning tunneling microscopy in conjunction with a modulated light source |
GB8920571D0 (en) * | 1989-09-12 | 1989-10-25 | Carr Robert J G | Examination of objects of macromolecular size |
US5003815A (en) * | 1989-10-20 | 1991-04-02 | International Business Machines Corporation | Atomic photo-absorption force microscope |
US5053699A (en) * | 1990-05-25 | 1991-10-01 | Texas Instruments Incorporated | Scanning electron microscope based parametric testing method and apparatus |
JPH0477605A (ja) * | 1990-07-20 | 1992-03-11 | Olympus Optical Co Ltd | 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ |
JP2744339B2 (ja) * | 1990-08-03 | 1998-04-28 | キヤノン株式会社 | 情報処理装置及び情報処理方法 |
US5122739A (en) * | 1990-11-06 | 1992-06-16 | Texas Instruments Incorporated | STM-like device and method for measuring node voltages on integrated circuits |
US5237529A (en) * | 1991-02-01 | 1993-08-17 | Richard Spitzer | Microstructure array and activation system therefor |
JP2823970B2 (ja) * | 1991-04-05 | 1998-11-11 | 浜松ホトニクス株式会社 | 近接場走査光学顕微鏡 |
US5298975A (en) * | 1991-09-27 | 1994-03-29 | International Business Machines Corporation | Combined scanning force microscope and optical metrology tool |
US5254854A (en) * | 1991-11-04 | 1993-10-19 | At&T Bell Laboratories | Scanning microscope comprising force-sensing means and position-sensitive photodetector |
US5198667A (en) * | 1991-12-20 | 1993-03-30 | The United States Of America As Represented By The Secretary Of The Navy | Method and apparatus for performing scanning tunneling optical absorption spectroscopy |
US5262642A (en) * | 1992-02-26 | 1993-11-16 | Northwestern University | Scanning tunneling optical spectrometer |
US5321977A (en) * | 1992-12-31 | 1994-06-21 | International Business Machines Corporation | Integrated tip strain sensor for use in combination with a single axis atomic force microscope |
EP0650067B1 (de) * | 1993-04-13 | 2004-09-01 | Agilent Technologies, Inc. | Elektro-optisches instrument |
US5444260A (en) * | 1993-07-01 | 1995-08-22 | Midwest Reasearch Institute | Atomic-level imaging, processing and characterization of semiconductor surfaces |
WO1995012882A1 (en) * | 1993-11-03 | 1995-05-11 | International Business Machines Corporation | Method and apparatus for retrieving digital data from a magnetic storage medium |
US5770946A (en) * | 1994-05-11 | 1998-06-23 | Patterson; Joseph M. | Photon assisted sub-tunneling electrical probe, probe tip, and probing method |
DE19851622A1 (de) * | 1998-11-09 | 2000-05-18 | Fraunhofer Ges Forschung | Verfahren zum Untersuchen und/oder zum Modifizieren von Oberflächenstrukturen einer Probe |
JP3925610B2 (ja) * | 2001-02-13 | 2007-06-06 | 喜萬 中山 | 発熱プローブ及び発熱プローブ装置 |
EP1967839A1 (de) * | 2001-11-26 | 2008-09-10 | Japan Science and Technology Agency | Rastersondenmikroskopvorrichtung mit Verzögerungszeitmodulation und Femtosekunden-Zeitauflösung |
GB0412538D0 (en) * | 2004-06-04 | 2004-07-07 | Council Cent Lab Res Councils | Time resolving microscope and chemical specificity microscope |
CN1307413C (zh) * | 2005-01-25 | 2007-03-28 | 中国科学院武汉岩土力学研究所 | 岩土孔隙介质飞秒激光冷切割的方法 |
US20070268016A1 (en) * | 2006-05-16 | 2007-11-22 | Cheng-Chung Chi | Apparatus for detecting magnetic signals and signals of electric tunneling |
JP5262937B2 (ja) * | 2009-04-08 | 2013-08-14 | 三菱電機株式会社 | 走査型プローブ光電子収量分光顕微法および走査型プローブ光電子収量分光顕微鏡 |
JP7134476B2 (ja) * | 2018-08-17 | 2022-09-12 | Gセラノスティックス株式会社 | 測定装置、近接場の測定方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH643397A5 (de) * | 1979-09-20 | 1984-05-30 | Ibm | Raster-tunnelmikroskop. |
DE3276138D1 (en) * | 1982-12-27 | 1987-05-27 | Ibm | Optical near-field scanning microscope |
US4750822A (en) * | 1986-03-28 | 1988-06-14 | Therma-Wave, Inc. | Method and apparatus for optically detecting surface states in materials |
US4747698A (en) * | 1986-04-30 | 1988-05-31 | International Business Machines Corp. | Scanning thermal profiler |
-
1987
- 1987-06-22 EP EP87108907A patent/EP0296262B1/de not_active Expired - Lifetime
- 1987-06-22 DE DE8787108907T patent/DE3772563D1/de not_active Expired - Lifetime
-
1988
- 1988-05-20 JP JP63122232A patent/JPH073397B2/ja not_active Expired - Fee Related
- 1988-06-20 US US07/209,403 patent/US4918309A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0296262B1 (de) | 1991-08-28 |
EP0296262A1 (de) | 1988-12-28 |
US4918309A (en) | 1990-04-17 |
JPH073397B2 (ja) | 1995-01-18 |
JPS6412201A (en) | 1989-01-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |