DE3772563D1 - Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. - Google Patents

Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.

Info

Publication number
DE3772563D1
DE3772563D1 DE8787108907T DE3772563T DE3772563D1 DE 3772563 D1 DE3772563 D1 DE 3772563D1 DE 8787108907 T DE8787108907 T DE 8787108907T DE 3772563 T DE3772563 T DE 3772563T DE 3772563 D1 DE3772563 D1 DE 3772563D1
Authority
DE
Germany
Prior art keywords
sample
laser
nanometer
implementing
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8787108907T
Other languages
English (en)
Inventor
Johannes Georg Beha
Armin Udo Blacha
Rolf Clauberg
Rolf Bernd Georg Moeller
Wolfgang Dieter Pohl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3772563D1 publication Critical patent/DE3772563D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE8787108907T 1987-06-22 1987-06-22 Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens. Expired - Lifetime DE3772563D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87108907A EP0296262B1 (de) 1987-06-22 1987-06-22 Verfahren zur Oberflächenuntersuchung mit Nanometer- und Pikosekundenauflösung sowie Laserabgetastetes Rastertunnelmikroskop zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
DE3772563D1 true DE3772563D1 (de) 1991-10-02

Family

ID=8197082

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787108907T Expired - Lifetime DE3772563D1 (de) 1987-06-22 1987-06-22 Verfahren zur oberflaechenuntersuchung mit nanometer- und pikosekundenaufloesung sowie laserabgetastetes rastertunnelmikroskop zur durchfuehrung des verfahrens.

Country Status (4)

Country Link
US (1) US4918309A (de)
EP (1) EP0296262B1 (de)
JP (1) JPH073397B2 (de)
DE (1) DE3772563D1 (de)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS643502A (en) * 1987-06-25 1989-01-09 Seiko Instr & Electronics Scanning type tunnel microscope
US5255258A (en) * 1987-09-24 1993-10-19 Canon Kabushiki Kaisha Microprobe, preparation thereof and electronic device by use of said microprobe
JPH02134503A (ja) * 1988-11-15 1990-05-23 Mitsubishi Electric Corp 走査型トンネル顕微鏡
JP2737017B2 (ja) * 1989-01-20 1998-04-08 キヤノン株式会社 光検知装置及び光検知方法
US4935634A (en) * 1989-03-13 1990-06-19 The Regents Of The University Of California Atomic force microscope with optional replaceable fluid cell
US4941753A (en) * 1989-04-07 1990-07-17 International Business Machines Corp. Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
US5161147A (en) * 1989-08-30 1992-11-03 Hoechst Celanese Corp. High speed information system utilizing scanning tunneling microscopy in conjunction with a modulated light source
GB8920571D0 (en) * 1989-09-12 1989-10-25 Carr Robert J G Examination of objects of macromolecular size
US5003815A (en) * 1989-10-20 1991-04-02 International Business Machines Corporation Atomic photo-absorption force microscope
US5053699A (en) * 1990-05-25 1991-10-01 Texas Instruments Incorporated Scanning electron microscope based parametric testing method and apparatus
JPH0477605A (ja) * 1990-07-20 1992-03-11 Olympus Optical Co Ltd 走査型トンネル顕微鏡、及び、この顕微鏡に使用されるプローブ
JP2744339B2 (ja) * 1990-08-03 1998-04-28 キヤノン株式会社 情報処理装置及び情報処理方法
US5122739A (en) * 1990-11-06 1992-06-16 Texas Instruments Incorporated STM-like device and method for measuring node voltages on integrated circuits
US5237529A (en) * 1991-02-01 1993-08-17 Richard Spitzer Microstructure array and activation system therefor
JP2823970B2 (ja) * 1991-04-05 1998-11-11 浜松ホトニクス株式会社 近接場走査光学顕微鏡
US5298975A (en) * 1991-09-27 1994-03-29 International Business Machines Corporation Combined scanning force microscope and optical metrology tool
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
US5198667A (en) * 1991-12-20 1993-03-30 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for performing scanning tunneling optical absorption spectroscopy
US5262642A (en) * 1992-02-26 1993-11-16 Northwestern University Scanning tunneling optical spectrometer
US5321977A (en) * 1992-12-31 1994-06-21 International Business Machines Corporation Integrated tip strain sensor for use in combination with a single axis atomic force microscope
EP0650067B1 (de) * 1993-04-13 2004-09-01 Agilent Technologies, Inc. Elektro-optisches instrument
US5444260A (en) * 1993-07-01 1995-08-22 Midwest Reasearch Institute Atomic-level imaging, processing and characterization of semiconductor surfaces
WO1995012882A1 (en) * 1993-11-03 1995-05-11 International Business Machines Corporation Method and apparatus for retrieving digital data from a magnetic storage medium
US5770946A (en) * 1994-05-11 1998-06-23 Patterson; Joseph M. Photon assisted sub-tunneling electrical probe, probe tip, and probing method
DE19851622A1 (de) * 1998-11-09 2000-05-18 Fraunhofer Ges Forschung Verfahren zum Untersuchen und/oder zum Modifizieren von Oberflächenstrukturen einer Probe
JP3925610B2 (ja) * 2001-02-13 2007-06-06 喜萬 中山 発熱プローブ及び発熱プローブ装置
EP1967839A1 (de) * 2001-11-26 2008-09-10 Japan Science and Technology Agency Rastersondenmikroskopvorrichtung mit Verzögerungszeitmodulation und Femtosekunden-Zeitauflösung
GB0412538D0 (en) * 2004-06-04 2004-07-07 Council Cent Lab Res Councils Time resolving microscope and chemical specificity microscope
CN1307413C (zh) * 2005-01-25 2007-03-28 中国科学院武汉岩土力学研究所 岩土孔隙介质飞秒激光冷切割的方法
US20070268016A1 (en) * 2006-05-16 2007-11-22 Cheng-Chung Chi Apparatus for detecting magnetic signals and signals of electric tunneling
JP5262937B2 (ja) * 2009-04-08 2013-08-14 三菱電機株式会社 走査型プローブ光電子収量分光顕微法および走査型プローブ光電子収量分光顕微鏡
JP7134476B2 (ja) * 2018-08-17 2022-09-12 Ｇセラノスティックス株式会社 測定装置、近接場の測定方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
DE3276138D1 (en) * 1982-12-27 1987-05-27 Ibm Optical near-field scanning microscope
US4750822A (en) * 1986-03-28 1988-06-14 Therma-Wave, Inc. Method and apparatus for optically detecting surface states in materials
US4747698A (en) * 1986-04-30 1988-05-31 International Business Machines Corp. Scanning thermal profiler

Also Published As

Publication number Publication date
EP0296262B1 (de) 1991-08-28
EP0296262A1 (de) 1988-12-28
US4918309A (en) 1990-04-17
JPH073397B2 (ja) 1995-01-18
JPS6412201A (en) 1989-01-17

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