DE69128317D1 - Fühlervorrichtung zum Nachweis von Mikroverschiebungen sowie Mikroskop- und Informationsverarbeitungseinrichtungen, die eine solche Vorrichtung verwenden - Google Patents

Fühlervorrichtung zum Nachweis von Mikroverschiebungen sowie Mikroskop- und Informationsverarbeitungseinrichtungen, die eine solche Vorrichtung verwenden

Info

Publication number
DE69128317D1
DE69128317D1 DE69128317T DE69128317T DE69128317D1 DE 69128317 D1 DE69128317 D1 DE 69128317D1 DE 69128317 T DE69128317 T DE 69128317T DE 69128317 T DE69128317 T DE 69128317T DE 69128317 D1 DE69128317 D1 DE 69128317D1
Authority
DE
Germany
Prior art keywords
cantilever
stage
micro
layer structure
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128317T
Other languages
English (en)
Other versions
DE69128317T2 (de
Inventor
Toshihiko Miyazaki
Hiroyasu Nose
Ryo Kuroda
Toshimitsu Kawase
Katsuhiko Shinjo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69128317D1 publication Critical patent/DE69128317D1/de
Application granted granted Critical
Publication of DE69128317T2 publication Critical patent/DE69128317T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q80/00—Applications, other than SPM, of scanning-probe techniques
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69128317T 1990-08-16 1991-08-13 Fühlervorrichtung zum Nachweis von Mikroverschiebungen sowie Mikroskop- und Informationsverarbeitungseinrichtungen, die eine solche Vorrichtung verwenden Expired - Fee Related DE69128317T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP21502190 1990-08-16
JP3159852A JP3030574B2 (ja) 1990-08-16 1991-06-05 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置

Publications (2)

Publication Number Publication Date
DE69128317D1 true DE69128317D1 (de) 1998-01-15
DE69128317T2 DE69128317T2 (de) 1998-04-09

Family

ID=26486524

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69128317T Expired - Fee Related DE69128317T2 (de) 1990-08-16 1991-08-13 Fühlervorrichtung zum Nachweis von Mikroverschiebungen sowie Mikroskop- und Informationsverarbeitungseinrichtungen, die eine solche Vorrichtung verwenden

Country Status (6)

Country Link
US (1) US5276672A (de)
EP (1) EP0472342B1 (de)
JP (1) JP3030574B2 (de)
AT (1) ATE160865T1 (de)
CA (1) CA2049197C (de)
DE (1) DE69128317T2 (de)

Families Citing this family (81)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH041948A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報記録装置及び情報再生装置及び情報記録再生装置
JP3198355B2 (ja) * 1991-05-28 2001-08-13 キヤノン株式会社 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
GB9112777D0 (en) * 1991-06-13 1991-07-31 Buser Rudolf A Microprobe for surface scanning microscopes
US5606162A (en) * 1991-06-13 1997-02-25 British Technology Group Limited Microprobe for surface-scanning microscopes
JP2593887Y2 (ja) * 1991-12-19 1999-04-19 株式会社アドバンテスト 原子間力顕微鏡用カンチレバー
JPH05282717A (ja) * 1992-03-31 1993-10-29 Canon Inc 記録媒体の製造方法、及び記録媒体、及び情報処理装置
JPH08501899A (ja) * 1992-05-22 1996-02-27 トラスティーズ オブ ボストン ユニバーシィティ 電歪センサおよびアクチュエータ
JPH0642953A (ja) * 1992-07-24 1994-02-18 Matsushita Electric Ind Co Ltd 原子間力顕微鏡
JP3025120B2 (ja) * 1992-12-21 2000-03-27 キヤノン株式会社 記録再生装置
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
US5537863A (en) * 1993-07-15 1996-07-23 Nikon Corporation Scanning probe microscope having a cantilever used therein
US7073254B2 (en) 1993-11-16 2006-07-11 Formfactor, Inc. Method for mounting a plurality of spring contact elements
US6482013B2 (en) 1993-11-16 2002-11-19 Formfactor, Inc. Microelectronic spring contact element and electronic component having a plurality of spring contact elements
DE4417132C2 (de) * 1994-05-17 1996-08-14 Ibm Resonanter Meßwertaufnehmer und dessen Verwendung
JP3523688B2 (ja) * 1994-07-06 2004-04-26 オリンパス株式会社 試料測定用プローブ装置
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
US6339217B1 (en) * 1995-07-28 2002-01-15 General Nanotechnology Llc Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements
US5751683A (en) * 1995-07-24 1998-05-12 General Nanotechnology, L.L.C. Nanometer scale data storage device and associated positioning system
JPH08129875A (ja) * 1994-10-28 1996-05-21 Hewlett Packard Co <Hp> 導電性針の位置ずれを低減したプローブ装置
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US6520005B2 (en) 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
KR100230243B1 (ko) * 1994-12-29 1999-11-15 윤종용 광자기 디스크용 광픽업
US5679889A (en) * 1995-02-06 1997-10-21 Nikon Corporation Method for extracting electrode and cantilever for AFM using said method for extracting electrode
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法
JPH08329538A (ja) * 1995-05-30 1996-12-13 Hewlett Packard Co <Hp> プローブ装置
US5717631A (en) * 1995-07-21 1998-02-10 Carnegie Mellon University Microelectromechanical structure and process of making same
US6507553B2 (en) 1995-07-24 2003-01-14 General Nanotechnology Llc Nanometer scale data storage device and associated positioning system
US5874668A (en) * 1995-10-24 1999-02-23 Arch Development Corporation Atomic force microscope for biological specimens
JP3157840B2 (ja) * 1996-03-13 2001-04-16 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 新規なカンチレバー構造
GB9704769D0 (en) * 1997-03-07 1997-04-23 Powerbreaker Plc Low component count release mechanism
US5886922A (en) * 1997-05-07 1999-03-23 Hewlett-Packard Company Probe device for memory device having multiple cantilever probes
US7196328B1 (en) 2001-03-08 2007-03-27 General Nanotechnology Llc Nanomachining method and apparatus
US6923044B1 (en) 2001-03-08 2005-08-02 General Nanotechnology Llc Active cantilever for nanomachining and metrology
US6752008B1 (en) 2001-03-08 2004-06-22 General Nanotechnology Llc Method and apparatus for scanning in scanning probe microscopy and presenting results
US6802646B1 (en) 2001-04-30 2004-10-12 General Nanotechnology Llc Low-friction moving interfaces in micromachines and nanomachines
US6787768B1 (en) 2001-03-08 2004-09-07 General Nanotechnology Llc Method and apparatus for tool and tip design for nanomachining and measurement
US6016693A (en) * 1998-02-09 2000-01-25 The Regents Of The University Of California Microfabrication of cantilevers using sacrificial templates
AU6061100A (en) * 1999-07-01 2001-01-22 General Nanotechnology, Llc Object inspection and/or modification system and method
US6713374B2 (en) 1999-07-30 2004-03-30 Formfactor, Inc. Interconnect assemblies and methods
US7189077B1 (en) 1999-07-30 2007-03-13 Formfactor, Inc. Lithographic type microelectronic spring structures with improved contours
US6939474B2 (en) 1999-07-30 2005-09-06 Formfactor, Inc. Method for forming microelectronic spring structures on a substrate
US6780001B2 (en) 1999-07-30 2004-08-24 Formfactor, Inc. Forming tool for forming a contoured microelectronic spring mold
US7435108B1 (en) 1999-07-30 2008-10-14 Formfactor, Inc. Variable width resilient conductive contact structures
US6888362B2 (en) 2000-11-09 2005-05-03 Formfactor, Inc. Test head assembly for electronic components with plurality of contoured microelectronic spring contacts
US6647766B2 (en) * 1999-12-31 2003-11-18 International Business Machines Corporation Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
US6445106B1 (en) 2000-02-18 2002-09-03 Intel Corporation Micro-electromechanical structure resonator, method of making, and method of using
KR100388916B1 (ko) * 2000-12-12 2003-06-25 피에스아이에이 주식회사 주사 탐침 현미경용 캔틸레버 및 그의 제조 방법
US6931710B2 (en) 2001-01-30 2005-08-23 General Nanotechnology Llc Manufacturing of micro-objects such as miniature diamond tool tips
US7253407B1 (en) 2001-03-08 2007-08-07 General Nanotechnology Llc Active cantilever for nanomachining and metrology
KR100418881B1 (ko) * 2001-05-23 2004-02-19 엘지전자 주식회사 Ａｆｍ 용 고감도 압전저항 캔틸레버
US6642129B2 (en) * 2001-07-26 2003-11-04 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography
US7053369B1 (en) * 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US6813937B2 (en) * 2001-11-28 2004-11-09 General Nanotechnology Llc Method and apparatus for micromachines, microstructures, nanomachines and nanostructures
JP2005538855A (ja) 2002-09-09 2005-12-22 ジェネラル ナノテクノロジー エルエルシー 走査型プローブ顕微鏡の流体送達
US7005781B2 (en) * 2002-12-11 2006-02-28 J. G. Smits Devices for rotation using piezoelectric benders
GB0308810D0 (en) * 2003-04-16 2003-05-21 1 Ltd Recurved electro-active actuators
US7055378B2 (en) 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
KR100613398B1 (ko) * 2003-11-25 2006-08-17 한국과학기술연구원 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법
JP4585223B2 (ja) 2004-04-22 2010-11-24 東芝ストレージデバイス株式会社 圧電アクチュエータ及び圧電アクチュエータを用いたヘッドサスペンション装置
US7414250B1 (en) 2004-11-30 2008-08-19 Northwestern University Cryogenic variable temperature vacuum scanning tunneling microscope
US7395698B2 (en) * 2005-10-25 2008-07-08 Georgia Institute Of Technology Three-dimensional nanoscale metrology using FIRAT probe
JP4316590B2 (ja) * 2006-06-23 2009-08-19 株式会社東芝 圧電駆動型ｍｅｍｓアクチュエータ
US20080151597A1 (en) * 2006-12-20 2008-06-26 Seagate Technology Llc Wear-resistant multilayer probe
DE102007023549A1 (de) * 2007-05-21 2008-11-27 Continental Automotive Gmbh Festkörperaktoranordnung mit einem Biegeaktor
US7796493B2 (en) * 2007-08-10 2010-09-14 Intel Corporation Cantilever on cantilever structure
US8624616B2 (en) * 2008-07-01 2014-01-07 Intel Corporation Suspended IO trace design for SSP cantilever data read / write
CN101464244B (zh) * 2008-12-19 2011-05-11 北京工业大学 应力状态下纳米材料力电性能与显微结构测量装置和方法
JP5300559B2 (ja) * 2009-03-30 2013-09-25 株式会社東芝 圧電駆動型ｍｅｍｓ素子
US20110041224A1 (en) * 2009-08-06 2011-02-17 Purdue Research Foundation Atomic force microscope including accelerometer
NZ707530A (en) 2010-10-05 2017-04-28 Anpac Bio-Medical Science Co Ltd Micro-devices for disease detection
DE102010052037B4 (de) * 2010-11-23 2013-04-18 Franz Josef Giessibl Sensor und Verfahren zum berührungslosen Abtasten einer Oberfläche
JP5655861B2 (ja) * 2010-12-01 2015-01-21 株式会社村田製作所 圧電発電装置及びその製造方法
CN103562728B (zh) 2011-03-24 2016-08-17 安派科生物医学科技有限公司 用于疾病检测的微器件
TW201314979A (zh) * 2011-09-19 2013-04-01 Chief Land Electronic Co Ltd 換能器與能量轉換模組
CN106092387B (zh) * 2015-04-30 2019-11-22 意法半导体股份有限公司 用于检测诸如冲击、加速度、旋转力等平面内的力的集成压电传感器
US9761787B2 (en) 2015-06-02 2017-09-12 The Board Of Trustees Of The University Of Alabama Consensus-based multi-piezoelectric microcantilever sensor
BG66958B1 (bg) 2016-07-21 2019-09-16 Трифонов Ставров Владимир Микроконзолни сензори за комбинирана микроскопия
CN112964910A (zh) 2020-09-16 2021-06-15 中国科学院沈阳自动化研究所 原子力显微镜一体化双探针快速原位切换测量方法与装置
CN113092825B (zh) * 2021-03-05 2022-12-30 中山大学 原子力显微镜系统及其电流检测方法
WO2023126300A1 (en) * 2021-12-28 2023-07-06 Asml Netherlands B.V. Element of an afm tool

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1523364A (en) * 1975-02-19 1978-08-31 Matsushita Electric Industrial Co Ltd Phonograph pickup
US4112279A (en) * 1977-09-02 1978-09-05 Bell Telephone Laboratories, Incorporated Piezoelectric relay construction
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
JPS5858780A (ja) * 1981-10-02 1983-04-07 Matsushita Electric Ind Co Ltd 電歪素子
JPS59177979A (ja) * 1983-03-29 1984-10-08 Toshiba Corp 圧電アクチユエ−タ
SU1093922A1 (ru) * 1983-04-04 1984-05-23 Tereshchenko Anatolij F Устройство дл измерени силы
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4532802A (en) * 1984-05-31 1985-08-06 International Business Machines Corporation Apparatus for analyzing the interface between a recording disk and a read-write head
DE3572030D1 (en) * 1985-03-07 1989-09-07 Ibm Scanning tunneling microscope
JPH0695377B2 (ja) * 1985-03-12 1994-11-24 ソニー株式会社 バイモルフヘツドのバイモルフ駆動装置
GB8526866D0 (en) * 1985-10-31 1985-12-04 Emi Plc Thorn Information recovery system
US4724318A (en) * 1985-11-26 1988-02-09 International Business Machines Corporation Atomic force microscope and method for imaging surfaces with atomic resolution
DE3679319D1 (de) * 1986-05-27 1991-06-20 Ibm Speichereinheit mit direktem zugriff.
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
JPH0758193B2 (ja) * 1990-09-14 1995-06-21 三菱電機株式会社 原子間力顕微鏡の微動走査機構

Also Published As

Publication number Publication date
EP0472342B1 (de) 1997-12-03
US5276672A (en) 1994-01-04
EP0472342A2 (de) 1992-02-26
JP3030574B2 (ja) 2000-04-10
CA2049197A1 (en) 1992-02-17
EP0472342A3 (en) 1992-04-15
ATE160865T1 (de) 1997-12-15
DE69128317T2 (de) 1998-04-09
JPH0518741A (ja) 1993-01-26
CA2049197C (en) 1992-02-17

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