DE69817239D1 - Optisches Nahfeld-Rastermikroskop - Google Patents

Optisches Nahfeld-Rastermikroskop

Info

Publication number
DE69817239D1
DE69817239D1 DE69817239T DE69817239T DE69817239D1 DE 69817239 D1 DE69817239 D1 DE 69817239D1 DE 69817239 T DE69817239 T DE 69817239T DE 69817239 T DE69817239 T DE 69817239T DE 69817239 D1 DE69817239 D1 DE 69817239D1
Authority
DE
Germany
Prior art keywords
scanning microscope
field scanning
optical near
optical
field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69817239T
Other languages
English (en)
Other versions
DE69817239T2 (de
Inventor
Eisuke Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Application granted granted Critical
Publication of DE69817239D1 publication Critical patent/DE69817239D1/de
Publication of DE69817239T2 publication Critical patent/DE69817239T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/10—Thermal environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe
DE69817239T 1997-03-12 1998-03-11 Optisches Nahfeld-Rastermikroskop Expired - Lifetime DE69817239T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05801397A JP3249419B2 (ja) 1997-03-12 1997-03-12 走査型近接場光学顕微鏡
JP5801397 1997-03-12

Publications (2)

Publication Number Publication Date
DE69817239D1 true DE69817239D1 (de) 2003-09-25
DE69817239T2 DE69817239T2 (de) 2004-07-01

Family

ID=13072095

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69817239T Expired - Lifetime DE69817239T2 (de) 1997-03-12 1998-03-11 Optisches Nahfeld-Rastermikroskop

Country Status (7)

Country Link
US (1) US6194711B1 (de)
EP (1) EP0864899B1 (de)
JP (1) JP3249419B2 (de)
KR (1) KR100534039B1 (de)
CA (1) CA2229221A1 (de)
DE (1) DE69817239T2 (de)
TW (1) TW376448B (de)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3949831B2 (ja) * 1998-11-11 2007-07-25 セイコーインスツル株式会社 光カンチレバーとその製造方法
US7595189B2 (en) * 1999-01-08 2009-09-29 Applied Biosystems, Llc Integrated optics fiber array
US20050026209A1 (en) * 1999-01-08 2005-02-03 Vann Charles S. Optical fiber bundle for detecting binding of chemical species
JP3387846B2 (ja) * 1999-03-04 2003-03-17 セイコーインスツルメンツ株式会社 走査型プローブ顕微鏡
TW424155B (en) * 1999-05-03 2001-03-01 Ind Tech Res Inst Beating mode near-field optical microscope
DE19925431C2 (de) * 1999-06-02 2002-11-07 Ind Tech Res Inst Optisches Nahfeld-Abtastmikroskop
US6515274B1 (en) * 1999-07-20 2003-02-04 Martin Moskovits Near-field scanning optical microscope with a high Q-factor piezoelectric sensing element
US6429968B1 (en) * 2000-03-09 2002-08-06 Agere Systems Guardian Corp Apparatus for photoluminescence microscopy and spectroscopy
JP2002190444A (ja) 2000-10-10 2002-07-05 Canon Inc パターン露光装置、パターン作製方法、及びこれらを用いて作製したデバイス
JP4379758B2 (ja) 2000-11-13 2009-12-09 日本分光株式会社 近接場顕微鏡
US7498564B2 (en) 2001-02-06 2009-03-03 University Of Bristol Of Senate House Resonant scanning near-field optical microscope
WO2002063368A1 (en) * 2001-02-06 2002-08-15 University Of Bristol Scanning near-field optical microscope
KR100434542B1 (ko) * 2001-09-18 2004-06-05 삼성전자주식회사 근접장용 광 프로브 개구 측정장치 및 방법
US7473887B2 (en) 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
US7454095B2 (en) * 2004-04-27 2008-11-18 California Institute Of Technology Integrated plasmon and dielectric waveguides
US7372013B2 (en) * 2004-04-27 2008-05-13 California Institute Of Technology Near field scanning microscope probe and method for fabricating same
KR100558778B1 (ko) * 2004-04-30 2006-03-10 학교법인 서강대학교 유전체 공진기를 이용한 근접장 현미경
US20070240757A1 (en) * 2004-10-15 2007-10-18 The Trustees Of Boston College Solar cells using arrays of optical rectennas
US9423693B1 (en) 2005-05-10 2016-08-23 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
US7571638B1 (en) * 2005-05-10 2009-08-11 Kley Victor B Tool tips with scanning probe microscopy and/or atomic force microscopy applications
US7043104B1 (en) 2005-06-14 2006-05-09 Hewlett-Packard Development Company, L.P. High gain optical probe
US7149395B1 (en) 2005-08-09 2006-12-12 Instrument Technology Research Center Light-enhancing component and fabrication method thereof
WO2007025023A2 (en) * 2005-08-24 2007-03-01 The Trustees Of Boston College Apparatus and methods for optical switching using nanoscale optics
US7589880B2 (en) * 2005-08-24 2009-09-15 The Trustees Of Boston College Apparatus and methods for manipulating light using nanoscale cometal structures
EP1917557A4 (de) 2005-08-24 2015-07-22 Trustees Boston College Vorrichtung und verfahren zur sonnenenergieumwandlung unter verwendung nanoskaliger cometallstrukturen
US7623746B2 (en) * 2005-08-24 2009-11-24 The Trustees Of Boston College Nanoscale optical microscope
WO2007086903A2 (en) * 2005-08-24 2007-08-02 The Trustees Of Boston College Apparatus and methods for solar energy conversion using nanocoax structures
US7397030B1 (en) 2006-06-01 2008-07-08 N&K Technology, Inc. Integrated local and global optical metrology for samples having miniature features
US7784107B2 (en) * 2006-06-02 2010-08-24 Victor B. Kley High speed measurement, analysis and imaging systems and methods for length scales from meter to sub-nanometer
EP2038894A2 (de) * 2006-06-21 2009-03-25 University Of Dayton Verfahren zur polarisationssteuerung und anwendungen dafür
JP4825697B2 (ja) * 2007-01-25 2011-11-30 株式会社ミツトヨ デジタル式変位測定器
CN101627479B (zh) * 2007-01-30 2011-06-15 索拉斯特公司 光电池及其制造方法
WO2008143721A2 (en) * 2007-02-12 2008-11-27 Solasta, Inc. Photovoltaic cell with reduced hot-carrier cooling
EP2168170A2 (de) * 2007-07-03 2010-03-31 Solasta, Inc. Verteilte coax-fotovoltaikanordnung
JP4899162B2 (ja) * 2007-07-17 2012-03-21 独立行政法人産業技術総合研究所 走査型プローブ顕微鏡用プローブ及びそれを用いた走査型プローブ顕微鏡
GB0809768D0 (en) * 2008-05-29 2008-07-09 Univ Sheffield Hallam Improvements to mass spectrometry
TWI449915B (zh) * 2010-12-15 2014-08-21 Nat Applied Res Laboratoires 近場光學顯微裝置
US9778572B1 (en) 2013-03-15 2017-10-03 Victor B. Kley In-plane scanning probe microscopy tips and tools for wafers and substrates with diverse designs on one wafer or substrate
KR101466807B1 (ko) * 2013-07-29 2014-11-28 포항공과대학교 산학협력단 분광 측정을 위한 튜닝포크 기반의 근접장 탐침 및 이를 이용한 근접장 현미경, 근접장 현미경을 이용한 분광 분석 방법
CN103528798A (zh) * 2013-10-22 2014-01-22 中国科学院半导体研究所 一种对光波导通光性能进行测试的方法
KR102125284B1 (ko) 2015-03-11 2020-07-08 에이에스엠엘 네델란즈 비.브이. 검사와 계측을 위한 방법 및 장치
CN109682995A (zh) * 2019-01-21 2019-04-26 仪晟科学仪器(嘉兴)有限公司 一种散射式低温扫描近场光学显微镜
KR20220067593A (ko) 2020-11-16 2022-05-25 삼성전자주식회사 근접장 검출용 프로브 및 이를 포함하는 근접장 검출 시스템
CN113252947B (zh) * 2021-04-21 2022-05-03 上海交通大学 基于多探针的无光源式近场热辐射扫描显微镜系统
CN113341180B (zh) * 2021-05-24 2023-07-18 西安交通大学 一种基于近场无孔式探针的多模式测量方法及测量系统
CN116168996B (zh) * 2023-04-24 2023-06-27 合肥晶合集成电路股份有限公司 一种电子显微镜及其工作方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH650605A5 (de) * 1980-10-24 1985-07-31 Cerberus Ag Infrarot-einbruchdetektor.
EP0290647B1 (de) 1987-05-12 1991-07-24 International Business Machines Corporation Atomares Kräftemikroskop mit oscillierendem Quarz
US4738562A (en) * 1987-05-15 1988-04-19 Jmk International, Inc. Apparatus for inserting backing rod into concrete expansion joints
JPH02297003A (ja) * 1989-05-12 1990-12-07 Canon Inc 検出部位置決機構、圧電素子微動機構およびこれらを用いた走査型トンネル顕微鏡
US5636035A (en) * 1991-09-30 1997-06-03 The Trustees Of The Stevens Institute Of Technology Method and apparatus for dual modulation laser spectroscopy
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
JPH05180616A (ja) * 1992-01-08 1993-07-23 Canon Inc プローブ保持機構
JPH06251435A (ja) * 1993-03-01 1994-09-09 Canon Inc 記録再生装置
GB2289759B (en) * 1994-05-11 1996-05-22 Khaled Karrau Coupled oscillator scanning imager
GB2290656B (en) 1994-06-23 1998-03-25 Grongar Wynn Lloyd A scanning probe and an approach mechanism therefor
JPH0894650A (ja) * 1994-09-28 1996-04-12 Nikon Corp 近接場走査型顕微鏡の光プローブ保持装置
TW280928B (de) * 1994-10-24 1996-07-11 At & T Corp
US5574278A (en) * 1995-05-23 1996-11-12 The United States Of America As Represented By The Secretary Of Commerce Atomic force microscope using piezoelectric detection
DE19524907A1 (de) 1995-07-08 1997-01-09 Frieder Mugele Rastersondenmikroskop
JP3290586B2 (ja) * 1996-03-13 2002-06-10 セイコーインスツルメンツ株式会社 走査型近視野光学顕微鏡

Also Published As

Publication number Publication date
DE69817239T2 (de) 2004-07-01
KR100534039B1 (ko) 2006-03-07
CA2229221A1 (en) 1998-09-12
EP0864899A3 (de) 2000-08-02
US6194711B1 (en) 2001-02-27
KR19980080196A (ko) 1998-11-25
EP0864899A2 (de) 1998-09-16
EP0864899B1 (de) 2003-08-20
JP3249419B2 (ja) 2002-01-21
TW376448B (en) 1999-12-11
JPH10253643A (ja) 1998-09-25

Similar Documents

Publication Publication Date Title
DE69817239D1 (de) Optisches Nahfeld-Rastermikroskop
DE69717538D1 (de) Konfokales Rastermikroskop
DE69822562D1 (de) Rastersondenmikroskop
DE69824909D1 (de) Rastersondenmikroskop
NO981032L (no) Multifoton-lasermikroskopi
DE69840533D1 (de) Rasterelektronenmikroskop
DE69521355D1 (de) Optisches Nahfeld- und Atomkraft-Rastermikroskop
DE59712623D1 (de) Lichtabtastvorrichtung
DE59712817D1 (de) Lichtabtastvorrichtung
DE69731777D1 (de) Optischer Abtastkopf
DE19882527T1 (de) Rastersonden-Lichtmikroskop, welches eine feste Immersionslinse verwendet
DE69831363T2 (de) Optische Abtastvorrichtung
DE69220598T2 (de) Optisches Nahfeldabtastmikroskop
DE69733742D1 (de) Optisches Abtastgerät
DE69823413D1 (de) Rastersondemikroskop
DE69834003D1 (de) Optische Abtastvorrichtung
DE69942685D1 (de) Optisches Abtastgerät
DE69842255D1 (de) Optisches abtastgerät
DE69807151D1 (de) Rasterelektronenmikroskop
DE69720681D1 (de) Optischer Abtastkopf
DE19882512T1 (de) Abtastmikroskop mit Miniaturkopf
DE69625033D1 (de) Optisches Abtastsystem
AU1061599A (en) Scanning evanescent electro-magnetic microscope
DE69732471D1 (de) Optischer Abtastkopf
DE69721447D1 (de) Optisches Abtastsystem

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: SII NANO TECHNOLOGY INC., CHIBA, JP