DE69822562D1 - Rastersondenmikroskop - Google Patents

Rastersondenmikroskop

Info

Publication number
DE69822562D1
DE69822562D1 DE69822562T DE69822562T DE69822562D1 DE 69822562 D1 DE69822562 D1 DE 69822562D1 DE 69822562 T DE69822562 T DE 69822562T DE 69822562 T DE69822562 T DE 69822562T DE 69822562 D1 DE69822562 D1 DE 69822562D1
Authority
DE
Germany
Prior art keywords
scanning probe
probe microscope
microscope
scanning
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69822562T
Other languages
English (en)
Other versions
DE69822562T2 (de
Inventor
Shinichi Kitamura
Takashi Sueyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of DE69822562D1 publication Critical patent/DE69822562D1/de
Application granted granted Critical
Publication of DE69822562T2 publication Critical patent/DE69822562T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process
    • Y10S977/851—Particular movement or positioning of scanning tip
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69822562T 1997-07-08 1998-07-08 Rastersondenmikroskop Expired - Fee Related DE69822562T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18230597 1997-07-08
JP18230597A JP3925991B2 (ja) 1997-07-08 1997-07-08 走査プローブ顕微鏡

Publications (2)

Publication Number Publication Date
DE69822562D1 true DE69822562D1 (de) 2004-04-29
DE69822562T2 DE69822562T2 (de) 2005-02-03

Family

ID=16115977

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69822562T Expired - Fee Related DE69822562T2 (de) 1997-07-08 1998-07-08 Rastersondenmikroskop

Country Status (4)

Country Link
US (1) US6005246A (de)
EP (1) EP0890820B1 (de)
JP (1) JP3925991B2 (de)
DE (1) DE69822562T2 (de)

Families Citing this family (38)

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US6517669B2 (en) * 1999-02-26 2003-02-11 Micron Technology, Inc. Apparatus and method of detecting endpoint of a dielectric etch
US6449555B1 (en) 1999-03-05 2002-09-10 Kabushiki Kaisha Toshiba Run time information arithmetic operation apparatus
US6189374B1 (en) * 1999-03-29 2001-02-20 Nanodevices, Inc. Active probe for an atomic force microscope and method of use thereof
US6672144B2 (en) * 1999-03-29 2004-01-06 Veeco Instruments Inc. Dynamic activation for an atomic force microscope and method of use thereof
US6809533B1 (en) * 1999-09-10 2004-10-26 University Of Maryland, College Park Quantitative imaging of dielectric permittivity and tunability
DE10003693A1 (de) * 2000-01-28 2001-08-02 Zeiss Carl Abtastsystem mit auslenkbarer Tastspitze
CA2309412A1 (en) * 2000-05-24 2001-11-24 Michael Thompson Scanning of biochemical microassays by kelvin microprobe
US7084661B2 (en) * 2000-05-24 2006-08-01 Sensorchem International Corporation Scanning kelvin microprobe system and process for analyzing a surface
JP3817466B2 (ja) * 2000-11-29 2006-09-06 キヤノン株式会社 非接触型原子間力顕微鏡およびそれを用いた観察方法
JP3961258B2 (ja) * 2001-10-10 2007-08-22 株式会社ミツトヨ タッチセンサ、および微細形状測定装置用プローブ
WO2003033993A1 (en) * 2001-10-19 2003-04-24 Commonwealth Scientific And Industrial Research Organisation A kelvin probe instrument
US7156965B1 (en) 2001-11-09 2007-01-02 Veeco Instruments Inc. Scanning electrochemical potential microscope
JP2003329563A (ja) * 2002-05-16 2003-11-19 Seiko Instruments Inc 走査型プローブ顕微鏡
JP4190936B2 (ja) * 2002-09-17 2008-12-03 エスアイアイ・ナノテクノロジー株式会社 走査型プローブ顕微鏡およびその操作法
KR100501893B1 (ko) * 2002-11-14 2005-07-25 한국전자통신연구원 주파수 응답 분리 방식을 이용한 비접촉식 측정 장치 및그 측정 방법
US6845655B2 (en) * 2003-03-17 2005-01-25 Wisconsin Alumni Research Foundation Heterodyne feedback system for scanning force microscopy and the like
JP4103136B2 (ja) * 2003-04-23 2008-06-18 船井電機株式会社 データ記録再生装置
JP2005106786A (ja) * 2003-10-02 2005-04-21 Jeol Ltd 走査形プローブ顕微鏡
US7662648B2 (en) * 2005-08-31 2010-02-16 Micron Technology, Inc. Integrated circuit inspection system
WO2008006229A1 (en) * 2006-07-14 2008-01-17 Nanonis Gmbh Scanning probe microscope and method for operating the same
JP4831484B2 (ja) * 2006-08-30 2011-12-07 セイコーインスツル株式会社 電位差検出方法及び走査型プローブ顕微鏡
EP2092292B1 (de) * 2006-12-15 2017-09-20 SPECS Zurich GmbH Rasterkraftmikroskop mit periodisch phasenverlegter ac-erregung
US7958776B2 (en) * 2007-09-06 2011-06-14 Chunhai Wang Atomic force gradient microscope and method of using this microscope
US7865966B2 (en) * 2007-09-12 2011-01-04 Veeco Metrology Inc. Method and apparatus of automatic scanning probe imaging
CN101294887B (zh) * 2007-11-20 2011-01-26 中国科学院电工研究所 Spm高分辨图形数据处理方法
WO2010022521A1 (en) 2008-08-27 2010-03-04 Specs Zurich Gmbh Method for measuring a piezoelectric response by means of a scanning probe microscope
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
KR101920606B1 (ko) 2008-11-13 2019-02-13 브루커 나노, 인코퍼레이션. 탐침형 원자 현미경 작동 방법 및 장치
EP2219035A1 (de) * 2009-02-16 2010-08-18 Institut Curie Verfahren zur automatischen Anpassung der ausgeübten Kraft und Steuerung der Kraftabweichung in einem Atomkraftmikroskop während der Abbildung im Kontaktmodus
MY156153A (en) 2009-12-01 2016-01-15 Bruker Nano Inc Method and apparatus of operating a scanning probe microscope
FR2956484B1 (fr) * 2010-02-15 2012-04-20 Centre Nat Recherche Mesure du potentiel de surface d'un materiau.
EP3293527A3 (de) * 2012-06-22 2018-08-29 Bruker Nano, Inc. Verfahren und vorrichtung zur messung elektrischer eigenschaften unter verwendung eines afm im spitzenkrafterfassungsmodus
US8850611B1 (en) * 2013-03-08 2014-09-30 Uchicago Argonne, Llc Simultaneous topographic and elemental chemical and magnetic contrast in scanning tunneling microscopy
US9395387B1 (en) * 2015-06-19 2016-07-19 Shimadzu Corporation Scanning probe microscope
EP3500864A1 (de) 2016-08-22 2019-06-26 Bruker Nano, Inc. Infrarot-charakterisierung einer probe unter verwendung eines spitzenkraft-tapping-modus
CN109932530A (zh) * 2019-02-25 2019-06-25 天津大学 一种原子力显微镜扫描探针夹持器
AT523334B1 (de) * 2019-12-18 2022-02-15 Anton Paar Gmbh Schaltkreisanordnung zum Unterstützen unterschiedlicher Betriebsmodi zum Betrieb einer Messsonde eines Rastersondenmikroskops

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5185572A (en) * 1989-09-28 1993-02-09 Olympus Optical Co., Ltd. Scanning tunneling potentio-spectroscopic microscope and a data detecting method
JP2915554B2 (ja) * 1990-11-19 1999-07-05 オリンパス光学工業株式会社 バリアハイト測定装置
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5440121A (en) * 1993-12-28 1995-08-08 Seiko Instruments Inc. Scanning probe microscope
JP3229914B2 (ja) * 1994-12-12 2001-11-19 日本電子株式会社 走査型プローブ顕微鏡
JPH09120593A (ja) * 1995-08-23 1997-05-06 Sony Corp 記録再生装置

Also Published As

Publication number Publication date
JPH1123588A (ja) 1999-01-29
JP3925991B2 (ja) 2007-06-06
US6005246A (en) 1999-12-21
DE69822562T2 (de) 2005-02-03
EP0890820A1 (de) 1999-01-13
EP0890820B1 (de) 2004-03-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee