DE60003973D1 - Rasterabtastmikroskop - Google Patents
RasterabtastmikroskopInfo
- Publication number
- DE60003973D1 DE60003973D1 DE60003973T DE60003973T DE60003973D1 DE 60003973 D1 DE60003973 D1 DE 60003973D1 DE 60003973 T DE60003973 T DE 60003973T DE 60003973 T DE60003973 T DE 60003973T DE 60003973 D1 DE60003973 D1 DE 60003973D1
- Authority
- DE
- Germany
- Prior art keywords
- scanning probe
- probe microscope
- microscope
- scanning
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/02—Coarse scanning or positioning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
- G01Q10/06—Circuits or algorithms therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/02—Monitoring the movement or position of the probe by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q20/00—Monitoring the movement or position of the probe
- G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/04—Display or data processing devices
- G01Q30/06—Display or data processing devices for error compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
- G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/32—AC mode
- G01Q60/34—Tapping mode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/85—Scanning probe control process
- Y10S977/851—Particular movement or positioning of scanning tip
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/872—Positioner
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Power Engineering (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14351999A JP4044241B2 (ja) | 1999-05-24 | 1999-05-24 | プローブ顕微鏡 |
JP14351999 | 1999-05-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE60003973D1 true DE60003973D1 (de) | 2003-08-28 |
DE60003973T2 DE60003973T2 (de) | 2004-05-27 |
Family
ID=15340636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60003973T Expired - Lifetime DE60003973T2 (de) | 1999-05-24 | 2000-05-22 | Rasterabtastmikroskop |
Country Status (4)
Country | Link |
---|---|
US (1) | US6470738B2 (de) |
EP (1) | EP1055901B1 (de) |
JP (1) | JP4044241B2 (de) |
DE (1) | DE60003973T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4423168B2 (ja) * | 2004-11-02 | 2010-03-03 | 株式会社ミツトヨ | 表面性状測定装置 |
JP4323412B2 (ja) * | 2004-11-02 | 2009-09-02 | 株式会社ミツトヨ | 表面性状測定用探針およびこれを用いた顕微鏡 |
US20100175155A1 (en) * | 2009-01-06 | 2010-07-08 | President And Fellows Of Harvard College | Measurement and Mapping of Molecular Stretching and Rupture Forces |
JP5663993B2 (ja) * | 2010-07-21 | 2015-02-04 | 凸版印刷株式会社 | 光学式測定装置 |
US10620159B2 (en) * | 2015-06-24 | 2020-04-14 | Indikel As | Field Kelvin probe |
KR101607606B1 (ko) * | 2015-08-17 | 2016-03-31 | 한국표준과학연구원 | 원자간력 현미경의 측정 방법 |
US10060948B2 (en) * | 2016-08-12 | 2018-08-28 | Tiptek, LLC | Scanning probe and electron microscope probes and their manufacture |
EP3324194B1 (de) | 2016-11-22 | 2019-06-26 | Anton Paar GmbH | Abbildung eines spalts zwischen probe und sonde eines rastersondenmikroskops in einer im wesentlichen horizontalen seitenansicht |
CN109856427A (zh) * | 2017-11-30 | 2019-06-07 | 清华大学 | 表面力场分布的探测装置、探测系统及探测方法 |
CN112403929B (zh) * | 2020-10-29 | 2022-06-28 | 重庆博亿泰精密机械有限公司 | 一种工件质量的检测机构及其检测方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0247219B1 (de) * | 1986-05-27 | 1991-05-15 | International Business Machines Corporation | Speichereinheit mit direktem Zugriff |
EP0290647B1 (de) * | 1987-05-12 | 1991-07-24 | International Business Machines Corporation | Atomares Kräftemikroskop mit oscillierendem Quarz |
US5245863A (en) * | 1990-07-11 | 1993-09-21 | Olympus Optical Co., Ltd. | Atomic probe microscope |
US5254854A (en) * | 1991-11-04 | 1993-10-19 | At&T Bell Laboratories | Scanning microscope comprising force-sensing means and position-sensitive photodetector |
GB2289759B (en) * | 1994-05-11 | 1996-05-22 | Khaled Karrau | Coupled oscillator scanning imager |
JP3581475B2 (ja) * | 1995-02-13 | 2004-10-27 | キヤノン株式会社 | 情報処理装置 |
JP2934739B2 (ja) | 1996-02-20 | 1999-08-16 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡 |
JPH10283972A (ja) | 1997-04-10 | 1998-10-23 | Seiko Instr Inc | 走査型プローブ顕微鏡を用いた加工、記録、再生装置 |
JPH1144693A (ja) * | 1997-07-25 | 1999-02-16 | Agency Of Ind Science & Technol | 近接場光学顕微鏡のプローブチップ位置の測定方法とその装置および制御装置 |
US6043485A (en) * | 1997-10-30 | 2000-03-28 | Fuji Photo Film Co., Ltd. | Sample analyzer |
US6223591B1 (en) * | 1997-11-28 | 2001-05-01 | Nikon Corporation | Probe needle arrangement and movement method for use in an atomic force microscope |
US6169281B1 (en) * | 1998-07-29 | 2001-01-02 | International Business Machines Corporation | Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions |
-
1999
- 1999-05-24 JP JP14351999A patent/JP4044241B2/ja not_active Expired - Lifetime
-
2000
- 2000-05-17 US US09/573,636 patent/US6470738B2/en not_active Expired - Lifetime
- 2000-05-22 EP EP00110273A patent/EP1055901B1/de not_active Expired - Lifetime
- 2000-05-22 DE DE60003973T patent/DE60003973T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60003973T2 (de) | 2004-05-27 |
JP4044241B2 (ja) | 2008-02-06 |
US6470738B2 (en) | 2002-10-29 |
JP2000329678A (ja) | 2000-11-30 |
US20010017054A1 (en) | 2001-08-30 |
EP1055901B1 (de) | 2003-07-23 |
EP1055901A3 (de) | 2001-10-10 |
EP1055901A2 (de) | 2000-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |