DE69708751D1 - Messfühler - Google Patents

Messfühler

Info

Publication number
DE69708751D1
DE69708751D1 DE69708751T DE69708751T DE69708751D1 DE 69708751 D1 DE69708751 D1 DE 69708751D1 DE 69708751 T DE69708751 T DE 69708751T DE 69708751 T DE69708751 T DE 69708751T DE 69708751 D1 DE69708751 D1 DE 69708751D1
Authority
DE
Germany
Prior art keywords
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69708751T
Other languages
English (en)
Inventor
Masahiko Namerikawa
Kazuyoshi Shibata
Yukihisa Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69708751D1 publication Critical patent/DE69708751D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/222—Constructional or flow details for analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/015—Attenuation, scattering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
DE69708751T 1996-05-22 1997-05-20 Messfühler Expired - Fee Related DE69708751D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP12727896 1996-05-22
JP16218796A JP3343030B2 (ja) 1996-05-22 1996-06-21 センサ素子

Publications (1)

Publication Number Publication Date
DE69708751D1 true DE69708751D1 (de) 2002-01-17

Family

ID=26463267

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69708751T Expired - Fee Related DE69708751D1 (de) 1996-05-22 1997-05-20 Messfühler

Country Status (6)

Country Link
US (3) US5892143A (de)
EP (1) EP0809105B1 (de)
JP (1) JP3343030B2 (de)
CN (1) CN1173642A (de)
DE (1) DE69708751D1 (de)
ID (1) ID16941A (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3236536B2 (ja) * 1997-07-18 2001-12-10 日本碍子株式会社 セラミック基体及びこれを用いたセンサ素子
JP3388176B2 (ja) 1998-03-27 2003-03-17 日本碍子株式会社 圧電センサ装置とそれを用いた電気的定数変化の検出方法
US6575020B1 (en) * 1999-05-03 2003-06-10 Cantion A/S Transducer for microfluid handling system
US6308553B1 (en) * 1999-06-04 2001-10-30 Honeywell International Inc Self-normalizing flow sensor and method for the same
US6269685B1 (en) * 1999-09-23 2001-08-07 Ut Battelle, Llc Viscosity measuring using microcantilevers
AU1591301A (en) * 1999-11-09 2001-06-06 Sri International Workstation, apparatus, and methods for the high-throughput synthesis, screeningand characterization of combinatorial libraries
JP3830843B2 (ja) * 2002-03-28 2006-10-11 株式会社東芝 薄膜圧電共振子
US6668621B1 (en) * 2002-06-13 2003-12-30 Hubert Arthur Wright Viscosity measurement by means of damped resonant vibration normal to an approximate rigid plate
JP2004245613A (ja) * 2003-02-12 2004-09-02 Japan Science & Technology Agency フロ−セル型ｑｃｍ装置および試料測定方法
US7721590B2 (en) 2003-03-21 2010-05-25 MEAS France Resonator sensor assembly
KR100576849B1 (ko) 2003-09-19 2006-05-10 삼성전기주식회사 발광소자 및 그 제조방법
US7581434B1 (en) * 2003-09-25 2009-09-01 Rockwell Automation Technologies, Inc. Intelligent fluid sensor for machinery diagnostics, prognostics, and control
US7554247B2 (en) * 2004-12-15 2009-06-30 Nihon Dempa Kogyo Co., Ltd Component measuring device
WO2006064954A1 (ja) * 2004-12-15 2006-06-22 Nihon Dempa Kogyo Co., Ltd 水晶センサ及び感知装置
WO2006064951A1 (ja) 2004-12-15 2006-06-22 Nihon Dempa Kogyo Co., Ltd 水晶センサ及び感知装置
JP4134025B2 (ja) * 2004-12-28 2008-08-13 日本電波工業株式会社 感知装置
US7228735B2 (en) * 2005-02-03 2007-06-12 Integrated Sensing Systems, Inc. Fluid sensing device with integrated bypass and process therefor
CN101238361B (zh) 2005-08-03 2011-08-03 日本电波工业株式会社 浓度传感器和浓度检测装置
WO2007037386A1 (ja) * 2005-09-30 2007-04-05 Ulvac, Inc. センサ及びこれを使用した装置
JP4669767B2 (ja) * 2005-09-30 2011-04-13 株式会社アルバック センサ及びこれを使用した装置
JP2007093550A (ja) * 2005-09-30 2007-04-12 Ulvac Japan Ltd センサ及びこれを使用した装置
CN101368988B (zh) * 2007-08-15 2011-02-02 中国科学院电子学研究所 免封装压电驱动式微小型电场传感器
JP2011203246A (ja) * 2010-03-03 2011-10-13 Noboru Wakatsuki 粘弾性評価装置
US9086338B2 (en) 2010-06-25 2015-07-21 Nihon Dempa Kogyo Co., Ltd. Sensing device
JP5102334B2 (ja) * 2010-06-25 2012-12-19 日本電波工業株式会社 感知装置
CA3060248C (en) 2011-09-01 2022-04-12 Microtech Medical Technologies Ltd. Method of detecting portal and/or hepatic pressure and a portal hypertension monitoring system
GB201120887D0 (en) * 2011-12-06 2012-01-18 The Technology Partnership Plc Acoustic sensor
JP7487600B2 (ja) * 2020-07-29 2024-05-21 セイコーエプソン株式会社 流体デバイス
JP7484534B2 (ja) * 2020-07-30 2024-05-16 セイコーエプソン株式会社 流体デバイス

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133644A (en) * 1980-03-24 1981-10-19 Toshiba Corp Ultrasonic hydrometer
AT396998B (de) * 1985-12-09 1994-01-25 Ottosensors Corp Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen
US4741200A (en) * 1986-07-11 1988-05-03 Ford Motor Company Method and apparatus for measuring viscosity in a liquid utilizing a piezoelectric sensor
US4721874A (en) * 1986-10-06 1988-01-26 Emmert Sans W Apparatus and method for determining the viscosity of a fluid sample
GB2200211B (en) * 1986-12-08 1991-01-16 Fuji Electric Co Ltd Vibration-type transducer
JPH01311250A (ja) * 1988-06-08 1989-12-15 Seiko Instr Inc 流体粘度計測方法及び計測装置
JPH02213743A (ja) * 1989-02-15 1990-08-24 Seiko Instr Inc 液体の物理的性質の測定装置
JPH03148040A (ja) * 1989-11-06 1991-06-24 Izumi Denki Toyama Seisakusho:Kk 粘度測定装置
DE69221758T2 (de) * 1991-03-22 1998-01-02 Seiko Instr Inc Elektrochemische Messeinrichtung
US5374521A (en) * 1991-09-17 1994-12-20 Kipling; Arlin L. Acoustic reflection process for molecular sensing using a bulk acoustic wave quartz sensor
DE4293402T1 (de) * 1991-09-18 1994-09-08 Yuasa Battery Co Ltd Schwefelsäurekonzentrationssensor für Bleiakkumulatorbatterien
US5545461A (en) * 1994-02-14 1996-08-13 Ngk Insulators, Ltd. Ceramic diaphragm structure having convex diaphragm portion and method of producing the same
JP3162584B2 (ja) * 1994-02-14 2001-05-08 日本碍子株式会社 圧電／電歪膜型素子及びその製造方法
JP3323343B2 (ja) * 1994-04-01 2002-09-09 日本碍子株式会社 センサ素子及び粒子センサ
JP3388060B2 (ja) * 1994-11-25 2003-03-17 日本碍子株式会社 流体の特性測定用素子及び流体の特性測定装置

Also Published As

Publication number Publication date
US6047590A (en) 2000-04-11
US5892143A (en) 1999-04-06
EP0809105A1 (de) 1997-11-26
ID16941A (id) 1997-11-27
JPH1038788A (ja) 1998-02-13
EP0809105B1 (de) 2001-12-05
US6490911B1 (en) 2002-12-10
JP3343030B2 (ja) 2002-11-11
CN1173642A (zh) 1998-02-18

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee